JP4847342B2 - 熱伝達を必要とする装置及び熱伝達方法 - Google Patents
熱伝達を必要とする装置及び熱伝達方法 Download PDFInfo
- Publication number
- JP4847342B2 JP4847342B2 JP2006545339A JP2006545339A JP4847342B2 JP 4847342 B2 JP4847342 B2 JP 4847342B2 JP 2006545339 A JP2006545339 A JP 2006545339A JP 2006545339 A JP2006545339 A JP 2006545339A JP 4847342 B2 JP4847342 B2 JP 4847342B2
- Authority
- JP
- Japan
- Prior art keywords
- ocf
- cfhcf
- heat transfer
- transfer fluid
- ochfhcf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012546 transfer Methods 0.000 title claims description 53
- 238000000034 method Methods 0.000 title claims description 18
- 239000013529 heat transfer fluid Substances 0.000 claims description 39
- 239000004065 semiconductor Substances 0.000 claims description 26
- 150000001875 compounds Chemical class 0.000 claims description 24
- 238000012360 testing method Methods 0.000 claims description 24
- 230000007246 mechanism Effects 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 13
- 230000035939 shock Effects 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- 239000000446 fuel Substances 0.000 claims description 5
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 33
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 24
- 239000012530 fluid Substances 0.000 description 23
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 20
- 239000000463 material Substances 0.000 description 16
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 16
- 239000010702 perfluoropolyether Substances 0.000 description 14
- 239000000047 product Substances 0.000 description 12
- 239000000203 mixture Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 238000009835 boiling Methods 0.000 description 10
- 229910000027 potassium carbonate Inorganic materials 0.000 description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 9
- 239000004215 Carbon black (E152) Substances 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 8
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 231100000053 low toxicity Toxicity 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 239000012071 phase Substances 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 229920002545 silicone oil Polymers 0.000 description 6
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 5
- 238000010792 warming Methods 0.000 description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 150000001336 alkenes Chemical class 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 238000004821 distillation Methods 0.000 description 4
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical compound FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 4
- 239000011541 reaction mixture Substances 0.000 description 4
- MIYCNZXRUKZGOW-UHFFFAOYSA-N 1,1,1,2,2,3,3-heptafluoro-3-[1,2,2-trifluoro-2-[2-(1,1,2,3,3,3-hexafluoropropoxy)ethoxy]ethoxy]propane Chemical compound FC(F)(F)C(F)(F)C(F)(F)OC(F)C(F)(F)OCCOC(F)(F)C(F)C(F)(F)F MIYCNZXRUKZGOW-UHFFFAOYSA-N 0.000 description 3
- ZCEWRILAUIFWAC-UHFFFAOYSA-N 1,1,1,2,3,3-hexafluoro-3-[2-(1,1,2,3,3,3-hexafluoropropoxy)ethoxy]propane Chemical compound FC(F)(F)C(F)C(F)(F)OCCOC(F)(F)C(F)C(F)(F)F ZCEWRILAUIFWAC-UHFFFAOYSA-N 0.000 description 3
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 3
- 229920001774 Perfluoroether Polymers 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- -1 hydrocarbon alcohols Chemical class 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 3
- 230000002688 persistence Effects 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- WIISIUGKJRHYBI-UHFFFAOYSA-N 1,1,1,2,3,3-hexafluoro-3-[3-(1,1,2,3,3,3-hexafluoropropoxy)propoxy]propane Chemical compound FC(F)(F)C(F)C(F)(F)OCCCOC(F)(F)C(F)C(F)(F)F WIISIUGKJRHYBI-UHFFFAOYSA-N 0.000 description 2
- CUBBCUGJYKOQJL-UHFFFAOYSA-N 1,1,2-trifluoro-2-(trifluoromethoxy)-1-[2-[1,1,2-trifluoro-2-(trifluoromethoxy)ethoxy]ethoxy]ethane Chemical compound FC(F)(F)OC(F)C(F)(F)OCCOC(F)(F)C(F)OC(F)(F)F CUBBCUGJYKOQJL-UHFFFAOYSA-N 0.000 description 2
- BZPCMSSQHRAJCC-UHFFFAOYSA-N 1,2,3,3,4,4,5,5,5-nonafluoro-1-(1,2,3,3,4,4,5,5,5-nonafluoropent-1-enoxy)pent-1-ene Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)=C(F)OC(F)=C(F)C(F)(F)C(F)(F)C(F)(F)F BZPCMSSQHRAJCC-UHFFFAOYSA-N 0.000 description 2
- BEFGPIIIBJJRHO-UHFFFAOYSA-N 2,2,3,3,4,4-hexafluoro-1,5-bis(1,1,2,3,3,3-hexafluoropropoxy)pentane Chemical compound FC(F)(F)C(F)C(F)(F)OCC(F)(F)C(F)(F)C(F)(F)COC(F)(F)C(F)C(F)(F)F BEFGPIIIBJJRHO-UHFFFAOYSA-N 0.000 description 2
- WUFACZFVWSWOMI-UHFFFAOYSA-N 2-[1,1,2-trifluoro-2-(1,1,2,2,3,3,3-heptafluoropropoxy)ethoxy]ethanol Chemical compound OCCOC(F)(F)C(F)OC(F)(F)C(F)(F)C(F)(F)F WUFACZFVWSWOMI-UHFFFAOYSA-N 0.000 description 2
- ACYWZJNKZRMRRY-UHFFFAOYSA-N 2-chloro-1-[2-(2-chloro-1,1,2-trifluoroethoxy)ethoxy]-1,1,2-trifluoroethane Chemical compound FC(Cl)C(F)(F)OCCOC(F)(F)C(F)Cl ACYWZJNKZRMRRY-UHFFFAOYSA-N 0.000 description 2
- 229920006926 PFC Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000004035 construction material Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- BLTXWCKMNMYXEA-UHFFFAOYSA-N 1,1,2-trifluoro-2-(trifluoromethoxy)ethene Chemical compound FC(F)=C(F)OC(F)(F)F BLTXWCKMNMYXEA-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N dimethylmethane Natural products CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000002637 fluid replacement therapy Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000004508 fractional distillation Methods 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 description 1
- 231100000344 non-irritating Toxicity 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- QMMOXUPEWRXHJS-UHFFFAOYSA-N pentene-2 Natural products CCC=CC QMMOXUPEWRXHJS-UHFFFAOYSA-N 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000002390 rotary evaporation Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/04—Saturated ethers
- C07C43/12—Saturated ethers containing halogen
- C07C43/126—Saturated ethers containing halogen having more than one ether bond
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/738,887 US7128133B2 (en) | 2003-12-16 | 2003-12-16 | Hydrofluoroether as a heat-transfer fluid |
| US10/738,887 | 2003-12-16 | ||
| PCT/US2004/035721 WO2005060434A2 (en) | 2003-12-16 | 2004-10-28 | Hydrofluoroether as a heat-transfer fluid |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007524737A JP2007524737A (ja) | 2007-08-30 |
