JP4846909B2 - 光学式エンコーダ及び回折格子の変位測定方法 - Google Patents

光学式エンコーダ及び回折格子の変位測定方法 Download PDF

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Publication number
JP4846909B2
JP4846909B2 JP2001025124A JP2001025124A JP4846909B2 JP 4846909 B2 JP4846909 B2 JP 4846909B2 JP 2001025124 A JP2001025124 A JP 2001025124A JP 2001025124 A JP2001025124 A JP 2001025124A JP 4846909 B2 JP4846909 B2 JP 4846909B2
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Japan
Prior art keywords
diffraction grating
light
grating
diffracted
diffraction
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JP2001025124A
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Japanese (ja)
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JP2001304918A (ja
JP2001304918A5 (enExample
Inventor
公 石塚
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Canon Inc
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Canon Inc
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Priority to JP2001025124A priority Critical patent/JP4846909B2/ja
Priority to US09/780,433 priority patent/US6831267B2/en
Publication of JP2001304918A publication Critical patent/JP2001304918A/ja
Priority to US10/915,348 priority patent/US6999179B2/en
Publication of JP2001304918A5 publication Critical patent/JP2001304918A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Polarising Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2001025124A 2000-02-15 2001-02-01 光学式エンコーダ及び回折格子の変位測定方法 Expired - Fee Related JP4846909B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001025124A JP4846909B2 (ja) 2000-02-15 2001-02-01 光学式エンコーダ及び回折格子の変位測定方法
US09/780,433 US6831267B2 (en) 2000-02-15 2001-02-12 Optical encoder
US10/915,348 US6999179B2 (en) 2000-02-15 2004-08-11 Optical encoder

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2000037045 2000-02-15
JP2000-37044 2000-02-15
JP2000-37045 2000-02-15
JP2000037045 2000-02-15
JP2000037043 2000-02-15
JP2000-37043 2000-02-15
JP2000037043 2000-02-15
JP2000037044 2000-02-15
JP2000037044 2000-02-15
JP2001025124A JP4846909B2 (ja) 2000-02-15 2001-02-01 光学式エンコーダ及び回折格子の変位測定方法

Publications (3)

Publication Number Publication Date
JP2001304918A JP2001304918A (ja) 2001-10-31
JP2001304918A5 JP2001304918A5 (enExample) 2008-04-10
JP4846909B2 true JP4846909B2 (ja) 2011-12-28

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JP2001025124A Expired - Fee Related JP4846909B2 (ja) 2000-02-15 2001-02-01 光学式エンコーダ及び回折格子の変位測定方法

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US (2) US6831267B2 (enExample)
JP (1) JP4846909B2 (enExample)

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JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP3890233B2 (ja) * 2002-01-07 2007-03-07 キヤノン株式会社 位置決めステージ装置、露光装置及び半導体デバイスの製造方法
JP2003255113A (ja) * 2002-02-28 2003-09-10 Canon Inc 光分離素子およびそれを用いた光学機器
JP3977126B2 (ja) * 2002-04-12 2007-09-19 キヤノン株式会社 変位情報検出装置
JP2004212243A (ja) * 2003-01-06 2004-07-29 Canon Inc 格子干渉型光学式エンコーダ
US7466416B2 (en) * 2004-04-30 2008-12-16 X-Rite, Inc. Color measurement system
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
DE102005058808B4 (de) 2005-12-09 2019-02-21 Dr. Johannes Heidenhain Gmbh Positionsmessgerät mit holographischem Maßstab
US7636165B2 (en) * 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
EP2063275B1 (en) * 2007-11-20 2012-01-04 The Modal Shop, Inc. Dynamic motion sensor calibration system and method for calibrating a dynamic motion sensor
US10346845B2 (en) * 2009-05-15 2019-07-09 Idm Global, Inc. Enhanced automated acceptance of payment transactions that have been flagged for human review by an anti-fraud system
JP5602420B2 (ja) * 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
DE102010029211A1 (de) 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011081879A1 (de) * 2010-11-03 2012-05-03 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung
DE102011082156A1 (de) 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN104423173B (zh) * 2013-08-27 2016-09-28 上海微电子装备有限公司 套刻测量装置和方法
JP6285270B2 (ja) * 2014-04-24 2018-02-28 株式会社ミツトヨ 光電式エンコーダ
CN104154884A (zh) * 2014-08-25 2014-11-19 长春华特光电技术有限公司 采用码尺的直读式光电准直测角仪
JP6400035B2 (ja) * 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、力覚センサ、および、装置
CN107515103B (zh) * 2016-06-17 2019-06-21 南京理工大学 一种采用环形光栅的焦距检测装置及方法
CN106226854B (zh) * 2016-09-21 2018-08-17 清华大学深圳研究生院 一种全息光栅阵列的制作装置
CN106226855B (zh) * 2016-09-21 2018-12-28 清华大学深圳研究生院 一种全息光栅的制作装置

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JPH07119626B2 (ja) * 1986-02-27 1995-12-20 キヤノン株式会社 ロータリーエンコーダー
DE69221565T2 (de) 1991-08-30 1998-02-12 Canon Kk Kopfpositionierungsgerät
JP3185373B2 (ja) * 1991-10-03 2001-07-09 キヤノン株式会社 エンコーダ
US5283434A (en) 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
US5390022A (en) 1992-04-07 1995-02-14 Canon Kabushiki Kaisha Displacement information detection apparatus for receiving a divergent light beam
JP3254737B2 (ja) 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
JP3478567B2 (ja) 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
JPH06194123A (ja) 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP3210111B2 (ja) 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
JP3173208B2 (ja) 1993-01-29 2001-06-04 キヤノン株式会社 変位測定装置
JP3083019B2 (ja) 1993-03-05 2000-09-04 キヤノン株式会社 光学装置及び速度情報検出装置
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JP3530573B2 (ja) 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
JP3158878B2 (ja) * 1994-07-28 2001-04-23 松下電器産業株式会社 光学式エンコーダ
JPH08210814A (ja) 1994-10-12 1996-08-20 Canon Inc 光学式変位測定装置
JPH08219812A (ja) 1995-02-15 1996-08-30 Canon Inc 変位情報検出装置、変位情報検出用スケール及びこれを用いたドライブ制御装置
DE69622297T2 (de) 1995-02-21 2002-11-21 Canon K.K., Tokio/Tokyo Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
JPH1038517A (ja) * 1996-07-23 1998-02-13 Canon Inc 光学式変位測定装置
US6151185A (en) 1996-09-05 2000-11-21 Canon Kabushiki Kaisha Position detecting apparatus, positioning apparatus, and information recording apparatus using the same
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
JP4365927B2 (ja) 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
DE60033075T3 (de) 1999-04-16 2012-08-30 Canon K.K. Kodierer
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001336952A (ja) * 2000-05-26 2001-12-07 Canon Inc 測定装置
JP4360762B2 (ja) * 2001-03-23 2009-11-11 株式会社リコー 光学式エンコーダ装置

Also Published As

Publication number Publication date
US20050007598A1 (en) 2005-01-13
JP2001304918A (ja) 2001-10-31
US20010017350A1 (en) 2001-08-30
US6999179B2 (en) 2006-02-14
US6831267B2 (en) 2004-12-14

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