KR100669264B1 - 열전달액으로서의 히드로플루오로에테르 - Google Patents
열전달액으로서의 히드로플루오로에테르 Download PDFInfo
- Publication number
- KR100669264B1 KR100669264B1 KR1020027004447A KR20027004447A KR100669264B1 KR 100669264 B1 KR100669264 B1 KR 100669264B1 KR 1020027004447 A KR1020027004447 A KR 1020027004447A KR 20027004447 A KR20027004447 A KR 20027004447A KR 100669264 B1 KR100669264 B1 KR 100669264B1
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- Prior art keywords
- heat transfer
- heat
- temperature
- liquid
- transfer liquid
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C19/00—Acyclic saturated compounds containing halogen atoms
- C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/04—Saturated ethers
- C07C43/12—Saturated ethers containing halogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Lubricants (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
성분의 구조 | 1H/19F-NMR 상대 중량% 농도 (단일 시도 측정) |
n-CF3CF2CF2CF(OCH2CH3)-CF(CF3)2 | 99.86 % |
[(CF3)2-CF-]2-CF-0-CH2CH3 | 0.093 % |
CF3CF2CF2CF(OCH3)-CF(CF3)2 | 0.044 % |
CF30CF2CF2CF(OCH2CH3)CF(CF3)2 | 0.0057 % |
가능한 아세톤 | 0.0005 % |
25℃에서의 액체 밀도 | 1614 kg/㎥ |
25℃에서의 비열 | 1128 J/kg℃ |
25℃에서의 동점성계수 | 0.77 센티스토크스 |
구조 1 | 구조 2 | 구조 3 | 구조 4 | 구조 5 | |
분자량 (달톤) | 584 | 600 | 616 | 618 | 634 |
비율 | 다양 | 다양 | 다양 | 다양 | 다양 |
m | 2 | 1 | 0 | 4 | 3 |
n | 3 | 5 | 7 | 0 | 2 |
구조 1 | 구조 2 | 구조 3 | 구조 4 | |
분자량 (달톤) | 416 | 466 | 532 | 582 |
비 율 | 17.9 % | 38.8 % | 18.1 % | 21.9 % |
m | 2 | 3 | 3 | 4 |
n | 1 | 0 | 1 | 0 |
펌핑 파우어 w/m | 초기 비점 ℃ | 겔 온도 ℃ | 주요 구성요소 분자량 범위 달톤 | 분자량 윈도우 달톤 | △MW/MW | |
n-C3F7CF(OC2H5)CF(CF3)2 | 0.197 | 128 | -100 | 414 | 0 | 0% |
H-갈덴(상표명) ZT-130 (비교) | 0.313 | 125 | -115 | 416-582 | 166 | 35% |
HT-135 (비교) | 0.704 | 135 | <-100 | 584-634 | 50 | 8% |
FC-3283 (비교) | 0.292 | 130 | -50 | 521 | 0 | 0% |
Claims (9)
- (a) 디바이스; 및(b) 열전달액의 사용을 포함하는, 상기 디바이스에 또는 그것으로부터 열을 전달하기 위한 수단을 포함하며, 여기서 상기 열전달액이 3-에톡시-퍼플루오로(2-메틸헥산)인, 열전달을 필요로 하는 장치.
- 제1항에 있어서, 상기 디바이스가 마이크로프로세서, 반도체 디바이스를 제조하기 위하여 사용되는 웨이퍼, 전력 조절 반도체, 전기적 분배 스위치 기어, 전력 변압기, 회로 보드, 멀티-칩 모듈, 포장된 및 비포장된 반도체 디바이스, 화학 반응기, 핵 반응기, 연료전지, 레이저 및 미사일 구성요소로 구성되는 군으로부터 선택되는 장치.
- 삭제
- 삭제
- 삭제
- 제1항에 있어서, 상기 열을 전달하기 위한 수단이 PECVD 공구에서 온도 조절 되는 웨이퍼 척, 다이 성능 시험을 위한 온도 조절되는 시험 헤드, 반도체 공정 장치내에서 온도 조절되는 작업 구역, 열충격 시험조 액체 저장소 및 항온조로 구성되는 군으로부터 선택되는 장치.