| JP2007524737A5 JP2007524737A5 (https=) | 2007-11-29 |
| JP4847342B2 true JP4847342B2 (ja) | 2011-12-28 |
Family
ID=34654270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006545339A Expired - Fee Related JP4847342B2 (ja) | 2003-12-16 | 2004-10-28 | 熱伝達を必要とする装置及び熱伝達方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US7128133B2 (https=) |
| EP (1) | EP1711574B1 (https=) |
| JP (1) | JP4847342B2 (https=) |
| KR (1) | KR101128229B1 (https=) |
| CN (1) | CN1894356B (https=) |
| WO (1) | WO2005060434A2 (https=) |
Families Citing this family (72)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7128133B2 (en) * | 2003-12-16 | 2006-10-31 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| CN101056921A (zh) * | 2004-11-08 | 2007-10-17 | 3M创新有限公司 | 使用氢氟醚成核剂制备聚合物泡沫 |
| US20060176699A1 (en) * | 2005-02-08 | 2006-08-10 | Crunk Paul D | Fluid cooling lighting system |
| US7691282B2 (en) * | 2005-09-08 | 2010-04-06 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| US7790312B2 (en) * | 2005-09-08 | 2010-09-07 | 3M Innovative Properties Company | Electrolyte composition |
| ITMI20060381A1 (it) * | 2006-03-02 | 2007-09-03 | Solvay Solexis Spa | Fluidi di scambio termico |
| JP4822265B2 (ja) * | 2006-03-13 | 2011-11-24 | 独立行政法人産業技術総合研究所 | 含フッ素ポリエーテル化合物およびその製造方法 |
| US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| WO2008024602A1 (en) * | 2006-08-24 | 2008-02-28 | 3M Innovative Properties Company | Process for producing fluoropolymers |
| JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
| US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| FR2912419B1 (fr) * | 2007-02-12 | 2012-11-16 | Arkema France | Fluide frigorigene a base de diether lineaire. |
| JP5022111B2 (ja) * | 2007-06-06 | 2012-09-12 | パナソニック株式会社 | 含フッ素アルコキシアルカンの製造方法 |
| US7790002B2 (en) * | 2007-07-05 | 2010-09-07 | Nevada Heat Treating, Inc. | Ultrasonic transducer and horn used in oxidative desulfurization of fossil fuels |
| US7879200B2 (en) * | 2007-07-05 | 2011-02-01 | Nevada Heat Treating, Inc. | Ultrasonic transducer and horn used in oxidative desulfurization of fossil fuels |
| WO2009006426A2 (en) * | 2007-07-05 | 2009-01-08 | Nevada Heat Treating, Inc. | Ultrasonic transducer and horn used in oxidative desulfurization of fossil fuels |
| EP2025731A1 (en) * | 2007-08-06 | 2009-02-18 | Solvay Solexis S.p.A. | Heat Transfer fluid |
| US7737307B2 (en) * | 2007-08-06 | 2010-06-15 | E. I. Du Pont De Nemours And Company | Fluorinated nonionic surfactants |
| WO2009070728A1 (en) * | 2007-11-27 | 2009-06-04 | The Curators Of The University Of Missouri | Thermally driven heat pump for heating and cooling |
| US20090176148A1 (en) * | 2008-01-04 | 2009-07-09 | 3M Innovative Properties Company | Thermal management of electrochemical cells |
| US8003004B2 (en) * | 2008-01-23 | 2011-08-23 | 3M Innovative Properties Company | Heat transfer apparatus and methods including hydrofluorocarbonates |
| US8071816B2 (en) * | 2008-06-30 | 2011-12-06 | 3M Innovative Properties Company | Hydrofluoroacetal compounds and processes for their preparation and use |
