JP2008074576A5 - - Google Patents

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Publication number
JP2008074576A5
JP2008074576A5 JP2006257163A JP2006257163A JP2008074576A5 JP 2008074576 A5 JP2008074576 A5 JP 2008074576A5 JP 2006257163 A JP2006257163 A JP 2006257163A JP 2006257163 A JP2006257163 A JP 2006257163A JP 2008074576 A5 JP2008074576 A5 JP 2008074576A5
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JP
Japan
Prior art keywords
substrate
transfer
stage
transfer stage
end portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006257163A
Other languages
English (en)
Japanese (ja)
Other versions
JP4842748B2 (ja
JP2008074576A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006257163A priority Critical patent/JP4842748B2/ja
Priority claimed from JP2006257163A external-priority patent/JP4842748B2/ja
Publication of JP2008074576A publication Critical patent/JP2008074576A/ja
Publication of JP2008074576A5 publication Critical patent/JP2008074576A5/ja
Application granted granted Critical
Publication of JP4842748B2 publication Critical patent/JP4842748B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006257163A 2006-09-22 2006-09-22 基板搬送システム Expired - Fee Related JP4842748B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006257163A JP4842748B2 (ja) 2006-09-22 2006-09-22 基板搬送システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006257163A JP4842748B2 (ja) 2006-09-22 2006-09-22 基板搬送システム

Publications (3)

Publication Number Publication Date
JP2008074576A JP2008074576A (ja) 2008-04-03
JP2008074576A5 true JP2008074576A5 (enExample) 2009-11-05
JP4842748B2 JP4842748B2 (ja) 2011-12-21

Family

ID=39347034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006257163A Expired - Fee Related JP4842748B2 (ja) 2006-09-22 2006-09-22 基板搬送システム

Country Status (1)

Country Link
JP (1) JP4842748B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5422925B2 (ja) * 2008-06-09 2014-02-19 株式会社Ｉｈｉ 浮上搬送装置
JP4972618B2 (ja) * 2008-08-05 2012-07-11 シャープ株式会社 基板搬送装置
KR102023655B1 (ko) * 2010-02-17 2019-09-23 가부시키가이샤 니콘 반송 장치, 반송 방법, 노광 장치, 및 디바이스 제조 방법
JP5634288B2 (ja) * 2011-02-07 2014-12-03 オイレス工業株式会社 離間距離調整装置およびこれを用いた搬送装置
KR101318212B1 (ko) 2012-12-31 2013-10-15 한국기계연구원 글라스 이송 장치
FR3049941B1 (fr) * 2016-04-06 2018-04-13 Saint- Gobain Glass France Dispositif de convoyage et de maintien pour feuille de verre notamment dans une installation de lavage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188940A (ja) * 1989-01-17 1990-07-25 Sokueishiya Kk 試料処理用プリアライメント装置
JP3070006B2 (ja) * 1997-02-07 2000-07-24 株式会社オーク製作所 薄板状ワークの搬送方法
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP4373125B2 (ja) * 2003-05-07 2009-11-25 オリンパス株式会社 浮上搬送装置
JP4349528B2 (ja) * 2005-01-25 2009-10-21 大日本印刷株式会社 基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法

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