JP4931122B2 - Raw material supply apparatus and raw material supply method - Google Patents

Description

  The present invention relates to a single crystal pulling apparatus for manufacturing a single crystal ingot, and more particularly to a raw material supply apparatus and a raw material supply method for supplying a raw material.

  A specular wafer used as a substrate for manufacturing a semiconductor device is obtained by slicing a single crystal ingot into thin plate members and grinding and polishing the front and back surfaces thereof. This single crystal ingot can be manufactured by, for example, the Czochralski (CZ) method (including the MCZ method). A general method for producing a single crystal ingot using the Czochralski method will be briefly described.

  In the Czochralski method, a raw material polycrystalline silicon (polycrystalline raw material) is filled in a quartz crucible installed in a furnace of a single crystal pulling apparatus, and the quartz crucible is heated by a heater provided around the quartz crucible. Polycrystalline silicon is melted to obtain a raw material melt. A single crystal with the same orientation as the seed crystal is grown by immersing a single crystal (seed crystal), which is a seed, and slowly pulling up the seed crystal using the crystal pulling mechanism. Finish into an ingot. Then, the single crystal ingot grown to the required size is taken out of the furnace.

  After stopping the heating by the heater, the inside of the single crystal pulling apparatus is cooled, and a new quartz crucible and polycrystalline silicon as a raw material are recharged. Usually, when silicon is cooled below the melting point while the raw material melt remains in the quartz crucible, the quartz crucible is broken due to expansion during solidification of the melt, so that only one single crystal ingot is produced from one quartz crucible. It was not possible to increase the cost. Therefore, after the manufacturing process of one single crystal ingot is completed, the raw material polycrystalline silicon used for manufacturing the next single crystal ingot is prevented without cooling the apparatus and preventing the raw material melt in the quartz crucible from solidifying. There has been proposed a single crystal ingot manufacturing method in which the single crystal ingot is pulled up again by melting the recharged polycrystalline silicon. The following techniques are disclosed for supplying polycrystalline silicon as a raw material.

  For example, in Patent Document 1, a single crystal production apparatus (single crystal pulling apparatus) can be easily taken out and taken out, and a nugget-like and / or granular (hereinafter, collectively referred to as “lumb-like”) raw material is solidified and melted in a crucible. A recharge tube is disclosed that is charged directly to the liquid surface. This recharge tube is said to realize a supply rate suitable for recharge and improve the productivity of single crystals by performing recharge smoothly and efficiently in a short time.

  In Patent Document 2, the lamp material is melted and stuck on the bottom lid by heating the lamp material (raw material polycrystalline silicon) caused by radiant heat from the raw material melt, or a bridge is formed by thermal expansion. Thus, a recharging device for a single crystal pulling device that improves the problem of no longer falling is disclosed.

  Furthermore, Patent Document 3 discloses a raw material supply apparatus and a supply method capable of charging a solid raw material that does not cause crystal contamination evenly and in a large amount in the circumferential direction.

In each of the disclosed technologies as described above, a device (for example, a recharging device or a raw material supply device) composed of a substantially cylindrical raw material supply pipe (for example, a hopper main body, a recharge pipe main body) and a conical bottom lid. And using a bottom lid to put the polycrystalline silicon of the raw material into the recharge tube, opening and closing by moving the bottom lid up and down, and dropping the polycrystalline silicon of the raw material in the raw material supply tube into the quartz crucible It has become.
Republished WO2002 / 068732 JP 2004-244236 A JP 2006-89294 A

  However, in the single crystal pulling process, since the recharge device (or “raw material supply device for recharging”) is inserted into the furnace of the single crystal pulling device in the middle of the melting process of the single crystal silicon pulling, The lower part tends to be hot (several hundred degrees). For this reason, in (or outside) the recharge device, the shaft (or wire) that suspends the bottom cover extends and the bottom cover is lowered, and the recharge pipe (or “a member corresponding to the raw material supply apparatus or the raw material supply pipe of the recharge apparatus”). ) And the bottom lid, there is a possibility that the polycrystalline silicon in the recharge tube falls from the gap.

  In addition, since the bottom cover is supported by a long extending shaft or the like, shaft deflection, distortion of the circular opening at the lower end of the raw material supply pipe, deformation of the conical surface of the conical bottom cover, etc. Thus, a gap is likely to be generated between the raw material supply pipe and the bottom cover. Relatively large nugget-like raw materials are unlikely to fall through such gaps, but relatively small or thin pieces such as debris and granular pieces produced by contact between nugget-like raw materials may fall .

  Also, when such raw material powder (including the above-mentioned broken pieces and granular pieces) falls when the lower end of the raw material supply pipe is above the gate, the dropped raw material powder rides on the gate or gate flange. As a result, there is a risk that the chamber leaks or the gate cannot be opened or closed.

  The present invention has been made in view of such circumstances, and is not limited to a recharge device, but generally from a gap generated between a lower opening end of a material supply pipe (hopper body) of a material supply device and a bottom lid ( An object of the present invention is to provide a raw material supply device that prevents raw powder (such as polycrystalline silicon) from falling. In particular, it is an object of the present invention to provide a raw material supply apparatus and a supply method for stopping an inadvertent drop of a raw material that can be provided at low cost without using a complicated mechanism and with few malfunctions.