| CN102224216B (zh) * | 2008-09-26 | 2015-01-28 | 索尔维索莱克西斯公司 | 传热方法 |
| US7988877B2 (en) | 2008-11-03 | 2011-08-02 | 3M Innovative Properties Company | Methods of making fluorinated ethers, fluorinated ethers, and uses thereof |
| FR2941691B1 (fr) | 2009-02-02 | 2013-09-20 | Souza Guillaume De | Unite de pretraitement d'eau par echange a contact direct. |
| US20100263885A1 (en) | 2009-04-21 | 2010-10-21 | 3M Innovative Properties Company | Protection systems and methods for electronic devices |
| BRPI0924862A2 (pt) | 2009-06-12 | 2016-08-23 | Abb Technology Ag | meio de isolação dielétrica |
| DE202009009305U1 (de) | 2009-06-17 | 2009-11-05 | Ormazabal Gmbh | Schalteinrichtung für Mittel-, Hoch- oder Höchstspannung mit einem Füllmedium |
| US9010318B2 (en) | 2009-09-04 | 2015-04-21 | Wisconsin Alumni Research Foundation | Extended-range heat transfer fluid using variable composition |
| US8763408B2 (en) * | 2009-10-01 | 2014-07-01 | The Curators Of The University Of Missouri | Hybrid thermoelectric-ejector cooling system |
| US8323524B2 (en) * | 2009-10-01 | 2012-12-04 | 3M Innovative Properties Company | Apparatus including hydrofluoroether with high temperature stability and uses thereof |
| KR101104308B1 (ko) * | 2009-10-09 | 2012-01-11 | 한국과학기술연구원 | 함불소 에테르계 화합물, 이의 제조방법 및 이를 이용한 이산화탄소 흡수제 |
| US8261560B2 (en) * | 2009-11-02 | 2012-09-11 | 3M Innovative Properties Company | Methods of using hydrofluoroethers as heat transfer fluids |
| US8193393B2 (en) | 2010-03-26 | 2012-06-05 | 3M Innovative Properties Company | Fluoroether diketones for high temperature heat transfer |
| US8535559B2 (en) * | 2010-03-26 | 2013-09-17 | 3M Innovative Properties Company | Nitrogen-containing fluoroketones for high temperature heat transfer |
| KR20130128433A (ko) * | 2010-12-14 | 2013-11-26 | 에이비비 리써치 리미티드 | 유전성 절연 매질 |
| DK2652752T3 (en) | 2010-12-14 | 2016-01-11 | Abb Technology Ag | Dielectric INSULATION MEDIUM |
| RU2567754C2 (ru) | 2010-12-16 | 2015-11-10 | Абб Текнолоджи Аг | Диэлектрическая изолирующая среда |
| JP2014509302A (ja) * | 2010-12-21 | 2014-04-17 | ソルヴェイ・スペシャルティ・ポリマーズ・イタリー・エッセ・ピ・ア | フッ素化有機化合物の製造方法 |
| EP2688973A1 (en) * | 2011-03-25 | 2014-01-29 | 3M Innovative Properties Company | Fluorinated oxiranes as heat transfer fluids |
| WO2013087700A1 (en) | 2011-12-13 | 2013-06-20 | Abb Technology Ag | Sealed and gas insulated high voltage converter environment for offshore platforms |
| WO2014053462A1 (en) | 2012-10-01 | 2014-04-10 | Abb Technology Ag | Electrical insulator comprising an organofluorine compound and method for producing it |
| CN104813415B (zh) | 2012-10-05 | 2017-05-10 | Abb 技术有限公司 | 容纳包括有机氟化合物的介电绝缘气体的设备 |
| EP2747092A1 (en) * | 2012-12-21 | 2014-06-25 | Solvay SA | A method for dielectrically insulating active electric parts |
| US10464874B2 (en) * | 2014-02-21 | 2019-11-05 | Merck Patent Gmbh | Fluorinated tensides |
| DE202014003207U1 (de) | 2014-04-15 | 2014-05-21 | Abb Technology Ag | Elektrische Vorrichtung für die Erzeugung, Übertragung, Verteilung und/oder Verwendung elektrischer Energie |
