JP4870572B2 - 半導体発光デバイスおよびサブマウント、ならびにそれを形成するための方法 - Google Patents
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- 229910010271 silicon carbide Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/507—Wavelength conversion elements the elements being in intimate contact with parts other than the semiconductor body or integrated with parts other than the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
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Description
予め形成された蛍光板LEDデバイスは、米国特許出願公開(特許文献18参照)に述べられている。特許文献19には、半導体発光デバイスについて述べられている(特許文献2参照)。シングルワイアボンディングの可能な、また発光ダイオードデバイスのためのESD保護を提供することが可能なシリコンサブマウントが、特許文献20に述べられている。
Claims (21)
- 半導体発光デバイス用のサブマウントであって、
前記半導体発光デバイスを受け取るように構成されたキャビティをその中に有する半導体基板と、
前記キャビティ内に受け取られた発光デバイスの第1のノードを、前記半導体基板を貫いて前記半導体基板の外部表面にかけて延びる第1の導電経路に結合するように位置決めされた、前記キャビティ内の第1のボンドパッドと、
前記発光デバイスの第2のノードを、前記半導体基板を貫いて前記半導体基板の外部表面にかけて延びる第2の導電経路に結合するように位置決めされた、前記キャビティ内の第2のボンドパッドとを備え、
前記第1の導電経路と前記第2の導電経路が、直列に結合されたバイア接続とドープ領域を含み、前記半導体基板は第1の導電型のドーパントを含み、前記第1および第2の導電経路のそれぞれのドープ領域は、第1の導電型のドーパントと異なる第2の導電型のドーパントを含み、前記バイア接続と前記第1および第2の導電経路のそれぞれのドープ領域は、それぞれのボンドパッドから前記基板の前記外部表面にかけて直列に延び、
前記第1と第2の導電経路を結合し、前記キャビティ内に取り付けられた発光デバイスに対して静電気放電(ESD)保護を提供する、一体化された、対向するツェナーダイオード接合をさらに備え、
前記対向するツェナーダイオード接合は、前記第1の導電経路の少なくとも一部分および前記第2の導電経路の少なくとも一部分を形成する半導体材料の前記第2の導電型のドープ領域と、それらの間に配置された半導体材料の前記第1の導電型のドープ領域とを含む
ことを特徴とするサブマウント。 - 前記キャビティは、フロアと、前記フロアに対して少なくとも約90°の角度で曲げられた側壁とを含むことを特徴とする請求項1に記載のサブマウント。
- 前記第1および第2のボンドパッドが前記キャビティの前記フロア上に位置決めされることを特徴とする請求項2に記載のサブマウント。
- 前記キャビティは、少なくともその中に受け取られる前記発光デバイスの高さの、前記フロアから前記半導体基板の上部表面までの高さを有することを特徴とする請求項2に記載のサブマウント。
- 前記キャビティに隣接する前記半導体基板の上部表面内に、中実波長変換要素を受け取るように構成され、かつ前記キャビティ内の発光デバイスから放出される光を受け取るため、前記波長変換要素が前記キャビティを覆うように配置された、受取り用凹部をさらに備え、前記中実波長変換部材は、波長変換材料を中に有する剛性波長変換部材を含むことを特徴とする請求項2に記載のサブマウント。
- 前記キャビティの前記フロアおよび/または側壁上に反射材料コーティングをさらに備えることを特徴とする請求項2に記載のサブマウント。
- 前記第1および第2の導電経路は共に、前記半導体基板の前記外部表面の下側に延びることを特徴とする請求項1に記載のサブマウント。
- 前記半導体基板の前記外部表面上の第1の外部取付け用パッドおよび第2の外部取付け用パッドをさらに備え、前記第1の導電経路は前記第1の外部取付け用パッドに延び、前記第2の導電経路は前記第2の外部取付け用パッドに延びることを特徴とする請求項1に記載のサブマウント。
- 前記第1の導電型はp型を含み、前記第2の導電型はn型を含むことを特徴とする請求項1に記載のサブマウント。
- 前記n型ドープ領域は、前記第1および第2のボンドパッドのそれぞれと、または前記第1および第2の外部取付け用パッドのそれぞれと接触することを特徴とする請求項9に記載のサブマウント。
- 前記半導体基板はp型基板を含み、前記n型ドープ領域は、前記p型基板内のn型ドーパントのウェルを含むことを特徴とする請求項10に記載のサブマウント。
- 前記第1および第2の導電経路は、半導体材料のそれぞれの第1の導電型のドープ領域から延びるそれぞれの金属充填バイア接続をさらに備えることを特徴とする請求項1に記載のサブマウント。
- 請求項9に記載のサブマウントを含み、
前記キャビティ内の前記発光デバイスと、
前記発光デバイスから放出された光を受け取り波長変換するように、前記半導体基板の上部表面上で、前記発光デバイスを覆うように配置された中実波長変換部材とをさらに備えることを特徴とする発光デバイスパッケージ。 - 前記キャビティ内で、前記発光デバイスと前記波長変換部材の間でカプセルの材料をさらに含むことを特徴とする請求項13に記載のパッケージ。
- 前記カプセルの材料は、少なくとも約1.5の屈折率を有することを特徴とする請求項14に記載のパッケージ。
- 前記中実波長変換部材は、波長変換材料を中に有するガラス、シリコン、および/または硬化エポキシの剛性波長変換部材を含むことを特徴とする請求項13に記載のパッケージ。
- 前記波長変換材料は、燐光体を含むことを特徴とする請求項16に記載のパッケージ。
- 前記発光デバイスは、発光ダイオード(LED)を含むことを特徴とする請求項13に記載のパッケージ。
- その中にキャビティを有する半導体基板であって、前記キャビティが、フロアと、前記フロアに対して少なくとも約90°の角度で曲げられた側壁とを有する半導体基板と、
前記キャビティ内に受け取られた発光デバイスの第1のノードに結合するように位置決めされた、前記キャビティ内の第1のボンドパッドと、
