JP4889883B2 - 成膜方法および成膜装置 - Google Patents

成膜方法および成膜装置 Download PDF

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JP4889883B2
JP4889883B2 JP2001208605A JP2001208605A JP4889883B2 JP 4889883 B2 JP4889883 B2 JP 4889883B2 JP 2001208605 A JP2001208605 A JP 2001208605A JP 2001208605 A JP2001208605 A JP 2001208605A JP 4889883 B2 JP4889883 B2 JP 4889883B2
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pressure
printing
processing chamber
chamber
layer
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JP2002100472A (ja
JP2002100472A5 (https=
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舜平 山崎
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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  • Electroluminescent Light Sources (AREA)
JP2001208605A 2000-07-10 2001-07-09 成膜方法および成膜装置 Expired - Lifetime JP4889883B2 (ja)

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JP2001208605A JP4889883B2 (ja) 2000-07-10 2001-07-09 成膜方法および成膜装置

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JP2000209130 2000-07-10
JP2000209130 2000-07-10
JP2000-209130 2000-07-10
JP2001208605A JP4889883B2 (ja) 2000-07-10 2001-07-09 成膜方法および成膜装置

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JP2011248206A Division JP5100882B2 (ja) 2000-07-10 2011-11-14 発光装置の作製方法

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JP2002100472A JP2002100472A (ja) 2002-04-05
JP2002100472A5 JP2002100472A5 (https=) 2008-08-21
JP4889883B2 true JP4889883B2 (ja) 2012-03-07

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012094550A (ja) * 2000-07-10 2012-05-17 Semiconductor Energy Lab Co Ltd 発光装置の作製方法
US20240033924A1 (en) * 2018-03-29 2024-02-01 Jabil Inc. Apparatus, system, and method of certifying sensing for autonomous robot navigation

Families Citing this family (29)

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JP4539059B2 (ja) * 2003-08-26 2010-09-08 コニカミノルタホールディングス株式会社 透明導電膜積層体の製造方法
JP3833650B2 (ja) * 2003-12-04 2006-10-18 関東化学株式会社 低分子型有機ｅｌ素子製造の真空蒸着工程において使用するマスクの洗浄液組成物および洗浄方法
JP2006248065A (ja) * 2005-03-11 2006-09-21 Toppan Printing Co Ltd 凸版印刷用インキ供給基材、及びそれを用いた印刷装置、及び印刷方法
US7485023B2 (en) 2005-03-31 2009-02-03 Toppan Printing Co., Ltd. Organic electroluminescent device having partition wall and a manufacturing method of the same by relief printing method
JP2007012504A (ja) 2005-07-01 2007-01-18 Toppan Printing Co Ltd 有機ｅｌ素子の製造方法及び有機ｅｌ素子
JP2007024925A (ja) * 2005-07-12 2007-02-01 Casio Comput Co Ltd ディスプレイパネル、ディスプレイパネルの製造方法及び製造装置
JP4961694B2 (ja) * 2005-08-01 2012-06-27 凸版印刷株式会社 有機ｅｌ素子の製造方法
JP5076292B2 (ja) * 2005-08-08 2012-11-21 パナソニック株式会社 異方導電膜貼付装置及び方法
JP4872288B2 (ja) 2005-09-22 2012-02-08 凸版印刷株式会社 有機ｅｌ素子及びその製造方法
US7696683B2 (en) 2006-01-19 2010-04-13 Toppan Printing Co., Ltd. Organic electroluminescent element and the manufacturing method
KR100673765B1 (ko) 2006-01-20 2007-01-24 삼성에스디아이 주식회사 유기전계발광 표시장치 및 그 제조방법
US8038495B2 (en) 2006-01-20 2011-10-18 Samsung Mobile Display Co., Ltd. Organic light-emitting display device and manufacturing method of the same
KR100635514B1 (ko) 2006-01-23 2006-10-18 삼성에스디아이 주식회사 유기전계발광표시장치 및 그 제조방법
JP4624309B2 (ja) * 2006-01-24 2011-02-02 三星モバイルディスプレイ株式會社 有機電界発光表示装置及びその製造方法
KR100671641B1 (ko) 2006-01-25 2007-01-19 삼성에스디아이 주식회사 유기 전계 발광 표시장치 및 그 제조 방법
KR100688795B1 (ko) 2006-01-25 2007-03-02 삼성에스디아이 주식회사 유기전계발광 표시장치 및 그 제조방법
KR100671647B1 (ko) 2006-01-26 2007-01-19 삼성에스디아이 주식회사 유기전계발광 표시 장치
JP4633674B2 (ja) 2006-01-26 2011-02-16 三星モバイルディスプレイ株式會社 有機電界発光表示装置及びその製造方法
KR100688790B1 (ko) 2006-01-27 2007-03-02 삼성에스디아이 주식회사 유기 전계 발광 표시장치 및 그 제조 방법
US7546803B2 (en) 2006-01-30 2009-06-16 Toppan Printing Co., Ltd. Letterpress printing machine
JP4706845B2 (ja) 2006-02-15 2011-06-22 凸版印刷株式会社 有機ｅｌ素子の製造方法
US7880382B2 (en) 2006-03-08 2011-02-01 Toppan Printing Co., Ltd. Organic electroluminescence panel and manufacturing method of the same
US7687390B2 (en) 2006-03-28 2010-03-30 Toppan Printing Co., Ltd. Manufacturing method of a transparent conductive film, a manufacturing method of a transparent electrode of an organic electroluminescence device, an organic electroluminescence device and the manufacturing method
JP2007273094A (ja) 2006-03-30 2007-10-18 Toppan Printing Co Ltd 有機エレクトロルミネッセンス素子およびその製造方法
JP2007273229A (ja) * 2006-03-31 2007-10-18 Tottori Institute Of Industrial Technology 有機ｅｌ素子の有機薄膜層成膜方法、有機ｅｌ素子の有機薄膜層成膜装置及び有機ｅｌ素子。
JP5217564B2 (ja) * 2008-03-28 2013-06-19 カシオ計算機株式会社 発光装置の製造方法
JP6155548B2 (ja) * 2012-03-26 2017-07-05 凸版印刷株式会社 有機ｅｌ素子の製造方法、表示装置、照明装置及び有機ｅｌ素子の製造装置
KR102032081B1 (ko) * 2012-11-30 2019-10-14 카티바, 인크. 산업용 프린팅 시스템의 유지 방법
KR102850075B1 (ko) * 2014-04-30 2025-08-25 카티바, 인크. 가스 쿠션 장비 및 기판 코팅 기술

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10150028A (ja) * 1996-11-15 1998-06-02 Mitsubishi Electric Corp Ｓｏｇコーター及びｓｏｇ膜の成膜方法
JP4827294B2 (ja) * 1999-11-29 2011-11-30 株式会社半導体エネルギー研究所 成膜装置及び発光装置の作製方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012094550A (ja) * 2000-07-10 2012-05-17 Semiconductor Energy Lab Co Ltd 発光装置の作製方法
US20240033924A1 (en) * 2018-03-29 2024-02-01 Jabil Inc. Apparatus, system, and method of certifying sensing for autonomous robot navigation
US12496719B2 (en) * 2018-03-29 2025-12-16 Jabil Inc. Apparatus, system, and method of certifying sensing for autonomous robot navigation

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