JP4843493B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP4843493B2
JP4843493B2 JP2006530557A JP2006530557A JP4843493B2 JP 4843493 B2 JP4843493 B2 JP 4843493B2 JP 2006530557 A JP2006530557 A JP 2006530557A JP 2006530557 A JP2006530557 A JP 2006530557A JP 4843493 B2 JP4843493 B2 JP 4843493B2
Authority
JP
Japan
Prior art keywords
pump
exhaust mechanism
rotor
rotor element
impeller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006530557A
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English (en)
Japanese (ja)
Other versions
JP2007507657A (ja
Inventor
イアン ディヴィッド ストーンズ
ナイジェル ポール ショフィールド
マーティン ニコラス ステュアート
Original Assignee
エドワーズ リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34424883&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP4843493(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB0322888A external-priority patent/GB0322888D0/en
Application filed by エドワーズ リミテッド filed Critical エドワーズ リミテッド
Publication of JP2007507657A publication Critical patent/JP2007507657A/ja
Application granted granted Critical
Publication of JP4843493B2 publication Critical patent/JP4843493B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
JP2006530557A 2003-09-30 2004-09-23 真空ポンプ Expired - Fee Related JP4843493B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB0322888.9 2003-09-30
GB0322888A GB0322888D0 (en) 2003-09-30 2003-09-30 Vacuum pump
GBGB0409139.3A GB0409139D0 (en) 2003-09-30 2004-04-23 Vacuum pump
GB0409139.3 2004-04-23
PCT/GB2004/004110 WO2005033520A1 (en) 2003-09-30 2004-09-23 Vacuum pump

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011089466A Division JP5637919B2 (ja) 2003-09-30 2011-04-13 複合真空ポンプ

Publications (2)

Publication Number Publication Date
JP2007507657A JP2007507657A (ja) 2007-03-29
JP4843493B2 true JP4843493B2 (ja) 2011-12-21

Family

ID=34424883

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2006530557A Expired - Fee Related JP4843493B2 (ja) 2003-09-30 2004-09-23 真空ポンプ
JP2006530555A Expired - Fee Related JP5546094B2 (ja) 2003-09-30 2004-09-23 真空ポンプ
JP2011089466A Expired - Fee Related JP5637919B2 (ja) 2003-09-30 2011-04-13 複合真空ポンプ
JP2013213093A Expired - Fee Related JP5809218B2 (ja) 2003-09-30 2013-10-10 真空ポンプ
JP2013213092A Pending JP2014001743A (ja) 2003-09-30 2013-10-10 真空ポンプ

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP2006530555A Expired - Fee Related JP5546094B2 (ja) 2003-09-30 2004-09-23 真空ポンプ
JP2011089466A Expired - Fee Related JP5637919B2 (ja) 2003-09-30 2011-04-13 複合真空ポンプ
JP2013213093A Expired - Fee Related JP5809218B2 (ja) 2003-09-30 2013-10-10 真空ポンプ
JP2013213092A Pending JP2014001743A (ja) 2003-09-30 2013-10-10 真空ポンプ

Country Status (8)