その中に位置決めされた前記発光デバイスの第2のノードに結合するように位置決めされた、前記キャビティ内の第2のボンドパッドと、
前記基板を貫いて、前記第1のボンドパッドから前記半導体基板の外部表面にかけて延びる第1の導電経路と、
前記基板を貫いて、前記第2のボンドパッドから前記半導体基板の前記外部表面にかけて延びる第2の導電経路であって、前記第1の導電経路と前記第2の導電経路が、直列に結合されたバイア接続とドープ領域を含み、前記半導体基板は第1の導電型のドーパントを含み、前記第1および第2の導電経路のそれぞれのドープ領域は、第1の導電型のドーパントと異なる第2の導電型のドーパントを含み、前記バイア接続と前記第1および第2の導電経路のそれぞれのドープ領域は、それぞれのボンドパッドから前記基板の前記外部表面にかけて直列に延びた、第1の導電経路と第2の導電経路と、
前記キャビティ内に受け取られ、前記第1および第2のボンドパッドに結合されたノードを有する発光デバイスと、
前記第1と第2の導電経路を結合し、前記発光デバイスに静電気放電(ESD)保護を提供する、対向するツェナーダイオード接合と、
前記発光デバイスから放出された光を受け取り波長変換するように、前記半導体基板の上部表面上で、前記発光デバイスを覆うように配置された中実波長変換部材とをさらに備えることを特徴とする発光デバイスパッケージ。 - 前記第1および第2の導電経路はそれぞれ、直列に結合された金属バイア接続と高濃度ドープ領域とを備えることを特徴とする請求項1に記載のサブマウント。
- 前記第1の導電型のドーパントはp型ドーパントを含み、前記半導体基板はp型基板であり、前記第2の導電型のドーパントはn型ドーパントを含み、前記第2の導電型のドープ領域はn型にドープした領域であることを特徴とする請求項1に記載のサブマウント。
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US52805403P | 2003-12-09 | 2003-12-09 | |
US60/528,054 | 2003-12-09 | ||
US10/987,894 | 2004-11-12 | ||
US10/987,894 US7518158B2 (en) | 2003-12-09 | 2004-11-12 | Semiconductor light emitting devices and submounts |
PCT/US2004/039619 WO2005062393A2 (en) | 2003-12-09 | 2004-11-24 | Semiconductor light emitting devices and submounts and methods for forming the same |
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EP (1) | EP1692729B1 (ja) |
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KR (1) | KR101097694B1 (ja) |
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Families Citing this family (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060005763A1 (en) * | 2001-12-24 | 2006-01-12 | Crystal Is, Inc. | Method and apparatus for producing large, single-crystals of aluminum nitride |
US8545629B2 (en) | 2001-12-24 | 2013-10-01 | Crystal Is, Inc. | Method and apparatus for producing large, single-crystals of aluminum nitride |
US7638346B2 (en) * | 2001-12-24 | 2009-12-29 | Crystal Is, Inc. | Nitride semiconductor heterostructures and related methods |
US7518158B2 (en) * | 2003-12-09 | 2009-04-14 | Cree, Inc. | Semiconductor light emitting devices and submounts |
US7408203B2 (en) * | 2004-04-17 | 2008-08-05 | Lg Electronics Inc. | Light emitting device and fabrication method thereof and light emitting system using the same |
US8154030B2 (en) * | 2004-10-01 | 2012-04-10 | Finisar Corporation | Integrated diode in a silicon chip scale package |
TW200637033A (en) * | 2004-11-22 | 2006-10-16 | Matsushita Electric Ind Co Ltd | Light-emitting device, light-emitting module, display unit, lighting unit and method for manufacturing light-emitting device |
US20060258031A1 (en) * | 2005-01-26 | 2006-11-16 | Bily Wang | Wafer-level electro-optical semiconductor manufacture fabrication method |
US20100301349A1 (en) * | 2005-01-26 | 2010-12-02 | Harvatek Corporation | Wafer level led package structure for increasing light-emitting efficiency and heat-dissipating effect and method for manufacturing the same |
