JP4806179B2 - Heater plate manufacturing method - Google Patents

Description

  The present invention relates to a heater plate for manufacturing a semiconductor or a liquid crystal display, in particular a sheath heater used by heating in a vacuum vessel (vacuum chamber), a heater plate used for drying / preheating in the manufacturing process, and a manufacturing method therefor It is about. In addition to the above, for example, it can be used as a heater plate in a thin display (FPD) manufacturing apparatus of PDP, FED, ELD. The present invention can also be applied to general heater plates such as a heater plate for manufacturing a PTP sheet.

      Conventionally, in various fields such as a semiconductor manufacturing apparatus and a liquid crystal display manufacturing apparatus, a heater plate having a heater built in a metal base has been used. As a heater of such a heater plate, a stainless steel sheath heater is generally used. The heater plate has a structure in which a sheath heater is cast in aluminum (casting type), a sheath heater is sandwiched between aluminum or stainless steel plates and fastened with bolts (bolt fastening type), and the outer periphery of the plate in which the sheath heater is sandwiched Brazing, soldering and diffusion bonding (brazing, diffusion bonding type) of two parts sandwiching the sheath heater by pressurizing in a vacuum or in a predetermined gas atmosphere by welding parts (welding type) Alternatively, there is a type in which an annular groove and an annular protrusion are formed on the entire circumference of the joining surface of the plates sandwiching the sheath heater and joined by forging compression (forging pressure welding type).

    FIG. 10 shows a schematic structure of a conventional cast-in type heater plate 101 incorporating a sheath heater 102. In the sheath heater 102, a heating element is passed through a protective pipe made of stainless steel, and the two are electrically insulated by an insulating material. The pipe-shaped sheath heater 102 is bent into a predetermined pattern, cast into an aluminum base, and subjected to processing such as cutting and surface polishing, whereby the heater plate 101 is manufactured.

    FIG. 11 shows a schematic structure of a conventional bolt fastening type heater plate 103. In this structure, the metal base is divided into upper and lower parts, and a sheath heater 102 similar to the above is installed in a groove 104a formed in the lower base 104 made of aluminum, stainless steel or the like, the upper base 105 is brought into close contact, and both are placed in place. It is integrated by fastening with bolts.

    FIG. 12 shows a schematic structure of a conventional welded heater plate 106. Even in this structure, the metal base is divided into two parts, and the same sheath heater 102 is installed in the groove 107a formed in the lower base 107 made of aluminum, stainless steel, etc., and the upper base 108 is brought into close contact with each other. They are integrated by welding only at the edge 109.

FIG. 13 shows a schematic structure of a conventional brazing and diffusion bonding type heater plate 110. In this structure as well, the metal base is divided into two parts, and the same sheath heater 102 is installed in a groove 107a defined between the lower base 107 and the upper base 108 made of metal, and the upper base 108 and the lower base 107 are arranged. In a state where one or both of these are plastically deformed, they are integrally joined by brazing, soldering or diffusion bonding over the entire surface.

Further, FIG. 14 shows a schematic structure of a conventional forging pressure welding heater plate 111. Even in this structure, the metal base is divided into upper and lower parts, a quadrangular, polygonal or circular annular groove and an annular protrusion are formed on the entire circumference of the joining surface of the aluminum members 112 and 113, and sealed with the fastening part 114 by forging compression. , Metal bonded.
JP-A-11-285775 JP 2000-311932 A JP 2000-243542

    In recent years, the size of heater plates has increased rapidly with the increase in size of liquid crystal televisions and the like. In recent years, the fourth generation 730 mm × 920 mm and the fifth generation 1100 mm × 1300 mm to the sixth generation have been developed. 1500 × 1800 mm, and the 7th generation 2100 mm × 2400 mm. Along with such an increase in the size of the heater plate, there is a problem of cost reduction due to a longer life of the heater plate and a simplified manufacturing method.

    Of the heater plate structures described in the above prior art, the cast-in type heater plate is made of stainless steel used for the protective pipe of the sheath heater, although the sheath heater is in close contact with the aluminum casting, so that the heater has good thermal conductivity. Since the thermal expansion coefficients of metals such as steel and Inconel differ from those of aluminum as a metal base, the heater deforms due to its thermal stress at high temperatures and may be disconnected due to repeated use, or in some cases the entire heater plate There is a problem that is deformed.

