JP4868430B2 - リチャージ装置、インゴット引上げ装置、及びインゴット製造方法 - Google Patents

リチャージ装置、インゴット引上げ装置、及びインゴット製造方法 Download PDF

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Publication number
JP4868430B2
JP4868430B2 JP2003033055A JP2003033055A JP4868430B2 JP 4868430 B2 JP4868430 B2 JP 4868430B2 JP 2003033055 A JP2003033055 A JP 2003033055A JP 2003033055 A JP2003033055 A JP 2003033055A JP 4868430 B2 JP4868430 B2 JP 4868430B2
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hopper
shaft
ingot
hopper body
quartz
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Japanese (ja)
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JP2004244236A (ja
Inventor
英樹 田中
伸 松隈
崇浩 金原
政利 田村
泰三 宮本
雅富見 浦
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Sumco Techxiv Corp
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Sumco Techxiv Corp
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Priority to JP2003033055A priority Critical patent/JP4868430B2/ja
Priority to TW93102361A priority patent/TW200415266A/zh
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  • Crystals, And After-Treatments Of Crystals (AREA)
JP2003033055A 2003-02-12 2003-02-12 リチャージ装置、インゴット引上げ装置、及びインゴット製造方法 Expired - Lifetime JP4868430B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003033055A JP4868430B2 (ja) 2003-02-12 2003-02-12 リチャージ装置、インゴット引上げ装置、及びインゴット製造方法
TW93102361A TW200415266A (en) 2003-02-12 2004-02-03 Device for adding material, device for pulling up ingot, and method for producing ingot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003033055A JP4868430B2 (ja) 2003-02-12 2003-02-12 リチャージ装置、インゴット引上げ装置、及びインゴット製造方法

Related Child Applications (1)

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JP2008188384A Division JP4966267B2 (ja) 2008-07-22 2008-07-22 リチャージ装置、原料供給装置、及びインゴット引上げ装置

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JP2004244236A JP2004244236A (ja) 2004-09-02
JP4868430B2 true JP4868430B2 (ja) 2012-02-01

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JP2003033055A Expired - Lifetime JP4868430B2 (ja) 2003-02-12 2003-02-12 リチャージ装置、インゴット引上げ装置、及びインゴット製造方法

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JP (1) JP4868430B2 (enrdf_load_stackoverflow)
TW (1) TW200415266A (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4562139B2 (ja) * 2006-02-01 2010-10-13 コバレントマテリアル株式会社 単結晶引上装置及び原料シリコン充填方法
JP4563951B2 (ja) * 2006-03-17 2010-10-20 コバレントマテリアル株式会社 固形状原料のリチャージ装置
KR100800212B1 (ko) * 2006-08-02 2008-02-01 주식회사 실트론 단결정 성장 장치에 고체 원료를 공급하는 장치 및 방법
JP4931122B2 (ja) * 2006-09-29 2012-05-16 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 原料供給装置及び原料供給方法
JP4901405B2 (ja) * 2006-09-29 2012-03-21 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 原料供給装置
JP4699975B2 (ja) * 2006-09-29 2011-06-15 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 原料供給装置及び原料供給方法
JP4817379B2 (ja) * 2006-09-29 2011-11-16 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 原料供給装置
JP4699976B2 (ja) * 2006-09-29 2011-06-15 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 原料供給装置
KR100935083B1 (ko) * 2008-01-25 2009-12-31 주식회사 실트론 카본 오염을 방지할 수 있는 고체원료 공급장치 및 단결정 성장방법
JP5167942B2 (ja) * 2008-05-15 2013-03-21 株式会社Ｓｕｍｃｏ シリコン単結晶の製造方法
DE112009001202T5 (de) 2008-05-20 2011-06-22 Shin-Etsu Handotai Co., Ltd. Einkristallherstellungsvorrichtung
CN103849927A (zh) * 2012-11-30 2014-06-11 有研半导体材料股份有限公司 一种直拉法生长低电阻率单晶硅用掺杂装置及掺杂方法
KR101446718B1 (ko) * 2013-01-25 2014-10-06 주식회사 엘지실트론 단결정 잉곳 제조 장치
JP6028128B1 (ja) * 2015-03-25 2016-11-16 株式会社トクヤマ 投入装置、塊状シリコン原料の供給方法、シリコン単結晶製造装置およびシリコン単結晶の製造方法
JP6471700B2 (ja) * 2016-01-05 2019-02-20 株式会社Sumco リチャージ装置を用いたシリコン原料の融解方法
CN110067019A (zh) * 2019-06-03 2019-07-30 中国电子科技集团公司第二十六研究所 一种晶体生长连续自动加料装置及晶体连续生长系统
KR102474704B1 (ko) * 2021-02-19 2022-12-07 에스케이실트론 주식회사 단결정 성장 장치
KR102775318B1 (ko) 2024-04-09 2025-03-05 제이에이취엔지니어링주식회사 호퍼필터가 구성된 호퍼장치를 이용하여 반도체 단결정 성장장치에 실리콘을 충전하는 방법

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Publication number Publication date
TWI294471B (enrdf_load_stackoverflow) 2008-03-11
JP2004244236A (ja) 2004-09-02
TW200415266A (en) 2004-08-16

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