- 삭제
- (a) 디바이스를 제공하는 단계;(b) 열전달액을 포함하는 열을 전달하기 위한 수단을 제공하는 단계; 및(c) 디바이스에 또는 그것으로부터 열을 전달하기 위하여 열전달액을 사용하는 단계를 포함하며, 여기서 열전달액이 3-에톡시-퍼플루오로(2-메틸헥산)인, 열 전달 방법.
- 삭제
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15869799P | 1999-10-08 | 1999-10-08 | |
US60/158,697 | 1999-10-08 | ||
US09/661,935 | 2000-09-14 | ||
US09/661,935 US6374907B1 (en) | 1999-10-08 | 2000-09-14 | Hydrofluoroether as a heat-transfer fluid |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020042859A KR20020042859A (ko) | 2002-06-07 |
KR100669264B1 true KR100669264B1 (ko) | 2007-01-17 |
Family
ID=26855295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027004447A KR100669264B1 (ko) | 1999-10-08 | 2000-09-29 | 열전달액으로서의 히드로플루오로에테르 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6374907B1 (ko) |
EP (1) | EP1261676B1 (ko) |
JP (1) | JP2003526906A (ko) |
KR (1) | KR100669264B1 (ko) |
AU (1) | AU7741500A (ko) |
DE (1) | DE60021212T2 (ko) |
WO (1) | WO2001027217A1 (ko) |
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EP1235046B1 (en) | 1999-11-26 | 2011-10-05 | JFE Engineering Corporation | Thermal storage material using hydrate and thermal storage device therefor, and production method of the thermal storage material |
EP1306417B1 (en) * | 2001-10-23 | 2012-08-01 | Solvay Specialty Polymers Italy S.p.A. | Use of fluorinated liquids for the heat exchange or as working fluids in the presence of ionizing radiations and/or irradiation with neutrons |
EP1510763B1 (en) * | 2002-05-31 | 2012-02-01 | JFE Engineering Corporation | Apparatus for producing hydrate slurry |
WO2005007771A1 (en) * | 2003-07-23 | 2005-01-27 | Dupont Canada Inc. | Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks |
WO2005008819A2 (en) * | 2003-07-23 | 2005-01-27 | Dupont Canada Inc. | Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks |
US6953082B2 (en) * | 2003-12-16 | 2005-10-11 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
US7055579B2 (en) * | 2003-12-16 | 2006-06-06 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
US7128133B2 (en) * | 2003-12-16 | 2006-10-31 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
US7788939B2 (en) | 2004-07-15 | 2010-09-07 | Parker-Hannifin Corporation | Azeotrope spray cooling system |
US7428816B2 (en) | 2004-07-16 | 2008-09-30 | Honeywell International Inc. | Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems |
US7338575B2 (en) * | 2004-09-10 | 2008-03-04 | Axcelis Technologies, Inc. | Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
EP1655358A1 (de) * | 2004-11-04 | 2006-05-10 | Solvay Fluor GmbH | Arbeitsfluid zur Wärmeübertragung |
US7691282B2 (en) | 2005-09-08 | 2010-04-06 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
US7385089B2 (en) * | 2005-12-23 | 2008-06-10 | 3M Innovative Properties Company | Fluorochemical ketone compounds and processes for their use |
ITMI20060381A1 (it) | 2006-03-02 | 2007-09-03 | Solvay Solexis Spa | Fluidi di scambio termico |
US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
US8905124B2 (en) * | 2007-06-27 | 2014-12-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Temperature controlled loadlock chamber |
US20090176148A1 (en) * | 2008-01-04 | 2009-07-09 | 3M Innovative Properties Company | Thermal management of electrochemical cells |
