JP4838873B2 - 圧電振動片および圧電デバイス - Google Patents
圧電振動片および圧電デバイス Download PDFInfo
- Publication number
- JP4838873B2 JP4838873B2 JP2009169705A JP2009169705A JP4838873B2 JP 4838873 B2 JP4838873 B2 JP 4838873B2 JP 2009169705 A JP2009169705 A JP 2009169705A JP 2009169705 A JP2009169705 A JP 2009169705A JP 4838873 B2 JP4838873 B2 JP 4838873B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- vibrating piece
- groove
- excitation electrode
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005284 excitation Effects 0.000 claims description 107
- 239000013078 crystal Substances 0.000 description 98
- 238000005530 etching Methods 0.000 description 27
- 230000035945 sensitivity Effects 0.000 description 26
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000010931 gold Substances 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000011651 chromium Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 240000006829 Ficus sundaica Species 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009169705A JP4838873B2 (ja) | 2008-07-22 | 2009-07-21 | 圧電振動片および圧電デバイス |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008188182 | 2008-07-22 | ||
| JP2008188182 | 2008-07-22 | ||
| JP2009169705A JP4838873B2 (ja) | 2008-07-22 | 2009-07-21 | 圧電振動片および圧電デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010050960A JP2010050960A (ja) | 2010-03-04 |
| JP2010050960A5 JP2010050960A5 (enrdf_load_stackoverflow) | 2011-07-21 |
| JP4838873B2 true JP4838873B2 (ja) | 2011-12-14 |
Family
ID=42067634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009169705A Expired - Fee Related JP4838873B2 (ja) | 2008-07-22 | 2009-07-21 | 圧電振動片および圧電デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4838873B2 (enrdf_load_stackoverflow) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8552624B2 (en) | 2009-09-18 | 2013-10-08 | Seiko Epson Corporation | Impact resistance vibrating reed, vibrator, oscillator, and electronic device |
| JP5659585B2 (ja) | 2010-07-09 | 2015-01-28 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| JP5617392B2 (ja) | 2010-07-09 | 2014-11-05 | セイコーエプソン株式会社 | 振動片、振動子及び発振器 |
| JP2012054893A (ja) * | 2010-09-03 | 2012-03-15 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動片及び水晶デバイス |
| JP5534448B2 (ja) * | 2010-09-29 | 2014-07-02 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器および電波時計 |
| JP5912557B2 (ja) | 2011-03-29 | 2016-04-27 | 日本電波工業株式会社 | 音叉型圧電振動片及び圧電デバイス |
| CN105210295B (zh) | 2013-05-13 | 2017-10-03 | 株式会社村田制作所 | 振动装置 |
| JP2015023422A (ja) * | 2013-07-18 | 2015-02-02 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
| JP2015015770A (ja) * | 2014-10-09 | 2015-01-22 | セイコーエプソン株式会社 | 屈曲振動片、振動子、発振器及び電子機器 |
| JP6479509B2 (ja) * | 2015-03-09 | 2019-03-06 | シチズン時計株式会社 | 圧電振動子 |
| JP6647911B2 (ja) * | 2016-02-23 | 2020-02-14 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
| JP2019087774A (ja) * | 2017-11-01 | 2019-06-06 | 京セラ株式会社 | 音叉型水晶振動素子及び圧電デバイス |
| JP7060073B2 (ja) * | 2020-12-23 | 2022-04-26 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5458395A (en) * | 1977-10-19 | 1979-05-11 | Matsushima Kogyo Kk | Piezooelectric vibrator |
| JPH01236808A (ja) * | 1988-03-17 | 1989-09-21 | Matsushima Kogyo Co Ltd | 捩水晶振動子 |
| JP3931662B2 (ja) * | 2001-01-15 | 2007-06-20 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| JP2004282230A (ja) * | 2003-03-13 | 2004-10-07 | Seiko Epson Corp | 圧電振動片、及びこれを利用した圧電デバイス、並びにこれを利用した携帯電話装置、電子機器 |
| JP2008022413A (ja) * | 2006-07-14 | 2008-01-31 | Epson Toyocom Corp | 圧電振動片および圧電デバイス |
-
2009
- 2009-07-21 JP JP2009169705A patent/JP4838873B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010050960A (ja) | 2010-03-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4838873B2 (ja) | 圧電振動片および圧電デバイス | |
| JP4709884B2 (ja) | 圧電振動片および圧電デバイス | |
| JP4594412B2 (ja) | 圧電振動片および圧電デバイス | |
| JP4709260B2 (ja) | 圧電振動片および圧電デバイス | |
| JP5912557B2 (ja) | 音叉型圧電振動片及び圧電デバイス | |
| CN107681991B (zh) | 压电振动元件、压电振子、压电振荡器以及电子设备 | |
| US8736152B2 (en) | Piezoelectric vibrating pieces and associated devices exhibiting enhanced electrical field | |
| JP5123962B2 (ja) | 音叉型圧電振動片、圧電フレーム、圧電デバイス及び音叉型圧電振動片並びに圧電フレームの製造方法 | |
| CN203326965U (zh) | 振动元件、振子、电子器件、振荡器以及电子设备 | |
| JP5796355B2 (ja) | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 | |
| US8120234B2 (en) | Piezoelectric frames and piezoelectric devices comprising same | |
| JP4934125B2 (ja) | 圧電フレームおよび圧電デバイス | |
| US20120137775A1 (en) | Piezoelectric resonating device, manufacturing method thereof, piezoelectric resonator, and piezoelectric oscillator | |
| JP2006148857A (ja) | 圧電振動片および圧電デバイス | |
| JP5824967B2 (ja) | 振動素子、振動子、電子デバイス、及び電子機器 | |
| US20110156826A1 (en) | Resonator element, resonator, oscillator, electronic device, and frequency adjustment method | |
| JP2010004456A (ja) | 圧電振動片および圧電デバイス | |
| JP5446941B2 (ja) | 圧電振動片 | |
| JP5910092B2 (ja) | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 | |
| JP2008022413A (ja) | 圧電振動片および圧電デバイス | |
| JP2009100480A5 (enrdf_load_stackoverflow) | ||
| JP2006311090A (ja) | 圧電振動片および圧電デバイス | |
| JP2013162265A (ja) | 振動素子、振動子、電子デバイス、発振器、及び電子機器 | |
| JP2013042410A (ja) | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 | |
| JP5154977B2 (ja) | 圧電振動片、圧電デバイス及び音叉型圧電振動子の周波数調整方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110608 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110608 |
|
| A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20110608 |
|
| A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20110628 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110704 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110805 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110905 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110930 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141007 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141007 Year of fee payment: 3 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |