TW200415266A - Device for adding material, device for pulling up ingot, and method for producing ingot - Google Patents

Abstract

The present invention provides a device for adding material for a device for pulling up a single crystal, which improves over a conventional funnel problem where a wick material 50 is molten by the radiation heat from a molten solution 38 such that the wick material 50 is molten on a bottom cover and adheres thereto or forms a bridging due to thermal expansion without dropping. A conical bottom cover 36 is used to close the opening on the lower end of an essentially cylindrical funnel body 32 with quartz glass. A funnel 30 with an axis 34 is used to lower the bottom cover 36. The bottom cover 36 uses a bubble-containing quartz glass.

Description

200415266 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a crystal block pulling device caused by the Jeclasky method (CZ method), and particularly to an additional and input silicon material Feeding device. [Prior Art] A mirror wafer used as a substrate for manufacturing a semiconductor element is obtained by cutting a single crystal ingot into a thin plate member, and grinding and polishing the front and back surfaces 4 thereof. The osmium single crystal ingot can be produced by, for example, the Jeclasky method. Fig. 10 is a longitudinal cross-sectional view of a general block drawing device 110 that uses the Joklaski method, namely, 卞, 、, 日, 日, 、, 日, 日, 日, and 日. Hereinafter, a method for manufacturing a single crystal ingot by the single crystal ingot pulling device 11 will be briefly described using FIG. / The inside of the single crystal block pulling device 11 〇 is filled with an inert gas such as vacuum or argon. As shown in FIG. 10 (a), a block of polycrystalline silicon is put in a quartz crucible 120 in advance. Lighting material 50. Next, the quartz crucible 120 is heated by a heater 24 provided around the quartz crucible 120. Then, as shown in FIG. 10 (b), the lamp material 50 of polycrystalline silicon in the quartz crucible 12 is fused by the heat of the heater 24, and becomes the raw material melt 38. Next, in a state where the seed crystal 42 of crystalline silicon is hung on the seed shaft 16, it descends in the arrow direction, and is immersed in the raw material melt 38. Next, as the seed crystal axis is pulled below the seed crystal 42 to grow a single crystal, as shown in FIG. 10 (), a cylindrical single crystal block 1 can be obtained. Then, the grown single crystal crystal Block 1 is taken out of the furnace.

200415266 V. Description of the invention (2), the increase caused by the heater must be stopped,

Inside the pulling device 110, a new quartz crucible-cooled single crystal ingot is re-injected. Generally, in the quartz crucible 120: When the polycrystalline silicon 38 is cooled below the melting point of the silicon, the quartz crucible 1 20 is damaged by the expansion of the raw material molten liquid, so only the molten liquid can be solidified. At that time, i single crystal ingots are manufactured, so that the cost is reduced by 1 quartz hanging pot after the completion of the manufacturing process of the single crystal ingots. Therefore, it is proposed that the raw materials in the stone crucible 120 be melted. The solidification of the liquid 38 ;; breaks down to prevent the polycrystalline stone that is the raw material for the manufacture of a single crystal block. Shou '& line down-crystalline silicon, once again bow 丨 single crystalline monolithic crystalline ingots ^ ^ dazzling multi-junction as a re-input method of polycrystalline silicon used in this raw material. For example, Japanese Unexamined Patent Publication No. 57-9589 1 is cited. In addition, the feeding device is similar to the builder series, for example, Japanese Unexamined Patent Publication No. 6-88 ', which has a doping device. b 5 uses the supplementary device or doping funnel as shown in the bulletin to consider the impurity contamination of single crystal impurities = quartz is selected as the material in the book, and the transparent one is used for thermal properties and internal conditions, To make. Make enough confirmation funnel

[Summary of the Invention] [Problems to be Solved by the Invention] However, the bottom cover 136 shown in FIG. To fill the lamp material 50 and add and cast) The next transparent glass is easy to transmit heat, so with the guarantee of 7 =

200415266 V. Description of the invention (3) The interval becomes longer and the inside of the funnel 1 3 0 becomes high temperature due to the radiant heat from the melting solution 38. Therefore, there is a problem that the lamp material 50 is not easily dropped when the lamp materials 50 are fixed or the lamp material 50 and the quartz are fixed. In addition, the feed device shown in Japanese Patent Laid-Open No. 57-9589 1 has a complicated shape, and uses heat-resistant materials such as molybdenum and stainless steel. These metal materials become molten liquids and are used immediately. Therefore, they may be contaminated. = Refining liquid. In addition, when a hinge or the like is made of metal parts, lubricating cannot be performed in an atmosphere of Θ as described above. Therefore, the consumption of the sintered or sliding parts becomes a problem. The total weight of the light-emitting semiconductor material and the funnel itself is added to the joint of the bottom cover. The raw lamp materials filled in the tube body make the joint part ΐ support Ξ ί 体 body, because of Λ, the weight of the bottom cover and the front end of the tube body is almost all. Under heavy load, the system is made of quartz glass, and the bottom is made of molybdenum plate. Therefore, in the state of large damage, the contact between the cylinder and the quartz glass | the king becomes larger. In addition, Japan also considers the doping device shown in this Japanese Patent Publication No. 6-88865 as an additional material. However, it is filled with a lamp-shaped semiconductor raw material for large-scale use, and it is used for the British bottom cover and the substrate. In the state of being suspended, the entire weight becomes the joint portion of the peripheral part of the upper side of the stone, and then it is applied to the lower end of the Si? Tube of the quartz bottom cover. In the state of increasing, central? The contact between the glasses is caused by & the weight of the load is made of glass bottom i, and the possibility of damage to the field becomes greater. In addition, in order to suspend the quartz, tungsten wires are used, but the lamp is filled in a conical tube.

Page 8 200415266

It is the cause of metal pollution when it comes into contact with lighting materials. In addition, after the tapered tube is hung on the ring plate due to the friction between the tungsten wire and the lamp, the bottom cover will not be opened even if the guide shaft is lowered continuously. The invention of this application is to solve the foregoing problems, and the i-th objective is to provide a method that can reduce the temperature of the lamp, increase the melting of the lamp, attach the lamp to the bottom cover, or form a bridge due to thermal expansion. Refilling device to prevent falling. In addition, the invention of the present application is a refilling device for loading a large-sized lamp-shaped semiconductor bottom cover for increasing the size and loading of a crystal block. In addition, the invention section of this application does not use a metal material and a lamp material device. The second objective is to provide an additional system that can increase the weight of the raw material and the weight of the additional material so that the weight of the cylinder is not applied. The third objective is to provide an additional system that does not directly contact the metal material at high temperatures. Simple material device. In addition, the fourth item of the invention of the present application is added without a sliding part between the metals. [Means to solve the problem] In order to achieve the aforementioned purpose, the present application ^ The feeding device has a roughly cylindrical shape. The funnel book 7 = f 丨, the bottom cover for opening and closing the bottom opening of the invention and the first two: the funnel body shaft, which is characterized in that it has a body provided on the shaft and suspended by L & 盍. Brake. To suspend the aforementioned funnel. In addition, this

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200415266 V. Description of the invention (5) The material of the slightly funnel body, the bottom cover that closes the above, and the bottom cover that opens the bottom opening, is characterized by using 'characterized in that: In addition, in this application, 4 ^ Quartz glass containing air bubbles. The funnel device of the invention of the slightly cylindrical funnel Ben's 3 has the following: 4. The bottom cover of τ A mountain sun-closed which is a gift from Keshu Funnel, and the material of the bottom cover opened by the aforementioned opening. , = 7 The shaft to be suspended is characterized in that: In addition, in this application, Ϊ :,: Quartz with an outer line transmittance of 40% to 60%. Slightly cylindrical funnel body: The supplementary material of the f4 invention has a bottom cover and a cover; the description;] J The opening of the lower end of the funnel body is to open the funnel body, = 2 below the shaft ' It is characterized by: in the tube. /. Quartz with a roughly cylindrical shape that resembles the aforementioned shaft. In addition, the slightly cylindrical funnel body, the Yu, +, and the counter-bamboo display of the fifth invention of the present application include: The bottom cover is opened; ^ 2 The opening at the lower end is opened the funnel body, and has a rotating hanging shaft. It is characterized in that, in addition, the sixth invention of the present application is a cylindrical cylindrical funnel coat of the invention. The bottom cover of the cone with the opening and closing of the mouth of the stone: the front: the bottom [=: the bottom of the body opened at a predetermined position ^ brake crying body 2 hanging the funnel body on the upper side of it has: covering the upper opening The characteristics of the top extension are: the through hole used in the aforementioned funnel system, the shaft system has a plate; the shaft of the top plate is inserted through the middle of the suspension rod and is suspended 4: the length of the suspension rod The second brake to fix the funnel body,

V. Description of the invention (6) ______ The connector of the quartz rod and the aforementioned quartz glass rod formed integrally with the bottom cover of the rib. In addition, the 7th round body, sleeve, and bottom cover of the present application are characterized in that the feeding device is: a glass cylinder with a generally cylindrical shape leaking. Description The funnel system has: a plate, a shaft penetrating through the aforementioned top plate, an item “f M” of the upper part of the aforementioned cylinder, a front actuator, a front shell through hole, a shaft, and a hanging rod arranged on the forefoot. Intermediate and hanging ', /, there is a hanging rod, used to solidify :: the bottom cover is integrally formed with the stone ;: = body, brake, the connector of the quartz broken rod, the rod, the connection The aforementioned hanging rod and glass rod and the aforementioned connector are: The Keshu hanging rod and the aforementioned quartz are composed of a quartz tube with a height of approximately 51 and the same shape containing bubbles; the aforementioned bottom * In addition, this application; The supplementary material described in the item-any of the conical shapes of the 1st to 7th inventions has air on the bottom surface ^ characterized by: the aforementioned bottom cover is hollow in addition to 'this application 〇; the raw material for storing crystal blocks is melted ^ crystal blocks The pulling device is provided with: a heater, containing the aforementioned piler and afterburner: heating the aforementioned material The addition of the raw material of the melt is used to add the raw material, ... ,, °, to, and to add the aforementioned cylindrical leakage; the main body U 5 is that the aforementioned additional material is placed on the bottom cover of the switch, The material of the bottom end of the funnel body is described, using the package 4 :: = :: hanging shaft; in the above bottom 1 In addition, this application is: Shiyang glass. The raw material storing the crystal block is melted ^ = 丨 〇 invention The crystal block pulling device has:

7054-6132-PF (N2); Ahddub.pld

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ZUUH-1 JZOO V. Description of the invention (?) Graphite scourge, encirclement A ^ Du Xi a & the description of the graphite crucible plus weeping " Vice room :: It is set in the upper part of the room through the interrogation valve :: Guangna The auxiliary chamber i, which can be closed in each of the aforementioned aspects, is provided; The funnel movement set on the aforementioned seed shaft :: advance: support: seed wheel, and hanging 4 body, shaft and bottom cover; front :; especially: the aforementioned funnel is a cylinder with a funnel, a glass and a glass cylinder The funnel system has: the general cylindrical shaft of slate is generally used for shaft insertion; the aforementioned hidden part; 1 plate, which is arranged on the top and is sufficient to place the aforementioned funnel main hole and a in the description tube The outer periphery of the body has the following: the first brake that can be hung in the aforementioned space; the aforementioned hoop shaft: the hung suspension in jr Feng, ... determined in 7 of the two openings in the hanging rod; » Brother 2 brakes, and the foregoing mochi is roughly cylindrical :: ;;; and ;; The two glass rods and the foregoing connection are made of: Quartz broken glass. , | A-1 is composed of high-thermal-insulation ancient d 2 containing air bubbles. 'Cream dream making method of the 11th invention of the present application, " There is a scourge, plus use of the raw material dazzling melt solution containing the crystal block. _A ;: Room containing the crucible and heater, impregnated by the name 't / night's melt and pull seed crystals to 2 = raw material dazzle: pull device and used to add the aforementioned block i: crystal block :: supply as many blocks as possible, by adding the above-mentioned drawing device through the above-mentioned drawing material 2 = 1 original 2 xuan melt solution, said that the original solution is immersed Break the aforementioned knot

7054-6132-PF (N2); Ahddub.ptd Page 2 200415266 V. At least part of the description of the invention (8), through the aforementioned funnel, the polycrystalline stone in the crucible will be formed. [Embodiment] Hereinafter, an embodiment of the present invention will be described using Figs. 1 to 8. However, the following is merely an embodiment of the present invention, and may be appropriately changed in accordance with the technical common sense of a person skilled in the art. The technical idea of the present invention is not limited to these specific examples. Here, FIG. 1 is a longitudinal cross-sectional view of the Shixi single crystal pulling device using the Jecolaski method according to the embodiment of the present invention, and FIG. 2 (a) is a silicon sheet in section A _a of FIG. 1. A cross-sectional view of the crystal pulling device 10, FIG. 2 (b) is a cross-sectional view of the single crystal pulling device 10 in the T \ section of FIG. 1, and FIG. 3 is a Shixi single crystal drawing of an additional material process Longitudinal section view of device 10 'Figure 4 is a Shi Xidan, crystal pulling device that is put into the lamp 50 in the additional button process ^ Li 枓 Figure 5 is an empty funnel 3Gd in the additional material process : 丨 Sectional view of the two 10, Figure 6 is a single crystal: 2: Two = seed axis 16 hanging the seed crystal 42 can pull the clothes in the state of the block! The pulling device 10: = bow is early, and the crystal is melted and put into the quartz crucible 2. The front angle of the lamp: Figure 8: A longitudinal sectional view of the device 10. Bu Zhisi's early crystal pulling bow 丨 First, the silicon single crystal pulling device J 0 will be explained. Then, w% ^ is a normal body structure and is introduced in a single step.-Taxi — Detailed description of each clothing. Just as m is not, the silicon single crystal of the original form is pulled back. Yi 1 υ is mainly composed of surrounding stones.

7054-6132-PF (N2); Ahddub.ptd Page 13 200415266 V. Description of the invention (9) British hanging disaster 20 and graphite hanging disaster 22 and heater 24, room 12, μ ^ = placed raw materials The pull of the single crystal block is composed of seed crystals or the seed shaft 16 of the funnel 30. Baixian will explain the room 12. No Α㈤ ， 一 = The chamber 12 is in a state where the rotating shaft does not start from the center of its bottom and faces downward: vertical \ i2 «= a support shaft 28 that can move up and down freely. In support of this, earth-end bowl-shaped graphite hangs on 22, and within graphite hang-on 22, Λ 阳 hangs on 20. Because it becomes quartz hanging 20 and graphite hanging = 九 In order to prevent direct bonding in the melting of raw materials ... T is hard, so it is best to use quartz_2Q. Another ?: lowered to high temperature, at the same time, it has the so-called brittle and easy to break the shellfish. Therefore, the graphite hangs around the surrounding 22. 24, and the surrounding is around the heater 24, by this Heater 2 ... The lamp material of polycrystalline stone in the 20 is 50. Around the heating is 24, the cylinder is arranged in a concentric circle in the chamber 12. The thermal insulation material 26 is to prevent the direct heat from the heater. Ground light shot at 'room close η ~, Γ;% 王 u ~ 工部, also connected through the gate valve 18

ΐ 4. The so-called chamber 12 and the sub-chamber 14 can be connected or interrupted by means of 18. On the other hand, it is not shown in the figure.] The upper end of the field chamber 14 is blocked by the top plate. As shown in Figure 2. Instead of the auxiliary chamber cover 40 provided on the front surface of the auxiliary chamber 14, the auxiliary chamber 盍 40 can be opened and pulled to form a single crystal. The seed crystal shaft 16 can be mounted. In addition, as shown in Figure 2: Take =

200415266 Fifth, the inner peripheral surface of the invention description (ίο) is provided with a flange-shaped brake 4 4 which projects toward the center of the brake 6 4 to be described later. In the upper part of Tian j to 14, a seed shaft pulling device without a figure is provided. The seed shaft pulling device can hold the seed shaft 丨 6 freely up and down, and the seed shaft 16 is suspended by the top plate along the central axis of the auxiliary chamber 丨 4. At the lower end of the seed shaft 16 during the single crystal ingot drawing process, the seed crystal is suspended for the additional material process, and the funnel 30 is lowered. . Next, when adding materials, the structure of the funnel 30 will be described with reference to Fig. I. This embodiment is formed by a funnel body 32, a shaft 34, and an & cover 36. The heart bucket system is mainly formed by the funnel body 32 as shown in Fig. 1 into a small diameter and roughly cylindrical shape. The upper cylindrical body 5 2 is connected to the lower cylindrical body 54 as shown below. In the upper cylinder _ = 'Slightly cylindrical shape 56. On the other hand, a flange is provided at the upper end of the lower cylinder 54 to prevent the & Two systems. In addition, it is possible to confirm the filling in the funnel 30 to form the lower cylinder body 54 by using the transparent: Generation factor A ′ as a stone. … Say silicon light 5. Whether or not all of them fall on the lower end of the peripheral portion of the flange 56 are connected by a shape-shaped and cross-shaped connector 60. The connector core is composed of two members of a roughly cylindrical shape. The clamping and fixing protrusions are cut in the surrounding direction: a surface, and 4 screw holes are provided. The screw holes are fixed to the brake of the connector 60. 64. The brake system is made by the susceptor of 4 wide mouths. As shown in Fig. 1 and Fig. 9, β-% 44. Figure 2 (a), the flange 56, _ U 弋 2 of the rotating system 7054-6l32-PF (N2); Ahddub. Ptd page 15 200415266 5. Description of the invention (11) The 62 key The shaped rotary brake 62 is fixed to the flange 56 at the fundamental portion. On the other hand, a roller ⑽a made of a fluororesin such as polytetrafluoroethylene is rotatably provided at the front end of the rotary brake 62. The drum 6 2 a is rotatable around a horizontal rotation axis. Therefore, the funnel 30 can slide up and down while the roller 62a is in contact with the inner wall surface of the sub chamber 14. The θk-like pattern is provided with the rotary brake 62 and the drum 62a, and even if the lamp material 5 is filled while the funnel 3 is hung, the funnel 3 is not inadvertently rotated. In addition, when the lamp material 50 is dropped, It will not inadvertently rotate the funnel = 'so' can prevent contact and damage to the furnace product and the inside of the funnel body 32 constituted like this, as shown in Fig. 1, insert, 34. The shaft 34 is mainly composed of a brake 70, a suspension rod 72, and a coupler. Shi Yang & 78 is composed of a quartz glass 76 integrally formed on the bottom cover 36 = the seed shaft 16. A penetrating hole 68 is inserted through the top plate 66 of the upper cylinder 52, and the suspension rod 72 is inserted through the penetrating hole 68. In the middle of the suspension rod 72, the shape of the fixed cylinder is: genus = = device = brake 70. The outer diameter is larger than that of the through hole 68 :. Therefore, the funnel body 32 is stopped by the brake 70.仏 can be constructed in this way, by braking, all ". In addition, the suspension rod 72 is the main structure of the main body, when the brake is 70, and the funnel is originally 32, the bottom cover is removed. Page 16 054-6132-PF (N2); Ahddub.ptd 200415266 V. Description of the invention (12) The amount of clearance between the cylinders 54 is not applied to the bottom cover 36 through the upper end of the connector 74 glass rod 7 6. The contiguous stone central tube 78 is covered with metal contaminated by the stone central tube 78 and covered with the material 50. On the other hand, it is formed on the bottom cover 36, and the bottom cover 36 has a conical inner diameter. The bottom cover 36 is made of English glass. As shown in FIG. 2 (b), the bottom cover 12 and the sub-room 14 are the same. In addition, in the actual bottom cover 36, however, other components of the glass that can be lowered, such as British glass, which can be 40% to 70% lower, can also prevent the inner wall of the hollow portion of the lamp at 50 ° C. At the same time, it is best to adjust the peripheral part of Nagato at the same time. X makes the funnel body 32 so heavy that the hanging rod 7 2 ^ τ is arranged, and the upper part & 1 end is arranged, which is connected to a quartz glass cover metal hanging cymbal, the diameter of the cylindrical cover metal part > to prevent 2: Quartz glass rod 76. As for the lamp that becomes the raw material silicon, as described above, the stone test cover 36 is located at the bottom of the glass rod 76, and the bottom of the glass rod 76 is straight. At the bottom, the inner part of the stone ΐ36, which has a high orbit-breaking property, is included by the inclusion of air ΐ ^ larger than the lower tube 54 # Q β ζ package, and the internal system of 盍 36 is set to 4 air holes 80. ‘,,’? 5. Inside the bottom 而 36 ′ and inside the bottom cover 36, the air hole 80 keeps the air pressure of the Α cavity and keeps the shape. It is made of quartz glass containing 5 so that it is infrared penetrating. It is more transparent than using. Adding lower than transparent quartz, glass, non-transparent quartz, etc. also makes infrared transmission material: In addition, it can be shot by colored stones from the cloth shown in Figure 3 can have a good heat resistance rise Radiated heat of melt 38, part. However, the ^ plate attached to the bottom cover 36 is made of quartz glass, which contains air bubbles, and contaminates the raw material.