US7719021B2 (en) * | 2005-06-28 | 2010-05-18 | Lighting Science Group Corporation | Light efficient LED assembly including a shaped reflective cavity and method for making same |
US8079743B2 (en) * | 2005-06-28 | 2011-12-20 | Lighting Science Group Corporation | Display backlight with improved light coupling and mixing |
CN100405621C (zh) * | 2005-09-29 | 2008-07-23 | 上海乐金广电电子有限公司 | 白色光源的制造方法 |
US7641735B2 (en) * | 2005-12-02 | 2010-01-05 | Crystal Is, Inc. | Doped aluminum nitride crystals and methods of making them |
JP2007165811A (ja) | 2005-12-16 | 2007-06-28 | Nichia Chem Ind Ltd | 発光装置 |
US7528422B2 (en) * | 2006-01-20 | 2009-05-05 | Hymite A/S | Package for a light emitting element with integrated electrostatic discharge protection |
US8044412B2 (en) * | 2006-01-20 | 2011-10-25 | Taiwan Semiconductor Manufacturing Company, Ltd | Package for a light emitting element |
US7928462B2 (en) | 2006-02-16 | 2011-04-19 | Lg Electronics Inc. | Light emitting device having vertical structure, package thereof and method for manufacturing the same |
KR100746783B1 (ko) * | 2006-02-28 | 2007-08-06 | 엘지전자 주식회사 | 발광소자 패키지 및 그 제조방법 |
TWI303872B (en) * | 2006-03-13 | 2008-12-01 | Ind Tech Res Inst | High power light emitting device assembly with esd preotection ability and the method of manufacturing the same |
US9034103B2 (en) * | 2006-03-30 | 2015-05-19 | Crystal Is, Inc. | Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them |
US8012257B2 (en) * | 2006-03-30 | 2011-09-06 | Crystal Is, Inc. | Methods for controllable doping of aluminum nitride bulk crystals |
KR101314713B1 (ko) | 2006-06-16 | 2013-10-07 | 신꼬오덴기 고교 가부시키가이샤 | 반도체 장치, 그 제조 방법, 및 기판 |
KR100854328B1 (ko) * | 2006-07-07 | 2008-08-28 | 엘지전자 주식회사 | 발광 소자 패키지 및 그 제조방법 |
KR100845856B1 (ko) * | 2006-12-21 | 2008-07-14 | 엘지전자 주식회사 | 발광 소자 패키지 및 그 제조방법 |
DE102007001706A1 (de) | 2007-01-11 | 2008-07-17 | Osram Opto Semiconductors Gmbh | Gehäuse für optoelektronisches Bauelement und Anordnung eines optoelektronischen Bauelementes in einem Gehäuse |
US9771666B2 (en) | 2007-01-17 | 2017-09-26 | Crystal Is, Inc. | Defect reduction in seeded aluminum nitride crystal growth |
CN107059116B (zh) | 2007-01-17 | 2019-12-31 | 晶体公司 | 引晶的氮化铝晶体生长中的缺陷减少 |
US8080833B2 (en) | 2007-01-26 | 2011-12-20 | Crystal Is, Inc. | Thick pseudomorphic nitride epitaxial layers |
JP5730484B2 (ja) * | 2007-01-26 | 2015-06-10 | クリスタル アイエス インコーポレイテッド | 厚みのある擬似格子整合型の窒化物エピタキシャル層 |
EP1988577B1 (en) * | 2007-04-30 | 2017-04-05 | Tridonic Jennersdorf GmbH | Light emitting diode module with silicon platform |
US8436371B2 (en) * | 2007-05-24 | 2013-05-07 | Cree, Inc. | Microscale optoelectronic device packages |
US8088220B2 (en) | 2007-05-24 | 2012-01-03 | Crystal Is, Inc. | Deep-eutectic melt growth of nitride crystals |
US7791096B2 (en) * | 2007-06-08 | 2010-09-07 | Koninklijke Philips Electronics N.V. | Mount for a semiconductor light emitting device |
TWM327545U (en) * | 2007-07-09 | 2008-02-21 | Everlight Electronics Co Ltd | Improved light-emitting diode packaging structure |
