JP4878926B2 - 測長用モニター - Google Patents
測長用モニター Download PDFInfo
- Publication number
- JP4878926B2 JP4878926B2 JP2006158490A JP2006158490A JP4878926B2 JP 4878926 B2 JP4878926 B2 JP 4878926B2 JP 2006158490 A JP2006158490 A JP 2006158490A JP 2006158490 A JP2006158490 A JP 2006158490A JP 4878926 B2 JP4878926 B2 JP 4878926B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- length measurement
- insulating film
- interlayer insulating
- contact hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Semiconductor Integrated Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
4 測長用コンタクトホール 5 測長用コンタクトホール 6 金属層
10 半導体基板 11 絶縁膜 12 PE‐TEOS膜 13 SOG膜
14 PE‐TEOS膜 15 層間絶縁膜 100 測長用モニター
101 LSI形成領域 102 スクライブライン
103 測長用コンタクトホール 104 測長用コンタクトホール
105 金属層 110 半導体基板 111 絶縁膜
112 PE‐TEOS膜 113 SOG膜 114 PE‐TEOS膜
115 層間絶縁膜
Claims (2)
- 半導体基板上に形成され、隣り合う金属層の間に一定のスペースが生じるように複数の列を成す金属層と、
前記金属層上に第1のTEOS膜、SOG膜、第2のTEOS膜をこの順に積層して成る層間絶縁膜と、
前記層間絶縁膜を貫通し、前記金属層に至る、その径を測長するための測長用コンタクトホールと、を備え、前記SOG膜は隣り合う金属層の間にも形成されていることを特徴とする測長用モニター。 - 前記測長用コンタクトホールは、各列の前記金属層上に配列された複数の測長用コンタクトホールと、前記複数のコンタクトホールから離間して、1つの列の前記金属層上に形成された単一の測長用コンタクトホールと、から成ることを特徴とする請求項1に記載の測長用モニター。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006158490A JP4878926B2 (ja) | 2006-06-07 | 2006-06-07 | 測長用モニター |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006158490A JP4878926B2 (ja) | 2006-06-07 | 2006-06-07 | 測長用モニター |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007329248A JP2007329248A (ja) | 2007-12-20 |
JP4878926B2 true JP4878926B2 (ja) | 2012-02-15 |
Family
ID=38929525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006158490A Expired - Fee Related JP4878926B2 (ja) | 2006-06-07 | 2006-06-07 | 測長用モニター |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4878926B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6593524B2 (ja) | 2016-03-01 | 2019-10-23 | 三菱電機株式会社 | 半導体装置の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2983855B2 (ja) * | 1994-10-31 | 1999-11-29 | 三洋電機株式会社 | 測長用モニター |
JPH10163317A (ja) * | 1996-11-28 | 1998-06-19 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP3779307B2 (ja) * | 2003-07-25 | 2006-05-24 | 松下電器産業株式会社 | 抵抗不良評価装置、抵抗不良評価方法及び抵抗不良評価装置の製造方法 |
-
2006
- 2006-06-07 JP JP2006158490A patent/JP4878926B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2007329248A (ja) | 2007-12-20 |
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