    On the other hand, since the aluminum-based bolt-clamped heater plate has a gap in the groove, and this gap becomes a heat insulation layer and each part is only in physical contact, the upper and lower bases and the sheath heater or between the bases There is a problem that the adhesiveness is low and the thermal conductivity is poor, and in some cases, the temperature is locally raised and the heater is damaged. The same applies to a welded heater plate. Further, the welding type heater plate is greatly distorted by welding, and there is a problem in maintaining the shape.

  The brazing and diffusion bonding types perform pressure bonding on the entire surface of the opposing members in a vacuum or in an atmosphere such as nitrogen gas, so large-sized members cannot be bonded, and brazing material, solder, etc. can be bonded. Therefore, there is a problem that a third joining member is required.

    Furthermore, in the forging type heater plate, with the increase in size of the heater plate, the recesses or projections for fitting are processed in the outer peripheral part of the two plates and the vicinity of the heater part, and these are fitted together. In the method disclosed in Japanese Patent Laid-Open No. 2000-311932 for joining, creep deformation occurs when used at a high temperature of 300 to 500 ° C. for a long time. Deformation occurred and the heater plate could not be used.

Due to the above-described problem of deformation of the heater plate and the problem of increase in manufacturing cost caused by the increase in size of the heater plate, it is necessary to improve the conventional forging and pressure welding method.
The present invention has been made in view of the above-described problems of the prior art, and provides a heater plate manufacturing method that prevents deformation of a heater plate due to thermal stress, has good thermal conductivity, and has high durability. For the purpose.

In order to solve the above-described problem, the heater plate manufacturing method according to the first invention of the present application includes housing a sheath heater in a groove provided in an aluminum or aluminum alloy base member, and further fitting a joining aluminum or aluminum alloy member in the groove. The joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are metal joined by forging pressure welding to produce a heater plate, wherein the joining aluminum or aluminum alloy member is attached to the sheath heater. Both side surfaces are inclined so that the width becomes narrower toward the surface, and the width of the surface in contact with the sheath heater before forging pressure welding is larger than the width of the sheath heater .

Method of manufacturing a heater plate of the present gun second invention, the first of said bonding aluminum or aluminum alloy member in the invention, characterized in that it consists of an integral member.

Method of manufacturing a heater plate of the present gun third invention, the first of said bonding aluminum or aluminum alloy member in the invention is characterized by comprising a plurality members in the plane direction of the aluminum or aluminum alloy base material.

Method of manufacturing a heater plate of the present gun fourth invention, the first of said bonding aluminum or aluminum alloy member in the invention is characterized by comprising a plurality members in the vertical direction of the aluminum or aluminum alloy base material.

Method of manufacturing a heater plate of the present gun fifth invention, the first to fourth or layout arrangement of the sheath heater in the invention, the two central axes perpendicular to one another of the aluminum or aluminum alloy base material It is characterized by being at least one symmetrical or point symmetric with respect to the center.

Method of manufacturing a heater plate of the present gun sixth invention, the aluminum or aluminum alloy base member in any one of the first to fifth, characterized in that it is a plate.

Method of manufacturing a heater plate of the present gun seventh invention, the cross-sectional area before forging pressure of the first to sixth one of the bonding aluminum or aluminum alloy bonding member in the invention of the the cross-sectional area of the groove It is characterized by being larger than the effective sectional area obtained by subtracting the sectional area of the sheath heater .

Method of manufacturing a heater plate of the present gun eighth invention, the high relative to the first to seventh either the sheath heater in contact with the surface of the width before forging pressure of the bonding aluminum or aluminum alloy member in the invention (W2) The ratio of (h1) is 1 or more and 5 or less .

Method of manufacturing a heater plate of the present gun ninth invention, the inclination angle of both side surfaces of the first to eighth one of the bonding aluminum or aluminum alloy member in the invention of, is 30 ° or less than 0 ° but It is characterized by that.

Method of manufacturing a heater plate of the present gun 10 invention, the first to the shape of the surface in contact with the sheath heater of the ninth one of the bonding aluminum or aluminum alloy member in the invention of the aluminum or aluminum alloy base member Or a curved surface having a curvature in the same direction of the outer periphery of the sheath heater .

Method of manufacturing a heater plate of the present gun 11 invention, the cross-sectional area before forging pressure of the first to tenth one of the bonding aluminum or aluminum alloy member in the invention of the the cross-sectional area of the groove sheath heater Greater than the effective cross-sectional area minus the cross-sectional area of
And when the said aluminum or aluminum alloy member for joining is made to fit in the said groove part, it has a clearance gap in at least one part between the side surface of the said aluminum or aluminum alloy member for joining, and the said groove part .