  In order to solve the above-described problems, a raw material supply apparatus according to the present invention is a raw material supply apparatus that supplies a raw material for growing a single crystal, and includes a substantially cylindrical raw material supply pipe that holds the raw material, and the raw material supply pipe A conical bottom lid that is attached to and closed at an open end portion below the open end, and is opened from the open end portion, and a shaft that suspends the bottom lid. Drop prevention means for preventing the raw material powder from falling can be provided.

  In this way, the bottom cover of the raw material supply apparatus is provided with means for preventing the raw material (polycrystalline silicon, etc.) from falling, and it is completely closed between the raw material supply pipe and the bottom cover due to various factors. Even if a small gap occurs, the polycrystalline raw material is difficult to fall. In particular, since the raw powder fall prevention means can be provided on the conical surface of the bottom lid, no special mechanism or mechanism is required, and it can be provided at a low cost. In addition, when the raw material supply device drops, for example, a nugget-like raw material, such a drop of the nugget-like raw material is not hindered, and the function as the raw material supply device is not hindered.

  More specifically, the following can be provided.

(1) A raw material supply apparatus for supplying a raw material for growing a single crystal, a substantially cylindrical raw material supply pipe for holding the raw material, and a conical bottom provided detachably at a lower opening end of the raw material supply pipe A lid,
A support member that suspends the bottom lid, and the raw material held in the raw material supply pipe having the lower opening end closed by the mounting of the bottom lid is opened by the loading and unloading of the bottom lid A raw material supply device can be provided, wherein the raw material discharge device is provided from the lower opening end, and the bottom cover is provided with a raw material powder fall prevention means in the vicinity of the conical surface.

  Here, attachment and removal means that it corresponds to so-called attachment and removal. Mounting and unloading can be performed by relatively moving the lower opening end of the raw material supply pipe and the bottom cover. At the time of mounting, the lower opening end and the bottom lid are in contact with each other, and at the time of loading / unloading, a gap may be opened between the lower opening end and the bottom lid. This gap, which will be described in detail later, can include a gap that opens due to various factors even when the bottom cover is mounted. The concave shape may be a concave shape with respect to the conical surface, for example, and may include all shapes such as a so-called groove shape and hole shape. In addition to this, it may include a shape that is recessed with respect to a horizontal plane so that the object can stably maintain its position under gravity. At this time, it is preferable that the bottom of the recess does not go beyond the bottom lid. A very small one such as a pinhole may be present because it does not cause the raw material powder to fall, but it is preferable that it is not present because radiation heat can be easily guided to the inside from the lower crucible.

(2) The raw material powder fall prevention means can provide the raw material supply apparatus according to the above (1), which has a concave shape in the vicinity of the conical surface.

(3) The raw material powder fall prevention means can provide the raw material supply apparatus according to the above (1) or (2), which has a convex shape in the vicinity of the conical surface.

  Here, the convex shape may be, for example, a protruding shape with respect to a conical surface, such as a line shape such as a bank or a ridge, a mountain shape such as an embossed shape, or a button-shaped protruding shape. Also good. Moreover, the shape which has an uneven | corrugated shape can be contained in any of a concave shape and a convex shape. Since the conical surface is virtually provided, when the conical surface is virtually provided, the shape is defined by whether the actual shape protrudes from the surface (for example, convex upward) or is dented.

(4) The raw material powder fall prevention means has a continuous or intermittent shape in the vicinity of the conical surface, and can provide the raw material supply device according to any one of (1) to (3) above .

  Here, the conical bottom cover has a substantially conical shape (or a truncated cone shape), but the fall prevention means for the raw material powder falls within a predetermined range at the same height from the bottom surface. It is preferable to provide it. In particular, it is preferable to provide it at a place where the height from the bottom surface is relatively low (for example, a place where the height is about ½ or less of the total height). Further, the convex shape and the concave shape are provided to prevent the raw material powder from falling, and it is more preferable that the convex shape and the concave shape extend in a direction perpendicular to, or substantially perpendicular to, the direction not parallel to the dropping direction. . This is because the movement of the raw material powder falling is hindered by hitting a wall or surface which is a convex or concave component. In addition, it is considered that such an effect is generally higher when extended for a long time and when extended continuously, and thus it is more preferable that the effect is continuous. However, since the conical surface of the bottom lid is originally a mass of raw material that falls adjacently (or rolls on the surface), as described in detail in the detailed description, the shape of the raw material, the inclination of the conical surface, etc. These can be appropriately selected in consideration of various conditions.

(5) The raw material powder fall prevention means has a protruding shape (or protruding shape) in the vicinity of the conical surface, and can provide the raw material supply device according to any one of (1) to (4) above. .

  Here, the protruding shape can include a protruding shape in the lateral direction for forming a flat horizontal plane with respect to the vertical direction. At this time, a clear concave portion is not necessarily formed on the conical surface, but at least a horizontal surface that does not fall naturally can be provided, and the movement of the raw material powder that is about to fall is hindered by friction and other factors. It is possible.

(6) The raw material powder fall prevention means includes a ring arranged in the vicinity of the conical surface, and can provide the raw material supply apparatus according to any one of (1) to (5) above.