JP4809308B2 (ja) * | 2007-09-21 | 2011-11-09 | 新光電気工業株式会社 | 基板の製造方法 |
JP4961617B2 (ja) * | 2007-10-01 | 2012-06-27 | 新光電気工業株式会社 | 配線基板とその製造方法及び半導体装置 |
KR100896282B1 (ko) * | 2007-11-01 | 2009-05-08 | 엘지전자 주식회사 | 발광 소자 패키지 및 그 제조방법 |
US7985970B2 (en) * | 2009-04-06 | 2011-07-26 | Cree, Inc. | High voltage low current surface-emitting LED |
US8536584B2 (en) * | 2007-11-14 | 2013-09-17 | Cree, Inc. | High voltage wire bond free LEDS |
KR100999760B1 (ko) * | 2008-09-26 | 2010-12-08 | 엘지이노텍 주식회사 | 발광소자 패키지 및 그 제조방법 |
US20100176507A1 (en) * | 2009-01-14 | 2010-07-15 | Hymite A/S | Semiconductor-based submount with electrically conductive feed-throughs |
KR101064026B1 (ko) * | 2009-02-17 | 2011-09-08 | 엘지이노텍 주식회사 | 발광 디바이스 패키지 및 그 제조방법 |
US9093293B2 (en) | 2009-04-06 | 2015-07-28 | Cree, Inc. | High voltage low current surface emitting light emitting diode |
US8476668B2 (en) * | 2009-04-06 | 2013-07-02 | Cree, Inc. | High voltage low current surface emitting LED |
US20100314551A1 (en) * | 2009-06-11 | 2010-12-16 | Bettles Timothy J | In-line Fluid Treatment by UV Radiation |
US8933467B2 (en) | 2009-08-13 | 2015-01-13 | SemiLEDs Optoelectronics Co., Ltd. | Smart integrated semiconductor light emitting system including nitride based light emitting diodes (LED) and application specific integrated circuits (ASIC) |
US8084780B2 (en) * | 2009-08-13 | 2011-12-27 | Semileds Optoelectronics Co. | Smart integrated semiconductor light emitting system including light emitting diodes and application specific integrated circuits (ASIC) |
US9214456B2 (en) | 2009-08-13 | 2015-12-15 | SemiLEDs Optoelectronics Co., Ltd. | Light emitting diode (LED) system having lighting device and wireless control system |
US20110042803A1 (en) * | 2009-08-24 | 2011-02-24 | Chen-Fu Chu | Method For Fabricating A Through Interconnect On A Semiconductor Substrate |
KR101092097B1 (ko) * | 2009-08-31 | 2011-12-12 | 엘지이노텍 주식회사 | 발광 다이오드 패키지 및 그 제조방법 |
US7893445B2 (en) * | 2009-11-09 | 2011-02-22 | Cree, Inc. | Solid state emitter package including red and blue emitters |
DE102009053064A1 (de) * | 2009-11-13 | 2011-05-19 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterbauelement mit Schutzdiodenstruktur und Verfahren zur Herstellung eines Dünnfilm-Halbleiterbauelements |
US20110175218A1 (en) | 2010-01-18 | 2011-07-21 | Shiann-Ming Liou | Package assembly having a semiconductor substrate |
US20110186960A1 (en) | 2010-02-03 | 2011-08-04 | Albert Wu | Techniques and configurations for recessed semiconductor substrates |
JP5806734B2 (ja) | 2010-06-30 | 2015-11-10 | クリスタル アイエス, インコーポレーテッドCrystal Is, Inc. | 熱勾配制御による窒化アルミニウム大単結晶成長 |
WO2012002580A1 (ja) * | 2010-07-01 | 2012-01-05 | シチズンホールディングス株式会社 | Led光源装置及びその製造方法 |
DE102010027679A1 (de) * | 2010-07-20 | 2012-01-26 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
CN103222073B (zh) | 2010-08-03 | 2017-03-29 | 财团法人工业技术研究院 | 发光二极管芯片、发光二极管封装结构、及用以形成上述的方法 |