| MX2016014972A (es) | 2014-05-20 | 2017-05-12 | Abb Schweiz Ag | Aparato electrico para la generacion, transmision, distribucion y/o uso de energia electrica y metodo para recuperar una sustancia de un medio de aislamiento de este aparato. |
| CN106574172B (zh) | 2014-07-16 | 2018-11-02 | 3M创新有限公司 | 氢氟醚烯烃及其使用方法 |
| JP6462182B2 (ja) | 2015-08-19 | 2019-01-30 | アーベーベー・シュバイツ・アーゲー | 電気エネルギーの生成、伝送、配給および/または使用を行うための電気装置の絶縁媒体から少なくとも1つの物質を再生するための方法 |
| KR102739483B1 (ko) * | 2017-12-13 | 2024-12-05 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 하이드로플루오로올레핀 에테르, 조성물, 장치 및 이의 사용 방법 |
| TWI692291B (zh) * | 2018-01-05 | 2020-04-21 | 威剛科技股份有限公司 | 動態隨機存取記憶體模組 |
| CN109652235B (zh) * | 2018-09-29 | 2020-11-13 | 天津市长芦化工新材料有限公司 | 共沸组合物及其应用 |
| EP3917999B1 (en) | 2019-02-01 | 2023-03-08 | Solvay Specialty Polymers USA, LLC. | Process for separating mixtures of solids |
| JP2020128838A (ja) * | 2019-02-08 | 2020-08-27 | 株式会社デンソー | 熱輸送システム |
| JP7833891B2 (ja) * | 2019-03-18 | 2026-03-23 | サイエンスコ スペシャルティ ポリマーズ イタリー エス.ピー.エー. | 低いgwpを有するフッ素化化合物を使用する熱交換方法 |
| JP7338596B2 (ja) * | 2020-09-17 | 2023-09-05 | トヨタ自動車株式会社 | 非水冷却液組成物及び冷却システム |
| CN113604202B (zh) * | 2021-06-25 | 2023-07-04 | 浙江巨化技术中心有限公司 | 一种组合物、浸没式液冷剂及其应用以及浸没式液冷系统 |
| CN113773176B (zh) * | 2021-09-30 | 2024-03-19 | 三明市海斯福化工有限责任公司 | 一种含氟化合物、包含其的冷却剂及用途 |
| CN113773177B (zh) * | 2021-09-30 | 2024-03-12 | 三明市海斯福化工有限责任公司 | 一种含氟氧杂烷烃、包含其的用于半导体制程的冷却剂及用途 |
| US12534657B2 (en) | 2022-03-23 | 2026-01-27 | Nano And Advanced Materials Institute Limited | Two-phase immersion cooling |
| JP2025522606A (ja) * | 2022-06-29 | 2025-07-15 | ソルベイ スペシャルティ ポリマーズ イタリー エス.ピー.エー. | ハイドロフルオロエーテル組成物及びその調製方法 |
| JP2025522600A (ja) * | 2022-06-29 | 2025-07-15 | ソルベイ スペシャルティ ポリマーズ イタリー エス.ピー.エー. | ハイドロフルオロエーテルを製造する方法 |
| CN116003229B (zh) * | 2022-11-30 | 2024-09-20 | 浙江诺亚氟化工有限公司 | 一种氢氟醚化合物及其制备方法与在制备半导体干蚀刻液冷剂中的应用 |
| CN116063983B (zh) * | 2023-01-09 | 2026-04-07 | 浙江巨化技术中心有限公司 | 一种高热稳定性氢氟醚的应用 |
| WO2025105430A1 (ja) * | 2023-11-17 | 2025-05-22 | Agc株式会社 | 電子デバイスの信頼性試験用の試験液及び試験方法 |
| WO2025105412A1 (ja) * | 2023-11-17 | 2025-05-22 | Agc株式会社 | ハイドロフルオロエーテル組成物 |
| WO2025105413A1 (ja) * | 2023-11-17 | 2025-05-22 | Agc株式会社 | 熱媒体 |
| CN117776878A (zh) * | 2023-12-14 | 2024-03-29 | 苏州德加能源科技有限公司 | 一种乙二醇单(双)含氟醚的制备方法 |
| WO2025158989A1 (ja) * | 2024-01-24 | 2025-07-31 | Agc株式会社 | 共沸組成物及び共沸様組成物 |
| WO2025158990A1 (ja) * | 2024-01-24 | 2025-07-31 | Agc株式会社 | ハイドロフルオロエーテル組成物 |
| WO2025164448A1 (ja) * | 2024-01-31 | 2025-08-07 | Agc株式会社 | ハイドロフルオロエーテルオレフィンの濃度低減方法 |
| WO2026034406A1 (ja) * | 2024-08-08 | 2026-02-12 | Agc株式会社 | ハイドロフルオロエーテル組成物 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000063311A (ja) * | 1998-08-11 | 2000-02-29 | Ausimont Spa | 発泡組成物 |
| JP2000204360A (ja) * | 1999-01-08 | 2000-07-25 | Kajima Corp | 直膨式直接接触型製氷用の冷媒 |
| JP2001342458A (ja) * | 2000-05-30 | 2001-12-14 | Three M Innovative Properties Co | 蒸発系熱伝達作動液 |
| WO2002050005A1 (en) * | 2000-12-21 | 2002-06-27 | Ineos Fluor Holdings Limited | Process for the purification of fluoromethyl hexafluoroisopropyl ether |
| JP2003213251A (ja) * | 2001-10-23 | 2003-07-30 | Ausimont Spa | 電離放射線および/または中性子照射の存在下での熱交換用または作動液としてのフッ素化液体の使用 |
