JP2007314877A5 - - Google Patents

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Publication number
JP2007314877A5
JP2007314877A5 JP2007117863A JP2007117863A JP2007314877A5 JP 2007314877 A5 JP2007314877 A5 JP 2007314877A5 JP 2007117863 A JP2007117863 A JP 2007117863A JP 2007117863 A JP2007117863 A JP 2007117863A JP 2007314877 A5 JP2007314877 A5 JP 2007314877A5
Authority
JP
Japan
Prior art keywords
electrode
cover
evaporation source
thru
electrode cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007117863A
Other languages
English (en)
Japanese (ja)
Other versions
JP4846650B2 (ja
JP2007314877A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007117863A priority Critical patent/JP4846650B2/ja
Priority claimed from JP2007117863A external-priority patent/JP4846650B2/ja
Publication of JP2007314877A publication Critical patent/JP2007314877A/ja
Publication of JP2007314877A5 publication Critical patent/JP2007314877A5/ja
Application granted granted Critical
Publication of JP4846650B2 publication Critical patent/JP4846650B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007117863A 2006-04-28 2007-04-27 電極カバーおよび蒸着装置 Expired - Fee Related JP4846650B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007117863A JP4846650B2 (ja) 2006-04-28 2007-04-27 電極カバーおよび蒸着装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006126794 2006-04-28
JP2006126794 2006-04-28
JP2007117863A JP4846650B2 (ja) 2006-04-28 2007-04-27 電極カバーおよび蒸着装置

Publications (3)

Publication Number Publication Date
JP2007314877A JP2007314877A (ja) 2007-12-06
JP2007314877A5 true JP2007314877A5 (enExample) 2010-03-25
JP4846650B2 JP4846650B2 (ja) 2011-12-28

Family

ID=38849002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007117863A Expired - Fee Related JP4846650B2 (ja) 2006-04-28 2007-04-27 電極カバーおよび蒸着装置

Country Status (1)

Country Link
JP (1) JP4846650B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010015795A (ja) * 2008-07-03 2010-01-21 Hitachi Ltd 有機発光素子の作製方法及び作製装置
US8536611B2 (en) 2008-06-17 2013-09-17 Hitachi, Ltd. Organic light-emitting element, method for manufacturing the organic light-emitting element, apparatus for manufacturing the organic light-emitting element, and organic light-emitting device using the organic light-emitting element
CN106995915A (zh) * 2017-05-11 2017-08-01 成都西沃克真空科技有限公司 一种旋转式多位阻蒸设备
CN106987806A (zh) * 2017-05-11 2017-07-28 成都西沃克真空科技有限公司 一种电极杆的电极输入锁紧装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5733067B2 (enExample) * 1974-06-04 1982-07-14
JPS5852024B2 (ja) * 1976-09-28 1983-11-19 電気化学工業株式会社 抵抗加熱型真空蒸着装置
JPS6264767A (ja) * 1985-09-03 1987-03-23 清水建設株式会社 石炭サイロの目詰り防止方法及びその装置
JP4488273B2 (ja) * 2001-03-23 2010-06-23 オリンパス株式会社 薄膜形成用のターゲット組立体、蒸着源、薄膜形成装置及び薄膜形成方法

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