EP1695031A1 - Structure vibrante micro-usinee et microgyrometre associe - Google Patents
Structure vibrante micro-usinee et microgyrometre associeInfo
- Publication number
- EP1695031A1 EP1695031A1 EP04816376A EP04816376A EP1695031A1 EP 1695031 A1 EP1695031 A1 EP 1695031A1 EP 04816376 A EP04816376 A EP 04816376A EP 04816376 A EP04816376 A EP 04816376A EP 1695031 A1 EP1695031 A1 EP 1695031A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vibrating
- vibrating structure
- hollow shell
- structure according
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/12—Gyroscopes
Definitions
- the invention relates to a micro-machined vibrating structure comprising an anchoring end, integral with a fixed support, and at least one vibrating wall, in which progressive or pu standing waves are generated and comprising a base and a free end, the vibrating wall consisting of a side wall of a hollow shell.
- Part of the vibrating structure, close to the anchoring end, can be compared to a non-point deformation node remaining invariant in rotation and forming a decoupling zone on which the anchoring means can be placed.
- the disturbances which affect the anchoring means are not transmitted to the wave system generated by the vibration.
- the anchoring zone is therefore naturally decoupled from the vibrating structure.
- the performance of a vibrating resonator partly determines the performance of the device in which it is used.
- the main qualities of a resonator are as follows: a mastery of the modes of vibration and the purity of the resonance frequencies, which implies symmetry and control constraints in the production of the vibrating structure, an insensitivity to external disturbances, which supposes vibrating structures with perfect anti-symmetrical configurations or symmetrical configurations, a quality coefficient (fineness of the frequency response and high gain), obtained by associating the decoupling function between the fixed support and the vibrating structure, insensitivity to environmental parameters, which implies vibrating structures with anchoring means having a good disposition to minimize the effects of environmental variations.
- Figures 1 and 2 show, respectively in section and in top view, the vibrating structure currently the most efficient for a gyroscope, thanks to its perfect symmetry and its specific dimensioning. It is the hemispherical vibrating structure HRG (“Hemispherical Rate Gyro”), which is based on the principle of stemmed glass. It consists of a vibrating body 1 in the form of a hollow hemisphere, anchored on a foot 2 secured to a fixed support 3.
- HRG Hydrophilpherical Rate Gyro
- the shape of revolution in three dimensions is favorable when generating standing waves that are easy to calculate and stabilize
- the semi-sphere shape of the vibrating body 1 creates an absolute deformation node at the anchoring of the structure, which is the only specific node to remain invariant in rotation.
- Figures 4 and 5 show a particular embodiment of a vibrating structure according to the invention, respectively in perspective and in vertical section.
- FIG. 5 illustrates this particular design of the vibrating wall 7. It represents a view in vertical section of the vibrating structure 4 according to FIG. 4.
- the vibrating wall 7 has a height H, while the useful part of the vibrating wall 7, in which the waves are generated and analyzed, at a height h '.
- the smaller the height h the greater the height h 'and the more the characteristics of the vibration are improved.
- the height h must always be greater than a height hc, corresponding to the height of the zone of influence of the stresses generated by the fixed support 6.
- the vibrating wall 7 is of frustoconical shape, with a constant thickness e.
- the internal radius R of the vibrating wall 7 changes from a first value R1 at the free end 9 to a second value R2, less than R1, at the anchoring end 5.
- FIG. 10 shows a vibrating wall 7 of cylindrical external shape, the thickness e of which changes from a first value e1 at the free end 9 to a second value e2, greater than e1, at the anchoring end 5.
- the internal radius R of the hollow shell changes from a first value R1 at the free end 9 to a second value R2, less than R1, at the anchoring end 5.