Country Link
US (4) US7866940B2 (enExample)
EP (4) EP2378129B1 (enExample)
JP (5) JP4843493B2 (enExample)
CN (3) CN102062109B (enExample)
AT (1) ATE535715T1 (enExample)
CA (4) CA2747137C (enExample)
GB (1) GB0409139D0 (enExample)
WO (2) WO2005040615A2 (enExample)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
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GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US20120027583A1 (en) * 2006-05-04 2012-02-02 Bernd Hofmann Vacuum pump
US8288719B1 (en) * 2006-12-29 2012-10-16 Griffin Analytical Technologies, Llc Analytical instruments, assemblies, and methods
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
GB2489623B (en) * 2007-09-07 2013-03-06 Ionics Mass Spectrometry Group Multi-pressure stage mass spectrometer and methods
CN101398406B (zh) * 2007-09-30 2012-03-07 孔令昌 便携式质谱计
DE102008009715A1 (de) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
JP5313260B2 (ja) 2008-10-10 2013-10-09 株式会社アルバック ドライポンプ
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102010019940B4 (de) * 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2956674B1 (en) * 2013-02-15 2019-05-01 Edwards Limited Vacuum pump
DE202013005458U1 (de) 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB201314841D0 (en) 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102014101257A1 (de) 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3032106B1 (de) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
DE102014226038A1 (de) * 2014-12-16 2016-06-16 Carl Zeiss Microscopy Gmbh Druckreduzierungseinrichtung, Vorrichtung zur massenspektrometrischen Analyse eines Gases und Reinigungsverfahren
US9368335B1 (en) * 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
JP6488898B2 (ja) 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3112688B2 (de) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
KR101838660B1 (ko) * 2017-12-04 2018-03-14 (주)대명엔지니어링 진공 펌프
GB2569633A (en) * 2017-12-21 2019-06-26 Edwards Ltd A vacuum pumping arrangement and method of cleaning the vacuum pumping arrangement
DE202018000285U1 (de) * 2018-01-18 2019-04-23 Leybold Gmbh Vakuumpumpen-System
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
EP3623634B1 (de) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen
US11710950B2 (en) 2021-01-20 2023-07-25 Te Connectivity Solutions Gmbh Cutting blade and cutting depth control device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264196A (ja) * 1989-04-04 1990-10-26 Hitachi Ltd ターボ真空ポンプ
JPH06280785A (ja) * 1992-12-24 1994-10-04 Balzers Pfeiffer Gmbh 多段ガス吸込装置用真空ポンプ装置
JPH11351190A (ja) * 1998-05-20 1999-12-21 Boc Group Plc:The 真空ポンプ
JP2002285987A (ja) * 2001-03-28 2002-10-03 Chiba Seimitsu:Kk 小型真空ポンプ

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JPS6172896A (ja) 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
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GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264196A (ja) * 1989-04-04 1990-10-26 Hitachi Ltd ターボ真空ポンプ
JPH06280785A (ja) * 1992-12-24 1994-10-04 Balzers Pfeiffer Gmbh 多段ガス吸込装置用真空ポンプ装置
JPH11351190A (ja) * 1998-05-20 1999-12-21 Boc Group Plc:The 真空ポンプ
JP2002285987A (ja) * 2001-03-28 2002-10-03 Chiba Seimitsu:Kk 小型真空ポンプ

Also Published As

Publication number Publication date
JP2014001744A (ja) 2014-01-09
EP2375080B1 (en) 2020-06-03
WO2005040615A3 (en) 2005-06-16
CA2747137C (en) 2014-05-13
CN101124409A (zh) 2008-02-13
ATE535715T1 (de) 2011-12-15
EP2375080A2 (en) 2011-10-12
CN102062109A (zh) 2011-05-18
EP1668254A2 (en) 2006-06-14
US20080138219A1 (en) 2008-06-12
JP2007507656A (ja) 2007-03-29
JP2014001743A (ja) 2014-01-09
WO2005033520A1 (en) 2005-04-14
CA2563306C (en) 2011-11-15
US8851865B2 (en) 2014-10-07
EP2375080A3 (en) 2017-05-24
CA2563234A1 (en) 2005-04-14
EP2378129A3 (en) 2017-05-31
CA2747136C (en) 2012-04-10
WO2005040615A2 (en) 2005-05-06
CA2747136A1 (en) 2005-05-06
US20070116555A1 (en) 2007-05-24
CN101124409B (zh) 2012-11-07
US7866940B2 (en) 2011-01-11
US9249805B2 (en) 2016-02-02
EP1668255B1 (en) 2011-11-30
GB0409139D0 (en) 2004-05-26
EP2378129B1 (en) 2020-02-05
EP1668255A1 (en) 2006-06-14
JP5546094B2 (ja) 2014-07-09
US20110200423A1 (en) 2011-08-18
EP2378129A2 (en) 2011-10-19
JP5809218B2 (ja) 2015-11-10
CA2747137A1 (en) 2005-05-06
JP5637919B2 (ja) 2014-12-10
CA2563234C (en) 2011-11-15
EP1668254B1 (en) 2019-09-04
CA2563306A1 (en) 2005-05-06
CN1860301A (zh) 2006-11-08
JP2011137475A (ja) 2011-07-14
US20140369807A1 (en) 2014-12-18
EP1668255B2 (en) 2016-01-13
CN102062109B (zh) 2012-11-28
JP2007507657A (ja) 2007-03-29
CN1860301B (zh) 2012-10-10
US8672607B2 (en) 2014-03-18

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