US8455882B2 (en) | 2010-10-15 | 2013-06-04 | Cree, Inc. | High efficiency LEDs |
CN102456802A (zh) * | 2010-10-19 | 2012-05-16 | 展晶科技(深圳)有限公司 | 发光二极管封装结构的制造方法 |
US9022608B2 (en) | 2010-11-23 | 2015-05-05 | Q Technology, Inc. | Unlit LED circuit bypass element with system and method therefor |
US8772817B2 (en) | 2010-12-22 | 2014-07-08 | Cree, Inc. | Electronic device submounts including substrates with thermally conductive vias |
KR101761834B1 (ko) * | 2011-01-28 | 2017-07-27 | 서울바이오시스 주식회사 | 웨이퍼 레벨 발광 다이오드 패키지 및 그것을 제조하는 방법 |
KR101766297B1 (ko) * | 2011-02-16 | 2017-08-08 | 삼성전자 주식회사 | 발광소자 패키지 및 그 제조방법 |
US8962359B2 (en) | 2011-07-19 | 2015-02-24 | Crystal Is, Inc. | Photon extraction from nitride ultraviolet light-emitting devices |
KR20130011088A (ko) * | 2011-07-20 | 2013-01-30 | 삼성전자주식회사 | 발광소자 패키지 및 그 제조방법 |
WO2013016355A1 (en) * | 2011-07-25 | 2013-01-31 | Cree, Inc. | Monolithic multi-junction light emitting devices including multiple groups of light emitting diodes |
JPWO2013027413A1 (ja) * | 2011-08-25 | 2015-03-05 | パナソニック株式会社 | 保護素子及びこれを用いた発光装置 |
TWI449466B (zh) | 2011-12-26 | 2014-08-11 | Ind Tech Res Inst | 發光裝置 |
JP2014067934A (ja) * | 2012-09-27 | 2014-04-17 | Murata Mfg Co Ltd | 実装基板の製造方法および実装基板 |
EP2973664B1 (en) | 2013-03-15 | 2020-10-14 | Crystal Is, Inc. | Ultraviolet light-emitting device and method of forming a contact to an ultraviolet light-emitting device |
DE102013105631A1 (de) * | 2013-05-31 | 2014-12-04 | Osram Opto Semiconductors Gmbh | Träger für einen optoelektronischen Halbleiterchip und optoelektronisches Bauteil |
EP3014667B1 (en) * | 2013-06-28 | 2020-02-19 | Lumileds Holding B.V. | Light emitting diode device |
KR102130524B1 (ko) * | 2013-08-28 | 2020-07-07 | 삼성디스플레이 주식회사 | 발광 소자 모듈, 이를 포함하는 백라이트 유닛 및 이를 포함하는 액정 표시 장치 |
DE102013110853B4 (de) | 2013-10-01 | 2020-12-24 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Strahlungsemittierender Halbleiterchip und Verfahren zur Herstellung von strahlungsemittierenden Halbleiterchips |
JP6539035B2 (ja) * | 2014-01-08 | 2019-07-03 | ローム株式会社 | チップ部品 |
US20150303179A1 (en) * | 2014-04-18 | 2015-10-22 | Toshiba Corporation | Light Emitting Diode Assembly With Integrated Circuit Element |
TWM488746U (zh) * | 2014-07-14 | 2014-10-21 | Genesis Photonics Inc | 發光模組 |
US20170104135A1 (en) * | 2015-10-13 | 2017-04-13 | Sensor Electronic Technology, Inc. | Light Emitting Diode Mounting Structure |
WO2018200685A2 (en) | 2017-04-27 | 2018-11-01 | Ecosense Lighting Inc. | Methods and systems for an automated design, fulfillment, deployment and operation platform for lighting installations |
US10522532B2 (en) * | 2016-05-27 | 2019-12-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Through via extending through a group III-V layer |
MX2019000459A (es) * | 2016-07-28 | 2019-04-22 | Victor Equipment Co | Punta de combustible con supresor de retroceso de llama integrado. |