Method of manufacturing a heater plate of the present gun 12 invention, the in any one of the first to eleventh sheath heater is either being a plurality of arranged in the groove, or plurality of one by one each for the groove It is characterized by being arranged .

Method of manufacturing a heater plate of the present gun 13 invention, the in any one of the first to twelfth sheath heater is said or whether it is a plurality of arranged in parallel to the groove, in the height direction in the groove It is characterized by being arranged in layers .

Method of manufacturing a heater plate of the present gun 14 invention, the sheath heater in any one of the first to thirteenth, a substantially rectangular or substantially square cross-section is circular or corner portions consists curve of a predetermined curvature shape It is characterized in that it is a pipe-like thing having knives, or a narrow strip knitted into a pipe shape .

Method of manufacturing a heater plate of the present gun fifteenth aspect is characterized in that for accommodating the sheath heater airtight in the first to any one of the fourteenth.

Method of manufacturing a heater plate of the present gun 16 invention, the first to fifteenth either the bonding aluminum or aluminum alloy member and the aluminum or aluminum alloy base member in the invention of, JIS1050,1100,3003,3004 , 5005, 5052, 6063, 6061, 7003, or 7N01 .

    According to the present invention, the sheath heater and the joining aluminum or aluminum alloy member are accommodated in the groove provided in the aluminum or aluminum alloy base member, and the joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are joined by forging pressure welding. By metal bonding, a high level of confidentiality can be maintained between the aluminum or aluminum alloy base member and the sheath heater, and higher thermal conductivity can be ensured.

    In addition, according to the present invention, by performing metal joining in which the joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are forged by pressure welding in the vicinity of the temperature of the heating region in which the heater plate is used, Stress due to the difference in linear expansion between the aluminum or aluminum alloy base member and the sheath material of the internal heater in the operating temperature range can be reduced, and deformation or breakage of the sheath heater, deformation of the heater plate, or the like can be avoided. At the same time, the adhesion and thermal conductivity between the joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member can be improved.

  The heater plate in which the sheath heater is disposed in the present invention is a member in which the sheath heater is brought into close contact with the metal member, and heat generated by the sheath heater is transmitted to the metal member of the heater plate. The sheath heater is disposed inside the heater plate so as to heat the heater plate to a uniform temperature. For example, the sheath heater is arranged in a meandering shape or a spiral shape so that the heater plate is heated to a uniform temperature. In addition, the sheath heater is one in which a heating wire and an insulating material are enclosed in a sheath material (pipe) of stainless steel such as SUS304, nickel alloy such as incoloy, or titanium.

  A heater plate in which a sheathed heater is disposed according to the present invention is used as a heater plate in a vacuum container (vacuum chamber) of a semiconductor or liquid crystal manufacturing apparatus. FIG. 15 shows an example of use of a heater plate in which a sheath heater is disposed. FIG. 15 shows a chemical vapor deposition (CVD) processing apparatus. A heater plate 121 having a sheath heater 123 disposed in a vacuum chamber 122 is provided by a support member 124. A substrate 125 is placed on the heater plate 121. A gas supply unit 126 for CVD processing is provided in the vacuum chamber 122, and a gas is supplied from a supply port 127 to form a film on the substrate 125 by chemical vapor deposition.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view of a heater plate according to the present embodiment. In FIG. 1, a heater plate 1 has a structure in which a sheath heater 3 is housed as an internal component in an aluminum or aluminum alloy base member 2 and is sealed with a bonding aluminum or aluminum alloy member 4. FIG. 2 is a plan view of the heater plate 1 and FIG. 3 is a cross-sectional view taken along the line AA ′ of FIG. The aluminum or aluminum alloy base member 2 is provided with a groove portion 5 for housing the sheath heater 3 and the joining aluminum or aluminum alloy member 4. The aluminum or aluminum alloy base member 2 may be a thick member, but a plate material is practically preferable.

    After housing the sheath heater 3 in the groove portion 5, the joining aluminum or aluminum alloy member 4 is housed, and the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 are pressure contacted. For the sake of explanation, FIG. 3 is a view in which a gap is provided between the sheath heater 3 and the joining aluminum or aluminum alloy member 4 and the groove portion 5. ing.