| JP2004027178A (ja) * | 2002-01-08 | 2004-01-29 | Ausimont Spa | フッ素化液体の使用 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3362180A (en) | 1965-08-25 | 1968-01-09 | Du Pont | Chemical process |
| US3549711A (en) | 1967-06-20 | 1970-12-22 | Dow Chemical Co | Haloethers |
| US3739033A (en) | 1971-03-01 | 1973-06-12 | Allied Chem | Novel fluorinated aliphatic triethers |
| GB1354138A (en) | 1971-10-15 | 1974-06-05 | Ici Ltd | Fluorocarbon surfactants |
| US4079084A (en) | 1972-03-15 | 1978-03-14 | Imperial Chemical Industries Limited | Fluorocarbon surfactants |
| NL7401510A (https=) | 1973-02-09 | 1974-08-13 | ||
| FR2287432A1 (fr) | 1974-10-10 | 1976-05-07 | Poudres & Explosifs Ste Nale | Nouveaux ethers fluores et leur procede de preparation |
| JPH0688928B2 (ja) | 1985-07-20 | 1994-11-09 | 株式会社ネオス | 含フツ素カルボン酸およびその塩 |
| GB9121665D0 (en) * | 1991-10-11 | 1991-11-27 | Boc Group Plc | Sputtering processes and apparatus |
| US5925611A (en) | 1995-01-20 | 1999-07-20 | Minnesota Mining And Manufacturing Company | Cleaning process and composition |
| CA2233874A1 (en) | 1995-10-20 | 1997-04-24 | Gregory J. Sherwood | Hydrofluoroethers as low temperature refrigerants |
| US5750797A (en) | 1996-04-15 | 1998-05-12 | Minnesota Mining And Manufacturing Company | Process for the production of hydrofluoroethers |
| DE19619233A1 (de) * | 1996-05-13 | 1997-11-20 | Hoechst Ag | Fluorhaltige Lösungsmittel für Lithiumbatterien mit erhöhter Sicherheit |
| BE1010420A3 (fr) * | 1996-07-12 | 1998-07-07 | Cockerill Rech & Dev | Procede pour la formation d'un revetement sur un substrat et installation pour la mise en oeuvre de ce procede. |
| US5847048A (en) | 1997-10-01 | 1998-12-08 | E. I. Du Pont De Nemours And Company | Polymers containing fluoroalkoxy side chains |
| US6429400B1 (en) | 1997-12-03 | 2002-08-06 | Matsushita Electric Works Ltd. | Plasma processing apparatus and method |
| US6866094B2 (en) | 1997-12-31 | 2005-03-15 | Temptronic Corporation | Temperature-controlled chuck with recovery of circulating temperature control fluid |
| US6280808B1 (en) * | 1999-05-25 | 2001-08-28 | Rohm And Haas Company | Process and apparatus for forming plastic sheet |
| US6205799B1 (en) | 1999-09-13 | 2001-03-27 | Hewlett-Packard Company | Spray cooling system |
| US6297308B1 (en) | 1999-10-07 | 2001-10-02 | 3M Innovative Properties Company | Chemical compositions |
| US6303080B1 (en) | 1999-10-08 | 2001-10-16 | 3M Innovative Properties Company | Hydrofluoroethers as heat-transfer fluids in low temperature processes requiring sterilization |
| US6374907B1 (en) | 1999-10-08 | 2002-04-23 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US6347907B1 (en) * | 2000-01-06 | 2002-02-19 | David Halstead | Dolly and method of use |
| CA2451426A1 (en) | 2001-06-18 | 2002-12-27 | Honeywell International Inc. | Fluorine-containing compounds and polymers derived therefrom |
| US7128133B2 (en) * | 2003-12-16 | 2006-10-31 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
-
2003
- 2003-12-16 US US10/738,887 patent/US7128133B2/en not_active Expired - Lifetime