CN107369677A (zh) * | 2017-08-10 | 2017-11-21 | 中国科学院福建物质结构研究所 | 一种集成封装的三基色led器件及其制作方法和用途 |
CN110164857B (zh) * | 2018-02-14 | 2024-04-09 | 晶元光电股份有限公司 | 发光装置 |
US10770636B2 (en) * | 2018-02-14 | 2020-09-08 | Epistar Corporation | Light emitting device and manufacturing method thereof |
DE102020126391A1 (de) | 2020-10-08 | 2022-04-14 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Led package für uv licht und verfahren |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5003357A (en) * | 1987-05-30 | 1991-03-26 | Samsung Semiconductor And Telecommunications Co. | Semiconductor light emitting device |
JPH11251644A (ja) * | 1998-02-27 | 1999-09-17 | Matsushita Electron Corp | 半導体発光装置 |
JPH11307818A (ja) * | 1998-04-24 | 1999-11-05 | Matsushita Electron Corp | フルカラー複合半導体発光素子及びこれを用いた発光装置 |
JPH11354836A (ja) * | 1998-06-05 | 1999-12-24 | Matsushita Electron Corp | フルカラー半導体発光装置 |
JP2001015815A (ja) * | 1999-04-28 | 2001-01-19 | Sanken Electric Co Ltd | 半導体発光装置 |
US20020063520A1 (en) * | 2000-11-29 | 2002-05-30 | Huei-Che Yu | Pre-formed fluorescent plate - LED device |
US6642550B1 (en) * | 2002-08-26 | 2003-11-04 | California Micro Devices | Silicon sub-mount capable of single wire bonding and of providing ESD protection for light emitting diode devices |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5027168A (en) | 1988-12-14 | 1991-06-25 | Cree Research, Inc. | Blue light emitting diode formed in silicon carbide |
US4918497A (en) | 1988-12-14 | 1990-04-17 | Cree Research, Inc. | Blue light emitting diode formed in silicon carbide |
US4966862A (en) | 1989-08-28 | 1990-10-30 | Cree Research, Inc. | Method of production of light emitting diodes |
US5210051A (en) | 1990-03-27 | 1993-05-11 | Cree Research, Inc. | High efficiency light emitting diodes from bipolar gallium nitride |
US5416342A (en) | 1993-06-23 | 1995-05-16 | Cree Research, Inc. | Blue light-emitting diode with high external quantum efficiency |
US5338944A (en) | 1993-09-22 | 1994-08-16 | Cree Research, Inc. | Blue light-emitting diode with degenerate junction structure |
US5393993A (en) | 1993-12-13 | 1995-02-28 | Cree Research, Inc. | Buffer structure between silicon carbide and gallium nitride and resulting semiconductor devices |
US5604135A (en) | 1994-08-12 | 1997-02-18 | Cree Research, Inc. | Method of forming green light emitting diode in silicon carbide |
US5523589A (en) | 1994-09-20 | 1996-06-04 | Cree Research, Inc. | Vertical geometry light emitting diode with group III nitride active layer and extended lifetime |
US5631190A (en) | 1994-10-07 | 1997-05-20 | Cree Research, Inc. | Method for producing high efficiency light-emitting diodes and resulting diode structures |
US5739554A (en) | 1995-05-08 | 1998-04-14 | Cree Research, Inc. | Double heterojunction light emitting diode with gallium nitride active layer |
BRPI9715293B1 (pt) | 1996-06-26 | 2016-11-01 | Osram Ag | elemento de cobertura para um elemento de construção optoeletrônico |
