GB0409139D0 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB0409139D0
GB0409139D0 GBGB0409139.3A GB0409139A GB0409139D0 GB 0409139 D0 GB0409139 D0 GB 0409139D0 GB 0409139 A GB0409139 A GB 0409139A GB 0409139 D0 GB0409139 D0 GB 0409139D0
Authority
GB
United Kingdom
Prior art keywords
pump
outlet
pumping section
fluid
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0409139.3A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34424883&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=GB0409139(D0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB0322888A external-priority patent/GB0322888D0/en
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GBGB0409139.3A priority Critical patent/GB0409139D0/en
Publication of GB0409139D0 publication Critical patent/GB0409139D0/en
Priority to JP2006530557A priority patent/JP4843493B2/ja
Priority to US10/572,894 priority patent/US8851865B2/en
Priority to JP2006530555A priority patent/JP5546094B2/ja
Priority to CN2004800268965A priority patent/CN101124409B/zh
Priority to PCT/GB2004/004110 priority patent/WO2005033520A1/en
Priority to EP11169892.4A priority patent/EP2375080B1/en
Priority to CN2011100487470A priority patent/CN102062109B/zh
Priority to PCT/GB2004/004046 priority patent/WO2005040615A2/en
Priority to EP04768653.0A priority patent/EP1668255B2/en
Priority to AT04768653T priority patent/ATE535715T1/de
Priority to US10/574,027 priority patent/US7866940B2/en
Priority to CA2747137A priority patent/CA2747137C/en
Priority to EP11169894.0A priority patent/EP2378129B1/en
Priority to CA2563234A priority patent/CA2563234C/en
Priority to CA2747136A priority patent/CA2747136C/en
Priority to CN2004800284031A priority patent/CN1860301B/zh
Priority to EP04768590.4A priority patent/EP1668254B1/en
Priority to CA2563306A priority patent/CA2563306C/en
Priority to US12/966,566 priority patent/US8672607B2/en
Priority to JP2011089466A priority patent/JP5637919B2/ja
Priority to JP2013213092A priority patent/JP2014001743A/ja
Priority to JP2013213093A priority patent/JP5809218B2/ja
Priority to US14/471,698 priority patent/US9249805B2/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
GBGB0409139.3A 2003-09-30 2004-04-23 Vacuum pump Ceased GB0409139D0 (en)

Priority Applications (24)

Application Number Priority Date Filing Date Title
GBGB0409139.3A GB0409139D0 (en) 2003-09-30 2004-04-23 Vacuum pump
CN2004800284031A CN1860301B (zh) 2003-09-30 2004-09-23 真空泵
EP04768590.4A EP1668254B1 (en) 2003-09-30 2004-09-23 Vacuum pump
CA2563306A CA2563306C (en) 2003-09-30 2004-09-23 Vacuum pump
AT04768653T ATE535715T1 (de) 2003-09-30 2004-09-23 Vakuumpumpe
CA2747137A CA2747137C (en) 2003-09-30 2004-09-23 Vacuum pump
JP2006530555A JP5546094B2 (ja) 2003-09-30 2004-09-23 真空ポンプ
CN2004800268965A CN101124409B (zh) 2003-09-30 2004-09-23 差动泵吸的真空系统及差动抽真空的方法
PCT/GB2004/004110 WO2005033520A1 (en) 2003-09-30 2004-09-23 Vacuum pump
EP11169892.4A EP2375080B1 (en) 2003-09-30 2004-09-23 Vacuum pump
CN2011100487470A CN102062109B (zh) 2003-09-30 2004-09-23 真空泵
PCT/GB2004/004046 WO2005040615A2 (en) 2003-09-30 2004-09-23 Vacuum pump
EP04768653.0A EP1668255B2 (en) 2003-09-30 2004-09-23 Vacuum pump
JP2006530557A JP4843493B2 (ja) 2003-09-30 2004-09-23 真空ポンプ
US10/574,027 US7866940B2 (en) 2003-09-30 2004-09-23 Vacuum pump
US10/572,894 US8851865B2 (en) 2003-09-30 2004-09-23 Vacuum pump
EP11169894.0A EP2378129B1 (en) 2003-09-30 2004-09-23 Vacuum pump
CA2563234A CA2563234C (en) 2003-09-30 2004-09-23 Vacuum pump
CA2747136A CA2747136C (en) 2003-09-30 2004-09-23 Vacuum pump
US12/966,566 US8672607B2 (en) 2003-09-30 2010-12-13 Vacuum pump
JP2011089466A JP5637919B2 (ja) 2003-09-30 2011-04-13 複合真空ポンプ
JP2013213093A JP5809218B2 (ja) 2003-09-30 2013-10-10 真空ポンプ
JP2013213092A JP2014001743A (ja) 2003-09-30 2013-10-10 真空ポンプ
US14/471,698 US9249805B2 (en) 2003-09-30 2014-08-28 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0322888A GB0322888D0 (en) 2003-09-30 2003-09-30 Vacuum pump
GBGB0409139.3A GB0409139D0 (en) 2003-09-30 2004-04-23 Vacuum pump

