JP4846650B2 - 電極カバーおよび蒸着装置 - Google Patents
電極カバーおよび蒸着装置 Download PDFInfo
- Publication number
- JP4846650B2 JP4846650B2 JP2007117863A JP2007117863A JP4846650B2 JP 4846650 B2 JP4846650 B2 JP 4846650B2 JP 2007117863 A JP2007117863 A JP 2007117863A JP 2007117863 A JP2007117863 A JP 2007117863A JP 4846650 B2 JP4846650 B2 JP 4846650B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- evaporation source
- cover
- electrode cover
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 82
- 238000001704 evaporation Methods 0.000 claims description 141
- 230000008020 evaporation Effects 0.000 claims description 141
- 239000000463 material Substances 0.000 claims description 69
- 230000008021 deposition Effects 0.000 claims description 32
- 239000004020 conductor Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 description 36
- 239000000758 substrate Substances 0.000 description 24
- 238000010438 heat treatment Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 238000012423 maintenance Methods 0.000 description 15
- 239000010408 film Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 7
- 150000002894 organic compounds Chemical class 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 150000002484 inorganic compounds Chemical class 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229910017073 AlLi Inorganic materials 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- AHLBNYSZXLDEJQ-FWEHEUNISA-N orlistat Chemical compound CCCCCCCCCCC[C@H](OC(=O)[C@H](CC(C)C)NC=O)C[C@@H]1OC(=O)[C@H]1CCCCCC AHLBNYSZXLDEJQ-FWEHEUNISA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- -1 strontium Alkaline earth metals Chemical class 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007117863A JP4846650B2 (ja) | 2006-04-28 | 2007-04-27 | 電極カバーおよび蒸着装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006126794 | 2006-04-28 | ||
| JP2006126794 | 2006-04-28 | ||
| JP2007117863A JP4846650B2 (ja) | 2006-04-28 | 2007-04-27 | 電極カバーおよび蒸着装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007314877A JP2007314877A (ja) | 2007-12-06 |
| JP2007314877A5 JP2007314877A5 (enExample) | 2010-03-25 |
| JP4846650B2 true JP4846650B2 (ja) | 2011-12-28 |
Family
ID=38849002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007117863A Expired - Fee Related JP4846650B2 (ja) | 2006-04-28 | 2007-04-27 | 電極カバーおよび蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4846650B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010015795A (ja) * | 2008-07-03 | 2010-01-21 | Hitachi Ltd | 有機発光素子の作製方法及び作製装置 |
| US8536611B2 (en) | 2008-06-17 | 2013-09-17 | Hitachi, Ltd. | Organic light-emitting element, method for manufacturing the organic light-emitting element, apparatus for manufacturing the organic light-emitting element, and organic light-emitting device using the organic light-emitting element |
| CN106995915A (zh) * | 2017-05-11 | 2017-08-01 | 成都西沃克真空科技有限公司 | 一种旋转式多位阻蒸设备 |
| CN106987806A (zh) * | 2017-05-11 | 2017-07-28 | 成都西沃克真空科技有限公司 | 一种电极杆的电极输入锁紧装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5733067B2 (enExample) * | 1974-06-04 | 1982-07-14 | ||
| JPS5852024B2 (ja) * | 1976-09-28 | 1983-11-19 | 電気化学工業株式会社 | 抵抗加熱型真空蒸着装置 |
| JPS6264767A (ja) * | 1985-09-03 | 1987-03-23 | 清水建設株式会社 | 石炭サイロの目詰り防止方法及びその装置 |
| JP4488273B2 (ja) * | 2001-03-23 | 2010-06-23 | オリンパス株式会社 | 薄膜形成用のターゲット組立体、蒸着源、薄膜形成装置及び薄膜形成方法 |
-
2007
- 2007-04-27 JP JP2007117863A patent/JP4846650B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007314877A (ja) | 2007-12-06 |
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