FR2864226B1 - Structure vibrante micro-usinee et microgyrometre associe - Google Patents

Structure vibrante micro-usinee et microgyrometre associe

Info

Publication number
FR2864226B1
FR2864226B1 FR0314973A FR0314973A FR2864226B1 FR 2864226 B1 FR2864226 B1 FR 2864226B1 FR 0314973 A FR0314973 A FR 0314973A FR 0314973 A FR0314973 A FR 0314973A FR 2864226 B1 FR2864226 B1 FR 2864226B1
Authority
FR
France
Prior art keywords
microgyrometer
micro
therefor
factory
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0314973A
Other languages
English (en)
Other versions
FR2864226A1 (fr
Inventor
Elisabeth Delevoye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0314973A priority Critical patent/FR2864226B1/fr
Priority to EP04816376A priority patent/EP1695031A1/fr
Priority to PCT/FR2004/003203 priority patent/WO2005061991A1/fr
Priority to US10/582,344 priority patent/US7404325B2/en
Priority to JP2006544490A priority patent/JP2007514947A/ja
Publication of FR2864226A1 publication Critical patent/FR2864226A1/fr
Application granted granted Critical
Publication of FR2864226B1 publication Critical patent/FR2864226B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Vibration Prevention Devices (AREA)
FR0314973A 2003-12-19 2003-12-19 Structure vibrante micro-usinee et microgyrometre associe Expired - Fee Related FR2864226B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0314973A FR2864226B1 (fr) 2003-12-19 2003-12-19 Structure vibrante micro-usinee et microgyrometre associe
EP04816376A EP1695031A1 (fr) 2003-12-19 2004-12-13 Structure vibrante micro-usinee et microgyrometre associe
PCT/FR2004/003203 WO2005061991A1 (fr) 2003-12-19 2004-12-13 Structure vibrante micro-usinee et microgyrometre associe
US10/582,344 US7404325B2 (en) 2003-12-19 2004-12-13 Micro-machined vibrating structure and associated micro-gyroscope
JP2006544490A JP2007514947A (ja) 2003-12-19 2004-12-13 微細加工振動構造及び関連するマイクロ・ジャイロスコープ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0314973A FR2864226B1 (fr) 2003-12-19 2003-12-19 Structure vibrante micro-usinee et microgyrometre associe

Publications (2)

Publication Number Publication Date
FR2864226A1 FR2864226A1 (fr) 2005-06-24
FR2864226B1 true FR2864226B1 (fr) 2006-06-09

Family

ID=34630327

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0314973A Expired - Fee Related FR2864226B1 (fr) 2003-12-19 2003-12-19 Structure vibrante micro-usinee et microgyrometre associe

Country Status (5)

Country Link
US (1) US7404325B2 (fr)
EP (1) EP1695031A1 (fr)
JP (1) JP2007514947A (fr)
FR (1) FR2864226B1 (fr)
WO (1) WO2005061991A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7281426B1 (en) * 2006-06-15 2007-10-16 Innalabs Technologies, Inc. Stemless hemispherical resonator gyroscope
US7992438B2 (en) * 2007-11-28 2011-08-09 Chung Shan Institute Of Science And Technology, Armaments Bureau, M.N.D. Multiaxial gyroscope
FR2938918B1 (fr) * 2008-11-21 2011-02-11 Commissariat Energie Atomique Procede et dispositif d'analyse acoustique de microporosites dans un materiau tel que le beton a l'aide d'une pluralite de transducteurs cmuts incorpores dans le materiau
US8631702B2 (en) 2010-05-30 2014-01-21 Honeywell International Inc. Hemitoroidal resonator gyroscope
US20160245653A1 (en) * 2013-04-30 2016-08-25 Sangtae Park Cylindrical resonator gyroscope
US9599470B1 (en) * 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
JP6455751B2 (ja) * 2014-07-25 2019-01-23 ローム株式会社 Ｍｅｍｓ圧電センサ
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
CN107014366B (zh) * 2017-03-30 2019-06-14 中国人民解放军国防科学技术大学 一种基于静电激励与检测的圆柱壳体振动陀螺
FR3140160A1 (fr) * 2022-09-23 2024-03-29 Jxsens Capteur gyroscopique vibrant

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2544646A (en) * 1948-06-16 1951-03-13 Sperry Corp Angular velocity measuring instrument
GB8404668D0 (en) * 1984-02-22 1984-03-28 Burdess J S Gyroscopic devices
US4759220A (en) * 1986-02-28 1988-07-26 Burdess James S Angular rate sensors
US4793195A (en) * 1986-10-20 1988-12-27 Northrop Corporation Vibrating cylinder gyroscope and method
US5656777A (en) * 1996-06-13 1997-08-12 Alliedsignal, Inc. Miniature box vibrating gyroscope
JPH102811A (ja) * 1996-06-14 1998-01-06 Murata Mfg Co Ltd 外力計測装置およびその製造方法
JPH1062176A (ja) * 1996-08-15 1998-03-06 Sony Corp 圧電振動子およびこれを用いた圧電振動ジャイロ
FR2769086B1 (fr) * 1997-09-30 1999-12-03 Salaberry Bernard Lucien Charl Gyrometre vibrant a excitation et detection electromagnetique
JPH11271063A (ja) * 1998-03-24 1999-10-05 Aisin Seiki Co Ltd 角速度検出装置
US6151964A (en) * 1998-05-25 2000-11-28 Citizen Watch Co., Ltd. Angular velocity sensing device
JP2000039324A (ja) * 1998-07-21 2000-02-08 Japan Aviation Electronics Industry Ltd 振動形角速度センサ
US6272925B1 (en) * 1999-09-16 2001-08-14 William S. Watson High Q angular rate sensing gyroscope
JP2001108442A (ja) * 1999-10-06 2001-04-20 Japan Aviation Electronics Industry Ltd 振動型角速度センサ励振方法・振動型角速度センサ
JP2001289641A (ja) * 2000-02-01 2001-10-19 Japan Aviation Electronics Industry Ltd リング型振動式角速度センサ
US6443008B1 (en) * 2000-02-19 2002-09-03 Robert Bosch Gmbh Decoupled multi-disk gyroscope
JP2001272235A (ja) * 2000-03-27 2001-10-05 Japan Aviation Electronics Industry Ltd リング型振動式角速度センサ
EP1352222B1 (fr) * 2001-01-17 2010-08-25 Honeywell International Inc. Transducteur de force a double faisceau resonant avec pompage longitudinal reduit

Also Published As

Publication number Publication date
JP2007514947A (ja) 2007-06-07
WO2005061991A1 (fr) 2005-07-07
EP1695031A1 (fr) 2006-08-30
US20070095161A1 (en) 2007-05-03
FR2864226A1 (fr) 2005-06-24
US7404325B2 (en) 2008-07-29

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120831