Publications (1)

Publication Number Publication Date
GB0409139D0 true GB0409139D0 (en) 2004-05-26

Family

ID=34424883

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0409139.3A Ceased GB0409139D0 (en) 2003-09-30 2004-04-23 Vacuum pump

Country Status (8)

Country Link
US (4) US7866940B2 (enExample)
EP (4) EP2375080B1 (enExample)
JP (5) JP4843493B2 (enExample)
CN (3) CN1860301B (enExample)
AT (1) ATE535715T1 (enExample)
CA (4) CA2563306C (enExample)
GB (1) GB0409139D0 (enExample)
WO (2) WO2005040615A2 (enExample)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US20120027583A1 (en) * 2006-05-04 2012-02-02 Bernd Hofmann Vacuum pump
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US8288719B1 (en) * 2006-12-29 2012-10-16 Griffin Analytical Technologies, Llc Analytical instruments, assemblies, and methods
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
GB2466156B8 (en) * 2007-09-07 2015-10-14 Ionics Mass Spectrometry Group Multi-pressure stage mass spectrometer and methods
CN101398406B (zh) * 2007-09-30 2012-03-07 孔令昌 便携式质谱计
DE102008009715A1 (de) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
CN102177346B (zh) * 2008-10-10 2014-01-15 株式会社爱发科 干泵
GB0901872D0 (en) 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102010019940B4 (de) * 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2956674B1 (en) * 2013-02-15 2019-05-01 Edwards Limited Vacuum pump
DE202013005458U1 (de) 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB201314841D0 (en) * 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102014101257A1 (de) 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3032106B1 (de) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
DE102014226038A1 (de) * 2014-12-16 2016-06-16 Carl Zeiss Microscopy Gmbh Druckreduzierungseinrichtung, Vorrichtung zur massenspektrometrischen Analyse eines Gases und Reinigungsverfahren
US9368335B1 (en) * 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
JP6488898B2 (ja) * 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3112688B2 (de) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
KR101838660B1 (ko) * 2017-12-04 2018-03-14 (주)대명엔지니어링 진공 펌프
GB2569633A (en) * 2017-12-21 2019-06-26 Edwards Ltd A vacuum pumping arrangement and method of cleaning the vacuum pumping arrangement
DE202018000285U1 (de) * 2018-01-18 2019-04-23 Leybold Gmbh Vakuumpumpen-System
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
GB2584603B (en) 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
EP3623634B1 (de) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen
US11710950B2 (en) 2021-01-20 2023-07-25 Te Connectivity Solutions Gmbh Cutting blade and cutting depth control device

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US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
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CN1399076A (zh) * 2001-07-27 2003-02-26 大晃机械工业株式会社 真空泵
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
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GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement

Also Published As

Publication number Publication date
US20110200423A1 (en) 2011-08-18
EP1668255A1 (en) 2006-06-14
EP2375080A2 (en) 2011-10-12
CN1860301A (zh) 2006-11-08
JP5637919B2 (ja) 2014-12-10
CA2563306A1 (en) 2005-05-06
EP1668254A2 (en) 2006-06-14
JP4843493B2 (ja) 2011-12-21
JP2014001743A (ja) 2014-01-09
CN1860301B (zh) 2012-10-10
CN102062109B (zh) 2012-11-28
JP5809218B2 (ja) 2015-11-10
WO2005033520A1 (en) 2005-04-14
CA2747136A1 (en) 2005-05-06
CA2747136C (en) 2012-04-10
WO2005040615A3 (en) 2005-06-16
US20140369807A1 (en) 2014-12-18
CA2563234A1 (en) 2005-04-14
US8672607B2 (en) 2014-03-18
CA2747137A1 (en) 2005-05-06
JP2007507656A (ja) 2007-03-29
EP1668255B2 (en) 2016-01-13
EP1668255B1 (en) 2011-11-30
US8851865B2 (en) 2014-10-07
EP2378129B1 (en) 2020-02-05
CA2747137C (en) 2014-05-13
CN101124409A (zh) 2008-02-13
JP2011137475A (ja) 2011-07-14
EP2375080B1 (en) 2020-06-03
US20070116555A1 (en) 2007-05-24
US7866940B2 (en) 2011-01-11
EP2378129A3 (en) 2017-05-31
JP5546094B2 (ja) 2014-07-09
WO2005040615A2 (en) 2005-05-06
ATE535715T1 (de) 2011-12-15
JP2014001744A (ja) 2014-01-09
EP2375080A3 (en) 2017-05-24
EP2378129A2 (en) 2011-10-19
US20080138219A1 (en) 2008-06-12
CA2563234C (en) 2011-11-15
US9249805B2 (en) 2016-02-02
JP2007507657A (ja) 2007-03-29
CN102062109A (zh) 2011-05-18
CA2563306C (en) 2011-11-15
CN101124409B (zh) 2012-11-07
EP1668254B1 (en) 2019-09-04

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)