JP4877481B2 - 液体噴射ヘッド及び液体噴射装置 - Google Patents
液体噴射ヘッド及び液体噴射装置 Download PDFInfo
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- JP4877481B2 JP4877481B2 JP2006073447A JP2006073447A JP4877481B2 JP 4877481 B2 JP4877481 B2 JP 4877481B2 JP 2006073447 A JP2006073447 A JP 2006073447A JP 2006073447 A JP2006073447 A JP 2006073447A JP 4877481 B2 JP4877481 B2 JP 4877481B2
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- forming substrate
- adhesive
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- liquid ejecting
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
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- 239000011651 chromium Substances 0.000 description 2
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- 238000009792 diffusion process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
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- 239000000203 mixture Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000000018 DNA microarray Methods 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 208000016169 Fish-eye disease Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
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- 239000007772 electrode material Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000013212 metal-organic material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920003366 poly(p-phenylene terephthalamide) Polymers 0.000 description 1
- -1 polyparaphenylene terephthalamide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006073447A JP4877481B2 (ja) | 2006-03-16 | 2006-03-16 | 液体噴射ヘッド及び液体噴射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006073447A JP4877481B2 (ja) | 2006-03-16 | 2006-03-16 | 液体噴射ヘッド及び液体噴射装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007245589A JP2007245589A (ja) | 2007-09-27 |
| JP2007245589A5 JP2007245589A5 (enExample) | 2009-04-30 |
| JP4877481B2 true JP4877481B2 (ja) | 2012-02-15 |
Family
ID=38590365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006073447A Expired - Fee Related JP4877481B2 (ja) | 2006-03-16 | 2006-03-16 | 液体噴射ヘッド及び液体噴射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4877481B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8262199B2 (en) | 2008-09-30 | 2012-09-11 | Fujifilm Corporation | Droplet jetting head, method of manufacturing droplet jetting head, and droplet jetting apparatus equipped with droplet jetting head |
| JP6024139B2 (ja) * | 2012-03-22 | 2016-11-09 | 株式会社リコー | 液滴吐出ヘッド、インクカートリッジ、及び画像形成装置 |
| JP2014073551A (ja) * | 2012-10-04 | 2014-04-24 | Seiko Epson Corp | 電子装置および電子装置の製造方法 |
| JP6252117B2 (ja) | 2013-11-08 | 2017-12-27 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| GB201820560D0 (en) | 2018-12-17 | 2019-01-30 | Aston Martin Lagonda Ltd | Assemblies for engines |
| JP7552708B2 (ja) * | 2020-09-30 | 2024-09-18 | コニカミノルタ株式会社 | インクジェットヘッドおよびその製造方法、ならびに画像形成装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3582968B2 (ja) * | 1996-09-30 | 2004-10-27 | 株式会社東芝 | 薄膜磁気ヘッドおよび磁気記録装置 |
| JP4408582B2 (ja) * | 2001-03-05 | 2010-02-03 | 株式会社リコー | インクジェットヘッド及びインクジェット記録装置 |
| JP3888421B2 (ja) * | 2001-03-09 | 2007-03-07 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの製造方法 |
| JP2005153369A (ja) * | 2003-11-27 | 2005-06-16 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置並びに液体噴射ヘッドの製造方法 |
| JP2006044083A (ja) * | 2004-08-05 | 2006-02-16 | Seiko Epson Corp | 液体噴射ヘッドの製造方法及び液体噴射ヘッド |
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2006
- 2006-03-16 JP JP2006073447A patent/JP4877481B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007245589A (ja) | 2007-09-27 |
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