JPH1074986A (ja) | 1996-06-27 | 1998-03-17 | Natl Aerospace Lab | 熱電変換素子、π型熱電変換素子対および熱電変換モジュールの各製造方法 |
JP3196823B2 (ja) | 1997-06-11 | 2001-08-06 | 日本電気株式会社 | 半導体装置 |
US6201262B1 (en) | 1997-10-07 | 2001-03-13 | Cree, Inc. | Group III nitride photonic devices on silicon carbide substrates with conductive buffer interlay structure |
JP4350232B2 (ja) * | 1999-10-05 | 2009-10-21 | 株式会社朝日ラバー | 蛍光被覆体製造支援方法、及びその製造支援システム |
US6303509B1 (en) * | 1999-10-29 | 2001-10-16 | Taiwan Semiconductor Manufacturing Company | Method to calibrate the wafer transfer for oxide etcher (with clamp) |
JP2002190622A (ja) | 2000-12-22 | 2002-07-05 | Sanken Electric Co Ltd | 発光ダイオード用透光性蛍光カバー |
US6747406B1 (en) | 2000-08-07 | 2004-06-08 | General Electric Company | LED cross-linkable phospor coating |
US6635363B1 (en) | 2000-08-21 | 2003-10-21 | General Electric Company | Phosphor coating with self-adjusting distance from LED chip |
JP5110744B2 (ja) | 2000-12-21 | 2012-12-26 | フィリップス ルミレッズ ライティング カンパニー リミテッド ライアビリティ カンパニー | 発光装置及びその製造方法 |
US20020084749A1 (en) * | 2000-12-28 | 2002-07-04 | Ayala Raul E. | UV reflecting materials for LED lamps using UV-emitting diodes |
JP2002220350A (ja) | 2001-01-24 | 2002-08-09 | Toshiba Corp | 有害塩素化合物処理方法および処理装置 |
JP4737842B2 (ja) | 2001-01-30 | 2011-08-03 | 京セラ株式会社 | 発光素子収納用パッケージの製造方法 |
US6791119B2 (en) | 2001-02-01 | 2004-09-14 | Cree, Inc. | Light emitting diodes including modifications for light extraction |
TW490863B (en) * | 2001-02-12 | 2002-06-11 | Arima Optoelectronics Corp | Manufacturing method of LED with uniform color temperature |
JP2002314143A (ja) | 2001-04-09 | 2002-10-25 | Toshiba Corp | 発光装置 |
US6958497B2 (en) | 2001-05-30 | 2005-10-25 | Cree, Inc. | Group III nitride based light emitting diode structures with a quantum well and superlattice, group III nitride based quantum well structures and group III nitride based superlattice structures |
US20030102473A1 (en) * | 2001-08-15 | 2003-06-05 | Motorola, Inc. | Structure and method for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate |
US6531328B1 (en) * | 2001-10-11 | 2003-03-11 | Solidlite Corporation | Packaging of light-emitting diode |
US7858403B2 (en) * | 2001-10-31 | 2010-12-28 | Cree, Inc. | Methods and systems for fabricating broad spectrum light emitting devices |
US6791116B2 (en) * | 2002-04-30 | 2004-09-14 | Toyoda Gosei Co., Ltd. | Light emitting diode |
JP2003347601A (ja) | 2002-05-28 | 2003-12-05 | Matsushita Electric Works Ltd | 発光ダイオード照明装置 |
US7244965B2 (en) * | 2002-09-04 | 2007-07-17 | Cree Inc, | Power surface mount light emitting die package |
US7264378B2 (en) | 2002-09-04 | 2007-09-04 | Cree, Inc. | Power surface mount light emitting die package |
JP2006500767A (ja) | 2002-09-19 | 2006-01-05 | クリー インコーポレイテッド | 発光ダイオード及びその製造方法 |
JP4201167B2 (ja) * | 2002-09-26 | 2008-12-24 | シチズン電子株式会社 | 白色発光装置の製造方法 |