- this evolution is non-linear and the internal face of the hollow shell is curved at the level of the anchoring end 5.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Vibration Prevention Devices (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0314973A FR2864226B1 (fr) | 2003-12-19 | 2003-12-19 | Structure vibrante micro-usinee et microgyrometre associe |
PCT/FR2004/003203 WO2005061991A1 (fr) | 2003-12-19 | 2004-12-13 | Structure vibrante micro-usinee et microgyrometre associe |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1695031A1 true EP1695031A1 (fr) | 2006-08-30 |
Family
ID=34630327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04816376A Ceased EP1695031A1 (fr) | 2003-12-19 | 2004-12-13 | Structure vibrante micro-usinee et microgyrometre associe |
Country Status (5)
Country | Link |
---|---|
US (1) | US7404325B2 (fr) |
EP (1) | EP1695031A1 (fr) |
JP (1) | JP2007514947A (fr) |
FR (1) | FR2864226B1 (fr) |
WO (1) | WO2005061991A1 (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7281426B1 (en) * | 2006-06-15 | 2007-10-16 | Innalabs Technologies, Inc. | Stemless hemispherical resonator gyroscope |
US7992438B2 (en) * | 2007-11-28 | 2011-08-09 | Chung Shan Institute Of Science And Technology, Armaments Bureau, M.N.D. | Multiaxial gyroscope |
FR2938918B1 (fr) * | 2008-11-21 | 2011-02-11 | Commissariat Energie Atomique | Procede et dispositif d'analyse acoustique de microporosites dans un materiau tel que le beton a l'aide d'une pluralite de transducteurs cmuts incorpores dans le materiau |
US8631702B2 (en) * | 2010-05-30 | 2014-01-21 | Honeywell International Inc. | Hemitoroidal resonator gyroscope |
US20160245653A1 (en) * | 2013-04-30 | 2016-08-25 | Sangtae Park | Cylindrical resonator gyroscope |
US9599470B1 (en) * | 2013-09-11 | 2017-03-21 | Hrl Laboratories, Llc | Dielectric high Q MEMS shell gyroscope structure |
JP6455751B2 (ja) * | 2014-07-25 | 2019-01-23 | ローム株式会社 | Mems圧電センサ |
US10308505B1 (en) | 2014-08-11 | 2019-06-04 | Hrl Laboratories, Llc | Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
CN107014366B (zh) * | 2017-03-30 | 2019-06-14 | 中国人民解放军国防科学技术大学 | 一种基于静电激励与检测的圆柱壳体振动陀螺 |
FR3140160A1 (fr) * | 2022-09-23 | 2024-03-29 | Jxsens | Capteur gyroscopique vibrant |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4655081A (en) * | 1984-02-22 | 1987-04-07 | National Research Development Corporation | Gyroscopic devices |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2544646A (en) * | 1948-06-16 | 1951-03-13 | Sperry Corp | Angular velocity measuring instrument |
US4759220A (en) * | 1986-02-28 | 1988-07-26 | Burdess James S | Angular rate sensors |
US4793195A (en) * | 1986-10-20 | 1988-12-27 | Northrop Corporation | Vibrating cylinder gyroscope and method |
US5656777A (en) * | 1996-06-13 | 1997-08-12 | Alliedsignal, Inc. | Miniature box vibrating gyroscope |
JPH102811A (ja) * | 1996-06-14 | 1998-01-06 | Murata Mfg Co Ltd | 外力計測装置およびその製造方法 |
JPH1062176A (ja) * | 1996-08-15 | 1998-03-06 | Sony Corp | 圧電振動子およびこれを用いた圧電振動ジャイロ |
FR2769086B1 (fr) * | 1997-09-30 | 1999-12-03 | Salaberry Bernard Lucien Charl | Gyrometre vibrant a excitation et detection electromagnetique |
JPH11271063A (ja) * | 1998-03-24 | 1999-10-05 | Aisin Seiki Co Ltd | 角速度検出装置 |
US6151964A (en) * | 1998-05-25 | 2000-11-28 | Citizen Watch Co., Ltd. | Angular velocity sensing device |
JP2000039324A (ja) * | 1998-07-21 | 2000-02-08 | Japan Aviation Electronics Industry Ltd | 振動形角速度センサ |
US6272925B1 (en) * | 1999-09-16 | 2001-08-14 | William S. Watson | High Q angular rate sensing gyroscope |
JP2001108442A (ja) * | 1999-10-06 | 2001-04-20 | Japan Aviation Electronics Industry Ltd | 振動型角速度センサ励振方法・振動型角速度センサ |
JP2001289641A (ja) * | 2000-02-01 | 2001-10-19 | Japan Aviation Electronics Industry Ltd | リング型振動式角速度センサ |
US6443008B1 (en) * | 2000-02-19 | 2002-09-03 | Robert Bosch Gmbh | Decoupled multi-disk gyroscope |
JP2001272235A (ja) * | 2000-03-27 | 2001-10-05 | Japan Aviation Electronics Industry Ltd | リング型振動式角速度センサ |
EP1352222B1 (fr) * | 2001-01-17 | 2010-08-25 | Honeywell International Inc. | Transducteur de force a double faisceau resonant avec pompage longitudinal reduit |
-
2003
- 2003-12-19 FR FR0314973A patent/FR2864226B1/fr not_active Expired - Fee Related
-
2004
- 2004-12-13 WO PCT/FR2004/003203 patent/WO2005061991A1/fr not_active Application Discontinuation
- 2004-12-13 EP EP04816376A patent/EP1695031A1/fr not_active Ceased
- 2004-12-13 US US10/582,344 patent/US7404325B2/en not_active Expired - Fee Related
- 2004-12-13 JP JP2006544490A patent/JP2007514947A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4655081A (en) * | 1984-02-22 | 1987-04-07 | National Research Development Corporation | Gyroscopic devices |
Also Published As
Publication number | Publication date |
---|---|
WO2005061991A1 (fr) | 2005-07-07 |
FR2864226A1 (fr) | 2005-06-24 |
US7404325B2 (en) | 2008-07-29 |
FR2864226B1 (fr) | 2006-06-09 |
US20070095161A1 (en) | 2007-05-03 |
JP2007514947A (ja) | 2007-06-07 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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17Q | First examination report despatched |
Effective date: 20070717 |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES |
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STAA | Information on the status of an ep patent application or granted ep patent |
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Effective date: 20111204 |