JP4830069B2 - 圧電ウエハ - Google Patents

圧電ウエハ Download PDF

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Publication number
JP4830069B2
JP4830069B2 JP2005329795A JP2005329795A JP4830069B2 JP 4830069 B2 JP4830069 B2 JP 4830069B2 JP 2005329795 A JP2005329795 A JP 2005329795A JP 2005329795 A JP2005329795 A JP 2005329795A JP 4830069 B2 JP4830069 B2 JP 4830069B2
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JP
Japan
Prior art keywords
piezoelectric
axis
piezoelectric substrate
substrate
piezoelectric wafer
Prior art date
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Expired - Lifetime
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JP2005329795A
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English (en)
Japanese (ja)
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JP2007142526A (ja
JP2007142526A5 (enExample
Inventor
資郎 村上
賢二 小峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2005329795A priority Critical patent/JP4830069B2/ja
Publication of JP2007142526A publication Critical patent/JP2007142526A/ja
Publication of JP2007142526A5 publication Critical patent/JP2007142526A5/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/52—Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005329795A 2005-11-15 2005-11-15 圧電ウエハ Expired - Lifetime JP4830069B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005329795A JP4830069B2 (ja) 2005-11-15 2005-11-15 圧電ウエハ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005329795A JP4830069B2 (ja) 2005-11-15 2005-11-15 圧電ウエハ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011055577A Division JP5152542B2 (ja) 2011-03-14 2011-03-14 水晶ウエハの製造方法

Publications (3)

Publication Number Publication Date
JP2007142526A JP2007142526A (ja) 2007-06-07
JP2007142526A5 JP2007142526A5 (enExample) 2008-10-23
JP4830069B2 true JP4830069B2 (ja) 2011-12-07

Family

ID=38204911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005329795A Expired - Lifetime JP4830069B2 (ja) 2005-11-15 2005-11-15 圧電ウエハ

Country Status (1)

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JP (1) JP4830069B2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5251082B2 (ja) * 2007-11-22 2013-07-31 セイコーエプソン株式会社 圧電振動片、圧電デバイスおよび圧電振動片の製造方法
JP2010004484A (ja) * 2008-06-23 2010-01-07 Nippon Dempa Kogyo Co Ltd 水晶振動子、電子部品、及び水晶振動子用素子の製造方法
JP5158706B2 (ja) * 2008-06-30 2013-03-06 日本電波工業株式会社 水晶振動子の製造方法及び水晶振動子並びに電子部品
JP5251369B2 (ja) * 2008-09-03 2013-07-31 セイコーエプソン株式会社 圧電振動片の製造方法
JP4809447B2 (ja) * 2009-01-30 2011-11-09 日本電波工業株式会社 水晶振動子の製造方法
JP5402031B2 (ja) * 2009-02-02 2014-01-29 セイコーエプソン株式会社 水晶振動片の加工方法及び水晶ウェーハ
JP5302776B2 (ja) * 2009-05-29 2013-10-02 京セラクリスタルデバイス株式会社 水晶片集合基板
JP4908614B2 (ja) * 2009-06-12 2012-04-04 日本電波工業株式会社 水晶振動子の製造方法
JP5113870B2 (ja) * 2009-08-27 2013-01-09 日本電波工業株式会社 表面実装用水晶振動子の製造方法
JP5465992B2 (ja) * 2009-12-11 2014-04-09 エスアイアイ・クリスタルテクノロジー株式会社 水晶振動子、電子部品および水晶振動子の製造方法
JP5632627B2 (ja) * 2010-03-15 2014-11-26 エスアイアイ・クリスタルテクノロジー株式会社 水晶振動片
JP5929244B2 (ja) * 2012-01-31 2016-06-01 株式会社大真空 厚みすべり振動型水晶片、電極付きの厚みすべり振動型水晶片、水晶振動板、水晶振動子および水晶発振器
JP5725008B2 (ja) * 2012-12-27 2015-05-27 セイコーエプソン株式会社 圧電振動片の製造方法
JP5679036B2 (ja) * 2013-11-28 2015-03-04 セイコーエプソン株式会社 圧電振動片、圧電デバイスおよび圧電振動片の製造方法
JP5872660B2 (ja) * 2014-10-09 2016-03-01 エスアイアイ・クリスタルテクノロジー株式会社 水晶振動片
JP5949882B2 (ja) * 2014-11-20 2016-07-13 セイコーエプソン株式会社 振動片の製造方法
JP6532223B2 (ja) * 2014-12-01 2019-06-19 京セラ株式会社 水晶振動素子の中間生成品の製造方法
JP5994880B2 (ja) * 2015-02-13 2016-09-21 セイコーエプソン株式会社 圧電ウエハ
JP6678428B2 (ja) * 2015-10-26 2020-04-08 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法、圧電振動片及び圧電振動子
JP6645211B2 (ja) * 2016-01-26 2020-02-14 株式会社大真空 水晶振動デバイスの製造方法
JP6206516B2 (ja) * 2016-02-04 2017-10-04 セイコーエプソン株式会社 圧電ウエハ、振動片の製造方法および振動デバイスの製造方法
JP7206924B2 (ja) * 2018-03-01 2023-01-18 株式会社大真空 圧電振動デバイス
JP7114027B2 (ja) * 2019-03-29 2022-08-08 株式会社村田製作所 水晶振動素子の製造方法
CN115051664B (zh) * 2022-07-06 2025-11-28 成都泰美克晶体技术有限公司 一种石英谐振器晶片的制作方法及石英谐振器晶片

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS588221U (ja) * 1981-07-10 1983-01-19 シチズン時計株式会社 音叉型水晶振動片
JPS58157211A (ja) * 1982-03-13 1983-09-19 Kinseki Kk 圧電振動板の製造方法
CH646032GA3 (enExample) * 1982-04-14 1984-11-15
JPH04294622A (ja) * 1991-03-25 1992-10-19 Seiko Epson Corp 圧電素子の製造方法
JPH05183374A (ja) * 1992-01-07 1993-07-23 Seiko Epson Corp 圧電振動片及び圧電振動子及び圧電振動子の製造方法
JP2002033631A (ja) * 2000-07-13 2002-01-31 Nippon Dempa Kogyo Co Ltd 水晶振動子の電極形成方法及びこれによる水晶振動子
JP2003298385A (ja) * 2002-03-29 2003-10-17 Seiko Instruments Inc Ａｔカット水晶振動子及びその製造方法

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JP2007142526A (ja) 2007-06-07

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