US6936857B2 (en) * | 2003-02-18 | 2005-08-30 | Gelcore, Llc | White light LED device |
US6876008B2 (en) * | 2003-07-31 | 2005-04-05 | Lumileds Lighting U.S., Llc | Mount for semiconductor light emitting device |
US7518158B2 (en) * | 2003-12-09 | 2009-04-14 | Cree, Inc. | Semiconductor light emitting devices and submounts |
US7553683B2 (en) * | 2004-06-09 | 2009-06-30 | Philips Lumiled Lighting Co., Llc | Method of forming pre-fabricated wavelength converting elements for semiconductor light emitting devices |
JP2006012868A (ja) * | 2004-06-22 | 2006-01-12 | Toshiba Corp | 半導体発光素子用パッケージおよびそれを用いた半導体発光装置 |
JP4862274B2 (ja) * | 2005-04-20 | 2012-01-25 | パナソニック電工株式会社 | 発光装置の製造方法及び該発光装置を用いた発光装置ユニットの製造方法 |
JP4980640B2 (ja) * | 2006-03-31 | 2012-07-18 | 三洋電機株式会社 | 照明装置 |
-
2004
- 2004-11-12 US US10/987,894 patent/US7518158B2/en active Active
- 2004-11-24 WO PCT/US2004/039619 patent/WO2005062393A2/en active Application Filing
- 2004-11-24 JP JP2006543856A patent/JP4870572B2/ja active Active
- 2004-11-24 CA CA002547832A patent/CA2547832A1/en not_active Abandoned
- 2004-11-24 EP EP04812190.9A patent/EP1692729B1/en active Active
- 2004-12-09 TW TW093138180A patent/TW200531312A/zh unknown
-
2006
- 2006-06-07 KR KR1020067011189A patent/KR101097694B1/ko active IP Right Grant
-
2009
- 2009-03-04 US US12/397,555 patent/US8138000B2/en active Active
-
2011
- 2011-07-04 JP JP2011147906A patent/JP2011193030A/ja active Pending
-
2012
- 2012-02-14 US US13/372,765 patent/US8847257B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5003357A (en) * | 1987-05-30 | 1991-03-26 | Samsung Semiconductor And Telecommunications Co. | Semiconductor light emitting device |
JPH11251644A (ja) * | 1998-02-27 | 1999-09-17 | Matsushita Electron Corp | 半導体発光装置 |
JPH11307818A (ja) * | 1998-04-24 | 1999-11-05 | Matsushita Electron Corp | フルカラー複合半導体発光素子及びこれを用いた発光装置 |
JPH11354836A (ja) * | 1998-06-05 | 1999-12-24 | Matsushita Electron Corp | フルカラー半導体発光装置 |
JP2001015815A (ja) * | 1999-04-28 | 2001-01-19 | Sanken Electric Co Ltd | 半導体発光装置 |
US20020063520A1 (en) * | 2000-11-29 | 2002-05-30 | Huei-Che Yu | Pre-formed fluorescent plate - LED device |
US6642550B1 (en) * | 2002-08-26 | 2003-11-04 | California Micro Devices | Silicon sub-mount capable of single wire bonding and of providing ESD protection for light emitting diode devices |
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JP2011193030A (ja) | 2011-09-29 |
CA2547832A1 (en) | 2005-07-07 |
TW200531312A (en) | 2005-09-16 |
WO2005062393A2 (en) | 2005-07-07 |
US20120138996A1 (en) | 2012-06-07 |
US8847257B2 (en) | 2014-09-30 |
EP1692729B1 (en) | 2020-02-12 |
US7518158B2 (en) | 2009-04-14 |
US20050121686A1 (en) | 2005-06-09 |
KR101097694B1 (ko) | 2011-12-22 |
KR20070041663A (ko) | 2007-04-19 |
US8138000B2 (en) | 2012-03-20 |
US20090159918A1 (en) | 2009-06-25 |
JP2007535130A (ja) | 2007-11-29 |
WO2005062393A3 (en) | 2006-01-05 |
EP1692729A2 (en) | 2006-08-23 |
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