-
2004
- 2004-10-28 WO PCT/US2004/035721 patent/WO2005060434A2/en not_active Ceased
- 2004-10-28 EP EP04796590A patent/EP1711574B1/en not_active Expired - Lifetime
- 2004-10-28 KR KR1020067011848A patent/KR101128229B1/ko not_active Expired - Fee Related
- 2004-10-28 CN CN2004800375933A patent/CN1894356B/zh not_active Expired - Fee Related
- 2004-10-28 JP JP2006545339A patent/JP4847342B2/ja not_active Expired - Fee Related
-
2006
- 2006-09-28 US US11/536,091 patent/US7390427B2/en not_active Expired - Fee Related
-
2008
- 2008-05-13 US US12/119,571 patent/US7651627B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000063311A (ja) * | 1998-08-11 | 2000-02-29 | Ausimont Spa | 発泡組成物 |
| JP2000204360A (ja) * | 1999-01-08 | 2000-07-25 | Kajima Corp | 直膨式直接接触型製氷用の冷媒 |
| JP2001342458A (ja) * | 2000-05-30 | 2001-12-14 | Three M Innovative Properties Co | 蒸発系熱伝達作動液 |
| WO2002050005A1 (en) * | 2000-12-21 | 2002-06-27 | Ineos Fluor Holdings Limited | Process for the purification of fluoromethyl hexafluoroisopropyl ether |
| JP2003213251A (ja) * | 2001-10-23 | 2003-07-30 | Ausimont Spa | 電離放射線および/または中性子照射の存在下での熱交換用または作動液としてのフッ素化液体の使用 |
| JP2004027178A (ja) * | 2002-01-08 | 2004-01-29 | Ausimont Spa | フッ素化液体の使用 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20070018134A1 (en) | 2007-01-25 |
| US20050127322A1 (en) | 2005-06-16 |
| US7128133B2 (en) | 2006-10-31 |
| WO2005060434A3 (en) | 2006-02-02 |
| EP1711574B1 (en) | 2013-03-27 |
| US7390427B2 (en) | 2008-06-24 |
| US20080245509A1 (en) | 2008-10-09 |
| JP2007524737A (ja) | 2007-08-30 |
| EP1711574A4 (en) | 2010-12-01 |
| US7651627B2 (en) | 2010-01-26 |
| CN1894356A (zh) | 2007-01-10 |
| EP1711574A2 (en) | 2006-10-18 |
| KR20060111574A (ko) | 2006-10-27 |
| CN1894356B (zh) | 2011-10-05 |
| KR101128229B1 (ko) | 2012-03-26 |
| WO2005060434A2 (en) | 2005-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4847342B2 (ja) | 熱伝達を必要とする装置及び熱伝達方法 | |
| US6953082B2 (en) | Hydrofluoroether as a heat-transfer fluid | |
| TWI481592B (zh) | 使用氫氟醚做為傳熱液之方法 | |
| KR102730629B1 (ko) | 퍼플루오르화 1-알콕시프로펜, 조성물, 및 이를 사용하기 위한 방법 및 장치 | |
| JP7186185B2 (ja) | 浸漬冷却用流体 | |
| US7055579B2 (en) | Hydrofluoroether as a heat-transfer fluid | |
| KR100669264B1 (ko) | 열전달액으로서의 히드로플루오로에테르 | |
| KR101772721B1 (ko) | 고온 열전달을 위한 질소 함유 플루오로케톤 | |
| KR20140019399A (ko) | 열 전달 유체로서의 플루오르화 옥시란 | |
| JP7689661B2 (ja) | ハイドロフルオロエーテル及びその使用方法 | |
| EP2553039A1 (en) | Fluoroether diketones for high temperature heat transfer | |
| JP7577066B2 (ja) | ハイドロフルオロオレフィン及びその使用方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071010 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071010 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110302 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110308 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110607 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110913 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20111013 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141021 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4847342 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |