JP4864202B2 - 単一電荷キャリアトランジスタ、量子ドット内に電荷キャリアを保持する方法、及び検出方法 - Google Patents
単一電荷キャリアトランジスタ、量子ドット内に電荷キャリアを保持する方法、及び検出方法 Download PDFInfo
- Publication number
- JP4864202B2 JP4864202B2 JP2000555299A JP2000555299A JP4864202B2 JP 4864202 B2 JP4864202 B2 JP 4864202B2 JP 2000555299 A JP2000555299 A JP 2000555299A JP 2000555299 A JP2000555299 A JP 2000555299A JP 4864202 B2 JP4864202 B2 JP 4864202B2
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- Expired - Fee Related
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- 239000002096 quantum dot Substances 0.000 title abstract description 16
- 239000002800 charge carrier Substances 0.000 title description 16
- 238000000034 method Methods 0.000 title description 16
- 238000001514 detection method Methods 0.000 title description 2
- 239000000463 material Substances 0.000 claims abstract description 140
- 239000004065 semiconductor Substances 0.000 claims abstract description 62
- 230000005669 field effect Effects 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 95
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 15
- 239000012212 insulator Substances 0.000 claims description 13
- 239000002356 single layer Substances 0.000 claims description 8
- 229910004613 CdTe Inorganic materials 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 2
- 125000005842 heteroatom Chemical group 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract description 7
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 description 19
- 230000005641 tunneling Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 230000005684 electric field Effects 0.000 description 10
- 230000008901 benefit Effects 0.000 description 9
- 238000005036 potential barrier Methods 0.000 description 8
- 238000005381 potential energy Methods 0.000 description 8
- 239000004047 hole gas Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000013139 quantization Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000002772 conduction electron Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000005533 two-dimensional electron gas Effects 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 210000001217 buttock Anatomy 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/014—Manufacture or treatment of FETs having zero-dimensional [0D] or one-dimensional [1D] channels, e.g. quantum wire FETs, single-electron transistors [SET] or Coulomb blockade transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
- H10D30/402—Single electron transistors; Coulomb blockade transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
- H10D30/43—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 1D charge carrier gas channels, e.g. quantum wire FETs or transistors having 1D quantum-confined channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
- H10D62/812—Single quantum well structures
- H10D62/813—Quantum wire structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
- H10D62/812—Single quantum well structures
- H10D62/814—Quantum box structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/936—Specified use of nanostructure for electronic or optoelectronic application in a transistor or 3-terminal device
- Y10S977/937—Single electron transistor
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9813142.8 | 1998-06-19 | ||
| GB9813142A GB2338592A (en) | 1998-06-19 | 1998-06-19 | Single electron transistor |
| PCT/GB1999/001885 WO1999066561A1 (en) | 1998-06-19 | 1999-06-18 | Single charge carrier transistor, method of holding a charge carrier within a quantum dot, and method of detection |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002518850A JP2002518850A (ja) | 2002-06-25 |
| JP2002518850A5 JP2002518850A5 (enExample) | 2006-08-10 |
| JP4864202B2 true JP4864202B2 (ja) | 2012-02-01 |
Family
ID=10833967
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000555300A Abandoned JP2002518851A (ja) | 1998-06-19 | 1999-06-18 | 量子ワイヤー電界効果トランジスタ及びその製造方法 |
| JP2000555299A Expired - Fee Related JP4864202B2 (ja) | 1998-06-19 | 1999-06-18 | 単一電荷キャリアトランジスタ、量子ドット内に電荷キャリアを保持する方法、及び検出方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000555300A Abandoned JP2002518851A (ja) | 1998-06-19 | 1999-06-18 | 量子ワイヤー電界効果トランジスタ及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6753593B1 (enExample) |
| EP (2) | EP1088346A1 (enExample) |
| JP (2) | JP2002518851A (enExample) |
| GB (1) | GB2338592A (enExample) |
| WO (2) | WO1999066561A1 (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6683337B2 (en) * | 2001-02-09 | 2004-01-27 | Micron Technology, Inc. | Dynamic memory based on single electron storage |
| EP1436841A1 (en) * | 2001-05-18 | 2004-07-14 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
| US6978070B1 (en) * | 2001-08-14 | 2005-12-20 | The Programmable Matter Corporation | Fiber incorporating quantum dots as programmable dopants |
| JP4334246B2 (ja) | 2003-02-27 | 2009-09-30 | 富士通株式会社 | 量子半導体装置及びその製造方法 |
| JP4304338B2 (ja) * | 2004-01-13 | 2009-07-29 | 独立行政法人産業技術総合研究所 | 光検出素子 |
| CN101065845A (zh) | 2004-06-04 | 2007-10-31 | 可编程物公司 | 包含作为可编程掺杂剂的量子点的层状复合薄膜 |
| US7465595B2 (en) | 2004-11-09 | 2008-12-16 | Fujitsu Limited | Quantum device, manufacturing method of the same and controlling method of the same |
| KR101045573B1 (ko) * | 2005-07-06 | 2011-07-01 | 인터내쇼널 렉티파이어 코포레이션 | Ⅲ족 질화물 인헨스먼트 모드 소자 |
| US7358581B2 (en) * | 2005-11-17 | 2008-04-15 | Kulite Semiconductor Products, Inc. | Quantum dot based pressure switch |
| US20070194297A1 (en) * | 2006-02-17 | 2007-08-23 | The Programmable Matter Corporation | Quantum Dot Switching Device |
| US7601946B2 (en) * | 2006-09-12 | 2009-10-13 | Ravenbrick, Llc | Electromagnetic sensor incorporating quantum confinement structures |
| US7768693B2 (en) | 2007-01-24 | 2010-08-03 | Ravenbrick Llc | Thermally switched optical downconverting filter |
| US8363307B2 (en) * | 2007-02-28 | 2013-01-29 | Ravenbrick, Llc | Multicolor light emitting device incorporating tunable quantum confinement devices |
| US7936500B2 (en) * | 2007-03-02 | 2011-05-03 | Ravenbrick Llc | Wavelength-specific optical switch |
| EP2171520A4 (en) | 2007-07-11 | 2011-09-07 | Ravenbrick Llc | REFLECTIVE OPTICAL SHUTTER WITH THERMAL SWITCHING |
| WO2009039423A1 (en) | 2007-09-19 | 2009-03-26 | Ravenbrick, Llc | Low-emissivity window films and coatings incoporating nanoscale wire grids |
| US8169685B2 (en) | 2007-12-20 | 2012-05-01 | Ravenbrick, Llc | Thermally switched absorptive window shutter |
| US8634137B2 (en) | 2008-04-23 | 2014-01-21 | Ravenbrick Llc | Glare management of reflective and thermoreflective surfaces |
| US9116302B2 (en) | 2008-06-19 | 2015-08-25 | Ravenbrick Llc | Optical metapolarizer device |
| CA2737041C (en) | 2008-08-20 | 2013-10-15 | Ravenbrick, Llc | Methods for fabricating thermochromic filters |
| CN102460238A (zh) | 2009-04-10 | 2012-05-16 | 雷文布里克有限责任公司 | 结合有宾主型结构的热切换滤光器 |
| US8643795B2 (en) | 2009-04-10 | 2014-02-04 | Ravenbrick Llc | Thermally switched optical filter incorporating a refractive optical structure |
| US8867132B2 (en) * | 2009-10-30 | 2014-10-21 | Ravenbrick Llc | Thermochromic filters and stopband filters for use with same |
| AU2011235265A1 (en) | 2010-03-29 | 2012-10-25 | Ravenbrick Llc | Polymer-stabilized thermotropic liquid crystal device |
| GB2480265B (en) * | 2010-05-10 | 2013-10-02 | Toshiba Res Europ Ltd | A semiconductor device and a method of fabricating a semiconductor device |
| WO2011153214A2 (en) | 2010-06-01 | 2011-12-08 | Ravenbrick Llc | Multifunctional building component |
| US8933488B2 (en) * | 2010-12-03 | 2015-01-13 | The Board Of Trustees Of The Leland Stanford Junior Univerity | Heterostructure field effect transistor with same channel and barrier configuration for PMOS and NMOS |
| WO2013033608A2 (en) | 2011-09-01 | 2013-03-07 | Wil Mccarthy | Thermotropic optical shutter incorporating coatable polarizers |
| US9859409B2 (en) * | 2016-04-28 | 2018-01-02 | International Business Machines Corporation | Single-electron transistor with wrap-around gate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0864525A (ja) * | 1994-08-23 | 1996-03-08 | Hitachi Ltd | 結晶粒の形成方法および半導体装置 |
| JPH08264750A (ja) * | 1995-03-20 | 1996-10-11 | Fujitsu Ltd | 量子半導体装置 |
| US5654558A (en) * | 1994-11-14 | 1997-08-05 | The United States Of America As Represented By The Secretary Of The Navy | Interband lateral resonant tunneling transistor |
| JPH1093109A (ja) * | 1996-09-13 | 1998-04-10 | Nippon Telegr & Teleph Corp <Ntt> | クーロンブロッケイド素子とその製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1315865C (en) | 1988-02-09 | 1993-04-06 | Elyahou Kapon | Semiconductor super lattice heterostructure fabrication methods, structures and devices |
| US5497015A (en) | 1988-11-12 | 1996-03-05 | Sony Corporation | Quantum interference transistor |
| EP0386388A1 (en) | 1989-03-10 | 1990-09-12 | International Business Machines Corporation | Method for the epitaxial growth of a semiconductor structure |
| EP0661733A2 (en) * | 1993-12-21 | 1995-07-05 | International Business Machines Corporation | One dimensional silicon quantum wire devices and the method of manufacture thereof |
| GB2288274A (en) * | 1994-03-31 | 1995-10-11 | Sharp Kk | Quantum device and method of making such a device |
| JPH07326730A (ja) | 1994-05-31 | 1995-12-12 | Mitsubishi Electric Corp | 半導体装置,その製造方法,単一電子デバイス,及びその製造方法 |
| GB2295272B (en) | 1994-11-15 | 1998-01-14 | Toshiba Cambridge Res Center | Semiconductor device |
| DE19522351A1 (de) * | 1995-06-20 | 1997-01-09 | Max Planck Gesellschaft | Verfahren zur Herstellung von Quantenstrukturen, insbesondere von Quantenpunkten und Tunnelbarrieren sowie Bauelemente mit solchen Quantenstrukturen |
| US5945686A (en) * | 1997-04-28 | 1999-08-31 | Hitachi, Ltd. | Tunneling electronic device |
| KR100240629B1 (ko) * | 1997-08-30 | 2000-01-15 | 정선종 | 테라급 집적이 가능한 대전효과 트랜지스터 및 그 제조방법 |
| KR19990024760A (ko) * | 1997-09-08 | 1999-04-06 | 정선종 | 양자세선 제조 방법 |
| US6063688A (en) * | 1997-09-29 | 2000-05-16 | Intel Corporation | Fabrication of deep submicron structures and quantum wire transistors using hard-mask transistor width definition |
-
1998
- 1998-06-19 GB GB9813142A patent/GB2338592A/en not_active Withdrawn
-
1999
- 1999-06-18 JP JP2000555300A patent/JP2002518851A/ja not_active Abandoned
- 1999-06-18 JP JP2000555299A patent/JP4864202B2/ja not_active Expired - Fee Related
- 1999-06-18 US US09/701,884 patent/US6753593B1/en not_active Expired - Lifetime
- 1999-06-18 US US09/719,484 patent/US6498354B1/en not_active Expired - Fee Related
- 1999-06-18 WO PCT/GB1999/001885 patent/WO1999066561A1/en not_active Ceased
- 1999-06-18 EP EP99928062A patent/EP1088346A1/en not_active Withdrawn
- 1999-06-18 EP EP99957113A patent/EP1088347B1/en not_active Expired - Lifetime
- 1999-06-18 WO PCT/GB1999/001940 patent/WO1999066562A1/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0864525A (ja) * | 1994-08-23 | 1996-03-08 | Hitachi Ltd | 結晶粒の形成方法および半導体装置 |
| US5654558A (en) * | 1994-11-14 | 1997-08-05 | The United States Of America As Represented By The Secretary Of The Navy | Interband lateral resonant tunneling transistor |
| JPH08264750A (ja) * | 1995-03-20 | 1996-10-11 | Fujitsu Ltd | 量子半導体装置 |
| JPH1093109A (ja) * | 1996-09-13 | 1998-04-10 | Nippon Telegr & Teleph Corp <Ntt> | クーロンブロッケイド素子とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002518851A (ja) | 2002-06-25 |
| EP1088347A1 (en) | 2001-04-04 |
| US6753593B1 (en) | 2004-06-22 |
| WO1999066561A1 (en) | 1999-12-23 |
| WO1999066562A1 (en) | 1999-12-23 |
| US6498354B1 (en) | 2002-12-24 |
| GB2338592A (en) | 1999-12-22 |
| EP1088346A1 (en) | 2001-04-04 |
| EP1088347B1 (en) | 2011-11-23 |
| GB9813142D0 (en) | 1998-08-19 |
| JP2002518850A (ja) | 2002-06-25 |
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