  Here, the ring may be a continuous ring-shaped ring or washer-shaped ring, or may be a U-shaped ring that is partially open. A continuously connected shape in which leakage from the open portion hardly occurs is more preferable. For the arrangement of the ring, any method such as simple arrangement, mechanical fastening with a screw or the like, pressure bonding, welding (welding), adhesion, or the like can be used. More preferably, the ring is disposed substantially horizontally (or parallel to the bottom surface of the bottom cover) on the conical surface of the bottom cover. More preferably, the ring has a circular cross section. This is because it is easily available at a low cost, and it is easy to form a concave portion on a conical surface.

  Here, the raw material powder fall prevention means may be a groove formed in the conical conical surface, and the polycrystalline raw material powder (especially a fine one) that can fall from the raw material supply pipe by the formation of the groove. ) Can be taken into the groove. Further, depending on the size and shape of the polycrystalline raw material powder, it can be caught in the groove by a part of the shape (for example, a protrusion). Thereby, the fall of polycrystalline silicon raw material powder can be prevented. On the other hand, when the size (for example, width) of the groove is sufficiently small, it is difficult to restrict the passage of a larger lump (for example, nugget-shaped) raw material. Therefore, in the open state in which the bottom cover is opened from the raw material supply pipe, a larger block of raw material can freely fall into the crucible. For example, the groove width may be about ½ or less, more preferably ¼ or less, with respect to an average diameter based on an arithmetical number based on the approximate number of lumped raw materials.

  Furthermore, the raw material powder fall prevention means may be a groove that has a circular shape along the conical surface and is dug down vertically from the conical surface or obliquely from the vertical. By forming a circular groove (or moat) on the conical surface of the bottom cover as viewed from above, polycrystalline silicon can be taken in without leakage. Further, since the groove shape is relatively easy to manufacture, it can be provided at a low cost.

  The raw material powder fall prevention means may include an overhang portion provided on the conical conical surface. The overhanging portion provided on the conical surface of the bottom lid can stop the polycrystalline silicon that is about to fall. It is also possible to rub the inner peripheral part of the raw material supply pipe to the outer peripheral part of the overhanging part. In this way, the raw material supply pipe can be completely closed. On the other hand, the rubbing may cause sticking or the like, and is preferably selected appropriately in consideration of use conditions and the like. Further, by combining the groove and the overhanging portion, it is possible to more effectively prevent the polycrystalline silicon from falling.

  The overhang portion can be formed by a ring-shaped member. Thus, by attaching a ring-shaped object to the conical surface of the bottom lid, the overhanging portion can be easily and inexpensively installed on the conical surface.

(7) A substantially cylindrical raw material supply pipe for holding a raw material for growing a single crystal, and a conical bottom lid detachably attached to a lower opening end of the raw material supply pipe, and the raw material powder is provided near the conical surface A raw material supply method for supplying a raw material using a raw material supply device comprising a bottom lid having a fall prevention means and a support member for suspending the bottom lid, wherein the raw material is attached to the bulk lid A step of filling the raw material supply pipe, a step of suspending and holding the raw material supply apparatus including the raw material filled in the raw material supply pipe in the single crystal growing apparatus by the support member, and And a step of releasing the filled raw material by detaching the bottom lid, and providing a raw material supply method.

  Since the raw material supply apparatus provided with the raw material powder fall prevention means as described above is used, even when the furnace of the single crystal pulling apparatus is hot, the raw material powder is inadvertently dropped from the suspended raw material supply apparatus. It is possible to prevent this, and it is possible to supply the raw material by subsequently performing a single crystal pulling step.

  Here, the raw material powder is a material obtained by pulverizing a raw material solid such as small pieces, granules, granules, etc. of the raw material having a size that can be dropped from the gap between the raw material supply pipe and the bottom cover as described above. It may mean any shape, including spherical shapes, elliptical spheres such as rugby balls. The average diameter based on the number of the spherical approximation may be about 0.1 mm to about 5.0 mm. Such a raw material is considered to have a size that can be trapped by the raw material powder fall prevention means.

Also, the shape index F can be 1 to 10. Here, the shape index is defined as follows. The equivalent sphere diameter (Deq) is obtained from the volume of the raw material powder, and the ratio F to the maximum distance (Lmax) obtained for the shape of the raw material powder is obtained. For example, as shown in FIG.
Sphere with diameter D: Since Deq and Lmax (diameter) are the same, F = Lmax / Deq = 1.
Cube with side D: Lmax is diagonal length, F = √3 / (6 / π) ^1/3 = 1.396.
A square prism with a side of D and a height of 2D: Lmax is the diagonal length, F = √6 / (12 / π) ^1/3 = 1.57.
A cylinder whose height is twice the diameter D: Lmax is the length of the oblique line connecting the upper and lower bases, and F = √5 / 3 ^1/3 = 1.55.
Cone whose height is the same as the diameter D: Lmax is the length along the conical surface, F = √5 / 4 ^1/3 = 1.41.
Flat plate with thickness D, width 4D and length 8D: Lmax is the diagonal length, F = 9 / (192 / π) ^1/3 = 2.28.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to prevent that the raw material powder containing the fragment of a polycrystalline raw material, a small piece, etc. fall carelessly from the clearance gap which arises between a raw material supply pipe (hopper main body) and a bottom cover. .