    FIG. 2 shows an embodiment in which the joining aluminum or aluminum alloy member 4 is formed as an integral member. On the other hand, FIG. 4 shows an embodiment in which the joining aluminum or aluminum alloy member is composed of a plurality of members when viewed in the plane direction of the aluminum or aluminum alloy base member 2. Similarly, as shown in FIGS. 7 (b) and 7 (d) described later, even if the bonding aluminum or aluminum alloy member 4 is composed of a plurality of members when viewed in the cross-sectional direction of the aluminum or aluminum alloy base member 2. Good. Therefore, if necessary, the joining aluminum or aluminum alloy member 4 may be divided into a plurality of pieces and subjected to forging pressure welding as shown in FIG. 4 or FIGS. 7B and 7D, instead of being integrated.

  The heater plate of the present invention may have a rectangular shape as shown in FIG. 2 or a circular shape as shown in FIG. It is preferably symmetric with respect to at least one of two central axes perpendicular to each other, or point-symmetric with respect to the center. That is, in FIG. 2, it is preferable to be symmetric with respect to the central axis 6, and in FIG. Further, in FIG. 5B, it is preferably point-symmetric with respect to the center 53. The joining member of the present invention is formed of a T-shape, a Y-shape, a taper, etc., and has a feature that it is easy to align when the joining member is aligned with the aluminum or aluminum alloy base member.

    Although not shown in particular, it is possible to arrange two heaters in parallel in the groove of the aluminum or aluminum alloy base member in a layout similar to the layout of FIGS. 2, 5 (a), and 5 (b). Alternatively, it is also possible to arrange two or more in the depth direction of the groove. Thus, a heater plate can be configured by housing a plurality of heaters in the groove of the base member. Alternatively, a heater plate can be configured by arranging a plurality of heaters one by one in a plurality of grooves.

Next, the shape of the bonding aluminum or aluminum alloy member 4 will be described in detail.
FIG. 6 shows an embodiment of the cross-sectional shape of the joining aluminum or aluminum alloy member 4 of the present invention. In FIG. 6, at least a part of two opposite sides of the bonding aluminum or aluminum alloy member 4 has a taper shape such that the interval becomes narrower in the embedding direction. In FIG. 6A, the two opposite sides 11 and 12 both form a taper having an angle α with respect to the perpendicular. FIGS. 6B and 6C show examples in which the cross-sectional shape has a two-step taper. In FIG. 6B, the sides 13 and 15 have a vertical parallel shape, and both the sides 14 and 16 form a taper having an angle α with respect to the perpendicular. Further, in FIG. 6C, both the sides 17 and 19 have an inclination of an angle α with respect to the perpendicular, and both sides 18 and 20 form a taper having an inclination of another angle β with respect to the perpendicular. Although not shown, the member width of the surface of the bonding aluminum or aluminum alloy member 4 in contact with the sheath heater can be made larger than the sheath heater width. In this way, by increasing the width of the joining member, material inflow to the outer peripheral side portion of the heater cross section is ensured, and the adhesion between the sheath heater and the joining member is improved. Here, when the joining member width is increased, it goes without saying that the base member width is also increased according to the amount of enlargement of the joining member width. In the case of FIG. 6B and FIG. 6C as well, increasing the member width of the surface in contact with the sheath heater increases the width of the sheath heater, which ensures material inflow to the outer peripheral side of the heater cross section and is used for joining with the sheath heater. The adhesiveness with the member is improved and effective. Even in cases other than the above of the present invention, increasing the member width of the surface of the bonding aluminum or aluminum alloy member 4 in contact with the sheath heater larger than the sheath heater width is effective in the material inflow property to the outer peripheral side portion of the heater cross section. .

  The taper angles α and β of the taper portion of the joining aluminum or aluminum alloy member shown in FIG. 6 may be more than 0 ° and 30 ° or less, and more preferably 1 ° or more and 30 ° or less. . Here, the joining member partially having a tapered shape is defined by a taper upper dimension W1, a taper lower dimension W2 and a taper angle. The total height of the member shall be displayed as h1. Further, the tapered portion can be a gentle curve instead of a straight line. In this case, the taper angle cannot be determined, but a convenient angle can be applied by connecting the taper start point and end point with a straight line. The case where the joining member connects the tapered portions with a curve is also included in the scope of the present invention.

  By making the cross-sectional shape of the joining aluminum or aluminum alloy member 4 of the present invention into a tapered shape as in the embodiment shown in FIG. Can be pressed.

