JP4828180B2 - 三フッ化窒素の製造方法 - Google Patents

三フッ化窒素の製造方法 Download PDF

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Publication number
JP4828180B2
JP4828180B2 JP2005245781A JP2005245781A JP4828180B2 JP 4828180 B2 JP4828180 B2 JP 4828180B2 JP 2005245781 A JP2005245781 A JP 2005245781A JP 2005245781 A JP2005245781 A JP 2005245781A JP 4828180 B2 JP4828180 B2 JP 4828180B2
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JP
Japan
Prior art keywords
gas
reactor
nitrogen trifluoride
reaction
tubular reactor
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Expired - Fee Related
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JP2005245781A
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English (en)
Japanese (ja)
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JP2007055869A (ja
Inventor
博基 大野
敏夫 大井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko KK
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Showa Denko KK
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Priority to JP2005245781A priority Critical patent/JP4828180B2/ja
Priority to CNA2006800311466A priority patent/CN101248006A/zh
Priority to US12/064,927 priority patent/US7820127B2/en
Priority to TW095131376A priority patent/TW200722370A/zh
Priority to KR1020087007173A priority patent/KR100975490B1/ko
Priority to PCT/JP2006/316778 priority patent/WO2007023968A1/ja
Publication of JP2007055869A publication Critical patent/JP2007055869A/ja
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Publication of JP4828180B2 publication Critical patent/JP4828180B2/ja
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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2005245781A 2005-08-26 2005-08-26 三フッ化窒素の製造方法 Expired - Fee Related JP4828180B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005245781A JP4828180B2 (ja) 2005-08-26 2005-08-26 三フッ化窒素の製造方法
CNA2006800311466A CN101248006A (zh) 2005-08-26 2006-08-25 三氟化氮的制造方法及其制造装置
US12/064,927 US7820127B2 (en) 2005-08-26 2006-08-25 Method and apparatus for producing nitrogen trifluoride
TW095131376A TW200722370A (en) 2005-08-26 2006-08-25 Method and apparatus for producing nitrogen trifluoride
KR1020087007173A KR100975490B1 (ko) 2005-08-26 2006-08-25 삼불화질소의 제조 방법 및 제조 장치
PCT/JP2006/316778 WO2007023968A1 (ja) 2005-08-26 2006-08-25 三フッ化窒素の製造方法および製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005245781A JP4828180B2 (ja) 2005-08-26 2005-08-26 三フッ化窒素の製造方法

Publications (2)

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JP2007055869A JP2007055869A (ja) 2007-03-08
JP4828180B2 true JP4828180B2 (ja) 2011-11-30

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ID=37919671

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JP2005245781A Expired - Fee Related JP4828180B2 (ja) 2005-08-26 2005-08-26 三フッ化窒素の製造方法

Country Status (2)

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JP (1) JP4828180B2 (zh)
CN (1) CN101248006A (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007084370A (ja) * 2005-09-21 2007-04-05 Showa Denko Kk 三フッ化窒素の製造方法
JP2010138029A (ja) * 2008-12-11 2010-06-24 Central Glass Co Ltd Ｎｆ３又は塩化フッ素化合物の製造方法
JP5955187B2 (ja) * 2012-10-01 2016-07-20 住友精化株式会社 塩化水素の製造方法
CN103215098B (zh) * 2013-04-18 2015-07-08 合肥工业大学 可燃冰的制备系统和方法
KR20220041173A (ko) * 2019-08-22 2022-03-31 푸젠 융징 테크놀로지 컴퍼니 리미티드 직접 플루오르화에 의해 무기 또는 유기 화합물을 플루오르화하는 공법
CN114572944A (zh) * 2021-12-23 2022-06-03 西安近代化学研究所 一种三氟化氮及三氟化氮混合气体的制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05105411A (ja) * 1991-10-22 1993-04-27 Onoda Cement Co Ltd 三フツ化窒素の製造方法
JP4508356B2 (ja) * 2000-05-12 2010-07-21 昭和電工株式会社 三フッ化窒素の製造方法及びその用途

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Publication number Publication date
CN101248006A (zh) 2008-08-20
JP2007055869A (ja) 2007-03-08

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