JP4869551B2 - プロセス制御システム及びプロセス制御方法 - Google Patents
プロセス制御システム及びプロセス制御方法 Download PDFInfo
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- JP4869551B2 JP4869551B2 JP2003408666A JP2003408666A JP4869551B2 JP 4869551 B2 JP4869551 B2 JP 4869551B2 JP 2003408666 A JP2003408666 A JP 2003408666A JP 2003408666 A JP2003408666 A JP 2003408666A JP 4869551 B2 JP4869551 B2 JP 4869551B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003408666A JP4869551B2 (ja) | 2002-12-06 | 2003-12-08 | プロセス制御システム及びプロセス制御方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002354763 | 2002-12-06 | ||
| JP2002354763 | 2002-12-06 | ||
| JP2003408666A JP4869551B2 (ja) | 2002-12-06 | 2003-12-08 | プロセス制御システム及びプロセス制御方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006299490A Division JP2007088497A (ja) | 2002-12-06 | 2006-11-02 | プロセス制御システム、プロセス制御方法およびプロセス処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004207703A JP2004207703A (ja) | 2004-07-22 |
| JP2004207703A5 JP2004207703A5 (enExample) | 2006-12-21 |
| JP4869551B2 true JP4869551B2 (ja) | 2012-02-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003408666A Expired - Fee Related JP4869551B2 (ja) | 2002-12-06 | 2003-12-08 | プロセス制御システム及びプロセス制御方法 |
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| Country | Link |
|---|---|
| JP (1) | JP4869551B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11876021B2 (en) | 2019-05-23 | 2024-01-16 | Kabushiki Kaisha Toshiba | Test circuit and test method |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4678372B2 (ja) * | 2004-06-29 | 2011-04-27 | 株式会社ニコン | 管理方法及び管理システム、並びにプログラム |
| JP5242906B2 (ja) * | 2006-10-17 | 2013-07-24 | 東京エレクトロン株式会社 | 基板処理装置の制御装置、制御方法および制御プログラムを記憶した記憶媒体 |
| JP5165878B2 (ja) * | 2006-10-20 | 2013-03-21 | 東京エレクトロン株式会社 | 基板処理装置の制御装置、制御方法および制御プログラムを記憶した記憶媒体 |
| JP2009099901A (ja) * | 2007-10-19 | 2009-05-07 | Sharp Corp | 半導体製造システム及び半導体製造方法 |
| JP5065082B2 (ja) | 2008-02-25 | 2012-10-31 | 東京エレクトロン株式会社 | 基板の処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム |
| JP5429869B2 (ja) * | 2008-12-22 | 2014-02-26 | 株式会社 Ｎｇｒ | パターン検査装置および方法 |
| JP5688227B2 (ja) | 2010-02-26 | 2015-03-25 | 株式会社日立ハイテクノロジーズ | エッチング装置、制御シミュレータ、及び半導体装置製造方法 |
| US9523976B1 (en) | 2012-11-15 | 2016-12-20 | Cypress Semiconductor Corporation | Method and system for processing a semiconductor wafer using data associated with previously processed wafers |
| US10401279B2 (en) * | 2013-10-29 | 2019-09-03 | Kla-Tencor Corporation | Process-induced distortion prediction and feedforward and feedback correction of overlay errors |
| US11675374B2 (en) * | 2018-10-26 | 2023-06-13 | Illinois Tool Works Inc. | Mass flow controller with advanced zero trending diagnostics |
| JP2024137176A (ja) * | 2023-03-24 | 2024-10-07 | 株式会社Ｓｃｒｅｅｎホールディングス | 分析装置、分析方法および分析プログラム |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0729958A (ja) * | 1993-07-14 | 1995-01-31 | Hitachi Ltd | 半導体製造装置 |
| JPH10242127A (ja) * | 1997-02-26 | 1998-09-11 | Sony Corp | 有機系反射防止膜のプラズマエッチング方法 |
| DE19922936B4 (de) * | 1999-05-19 | 2004-04-29 | Infineon Technologies Ag | Anlage zur Bearbeitung von Wafern |
| JP3910324B2 (ja) * | 1999-10-26 | 2007-04-25 | ファブソリューション株式会社 | 半導体製造装置 |
| JP2001237173A (ja) * | 2000-02-24 | 2001-08-31 | Sony Corp | レジストパターンの形成方法および半導体装置の製造方法 |
| JP2002026106A (ja) * | 2000-07-07 | 2002-01-25 | Matsushita Electric Ind Co Ltd | 半導体装置製造施設 |
| JP2002107417A (ja) * | 2000-09-28 | 2002-04-10 | Miyazaki Oki Electric Co Ltd | 半導体集積回路の試験装置及びその管理方法 |
| JP2002110493A (ja) * | 2000-10-04 | 2002-04-12 | Matsushita Electric Ind Co Ltd | 加工プロセス工程の異常抽出方法及び装置 |
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2003
- 2003-12-08 JP JP2003408666A patent/JP4869551B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11876021B2 (en) | 2019-05-23 | 2024-01-16 | Kabushiki Kaisha Toshiba | Test circuit and test method |
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| Publication number | Publication date |
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| JP2004207703A (ja) | 2004-07-22 |
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