US8003004B2 (en) * | 2008-01-23 | 2011-08-23 | 3M Innovative Properties Company | Heat transfer apparatus and methods including hydrofluorocarbonates |
US20090269521A1 (en) * | 2008-04-24 | 2009-10-29 | 3M Innovative Properties Company | Porous structured thermal transfer article |
US8071816B2 (en) * | 2008-06-30 | 2011-12-06 | 3M Innovative Properties Company | Hydrofluoroacetal compounds and processes for their preparation and use |
US20100263885A1 (en) * | 2009-04-21 | 2010-10-21 | 3M Innovative Properties Company | Protection systems and methods for electronic devices |
US9010318B2 (en) | 2009-09-04 | 2015-04-21 | Wisconsin Alumni Research Foundation | Extended-range heat transfer fluid using variable composition |
US8323524B2 (en) * | 2009-10-01 | 2012-12-04 | 3M Innovative Properties Company | Apparatus including hydrofluoroether with high temperature stability and uses thereof |
US8535559B2 (en) * | 2010-03-26 | 2013-09-17 | 3M Innovative Properties Company | Nitrogen-containing fluoroketones for high temperature heat transfer |
US8193393B2 (en) * | 2010-03-26 | 2012-06-05 | 3M Innovative Properties Company | Fluoroether diketones for high temperature heat transfer |
KR101920953B1 (ko) | 2011-06-10 | 2018-11-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 부분적으로 불소화된 케톤 및 그의 제조 및 이용 방법 |
DE102012221923A1 (de) * | 2012-11-29 | 2014-06-05 | Carl Zeiss Smt Gmbh | Kühlsystem für zumindest eine Systemkomponente eines optischen Systems für EUV-Anwendungen sowie derartige Systemkomponente und derartiges optisches System |
KR102341140B1 (ko) | 2013-07-25 | 2021-12-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 질소 함유 하이드로플루오로에테르 및 이의 제조 방법 |
KR102411949B1 (ko) | 2014-07-16 | 2022-06-22 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 하이드로플루오로에테르 올레핀 및 이의 사용 방법 |
CN105457575B (zh) * | 2014-09-12 | 2017-06-06 | 张宝权 | 氯化物成品质量控制工艺 |
WO2016064585A1 (en) | 2014-10-24 | 2016-04-28 | 3M Innovative Properties Company | Segregated fluorinated esters |
JP6971253B2 (ja) | 2017-03-21 | 2021-11-24 | スリーエム イノベイティブ プロパティズ カンパニー | 熱伝達流体及び同流体の使用方法 |
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DE69231725T2 (de) * | 1991-12-03 | 2001-10-31 | United States Environmental Protection Agency, Washington | Kältemittelzusammensetzung sowie verfahren zu deren benutzung |
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US6023002A (en) | 1998-01-26 | 2000-02-08 | 3M Innovative Properties Company | Process for preparing hydrofluoroethers |
-
2000
- 2000-09-14 US US09/661,935 patent/US6374907B1/en not_active Expired - Lifetime
- 2000-09-29 EP EP00967175A patent/EP1261676B1/en not_active Expired - Lifetime
- 2000-09-29 AU AU77415/00A patent/AU7741500A/en not_active Abandoned
- 2000-09-29 WO PCT/US2000/026968 patent/WO2001027217A1/en active IP Right Grant
- 2000-09-29 JP JP2001530423A patent/JP2003526906A/ja not_active Withdrawn
- 2000-09-29 DE DE60021212T patent/DE60021212T2/de not_active Expired - Lifetime
- 2000-09-29 KR KR1020027004447A patent/KR100669264B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE60021212T2 (de) | 2006-05-18 |
AU7741500A (en) | 2001-04-23 |
EP1261676A1 (en) | 2002-12-04 |
DE60021212D1 (de) | 2005-08-11 |
US6374907B1 (en) | 2002-04-23 |
WO2001027217A1 (en) | 2001-04-19 |
KR20020042859A (ko) | 2002-06-07 |
JP2003526906A (ja) | 2003-09-09 |
EP1261676B1 (en) | 2005-07-06 |
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