  Next, embodiments of the present invention will be described with reference to the drawings. In the drawings, components having the same configuration or function and corresponding parts are denoted by the same reference numerals, and redundant description is omitted. Further, in the following description, only one example of the embodiment according to the present invention is shown, and can be appropriately changed based on the common general knowledge of those skilled in the art without exceeding the scope of the present invention. The idea is not limited to these specific examples.

(Embodiment 1)
FIG. 1 is a cross-sectional view illustrating an example of a raw material supply apparatus 1 according to the first embodiment. As shown in FIG. 1, a raw material supply apparatus 1 according to the first embodiment includes a substantially cylindrical raw material supply pipe (hopper body) 3 that holds a raw material (for example, polycrystalline silicon), and a conical shape. At least a bottom lid 5 for opening and closing the lower end opening of the raw material supply pipe 3 and a shaft 7 for suspending the bottom lid 5 are provided.

  The raw material supply pipe 3 has an opening 3a at the lower end, and the lower end forms a tapered portion 3b so that a gap is hardly formed when the bottom lid 5 is fitted. In the first embodiment, the raw material supply pipe 3 has a right circular column (cylindrical) shape, but may have a flare shape that slightly expands the lower part. With such a flare shape, the bottom cover 5 is firmly attached to the lower end opening 3 a of the raw material supply pipe 3.

  The bottom cover 5 is provided with raw material powder fall prevention means 51. In FIG. 1, the example provided with the groove | channel 51 formed along the conical surface of the conical bottom cover 5 is shown. It can be said that such a groove 51 has a concave shape. In FIG. 1, the groove 51 is dug down in the vertical direction (gravity direction), and is formed in a circular shape (for example, a ring groove shape) along the conical surface 5Q. The closer the groove 51 is to the bottom surface of the conical surface 5Q, the more polycrystalline raw material powder that falls along the conical surface 5Q is taken in, so that more polycrystalline raw material powder is prevented from falling. Become. The groove 51 preferably exhibits a circular shape slightly smaller than the inner diameter of the raw material supply pipe 3 in a top view. 1 shows an example in which one groove 51 is formed, a plurality of grooves may be formed on the conical surface, and the groove 51 is limited to exhibiting a circular shape in a top view. Absent. The diameter of the bottom surface 5 </ b> S of the bottom lid 5 is larger than the inner diameter of the raw material supply pipe 3. A portion 5P of the conical surface of the bottom cover 5 is attached to the tapered portion 3b of the raw material supply pipe 3 to close the lower end opening 3a of the raw material supply pipe 3.

  Thus, the bottom cover 5 having the raw material powder fall prevention means prevents the raw material supply apparatus 1 from dropping polycrystalline silicon from the gap formed between the raw material supply pipe 3 and the bottom cover 5. For example, although the bottom cover 5 is in a state where the lower end opening 3 a of the raw material supply pipe 3 is closed by the shaft 7, the shaft 7 has a flare, the lower end opening 3 a and the tapered portion 3 b, and the cone of the bottom cover 5. A gap may be generated between the raw material supply pipe 3 and the bottom cover 5 due to deformation of the part 5P of the surface, and further, extension of the shaft 7 due to thermal expansion or the like. From such a relatively small gap, the nugget-shaped ramp material 46 (see FIG. 5) is difficult to drop off, but the powder mixed in the original material and the filled nugget-shaped ramp material 46 rub against each other. The raw material powder (for example, 47 in FIG. 5) containing broken pieces and small pieces that fall together may fall from the gap. Since such polycrystalline silicon raw material powder is taken into the groove 51, it is prevented from falling.

  FIG. 2 is an enlarged perspective view of the bottom cover 5. Unlike FIG. 1, the groove 51 does not go around the conical surface 5Q and has a groove-free portion 51X in the middle. Thereby, it is possible to ensure the strength of the peripheral edge of the bottom lid more reliably. The size of the groove 51 is appropriately selected in consideration of the size of the material. In general, the depth D of the groove 51 is preferably about 1 mm to 20 mm, more preferably 5 mm to 10 mm. Further, the width W of the groove 51 is preferably about 1 mm to 30 mm, and more preferably 10 mm to 20 mm. In addition, depending on the shape of the polycrystalline silicon raw material powder, a part of the raw material powder (for example, a protruding portion) may be caught in the groove 51 to prevent the raw material powder itself from falling. In the groove 51 provided on the conical surface 5Q, it is more preferable that the upper corner 51a formed with the conical surface 5Q is chamfered or curved. It is because the part which stores raw material powder increases.

  Moreover, in the groove | channel 51 of FIG. 1, although the example of the groove | channel shape dug and formed in the perpendicular direction was shown, the case where it digs down in the diagonal direction may be sufficient. Examples of various groove shapes are shown in FIGS. 3 (a) to 3 (c) in various sectional views of the bottom cover 5. FIG. FIG. 3A is an example of the bottom lid 5a in which the groove 52 dug obliquely is formed, and FIG. 3B shows the bottom lid 5b in which the two grooves 51 having different circular diameters are formed in a top view. It is an example. In this way, two or more of the same type of grooves may be provided, or two or more different types of grooves may be provided. As shown in FIG. 3 (b), by providing two grooves having two circular shapes of the outer side and the inner side in a top view, the raw material powder is more difficult to drop, and the total volume of the recesses is increased. It becomes possible to trap more raw material powder and prevent it from falling.

  FIG. 3C shows an example of the bottom lid 5 in which a protruding portion 55 is further provided in the groove 52 formed by digging obliquely in FIG. 3A. Part of the raw material powder is trapped in the groove 52 and is locked at the flat portion 55 a of the overhang portion 55. By adopting such a shape, it is possible to prevent the slightly larger raw material powder having projections in part from being dropped. It can be said that the protruding portion 55 has a convex shape.

(Embodiment 2)
4A and 4B are sectional views showing examples of the bottom lid 5 provided with a convex member as a raw material powder fall prevention means. These bottom lids 5 can be applied to the same raw material supply apparatus 1. Unlike FIGS. 1 and 2 and FIGS. 3A to 3C, the ring 53 is disposed on the conical surface 5Q to constitute a raw material powder fall prevention means. By arranging the ring 53 on the conical surface 5Q, a convex member or an overhanging portion can be provided. At the same time, since the ring 53 has a circular or elliptical cross section, the ring 53 can have a concave portion 53a on the conical surface. Similar to the grooves 51 and 52 described above, such a concave-shaped portion can trap (or store) the polycrystalline silicon raw material powder and prevent falling.

  Thus, when the ring 53 is used, it is possible to easily form a raw material powder fall prevention means having a convex portion and a concave portion. In addition, it is considered that the trapping effect is higher when the concave portion is formed by the convex portion than when the concave portion is simply provided. This is because the raw material powder containing small pieces rolling on the conical surface is likely to hit this convex shape portion, and the raw material powder containing small pieces whose rolling motion is stopped by hitting at the same time is trapped in the concave shape portion. .

  As can be seen from FIG. 4A, a ring 53 is attached to the conical surface 5 </ b> Q of the bottom cover 5. The outer diameter of the ring 53 is smaller than the inner diameter of the opening 3 a at the lower end of the raw material supply pipe 3. Note that the bottom cover 5 may be in a state of rubbing with the inner portion of the raw material supply pipe 3 just above the tapered portion 3 b of the lower end opening 3 a of the raw material supply pipe 3. If trapping is performed along the way, the lower end surface does not necessarily have to be larger than the inner diameter of the hopper. The bottom cover 5 is attached to the opening 3a of the raw material supply pipe 3, and the opening 3a can be reliably closed. In FIG. 4A, only one ring 53 is provided. However, for example, a ring having a smaller diameter can be arranged inside the inner periphery of the ring 53. Thereby, the same effect as the double groove of FIG.3 (b) is acquired.

  Even if the ring 53 is simply placed so as to be covered from the top without being bonded or welded to the bottom lid 5, the same effect as in the case of bonding may be obtained. However, in order to more reliably prevent the raw material powder from dropping and to attach the bottom cover 5 to the opening 3a, it is more preferable to fix the material powder by adhesion or the like. It is also possible to form the ring 53 integrally with the bottom cover 5. However, when it is important to clean a thing clogged in a narrow gap formed between the ring 53 and the conical surface 5Q, it is preferable to install the ring 53 easily. The ring 53 is more preferably made of the same material as the bottom lid 5. This is because heat radiation is received, and adhesion or the like is easily broken due to a difference in thermal expansion or the like. More specifically, it is more preferably formed of quartz or the like. This is because it is possible to prevent impurities from being mixed into the raw material polycrystalline silicon. In addition, when covering a ring from the top, you may provide several protrusions for positioning on the conical surface 5Q.

  In FIG. 4A, the ring 53 has an elliptical cross section, but is not limited to this shape. Rings having other cross-sectional shapes such as a perfect circle or a circle or a rectangle can be used.

  FIG. 4B illustrates not only the ring 53 but also the bottom cover 5 having a groove 52 as a raw material powder fall prevention means in a sectional view. As described above, the raw material powder falling on the convex portion formed on the conical surface 5Q is easily hit by the ring 53, and the raw material powder whose dropping motion is stopped by hitting the raw powder is applied to the concave portion by the groove 52. Will be trapped.

  FIG. 4C illustrates the bottom cover 5 integrally formed with the overhang portion 55 in a cross-sectional view. When the bottom lid 5 is manufactured, the conical surface 5Q has a protruding portion (convex portion) 55 that protrudes outward in advance. As described with reference to FIG. 3C, the bottom lid 5 having both the groove 52 and the overhanging portion 55 can be exemplified.

  As described above, the raw material powder fall prevention means shown in FIGS. 4A to 4C also uses the polycrystalline silicon from the gap formed between the raw material supply pipe 3 and the bottom cover 5 as in the first embodiment. It is possible to prevent the raw material powder containing small pieces from falling. In addition, the overhanging portion can effectively prevent the polycrystalline silicon raw material powder from falling.

  Next, an example of a single crystal pulling apparatus 10 for pulling single crystal silicon to which the raw material supply apparatus 1 to which the bottom cover 5 of the present invention is applied will be described with reference to FIGS.

