JP4806548B2 - マイクロ流路の流体制御構造、マイクロ流路の流体制御構造の製造方法、および閉塞部材操作装置 - Google Patents

マイクロ流路の流体制御構造、マイクロ流路の流体制御構造の製造方法、および閉塞部材操作装置 Download PDF

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JP4806548B2
JP4806548B2 JP2005263112A JP2005263112A JP4806548B2 JP 4806548 B2 JP4806548 B2 JP 4806548B2 JP 2005263112 A JP2005263112 A JP 2005263112A JP 2005263112 A JP2005263112 A JP 2005263112A JP 4806548 B2 JP4806548 B2 JP 4806548B2
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valve
flow path
microchip
hole
fluid control
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JP2006283965A5 (enrdf_load_stackoverflow
JP2006283965A (ja
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幸満 関森
武彦 北森
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Kanagawa Academy of Science and Technology
Nagano Keiki Co Ltd
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Kanagawa Academy of Science and Technology
Nagano Keiki Co Ltd
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  • Electrically Driven Valve-Operating Means (AREA)
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JP2005263112A 2005-03-10 2005-09-09 マイクロ流路の流体制御構造、マイクロ流路の流体制御構造の製造方法、および閉塞部材操作装置 Expired - Fee Related JP4806548B2 (ja)

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JP2005263112A JP4806548B2 (ja) 2005-03-10 2005-09-09 マイクロ流路の流体制御構造、マイクロ流路の流体制御構造の製造方法、および閉塞部材操作装置

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JP2005067859 2005-03-10
JP2005067859 2005-03-10
JP2005263112A JP4806548B2 (ja) 2005-03-10 2005-09-09 マイクロ流路の流体制御構造、マイクロ流路の流体制御構造の製造方法、および閉塞部材操作装置

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JP2006283965A5 JP2006283965A5 (enrdf_load_stackoverflow) 2008-10-23
JP4806548B2 true JP4806548B2 (ja) 2011-11-02

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016034674A (ja) * 2014-08-01 2016-03-17 大日本印刷株式会社 流路デバイス及びその製造方法
KR101770796B1 (ko) 2016-02-29 2017-08-24 광운대학교 산학협력단 액체 시료 분석 장치
KR101818566B1 (ko) * 2016-03-10 2018-01-15 한국기계연구원 미세 유체 칩 및 이의 제작 방법

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JP2008238097A (ja) * 2007-03-28 2008-10-09 Tosoh Corp 滴生成用微小流路集合体装置
JP4868526B2 (ja) * 2007-06-08 2012-02-01 公立大学法人首都大学東京 試料導入マイクロデバイス
JP4868527B2 (ja) * 2007-06-08 2012-02-01 公立大学法人首都大学東京 試料導入マイクロデバイス
US8561963B2 (en) 2007-12-19 2013-10-22 Palo Alto Research Center Incorporated Electrostatically addressable microvalves
KR100969667B1 (ko) * 2008-03-24 2010-07-14 디지탈 지노믹스(주) 생리활성물질을 전기적으로 검출하는 방법 및 이를 위한바이오칩
US9283562B2 (en) 2008-06-26 2016-03-15 Fujikura Kasei Co., Ltd. Liquid channel device and production method therefor
JP5359686B2 (ja) * 2009-08-25 2013-12-04 藤倉化成株式会社 液体流路装置とその製造方法
CN103341369B (zh) 2008-10-28 2015-04-29 藤仓化成株式会社 液体流道装置及其制作方法
DE102009023429B4 (de) * 2009-05-29 2013-08-14 Siemens Aktiengesellschaft Ventil für Lab-on-a-Chip-Systeme, Verfahren zum Betätigen und zur Herstellung des Ventils
DE102009023430B4 (de) * 2009-05-29 2013-07-25 Siemens Aktiengesellschaft Vorrichtung und Verfahren zum Steuern von Fluidströmen in Lab-on-a-Chip-Systemen sowie Verfahren zum Herstellen der Vorrichtung
JP5728778B2 (ja) * 2010-06-01 2015-06-03 国立大学法人九州工業大学 解析装置及び解析装置の製造方法
JP2012194062A (ja) * 2011-03-16 2012-10-11 Tokyo Denki Univ マイクロ流体チップ及びそれを用いたマイクロ流体システム
US20130161193A1 (en) * 2011-12-21 2013-06-27 Sharp Kabushiki Kaisha Microfluidic system with metered fluid loading system for microfluidic device
JP5871863B2 (ja) * 2013-07-04 2016-03-01 住友ゴム工業株式会社 マイクロ流路チップおよび医療用測定装置
CN105556279B (zh) * 2013-07-16 2019-11-26 普里米欧姆遗传学（英国）有限公司 微流体芯片
JP6190352B2 (ja) * 2014-12-19 2017-08-30 株式会社神戸製鋼所 流体流通装置及びその運転方法
US10732712B2 (en) * 2016-12-27 2020-08-04 Facebook Technologies, Llc Large scale integration of haptic devices
US20210148944A1 (en) * 2018-03-22 2021-05-20 Nikon Corporation Fluidic device and system
WO2019180871A1 (ja) * 2018-03-22 2019-09-26 株式会社ニコン 流体デバイス及びシステム
JP7302148B2 (ja) * 2018-08-03 2023-07-04 株式会社ニコン 流体デバイスキットおよび流体デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169467U (ja) * 1984-04-20 1985-11-09 旭有機材工業株式会社 プラスチツク製ゲ−トバルブ
JP2002228033A (ja) * 2001-02-05 2002-08-14 Olympus Optical Co Ltd 分離型マイクロバルブ
JP3538777B2 (ja) * 2001-03-26 2004-06-14 独立行政法人産業技術総合研究所 微小化学反応装置
JP2003166910A (ja) * 2001-11-30 2003-06-13 Asahi Kasei Corp 送液機構及び該送液機構を備える分析装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016034674A (ja) * 2014-08-01 2016-03-17 大日本印刷株式会社 流路デバイス及びその製造方法
KR101770796B1 (ko) 2016-02-29 2017-08-24 광운대학교 산학협력단 액체 시료 분석 장치
KR101818566B1 (ko) * 2016-03-10 2018-01-15 한국기계연구원 미세 유체 칩 및 이의 제작 방법

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