〇54-6132-PF (N2); Ahddub.ptd $ 17 200415266 5. Description of the invention (13) Composition. In the silicon soap crystal pulling device 10 of the present invention, the funnel body 32, the shaft 34, and the lamp material 50 are positioned above the bottom cover 36, and the radiant heat from the melt 38 is irradiated from the bottom. In addition, the infrared transmittance of non-transparent quartz is ~ 60%, which is extremely lower than 90% of transparent quartz. So can m come from? The temperature of the lamp material caused by the radiant heat of the melt 38. When the conventional silicon single crystal pulling device is used, a bridge is formed when it is added, and it cannot be dropped. As a result, if the crystal pulling device 10 is used, it is jealous. : ^ If the frequency 1 of Shixi Danjieshan Lighting Material 5G of the present invention is mistaken, it is enough to suppress the heating of the lighting material 5G, and it is particularly changed to "" 二 卜 J as shown in Figure 4, by using thermal expansion to make the filling Yu: Bucket 3. The inner light material 50 is shaped like this, and the quartz tube 78 is not lowered, and the bottom 36 is not lowered. It is suspended from the bottom like quartz glass: It becomes no contact with the metal part. Therefore, 'light material 50 series and then, using Figure 1 and Figure 3 or m 7 and 4 τ 丄 silicon single crystal pull bow 丨 the movement of the device 10 ^ as described above The composition of the past has been explained by everyone. Since there was no 'at the beginning of the watch, Shi Xidan 纟 士 18 and the state of the auxiliary chamber cover 40 closed. Every day pulls $ 10 to become an open gate valve?' After replacing the chamber 12 with an inert gas, the inside of 4 where the inert gas is still flowing is performed by the At low pressure. Then, ―2 ″ is heated and the mating is put into the quartz hanging snail in advance.

-6132-PF (N2); Ahddub.ptd 苐 Page 18 200415266 V. Description of the invention (14) 20 The polycrystalline silicon lamp 50 inside the lamp, which is used as the raw material melt 38. Then, close the gate valve 18, cut off the palace] 9 ^, L. to 12 and the auxiliary room 14. This keeps the inert atmosphere within 12 to prevent further payment, so that the auxiliary chamber u returns to the state of oxidation of Chang Hyun melt 38 η Gang "-Μ °. Then, open the auxiliary chamber cover 40, as Figure 6 shows, below the seed axis 丨 6. H ^ ^, j flavor, hanging seed crystal 4 2. Under the Japanese seed axis 16 under the book seed έ 士 曰 0Η 0Β ^ Full vice room The interior of Η. Next, the two VPs, the atmosphere, fill the Η. In this state, the seed: crystal 4 ::, 18, and the connecting chamber 12 and the auxiliary chamber ^ L, 口, 口, Japanese, and Japanese are in the melt 38. It is directly above, so hunting is performed by the radiant heat of the melt 38. Then, the driving device of the seeding shaft 16 is driven to hang down on the seeding shaft 结晶: the seed crystal 42 of 钿, and the seed At least a part of the crystal osmium, test = melt 38. When the seed crystal 42 is immersed in the raw material melt 38, the monocrystalline stone is gradually grown below the cymbal. The seed crystal can be pulled by following the predetermined speed. 42 to facilitate the drawing of the single crystal ingot j with the required diameter and length. Then, the single crystal ingot 1 ascending to the subchamber 1 to 4. As shown in Fig. 7, after the single crystal ingot 1 completely rises to the sub-chamber 丨 4, the shutters "i" and "sub-chamber i 4" are closed. As a result, the atmosphere in the chamber i 2 is maintained, and the oxidation of the raw material melt 38 is prevented, and the atmosphere in the chamber 14 is returned to normal pressure. Then, open the auxiliary chamber cover 40, # 出 单 结 说: =

1. With the above, the manufacturing process of the single crystal ingot is completed. A Next, the additional material process will be described. After the lamp 50, which becomes crystalline silicon, is filled in the funnel 30, the auxiliary chamber cover 40 is opened, and the leak is:

200415266 V. Description of the invention (15) 30 was suspended to the seed axis 16. In this state, the funnel body 32 is suspended by the brake 70, but there is no gap between the bottom cover 36 and the funnel body 32. Next, the sub-chamber cover 40 is closed to seal the sub-chamber 14. Then, the auxiliary chamber 14 is depressurized, and the inside of the auxiliary chamber 14 is filled with an inert atmosphere. Next, the space 18 is opened, and the communication room 12 and the sub-room 14 are opened. In this state, the funnel 3 is suspended from the seed shaft 16 by being lowered together with the seed shaft 16 by lowering the seed shaft i 6. When the funnel 30 is lowered, as shown in FIG. 3, the brake 64 is in contact with the brake 44. As shown in FIG. When the seed shaft 16 is lowered from this state,

Cover 36. Then, a gap 82 can be formed between the funnel body 32 and the bottom cover 36. Starting from this gap 82, the lamp material 50 of polycrystalline silicon falls into the quartz crucible 20 due to its weight. The shape 32 shown in the figure is raised when it is mounted on the quartz. At 36, the funnel is under the leakage blocking chamber 12, and at 40, so that the above is filled in the crucible 20, the shaft 34, and the state, the body 32 is completed, the bucket 30 is completed, and the auxiliary chamber is stopped by the auxiliary chamber 1 4 beams added inside after 'rise seed shaft 16 bottom cover 36'. Ascending on the shaft 34, the seed crystal and the seed shaft 16 are raised as the brake 70 comes into contact with the tragedy, and the seeding shaft 16 is raised to the auxiliary chamber 14 as a whole. Thereby, the oxidized state of the chamber melt solution 38 is returned to normal pressure. Then prepare the process. ^ Crystallization seconds. Therefore, after a certain distance from the top plate 6 6 axis 1 6 hours, in the internal and maintaining state, the lamp 50 taken out to cast, and the seed axis 1 6 away from the seed shaft 1 6 to become Figure 5 and hung the funnel this' axis 3 4. The bottom cover rises. Close the gate valve 18 and open the auxiliary chamber cover funnel 30 in an inert atmosphere. By

