JP4813855B2 - 切削装置および加工方法 - Google Patents
切削装置および加工方法 Download PDFInfo
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- JP4813855B2 JP4813855B2 JP2005263271A JP2005263271A JP4813855B2 JP 4813855 B2 JP4813855 B2 JP 4813855B2 JP 2005263271 A JP2005263271 A JP 2005263271A JP 2005263271 A JP2005263271 A JP 2005263271A JP 4813855 B2 JP4813855 B2 JP 4813855B2
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JP2005263271A JP4813855B2 (ja) | 2005-09-12 | 2005-09-12 | 切削装置および加工方法 |
CN2006101515091A CN1931551B (zh) | 2005-09-12 | 2006-09-12 | 切削装置和加工方法 |
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JP2005263271A JP4813855B2 (ja) | 2005-09-12 | 2005-09-12 | 切削装置および加工方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007080897A JP2007080897A (ja) | 2007-03-29 |
JP4813855B2 true JP4813855B2 (ja) | 2011-11-09 |
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JP2005263271A Active JP4813855B2 (ja) | 2005-09-12 | 2005-09-12 | 切削装置および加工方法 |
Country Status (2)
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JP (1) | JP4813855B2 (zh) |
CN (1) | CN1931551B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009218397A (ja) * | 2008-03-11 | 2009-09-24 | Towa Corp | 基板の切断方法及び装置 |
JP2014175422A (ja) * | 2013-03-07 | 2014-09-22 | Disco Abrasive Syst Ltd | 切削装置 |
US9508570B2 (en) | 2013-10-21 | 2016-11-29 | Asm Technology Singapore Pte Ltd | Singulation apparatus and method |
JP6441737B2 (ja) * | 2015-04-28 | 2018-12-19 | 株式会社ディスコ | 切削装置 |
JP6571379B2 (ja) * | 2015-04-28 | 2019-09-04 | 株式会社ディスコ | 切削装置 |
JP6560110B2 (ja) * | 2015-11-30 | 2019-08-14 | 株式会社ディスコ | 切削装置 |
JP2018181931A (ja) * | 2017-04-05 | 2018-11-15 | 株式会社ディスコ | 切削装置 |
JP6987450B2 (ja) * | 2017-12-15 | 2022-01-05 | 株式会社ディスコ | 切削装置 |
CN108044355B (zh) * | 2017-12-22 | 2024-01-23 | 沈阳芯嘉科技有限公司 | 一种激光砂轮划片机及复合材料切割方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57135738U (zh) * | 1981-02-19 | 1982-08-24 | ||
JP3291708B2 (ja) * | 1998-12-22 | 2002-06-10 | 株式会社東京精密 | ダイシング装置 |
JP3410385B2 (ja) * | 1999-04-19 | 2003-05-26 | 株式会社ディスコ | 洗浄装置及び切削装置 |
JP2002359211A (ja) * | 2001-05-30 | 2002-12-13 | Disco Abrasive Syst Ltd | 切削機 |
JP3765265B2 (ja) * | 2001-11-28 | 2006-04-12 | 株式会社東京精密 | ダイシング装置 |
JP2003257896A (ja) * | 2002-02-28 | 2003-09-12 | Disco Abrasive Syst Ltd | 半導体ウェーハの分割方法 |
JP2004303855A (ja) * | 2003-03-31 | 2004-10-28 | Disco Abrasive Syst Ltd | 切削装置 |
JP4796271B2 (ja) * | 2003-07-10 | 2011-10-19 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP4315788B2 (ja) * | 2003-11-26 | 2009-08-19 | アピックヤマダ株式会社 | 半導体装置の製造方法及び製造装置 |
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2005
- 2005-09-12 JP JP2005263271A patent/JP4813855B2/ja active Active
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2006
- 2006-09-12 CN CN2006101515091A patent/CN1931551B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN1931551B (zh) | 2011-10-26 |
CN1931551A (zh) | 2007-03-21 |
JP2007080897A (ja) | 2007-03-29 |
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