  FIG. 5 shows a vertical cross-sectional view of a silicon single crystal pulling apparatus 10 using the Czochralski method according to an embodiment of the present invention. As shown in FIG. 5, the silicon single crystal pulling apparatus 10 mainly includes a quartz crucible 20, a graphite crucible 22, a heater 12 surrounding a heater 24, a single crystal provided at the top of the chamber 12 and pulled from a raw material melt. It comprises a sub-chamber 14 for holding and taking out an ingot, and a seed shaft 16 for hooking a seed crystal or hopper 30.

  The bottomed cylindrical chamber 12 is provided with a rotary shaft 28 that can move up and down in a state of being directed vertically upward from the center of the bottom. A bowl-shaped graphite crucible 22 is fixed to the upper end of the rotating shaft 28, and a bowl-shaped quartz crucible 20 is fitted inside the graphite crucible 22. The reason why the double structure of the quartz crucible 20 and the graphite crucible 22 is adopted is that the crucible directly in contact with the raw material melt is preferably the quartz crucible 20 in order to prevent contamination of silicon. On the other hand, quartz is softened at a high temperature and has a property of being brittle and easily damaged, and therefore, the periphery thereof is surrounded by a graphite crucible 22.

  The graphite crucible 22 is surrounded by a heater 24, and the heater 24 melts the polycrystalline silicon lamp material 46 put into the quartz crucible 20. A cylindrical heat insulating material 26 is disposed around the heater 24 concentrically with the chamber 12. The heat insulating material 26 prevents heat from the heater 24 from being directly radiated to the chamber 12.

  As shown in FIG. 5, a substantially cylindrical sub-chamber 14 is connected to the upper portion of the chamber 12 via a gate valve (not shown). The chamber 12 and the sub-chamber 14 can be communicated or blocked by this gate valve. On the other hand, although not shown, the upper end of the sub-chamber 14 is sealed with a top plate. Note that a flange-shaped gate 40 protruding toward the center for hooking a stopper 64 described later is provided on the inner peripheral surface of the sub-chamber 14.

  A seed shaft pulling device (not shown) is provided above the sub chamber 14. The seed shaft pulling device holds the seed shaft 16 so as to be movable up and down, and the seed shaft 16 is suspended along the central axis of the sub-chamber 14 through the top plate. A seed crystal is suspended from the lower end of the seed shaft 16 during the single crystal ingot pulling process, and a hopper 30 is suspended during the raw material supply process.

  Next, the configuration of the hopper 30 that is hooked onto the seed shaft 16 when the raw material is supplied will be described with reference to FIG. The hopper 30 is mainly composed of a hopper body composed of the raw material supply pipe 3, a shaft, and a bottom lid 5.

  As shown in FIG. 5, the hopper main body has a shape in which a small-diameter substantially cylindrical upper cylinder and a large-diameter substantially cylindrical lower cylinder (raw material supply pipe 3) are connected in series vertically. A flange 56 is provided at the lower end of the upper cylinder. On the other hand, a flange 58 is provided above the lower cylinder.

  The lower cylinder is made of quartz in order to prevent contamination of silicon. It is possible to confirm whether or not all of the polycrystalline silicon lamp material 46 loaded in the hopper 30 has fallen by configuring the lower cylindrical body with transparent quartz.

  A coupler 60 having a substantially cylindrical shape and a U-shaped cross section is fixed to the lower end of the peripheral edge of the flange 56 with a bolt. The coupler 60 is composed of two members divided in the circumferential direction, and a flange 58 is sandwiched and fixed. Four screw holes are provided on the lower surface of the connector 60, and four SUS stoppers 64 are fixed to the screw holes. The stopper 64 is for hanging on the gate 40.

  As shown in FIG. 5, a shaft is inserted into the hopper main body configured as described above. The shaft mainly includes a stopper 70, a suspension rod 72, a coupler 74, a quartz tube 78, and a quartz glass rod 76 formed integrally with the bottom cover 5.

  The upper part of the shaft is constituted by a metal suspension bar 72, and the upper end thereof is fixed to the seed shaft 16. A through hole 68 through which the suspension rod 72 is inserted is formed in the top plate 66 of the upper cylindrical body, and the suspension rod 72 is inserted through the through hole 68 into the hopper body. A cylindrical metal stopper 70 is fixed in the middle of the suspension bar 72. Since the outer diameter of the stopper 70 is larger than the diameter of the through hole 68, the hopper body 32 is hooked by the stopper 70.

  With this configuration, the stopper 70 can support the entire weight of the hopper body. The length of the suspension bar 72 can be adjusted. When the hopper body is hooked by the stopper 70, the gap between the bottom lid 5 and the lower cylinder body is eliminated, and the weight of the hopper body is reduced. The length is adjusted so that it does not reach the bottom cover 5 periphery.

  The lower end of the suspension rod 72 is connected to the upper end of the quartz glass rod 76 via a connector 74. A substantially cylindrical quartz tube 78 with a small diameter at the top is disposed so as to cover the metal suspension rod 72 and the quartz glass rod 76. The quartz tube 78 covers the metal portion and prevents metal contamination of the lamp material 46, which is raw material silicon.

  On the other hand, as described above, the quartz glass rod 76 is formed integrally with the bottom lid 5, and the bottom lid 5 is made of quartz glass and is located at the lower end of the quartz glass rod 76. The bottom cover 5 has a conical shape, and the diameter of the bottom surface is larger than the inner diameter of the lower cylinder. Therefore, the lamp material 46 does not contact the metal part.

  The bottom lid 5 is provided with raw material powder fall prevention means. As shown in FIG. 5, the bottom cover 5 in which the groove 51 is formed is attached to the opening at the lower end of the hopper body (raw material supply pipe 3).

  Next, the raw material supply process will be described. After the polycrystalline silicon lamp material 46 as a raw material is loaded into the hopper 30, the subchamber lid is opened and the hopper 30 is suspended from the seed shaft 16. In this state, the hopper body is hooked by the stopper 70, but there is no gap between the bottom lid 5 and the hopper body.

  Next, the subchamber lid is closed and the subchamber 14 is sealed. Thereafter, the subchamber 14 is depressurized and the subchamber 14 is filled with an inert atmosphere. Next, a gate valve (not shown) is opened, and the chamber 12 and the subchamber 14 are communicated. In this state, when the seed shaft 16 is lowered, the hopper 30 suspended from the seed shaft 16 is lowered together with the seed shaft 16. At this time, since the bottom cover 5 is attached to the opening at the lower end of the hopper body (raw material supply pipe 3), the polycrystalline silicon lamp material 46 does not fall. However, as described above, due to various factors, a gap 3c may be formed between the bottom lid 5 and the opening at the lower end of the hopper body (raw material supply pipe 3), and the raw material powder 47 is removed from the gap. There is a possibility of falling. As shown in the figure, the gate valve is open, so there is a risk of dropping directly into the melt 48 of the crucible 20.

  However, in this embodiment, since the groove | channel 51 is trapping the raw material powder 47 containing these small pieces, even if there is the said clearance gap, it does not fall directly into the melt 48 of the crucible 20.

  As the hopper 30 descends, the stopper 64 contacts the gate 40. When the seed shaft 16 is further lowered from this state, the gate 40 prevents the hopper body from being lowered, and the shaft and the bottom cover 5 are further lowered (see FIG. 6). Then, a gap is formed between the hopper main body (raw material supply pipe 3) and the bottom lid 5, and the polycrystalline silicon lamp material 46 falls into the quartz crucible 20 from the gap 3c by its own weight.

  At this time, since the ramp material 46 made of polycrystalline silicon is considerably larger than the width of the groove 51, it can be freely dropped through the wide open gap without being trapped in the groove 51. Further, the raw material powder 47 including the trapped small pieces described above continues to be trapped at the position as it is (see the state on the right side of the bottom cover in the figure), or the trap material of the groove 51 is changed by the fall of the lamp material 46. It can be unwound and fall together (see the left side of the bottom lid in the figure).

  After all the polycrystalline silicon lamp material 46 loaded in the hopper 30 is put into the quartz crucible 20, the seed shaft 16 is raised. Then, the shaft and the bottom lid 5 rise together with the seed shaft 16. The shaft rises a certain distance, and the stopper 70 comes into contact with the top plate 66, whereby the hopper body is hooked. When the seed shaft 16 is further raised from this state, the shaft, the bottom cover 5 and the hopper main body are raised together with the seed shaft 16.

After the hopper 30 is fully raised to the sub-chamber 14, the gate valve is closed and the chamber 12 and the sub-chamber 14 are shut off. As a result, the inside of the chamber 12 is maintained in an inert atmosphere, and the sub-chamber lid is opened and the inside of the sub-chamber 14 is returned to normal pressure in a state where oxidation of the raw material melt 48 is prevented. Thereafter, the hopper 30 is taken out. Thus, the raw material supply process is completed.

  By repeating the single crystal ingot pulling step and the raw material supply step, single crystal ingots can be continuously produced without replacing the quartz crucible 20.

  Here, the bottom cover 5 is provided with raw material powder fall prevention means. As shown in FIG. 5, the bottom cover 5 in which the groove 51 is formed is attached to the opening at the lower end of the hopper body (raw material supply pipe 3).

  When the raw material supply apparatus 1 is installed in the sub-chamber 14 in a high temperature state, or when the raw material supply apparatus 1 installed in the sub-chamber 14 descends and moves into the chamber 12, the raw material supply apparatus 1 becomes high temperature. Will be exposed. As a result of the raw material supply apparatus 1 being exposed to a high temperature and the shaft extending as compared with the raw material supply pipe 3, the bottom cover 5 is relatively lowered, and a gap is generated between the raw material supply pipe 3 and the bottom cover 5. . In such a case, it is possible to prevent the polycrystalline silicon from falling by taking in the polycrystalline silicon (particularly powdery fine material) that the groove 51 formed in the bottom lid 5 leaks from the gap.

  Thus, by forming the groove 51 in the bottom cover 5, polycrystalline raw material powder (including raw material powder or fine raw material material) falls from the gap generated between the raw material supply pipe 3 and the bottom cover 5. Can be prevented. This makes it possible to prevent the melt raw material from splashing due to the dropping of the polycrystalline raw material powder, and to avoid the splashed melt from adhering to the in-furnace product. For example, it is possible to prevent a malfunction of the O-ring caused by adhering to a seal (O-ring) portion of the gate valve. Even if the temperature in the furnace (in the chamber 12 or the subchamber 14) of the single crystal pulling apparatus 10 is high, the raw material supply apparatus 1 can be installed in the single crystal pulling apparatus 10. For example, it can be installed in the raw material supply apparatus before the melting step, and the cycle time can be greatly reduced.

