JP4889883B2 - 成膜方法および成膜装置 - Google Patents
成膜方法および成膜装置 Download PDFInfo
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- JP4889883B2 JP4889883B2 JP2001208605A JP2001208605A JP4889883B2 JP 4889883 B2 JP4889883 B2 JP 4889883B2 JP 2001208605 A JP2001208605 A JP 2001208605A JP 2001208605 A JP2001208605 A JP 2001208605A JP 4889883 B2 JP4889883 B2 JP 4889883B2
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- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001208605A JP4889883B2 (ja) | 2000-07-10 | 2001-07-09 | 成膜方法および成膜装置 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000209130 | 2000-07-10 | ||
| JP2000-209130 | 2000-07-10 | ||
| JP2000209130 | 2000-07-10 | ||
| JP2001208605A JP4889883B2 (ja) | 2000-07-10 | 2001-07-09 | 成膜方法および成膜装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011248206A Division JP5100882B2 (ja) | 2000-07-10 | 2011-11-14 | 発光装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002100472A JP2002100472A (ja) | 2002-04-05 |
| JP2002100472A5 JP2002100472A5 (enrdf_load_stackoverflow) | 2008-08-21 |
| JP4889883B2 true JP4889883B2 (ja) | 2012-03-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001208605A Expired - Lifetime JP4889883B2 (ja) | 2000-07-10 | 2001-07-09 | 成膜方法および成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4889883B2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012094550A (ja) * | 2000-07-10 | 2012-05-17 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
| US20240033924A1 (en) * | 2018-03-29 | 2024-02-01 | Jabil Inc. | Apparatus, system, and method of certifying sensing for autonomous robot navigation |
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| JP3833650B2 (ja) * | 2003-12-04 | 2006-10-18 | 関東化学株式会社 | 低分子型有機ｅｌ素子製造の真空蒸着工程において使用するマスクの洗浄液組成物および洗浄方法 |
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| JP2007012504A (ja) | 2005-07-01 | 2007-01-18 | Toppan Printing Co Ltd | 有機ｅｌ素子の製造方法及び有機ｅｌ素子 |
| JP2007024925A (ja) * | 2005-07-12 | 2007-02-01 | Casio Comput Co Ltd | ディスプレイパネル、ディスプレイパネルの製造方法及び製造装置 |
| JP4961694B2 (ja) * | 2005-08-01 | 2012-06-27 | 凸版印刷株式会社 | 有機ｅｌ素子の製造方法 |
| JP5076292B2 (ja) * | 2005-08-08 | 2012-11-21 | パナソニック株式会社 | 異方導電膜貼付装置及び方法 |
| JP4872288B2 (ja) | 2005-09-22 | 2012-02-08 | 凸版印刷株式会社 | 有機ｅｌ素子及びその製造方法 |
| US7696683B2 (en) | 2006-01-19 | 2010-04-13 | Toppan Printing Co., Ltd. | Organic electroluminescent element and the manufacturing method |
| KR100673765B1 (ko) | 2006-01-20 | 2007-01-24 | 삼성에스디아이 주식회사 | 유기전계발광 표시장치 및 그 제조방법 |
| US8038495B2 (en) | 2006-01-20 | 2011-10-18 | Samsung Mobile Display Co., Ltd. | Organic light-emitting display device and manufacturing method of the same |
| KR100635514B1 (ko) | 2006-01-23 | 2006-10-18 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그 제조방법 |
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| US7546803B2 (en) | 2006-01-30 | 2009-06-16 | Toppan Printing Co., Ltd. | Letterpress printing machine |
| JP4706845B2 (ja) | 2006-02-15 | 2011-06-22 | 凸版印刷株式会社 | 有機ｅｌ素子の製造方法 |
| US7880382B2 (en) | 2006-03-08 | 2011-02-01 | Toppan Printing Co., Ltd. | Organic electroluminescence panel and manufacturing method of the same |
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| JP2007273094A (ja) | 2006-03-30 | 2007-10-18 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス素子およびその製造方法 |
| JP2007273229A (ja) * | 2006-03-31 | 2007-10-18 | Tottori Institute Of Industrial Technology | 有機ｅｌ素子の有機薄膜層成膜方法、有機ｅｌ素子の有機薄膜層成膜装置及び有機ｅｌ素子。 |
| JP5217564B2 (ja) * | 2008-03-28 | 2013-06-19 | カシオ計算機株式会社 | 発光装置の製造方法 |
| JP6155548B2 (ja) * | 2012-03-26 | 2017-07-05 | 凸版印刷株式会社 | 有機ｅｌ素子の製造方法、表示装置、照明装置及び有機ｅｌ素子の製造装置 |
| KR102326995B1 (ko) * | 2012-11-30 | 2021-11-16 | 카티바, 인크. | 산업용 프린팅 시스템의 유지 방법 |
| KR102315014B1 (ko) * | 2014-04-30 | 2021-10-20 | 카티바, 인크. | 가스 쿠션 장비 및 기판 코팅 기술 |
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| JPH10150028A (ja) * | 1996-11-15 | 1998-06-02 | Mitsubishi Electric Corp | Ｓｏｇコーター及びｓｏｇ膜の成膜方法 |
| JP4827294B2 (ja) * | 1999-11-29 | 2011-11-30 | 株式会社半導体エネルギー研究所 | 成膜装置及び発光装置の作製方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012094550A (ja) * | 2000-07-10 | 2012-05-17 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
| US20240033924A1 (en) * | 2018-03-29 | 2024-02-01 | Jabil Inc. | Apparatus, system, and method of certifying sensing for autonomous robot navigation |
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