200415266 V. Description of the invention (16) Material system: The above-mentioned single crystal ingot drawing process and the addition of clothes are carried out without changing the quartz crucible 20. Here, in this embodiment, the bottom cover 36 It can also make the bottom cover 36, the inside of which is not hollow, but conical, and swollen. In addition, in the present embodiment, the funnel body 32 is made roughly round. (Yiyi therefore, the bottom cover 36 has a conical shape, but, The bottom cover 36 = Douya: limited to the shape of the cone, if it can seal the funnel body M 3; :: = can be any shape. For example, in the state of the funnel body pyramid shape, the bottom cover 36 In addition, in the present embodiment, the gate valve 18 and the gate 44 are individually formed, and the gate valve 8 and the gate 44 can also be formed integrally. In addition, in this embodiment, in order to After the single crystal ingot is pulled, the σ feedstock is used. Therefore, a formal refilling device is used. However, the formal refilling is used. = ^ The application is not limited to the replenishment. It can also be used for a large number of refills. Tied to The single crystal ingot is pulled in the following order: ^ The single crystal ingot can be pulled to achieve the original price reduction for the purpose; evening and after the lamp of polycrystalline silicon is added in the melting stage, the additional investment is 50%. The crystalline silicon lamp 50 is melted 38 in a quartz crucible. The original #melt means that the polycrystalline silicon lamp 50 shown in FIG. 1 is used as the material system. Therefore, after melting, The gap part 8 between 50 and 50 of each lamp material is embedded, p. 21 7054-6132-PF (N2); Ahddub.ptd 200415266 V. Description of the invention (17) As shown in Fig. 8 'Lower the melt 3 8 Therefore, after the refining, the polycrystalline silicon can be added to the quartz crucible 20 by adding the polycrystalline silicon lamp 50 to the quartz crucible 20 by a formal charging device. You can increase the liquid level of Hyun Melt Solution 38 by adding additional lighting materials 50 as shown in Figure 9. In the quartz crucible 20, you can add a large amount of raw material stone Xi. You can use this to pull longer orders The crystal block can reduce the original price. In addition, regarding the material and size of the crystal block, when the present invention is implemented, Any limitation, of course, now being fabricated diameter and length of the silicon,

Single crystal ingots such as GaAs, GaP, InP, etc. are applicable to the present invention even for crystal ingots of very large diameters and lengths that may be manufactured in the future. ^ As described above, the present invention is not limited to the aforementioned embodiments. As for the shape, material, and other structures of the bottom cover, various applications and changes can be added within the scope of the gist of the invention. [Implementation materials] The effects between the state of performing additional feeding using the conventional funnel and the state of performing additional feeding using the funnel of the present invention will be specifically described below using Table 1. [Table 1] Quartz type Heater power (kw) Melt_h standby time (sec) Hanging rate of lamp (not transparent 110 120 20 115 110 40 115 120 50 120 100 80 non-transparent 115 120 0 Ϊ20 100 5

7054.6132-PF (N2); Ahddub.ptd Page 22 200415266 V. Description of the invention (18) Table 1 shows that when using a funnel to add additional lighting materials, the lighting materials are melted and attached to the bottom cover, or The proportion of bridging that does not fall due to thermal expansion. As shown in Table 1, the state of using the funnel of the present invention in which the bottom cover is made of non-transparent quartz is significantly improved compared with the state of using the conventional funnel in which the bottom cover is made of transparent quartz. Hanging rate of lighting materials when materials are expected. Here, the so-called “lamp hanging rate” refers to the ratio of the amount of offsets that occur with respect to the total number of times the lamp is hung.

Next, "technology ideas and effects outside the scope of patent application which can be grasped by the aforementioned embodiment of the present invention are described together. In the funnel having the shaft, the funnel body, and the bottom cover, the bottom cover is made of a substance whose infrared transmittance is lower than that of transparent quartz. In this way, the bottom cover can be formed by using a substance with a low infrared transmittance in order to suppress the temperature rise of the lamp material caused by the radiant heat from the melting solution, and to suppress the melting and attachment of the lamp material to the bottom cover or Forms bridging and does not fall due to thermal expansion. On the funnel having the shaft, the funnel body and the bottom cover, the funnel body is hung by the braking action fixed to the shaft. Like this, you can stop the funnel body by using brake = so that the weight of the funnel body is not loaded on

The peripheral part of 5 prevents damage to the lower end of the funnel body made of quartz and the peripheral part of the puppet. -The shaft has a shaft: a funnel of the funnel body and the bottom cover, and a central clothing officer covering the shaft. In this way, the shaft can be covered with a quartz tube to prevent contamination of the lamp.