  In the above embodiment, the raw material supply pipe 3 is made of quartz and the shaft 7 is made of metal. However, the present invention is not limited to these materials. That is, when a gap is generated between the raw material supply pipe 3 and the bottom cover 5 for some reason, according to the present invention, the same trapping effect of a powdery material including small pieces can be achieved.

  Moreover, the raw material supply apparatus 1 and the single crystal pulling apparatus 10 shown in the above embodiment are examples, and are not limited to these. The raw material supply apparatus of the present invention can be applied to an apparatus having a function of opening and closing a lower end opening of a raw material supply pipe (hopper body) using a conical bottom lid. Moreover, although the above-mentioned Example demonstrated as an example the main body shape of the raw material supply apparatus 1, it is not restricted to a cylindrical shape, Other shapes, such as a rectangular cylinder shape, may be sufficient. Needless to say. Further, the shape of the bottom cover is not limited to the conical shape or the truncated cone shape, and it is needless to say that the bottom lid may have another shape such as a pyramid or a prism.

  The raw material powder fall prevention means of the bottom cover shown in the above embodiments is merely an example, and other means may be used. The raw material powder fall prevention means may be any means that prevents the polycrystalline raw material powder filled in the raw material supply pipe 3 from dropping from the gap formed between the raw material supply pipe 3 and the bottom cover 5. A means for preventing the falling by hooking a part of the crystal raw material powder, or a means for preventing the dropping by partially inserting the polycrystalline raw material powder into the groove or concave portion may be used.

  As mentioned above, although embodiment of invention was described, it cannot be overemphasized that a various change is possible for this invention in the range which is not limited to this embodiment and does not change the summary of this invention.

It is the schematic sectional drawing which showed the example of the raw material supply apparatus of Embodiment 1. It is an expansion perspective view which shows the bottom cover in which the groove | channel was formed. It is sectional drawing which shows the example of the bottom cover in which the groove | channel of various shapes was formed. It is sectional drawing which shows the example of the bottom cover provided with the ring etc. It is sectional drawing which shows the example of the single crystal pulling apparatus which installed the raw material supply apparatus. In a single crystal pulling apparatus, it is sectional drawing which shows how to supply a raw material with a raw material supply apparatus. It is explanatory drawing of a figure index.

Explanation of symbols

1 Raw material supply device 3 Raw material supply pipe (hopper body)
5 Bottom cover 7 Shaft 10 Single crystal pulling device 12 Chamber 14 Subchamber 16 Seed shaft 20 Quartz crucible 22 Graphite crucible 24 Heater 26 Heat insulating material 28 Rotating shaft 40 Gate 46 Lamp material 48 Raw material melt 51, 52 Groove 53 Ring 66 Top plate 70 stopper

Claims (7)

A raw material supply apparatus for supplying a raw material for growing a single crystal,
A substantially cylindrical raw material supply pipe for holding the raw material;
A conical bottom lid detachably provided at a lower opening end of the raw material supply pipe;
A support member for suspending the bottom lid,
The raw material held in the raw material supply pipe having the lower open end closed by the mounting of the bottom lid is discharged from the lower open end opened by the loading and unloading of the bottom lid,
The bottom cover is provided with a raw material powder fall prevention means on the conical surface as a groove at the same height from the bottom surface of the bottom cover , and the groove is dropped in the downward direction along the conical surface of the raw material powder. A raw material supply device that extends in a direction perpendicular to the substrate . 2. The raw material supply apparatus according to claim 1, wherein the raw material powder fall preventing means has a concave shape in which the groove of the conical surface is dug down in a vertical direction . The raw material supply device according to claim 1 or 2, wherein the raw material powder fall prevention means has a convex shape extending on the conical surface in the same manner as the groove . The raw material supply apparatus according to any one of claims 1 to 3, wherein the raw material powder fall prevention means is provided in the conical surface as a continuously extending groove shape or an intermittently extending groove shape .   The raw material supply device according to any one of claims 1 to 4, wherein the raw material powder fall prevention means has a protruding shape on the conical surface. 4. The raw material supply apparatus according to claim 3, wherein the raw material powder fall prevention means is formed by arranging a ring on the conical surface. A substantially cylindrical raw material supply pipe for holding a raw material for growing a single crystal;
A conical bottom cover detachably provided at a lower opening end of the raw material supply pipe, the raw material powder falling prevention means on the conical surface as a groove at the same height from the bottom surface of the bottom cover , the groove A bottom lid that is shaped to extend in a direction perpendicular to the falling direction of the raw material powder falling downward along the conical surface of the raw powder,
A raw material supply method for supplying a raw material using a raw material supply device comprising a support member for suspending the bottom lid,
Filling the bulk material into the raw material supply pipe fitted with the bottom lid;
A process of suspending and holding a raw material supply apparatus including the raw material filled in the raw material supply pipe by supporting the raw material supply apparatus in the single crystal growth apparatus with the support member;
And a step of releasing the filled raw material by removing the bottom cover.

Images