JP4842748B2 - 基板搬送システム - Google Patents

基板搬送システム Download PDF

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Publication number
JP4842748B2
JP4842748B2 JP2006257163A JP2006257163A JP4842748B2 JP 4842748 B2 JP4842748 B2 JP 4842748B2 JP 2006257163 A JP2006257163 A JP 2006257163A JP 2006257163 A JP2006257163 A JP 2006257163A JP 4842748 B2 JP4842748 B2 JP 4842748B2
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Japan
Prior art keywords
substrate
stage
transfer
transport
stages
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Expired - Fee Related
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JP2006257163A
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English (en)
Japanese (ja)
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JP2008074576A5 (enExample
JP2008074576A (ja
Inventor
津登務 小沢
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Olympus Corp
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Olympus Corp
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Priority to JP2006257163A priority Critical patent/JP4842748B2/ja
Publication of JP2008074576A publication Critical patent/JP2008074576A/ja
Publication of JP2008074576A5 publication Critical patent/JP2008074576A5/ja
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Publication of JP4842748B2 publication Critical patent/JP4842748B2/ja
Expired - Fee Related legal-status Critical Current
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2006257163A 2006-09-22 2006-09-22 基板搬送システム Expired - Fee Related JP4842748B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006257163A JP4842748B2 (ja) 2006-09-22 2006-09-22 基板搬送システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006257163A JP4842748B2 (ja) 2006-09-22 2006-09-22 基板搬送システム

Publications (3)

Publication Number Publication Date
JP2008074576A JP2008074576A (ja) 2008-04-03
JP2008074576A5 JP2008074576A5 (enExample) 2009-11-05
JP4842748B2 true JP4842748B2 (ja) 2011-12-21

Family

ID=39347034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006257163A Expired - Fee Related JP4842748B2 (ja) 2006-09-22 2006-09-22 基板搬送システム

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JP (1) JP4842748B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5422925B2 (ja) * 2008-06-09 2014-02-19 株式会社Ｉｈｉ 浮上搬送装置
JP4972618B2 (ja) * 2008-08-05 2012-07-11 シャープ株式会社 基板搬送装置
KR102023655B1 (ko) * 2010-02-17 2019-09-23 가부시키가이샤 니콘 반송 장치, 반송 방법, 노광 장치, 및 디바이스 제조 방법
JP5634288B2 (ja) * 2011-02-07 2014-12-03 オイレス工業株式会社 離間距離調整装置およびこれを用いた搬送装置
KR101318212B1 (ko) 2012-12-31 2013-10-15 한국기계연구원 글라스 이송 장치
FR3049941B1 (fr) * 2016-04-06 2018-04-13 Saint- Gobain Glass France Dispositif de convoyage et de maintien pour feuille de verre notamment dans une installation de lavage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188940A (ja) * 1989-01-17 1990-07-25 Sokueishiya Kk 試料処理用プリアライメント装置
JP3070006B2 (ja) * 1997-02-07 2000-07-24 株式会社オーク製作所 薄板状ワークの搬送方法
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP4373125B2 (ja) * 2003-05-07 2009-11-25 オリンパス株式会社 浮上搬送装置
JP4349528B2 (ja) * 2005-01-25 2009-10-21 大日本印刷株式会社 基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法

Also Published As

Publication number Publication date
JP2008074576A (ja) 2008-04-03

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