7054-6132.PF (N2); Ahddub.ptd

200415266

V. Description of the invention (19) A funnel that prevents the funnel from rotating is provided on the funnel having a shaft, a funnel body and a bottom cover. As described above, since the funnel has a rotation stopper, even if the funnel is loaded while the funnel is suspended in the auxiliary chamber, the funnel is not inadvertently rotated. In addition, the funnel is not inadvertently rotated when the lamp is dropped, so it is possible to prevent contact and damage to the product or chamber in the furnace due to vibration and the like.

A funnel having a shaft, a funnel body and a bottom cover is provided with a rotatable roller at the front end of the rotary brake. In this manner, a rotatable roller can be provided at the front end of the rotary brake so that the funnel can slide up and down in the subchamber. [Effect of the invention] If the silicon single crystal pulling device of the present invention is used, the heating of the lamp material due to the radiant heat from the molten liquid can be suppressed when the material is added, so the lamp material can be smoothly input to the Quartz crucible.

That is, in the silicon single crystal pulling device of the present invention, the funnel body, the shaft and the lamp material are positioned above the bottom cover, and the radiant heat from the molten liquid is exposed from the bottom. In addition, the infrared transmittance of non-transparent quartz is 40% ~ 60%, which is extremely lower than that of transparent quartz by 90%. Therefore, the temperature rise of the lamp due to the radiant heat from the melt can be reduced. Therefore, when the conventional silicon single crystal pulling device is used, when the material is added, the light material is melted and attached to the bottom cover, or the bridge is formed due to thermal expansion, and it cannot be dropped. The invention of the silicon single crystal pulling device 'can suppress the heating of the lamp material and improve the lamp material.

7054-6132-PF (N2); Ahddub.ptd Page 24 200415266 V. Description of the invention (20) Hang up the frequency. In addition, in recent years, semiconductor wafers with diameters exceeding 300 mm and 300 mm are becoming mainstream. With this, the required diameter of single crystal ingots has also become larger. Relative to the increase in the amount of the single crystal and the increase in the weight of the additional material, it is possible to load a large amount of lamp-shaped semiconductor raw materials. Therefore, the silicon single crystal pulling device of the present invention is borrowed. Structure supporting weight by shaft. That is, in the silicon single crystal pulling device of the present invention, the entire weight of the funnel body is supported by the brake. Therefore, the weight of the funnel body is not applied to the peripheral portion of the bottom cover. Therefore, the possibility of breakage can be reduced.

7054-6132-PF (N2); Ahddub.ptd Page 25 200415266 Brief Description of Drawings Figure 1 is a longitudinal sectional view of a silicon single crystal pulling device according to an embodiment of the present invention. Fig. 2 (a) is a cross-sectional view of the silicon single crystal pulling device of section A-A in Fig. 1; Fig. 2 (b) is a cross-sectional view of the silicon single crystal drawing device of section B-B in Fig. 1. Fig. 3 is a longitudinal sectional view of a silicon single crystal pulling device for an additional material manufacturing process. Fig. 4 is a longitudinal sectional view of a silicon single crystal pulling device in the input of a lamp material in an additional material process. Fig. 5 is a longitudinal cross-sectional view of a silicon single crystal pulling device in a funnel that draws and becomes empty during an additional material manufacturing process. Fig. 6 is a longitudinal cross-sectional view of a silicon single crystal pulling device in a state where a single crystal block is pulled and a seed crystal is suspended under a seed axis. Fig. 7 is a longitudinal sectional view of a silicon single crystal pulling device in a state where a single crystal block is pulled while a single crystal block is being pulled. Fig. 8 is a longitudinal sectional view of a silicon single crystal pulling device in a state where the lamp material is put into a quartz crucible after melting. Fig. 9 is a diagram after adding a polycrystalline silicon lamp material to a quartz crucible. Figs. 10 (a) to 10 (c) are longitudinal sectional views of a general single-junction ingot pulling device using the Jeclaschi method. Fig. 11 is a longitudinal sectional view of a conventional silicon single-junction crystal pulling device using a transparent quartz in a hanging funnel. 【Symbol Description】

7054-6132-PF (N2); Ahddub.ptd Page 26 200415266 The diagram briefly illustrates 1 ~ early crystal block, 10 ~ silicon single crystal pull 12-'chamber; 14 ~ subchamber; 16, i seed axis, 18 ~ gate valve; 20-i quartz crucible; 22 ~ graphite crucible; 24,-heater; 26 ~ thermal insulation material; 28-^ support shaft; 30 ~ funnel; 32-funnel body; 34 ~ shaft; 36, i bottom Cover; 38 ~ smelting solution; 40-i auxiliary chamber cover; 42 ~ seed crystals, 44-'gate; 50 ~ light materials; 52-◊ upper cylinder; 54 ~ lower cylinder; 56, i flange; 58 ~ Flange, 60 ~ connector; 62 ~ rotary brake 62a ~ roller; 6 4 ~ brake; 6 6 ~ top plate; 68 ~ through hole; 70 ~ brake; 72 ~ hanging rod; 7 4 ~ connector; 76 ~ Quartz glass rod 78, ☆ Quartz tube; 8 0 ~ Air hole; 82--gap; 8 4 ~ gap section; 110 ~ silicon single crystal pulling device; 12 0 ~ quartz crucible 136 ~ bottom cover. ring

7054-6132-PF (N2); Ahddub.ptd Page 27

Claims (1)

200415266 6. The scope of patent application 'has: a generally cylindrical funnel body, a bottom cover for opening and closing the mouth, and the aforementioned bottom 1. A shaft opened under the body of an additional material device, which is: placed on the aforementioned shaft and used for The brake which suspends the funnel body is suspended from the cover of the funnel. 2. The above-mentioned leaky cover is given in English. 4. The above-mentioned leak cover is placed on the quartz. 5. A bucket-type suspending feature. The aforementioned bucket-type suspending feature. The shaft opened at the bottom of the supplementary device body is: The shaft opened at the bottom of the material of the supplementary device body is: The shaft of the bottom cover is made of the material at the bottom of the supplemental device body: : The cylindrical funnel body, the bottom cover for opening and closing the mouth, and the bottom are made of quartz glass containing bubbles. It has: a roughly cylindrical funnel body, a bottom cover that opens and closes the mouth, and a stone that uses the infrared transmittance of 40% to 60% of the aforementioned bottom. It has: a roughly cylindrical funnel body that closes the mouth. A bottom cover for the switch and a supplementary device having a substantially cylindrical shape covering the above-mentioned shaft with the bottom, a substantially cylindrical funnel body, 7054-6132-PF (N2); Ahddub.ptd Page 28 200415266 The bottom cover and the bottom mouth part are opened and closed. 6. The scope of the patent application. The shaft for opening and lowering the cover at the lower end of the funnel body. In addition, the main body of the bucket, the bottom cover of the cylindrical shape of the funnel f glass under the funnel body, the shaft that suspends the bottom cover = mouth, the body of the cone of the switch, and the funnel body is hung The first brake that is placed in the above-mentioned funnel device on the accident, is sighed. The above-mentioned funnel system has: a universal through hole covering the shaft inserted on the top plate, and two ^ of the mouth The top plate and the hanging rod are used to be fixed to the hanging rod ^ is a second brake with adjustable body and the bottom # 3 + process to hang the funnel JIIL Wang-iS # »1 .N A rod and a quartz glass 7 connecting the aforementioned hanging rod and the aforementioned stone battle shape. A replenishing device having a connector for leaking the rod. It is characterized by: 4 + body, shaft and bottom cover, W fan funnel book • / ,,, '独 Ｍ _ 周 形 壮 + r # body, a top plate covering the upper part of the foregoing cylinder body, and a glass plate worn on ^ A through hole for the cylinder, and a shaft insert i provided on the top plate of the cylinder body; the shaft system includes: a suspension rod, a first brake for fixing to the front; a second brake for the funnel body, and the foregoing The bottom rod is suspended in the middle of the Portuguese glass rod, the stone connecting the hanging rod and the stone-formed stone, the connector covering the hanging rod and the quartz glass, and the mouthpiece. ~ Schematic diagram of other connectors 7054-6132-PF (N2); Ahddub.ptd p. 29, patent scope of the patent of M. The tube is made of quartz glass. The bottom cover is made of a high thermal insulation stone containing air bubbles. Among them, · 7 of the patent scope of any one of items 1 to 7 a · 9 · 1: 1 hollow cone shape, with ^ on the bottom surface: Γ: a pot, which heats the raw material ΐ 4: a room for storing the raw material molten liquid heater of the crystal block, and a heater, which stores the above-mentioned accidents, and is characterized by: 17 additional devices for the raw material of the crystal block, other The additional materials are described below. The bottom of the funnel body = • The cylindrical funnel body and the shaft to be suspended; ▲ The bottom: the bottom of m and the bottom cover glass. -The material of the wind, using quartz containing bubbles 10 · A crystal block pull # wθ 士: a heater of the ink crucible, which houses each of the aforementioned components: a pot; a sub chamber provided around the aforementioned transmission gate valve, and installed in the aforementioned sub chamber Room ^ ^ The upper part of the room, the 士 -shi is disposed on the flange-shaped gate from the field to the inside, the seed shaft that can be moved up and down, and suspended from the foregoing. Its characteristics are as follows: The funnel of the kind of shaft has three genera: 2 It has a funnel body, a shaft, and a bottom i; the above funnel = yes. A cylinder of quartz glass with a roughly cylindrical shape covers the foregoing body. The top plate of the cymbal, the universal through hole of the shaft inserted through the top plate of Kos, and the first brake provided on the periphery of the cylinder to suspend the funnel body to the brake; the shaft system has: length adjustable The hanging rod ', 200415266 VI. Application scope: hanging the quartz funnel f 2 knot-making device formed by the aforementioned funnel, and covering the above-mentioned rough cylindrical skin and the former and thermal quartz The pre-breaking system uses the raw materials with melting material plus the second material to melt the aforementioned materials; night;,:! The pull-pull funnel 66, which is used to make the crystal block, and the 仏 κ clothes set and the pull device that is used to make the crystal can be fixed to the actuator and the bottom: the middle-range suspension rod and the quartz The quartz glass rod and the bottom cover of the front cover are made of high-g breaks containing the name G3. 1. A method for making a crystal block. A crucible for the molten liquid, a heating device for heating the aforementioned original hanging horse and a heater, w, ^ I is a method of dividing at least one of the crystals in the seed to facilitate the addition of the aforementioned block of polycrystalline silicon blocks, which is characterized in that: in the aforementioned crucible, L is used to supply block I Β τΆ Add the "" and "" to heat the polycrystalline silicon. On the second day and night, by using the aforementioned raw material molten liquid, in the pot drawn by the aforementioned pull ^ Ke Shu ^, to make at least _ Part ^ = In the above mentioned raw material molten liquid is used to hang the pot, and a large number of knots s are added. 7054-6132-PF (N2); Ahddub.ptd 31st stomach