  In the case where the cross-sectional shape of the joining aluminum or aluminum alloy member 4 of the present invention is a taper shape as shown in FIG. The cross-sectional area of the alloy member 4 is preferably larger than the effective cross-sectional area obtained by removing the cross-sectional area of the sheath heater 3 from the cross-sectional area of the groove portion 5 formed in the aluminum or aluminum alloy base member 2. This is because otherwise, the joining member is sufficiently filled in the groove, and the metal cannot be sufficiently joined. This is because a gap is formed between the sheath heater and the joining member, and the thermal conductivity of the heater is lowered.

  Further, in FIG. 6, the relationship between the height h1 of the bonding aluminum or aluminum alloy member 4 and the taper lower width W3 or the member lowest width W2 is particularly limited because the buckling resistance can be improved by adjusting the taper angle. Although not necessary, it is preferably 1 or more and 5 or less in consideration of the relationship between the overall thickness of the heater plate and the heater diameter and the buckling resistance when the taper angle is close to 0 °. Considering the resistance to be received, it is preferably 1 or more and 3 or less. In addition, although bonding is possible even if it is 1 or less, since 1 or more is preferable in consideration of thermal deformation during use of the heater plate of the forging pressure welding portion, strength of the bonding portion, etc., the lower limit value is set to 1 or more here. For example, when the diameter of the sheath heater is 10φ, the upper width W1, the lower width W2, and the height h in FIG. 6A may be 15 mm, 10 mm, and 30 mm. In addition, by using the taper-shaped joining member, the fitting is performed while being guided by the taper, so that the adhesion between the sheath heater and the joining member 4 is improved, and the material provided in the groove provided in the base member 2 is used. Is sufficiently filled, and a strong metal joint can be obtained.

Next, the case where the cross-sectional shape of the bonding aluminum or aluminum alloy member 4 is substantially T-shaped or Y-shaped will be described.
FIG. 7 shows an embodiment of the joining aluminum or aluminum alloy member 4 having a substantially T-shaped cross section. In FIG. 7A, the vertical bar portion 31 and the horizontal bar portion 32 of the T-shaped bonding aluminum or aluminum alloy member 4 are used to join the aluminum or aluminum alloy base member 2. That is, in addition to the T-shaped vertical bar portion 31 that presses the sheath heater 3, the T-shaped horizontal bar portion 32 is also joined to the aluminum or aluminum alloy base member 2. In this case, the aluminum or aluminum alloy base member 2 is provided with a recess for fitting at a position facing the T-shaped joining aluminum or aluminum alloy member 4. When the diameter of the sheath heater is 10φ, the width w and the height h in FIG. 7A may be 10 mm and 30 mm.

Further, in FIG. 7B, a T-shaped vertical bar portion 31 and a horizontal bar portion 32 that press the heater are separated at a position 33 and are separated and joined. . Although the entire vertical bar portion 31 is divided as a separate body in FIG. 7B, only a part of the vertical bar portion 31 may be a separate body. The ratio of the width and length of the vertical bar portion 31 is
Regardless of whether the vertical bar portion is integral or separate, joining is possible even with 1 or less, but considering thermal deformation and joint strength during use of the heater plate of the forging pressure welding portion, 1 or more Preferably, 4 or less is preferable in consideration of the buckling strength of the convex portion. Considering the resistance that the joining member during forge welding receives from the side surface of the base member, 1 to 3 is particularly preferable.

    In FIG. 7 (c), the joining aluminum or aluminum alloy member 4 is not only in the T-shaped vertical bar portion 31 and horizontal bar portion 32 of FIG. 7 (a), but also in a position where there is no sheath heater. A vertical bar portion 34 is provided. In this case, the aluminum or aluminum alloy base member 2 is provided with a concave portion or a convex portion at a position facing the aluminum or aluminum alloy member 4 so as to be fitted. In addition, although 34 of FIG.7 (c) is the convex part extended below, you may provide a convex part in the position which aluminum or the aluminum alloy base member 2 opposes, making 34 a recessed part. As for the volume of the vertical bar part 34 provided as a convex part, it is desirable that it is larger than the recessed part provided in the aluminum or aluminum alloy base member 2 fitted to this. Further, the width of the concave portion for fitting and the width of the convex portion of the joining member is such that the concave portion width is larger than the convex portion width, and the ratio of the convex portion width to the convex portion length is 1 as in the case of FIG. It is preferably 4 or less and particularly preferably 1 or more and 3 or less. By making such a protrusion, the bonding of the bonding aluminum or aluminum alloy member 4 and the aluminum or aluminum alloy base member 2 can be made stronger.

    Further, FIG. 7 (d) has the same cross-sectional shape as FIG. 7 (c), but as in the case of FIG. 7 (b), a T-shaped vertical bar portion 31 for pressing the sheath heater 3 and other portions. Is divided at the position 35 to be separated, and has a structure of being divided and joined. Also in this case, only a part of the vertical bar portion 31 may be a separate body. In FIG. 7D, the position of the vertical bar portion 34 is different from that in FIG. 7C, but the position of the vertical bar portion 34 may be adjusted as necessary. Here, as shown in FIG. 7 (e), the length of the horizontal bar portion of the joining aluminum or aluminum alloy member and the dimension of the groove portion in which the horizontal bar portion of the groove formed in the aluminum or aluminum alloy base member fits are as described above. The width A1 of the horizontal bar portion of the joining member is larger than the width A2 of the groove, or the shape having a taper in the thickness direction in which the horizontal bar portion end upper surface width A1a is larger than the horizontal bar portion end lower surface width A1b. It is desirable that the width be larger than the groove width of the base member to be fitted. Further, the ratio of the width A and the height B of the T-shaped horizontal bar is not particularly limited, but if the width is unnecessarily long, the material is wasted, so at most 5 to 6 times the heater housing width. The degree is sufficient. The thickness should be sufficient to secure the bonding member, and for that purpose, about 5 mm to 20 mm is necessary.

    Next, an embodiment in which the cross-sectional shape of the bonding aluminum or aluminum alloy member 4 is Y-shaped is shown in FIG. In the T-shape shown in FIG. 7, the shape of the horizontal bar portion 32 is rectangular, whereas in the Y-shape shown in FIG. 8, the lower sides 36 and 37 of the horizontal bar have a gentle downward slope toward the center. It is what. The cross-sectional area of the T-shaped or Y-shaped horizontal bar portion and the cross-sectional area of the vertical bar portion are the cross-sectional area of the groove horizontal bar portion when the portion of the groove formed in the base member is considered to be independent. Both of them must be larger than the groove cross-sectional area where the vertical bar is inserted and the heater part is excluded. The reason is that both the horizontal bar portion and the vertical bar portion must be sufficiently metal-bonded to the base member in order to sufficiently join the base member of the T-shaped or Y-shaped bonding member. is there.

  When the cross-sectional shape of the joining aluminum or aluminum alloy member 4 of the present invention is substantially T-shaped or Y-shaped, the cross-sectional area of the joining aluminum or aluminum alloy member 4 is formed in the aluminum or aluminum alloy base member 2 5 is preferably larger than the effective sectional area obtained by removing the sectional area of the sheath heater 3 from the sectional area of 5.

Further, the aluminum for joining or the aluminum alloy member 4 is made at least partially narrower than the width of the groove 5 of the aluminum or aluminum alloy base member 2 so that the aluminum for joining to the groove 5 of the aluminum or aluminum alloy base member 2 is formed. Alternatively, it is preferable to have a gap in at least a part of the side surface of the groove portion 5 when the aluminum alloy member 4 is fitted. In this way, the joining aluminum or aluminum alloy member 4 can be inserted deep into the groove,
The sheath heater and the joining member can be brought into close contact with each other.

  Furthermore, even when the cross-sectional shape of the bonding aluminum or aluminum alloy member 4 of the present invention is substantially T-shaped or Y-shaped, the ratio between the height and width of the vertical bar portions 31 and 34 is 1 or more and 4 or less. Is preferred. Further, when the width of the vertical portion is compared with the groove width of the base member with which the vertical portion is fitted, the groove width of the base member is large, and the cross-sectional area of the vertical bar is determined from the cross-sectional area of the base member in which the vertical bar portion is accommodated. It must be larger than the cross-sectional area of the portion excluding the cross-sectional area. In this way, metal bonding between the groove portion in contact with the vertical rod portion of the base member and the vertical rod portion of the bonding member is realized by forging and compressing the bonding member in the space formed by the groove of the base member. .

    The shape of the surface directly contacting the sheath heater 3 of the bonding aluminum or aluminum alloy member 4 having various shapes described above has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2 or the outer periphery of the sheath heater 3. Is preferably a curved surface having a curvature in the same direction. FIG. 9 shows an example of the bonding aluminum or aluminum alloy member 4 whose surface directly in contact with the sheath heater 3 has a curvature in the same direction as the outer periphery of the sheath heater 3. By forming the surface 38 in direct contact with the sheath heater 3 in such a shape, the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 and the sheath portion of the sheath heater 3 can be joined without a gap, and high airtightness is achieved. And excellent thermal conductivity. Furthermore, by increasing the soundness of the sheath portion, the internal insulating material is protected, and high electrical insulation is maintained.

    For the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 of the heater plate of the present invention, any one of the alloys of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01 is used. Can be used.

As another embodiment of the heater plate of the present invention, the sheath heater 3 has a pipe shape in which the sectional shape of the sheath heater 3 is a circular shape or a substantially rectangular shape (including a substantially square shape) having a curved portion with a predetermined curvature. Can be knitted.
Next, a method for manufacturing the heater plate will be described.

In the heater plate 1 of the present invention, a groove portion 5 for inserting a sheath heater 3 which is an internal component and a joining aluminum or aluminum alloy member 4 is disposed in the aluminum or aluminum alloy base member 2 in advance, and the sheath heater 3 is placed in the groove portion 5. Then, the joining aluminum or the aluminum alloy member 4 for filling the space of the groove portion 5 is inserted from above. Further, the heater plate is manufactured by performing solid-state metal bonding of the bonding aluminum or aluminum alloy member 4 and the aluminum or aluminum alloy base member 2 by forging pressure welding. Here, the aluminum or aluminum alloy base member may be an aluminum alloy plate.

    In the heater plate manufacturing method of the present invention, it is desirable to clean the surface as a pretreatment. For example, in the case of an aluminum or aluminum alloy member, (1) oil removal of the surface with nitric acid, (2) washing with water, (3) caustic treatment (etching with an alkaline solution), (4) washing with water, (5) washing with nitric acid, It is preferable to wash the surface by appropriately combining steps such as (6) washing with water and (7) washing with hot water. This is because the bondability is improved by cleaning the surface before forging pressure welding.

    In addition, it is desirable to perform cutting, polishing, anodizing, and shot blasting as finishing after the aluminum or aluminum alloy base member 2 and the bonding aluminum or aluminum alloy member 4 are forged and pressure-welded. Here, since cutting is performed after forging, the deformation in the vicinity of the pressing portion of the heater plate pressing surface after forging pressure welding caused by pressing the joining member in excess of the effective volume of the base member groove portion during forging pressing is performed by cutting, It can be removed by polishing or the like.

    The forging pressure temperature when the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 are pressure-welded is metal-bonded in a temperature range of 250 to 500 ° C., but preferably in the range of 300 to 450 ° C. Furthermore, 350-420 degreeC is suitable. The merit of forging pressure welding can be joined in a very short time when the joining member is integrated as compared with the welding method.

    When natural cooling is performed after forging and the temperature reaches room temperature, stress is generated due to the shrinkage difference between the aluminum or aluminum alloy base member and the stainless steel sheath heater, but the heater plate deforms at room temperature because the proof stress of the aluminum or aluminum alloy base member is large. There is no. Further, since the strength of the stainless steel of the sheath heater is high, the sheath heater does not deform or break. When the heater plate forged at around 400 ° C. is heated to around 400 ° C., which is the operating temperature range, the state when it is forged is restored, and between the aluminum member and the stainless steel sheath material. The stress becomes extremely small, and there is no possibility that the heater plate is deformed or the sheath material is deformed or broken.

  In the manufacturing method of the heater plate 1 of the present invention, aluminum or aluminum alloy used for the base member 2 and the joining member 4 is any one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. You can choose. The material or manufacturing method of the aluminum or aluminum alloy base member 2 is not specified, but it is desirable to use a rolled plate or a forged product with few internal defects in consideration of leakage resistance. Further, from the viewpoint of the corrosion resistance against the cleaning gas, JIS 1050 having a purity of 99.5% or more is most preferable as the aluminum material. In view of preventing creep deformation accompanying the increase in size of the heater plate, alloys having higher strength than 1100, 6061 and the like are being used, but any of the above aluminum or aluminum alloys can be used. In addition, Al-Mg alloys such as 5005 and 5052 having a low magnesium content can also be used in a composition range that satisfies the press contact property and can ensure metal bonding.

    When the aluminum or aluminum alloy base member 2 and the joining member 4 are made of the same material, the members are pressed against each other by deformation during forging and pressure welding, and are easily metal-joined physically. Further, even if the base member 2 and the joining member 4 made of aluminum or aluminum alloy are different materials, the members are brought into pressure contact with each other by physical deformation due to deformation during forging compression. For example, JIS 1000 series aluminum Even metal materials and JIS 3000 series aluminum materials are physically metal-bonded by forging pressure welding.

    When the bonding aluminum or aluminum alloy member 4 filling the groove 5 is divided into a plurality of members in the plane direction of the aluminum or aluminum alloy base member 2 as shown in FIG. 3, the divided members are simultaneously used. It is possible to forge or to forge sequentially. In the case of sequentially forging the divided members, the range of the portion to be forged at a time is reduced, so that forging can be performed using a smaller press. Moreover, when it is divided into a plurality of members in the cross-sectional direction as shown in FIGS. 7B and 7D, forging pressure welding can be performed by combining the plurality of members.

    In this case, a plurality of joining aluminum or aluminum alloy members have a length in the heater arrangement direction in which the upper surface of the member is longer than the lower surface of the member, the end surface of the joining member has a tapered shape, and the length of the upper surface of the joining member By making the length longer than the heater embedding groove length of the base member, a plurality of members are subjected to forging pressure welding while plastically deforming while exerting pressure on each other, so that sufficient joining at the time of forging pressure welding at the boundary of the plurality of members can be ensured. Although it is desirable to perform the joining of the joining member and the base member only by forging pressure welding in order to simplify the manufacturing process, by joining the boundaries of a plurality of joining members by electron beam welding, brazing, etc. In addition, it is possible to use a plurality of joining members whose length is shorter than the groove length of the base member.

    In the heater plate manufacturing method of the present invention, the joining aluminum or aluminum alloy member 4 has a taper portion with an angle exceeding 0 ° and not more than 30 °, and the taper portion is provided on the aluminum or aluminum alloy base member 2. It inserts into the groove part 5 and is metal-joined by forging pressure welding.

  In another manufacturing method of the heater plate 1 of the present invention, the cross section of the joining aluminum or aluminum alloy member 4 has a substantially T-shaped or substantially Y-shaped shape, and one aluminum or aluminum alloy base member 2 is formed. A concave portion or a convex portion is provided at a position facing each other so as to be fitted to the substantially aluminum or aluminum alloy member 4 having a substantially T shape or Y shape. Metal bonding is performed by fitting a substantially T-shaped or substantially Y-shaped bonding aluminum or aluminum alloy member 4 to the concave or convex portion of the aluminum or aluminum alloy base member 2 and performing forging pressure welding. Here, the bonding aluminum or aluminum alloy member 4 may be provided with a convex portion or a concave portion at a position other than the vertical bar portion 31 that presses the sheath heater 3.

    In the method for manufacturing the heater plate 1 of the present invention, the surface of the bonding aluminum or aluminum alloy member 4 that contacts the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2 or the outer periphery of the sheath heater 3. It is desirable that the surface has a curvature in the same direction.

  In the method for manufacturing the heater plate 1 of the present invention, the actual sectional area of the joining aluminum or aluminum alloy member 4 is the effective sectional area obtained by removing the sectional area of the sheath heater 3 from the sectional area of the groove portion 5 of the aluminum or aluminum alloy base member 2. It is preferably larger, and the adhesion between the aluminum or aluminum alloy base member 2 and the sheath heater 3 can be further enhanced by forging pressure welding. Further, when the bonding aluminum or aluminum alloy member 4 and the aluminum or aluminum alloy base member 2 are fitted, at least part of the contact surface between the side surface of the groove 5 and the side surface of the bonding aluminum or aluminum alloy member 4 It is preferable to have a gap. Thereby, the joining aluminum or aluminum alloy member 4 is surely inserted until it comes into contact with the sheath heater 3 by forging pressure welding, and the adhesion between the aluminum or aluminum alloy base member 2 and the sheath heater 3 can be further enhanced.

  With the above-described heater plate manufacturing method of the present invention, the adhesion between the aluminum or aluminum alloy base member 2 and the sheath heater 3 is enhanced, so that the thermal conductivity from the sheath heater 3 to the aluminum or aluminum alloy base member 2 is greatly increased. Since it is raised, the lifetime of the sheath heater 3 can be improved. Moreover, in the manufacturing method of the heater plate 1 of the present invention, since the forging pressure is performed in the vicinity of 400 ° C. which is the operating temperature range, the stress between the aluminum member and the stainless steel sheath material during use is extremely small, The heater plate can be used for a long time without distortion.

    In the present invention, since the two aluminum or aluminum alloys are not metal-bonded by forging pressure, only the portion in which the sheath heater is embedded is forged and pressure-welded, so that deformation of the heater plate due to thermal stress can be prevented. Therefore, even if the heater plate is enlarged, according to the present invention, only the vicinity of the sheath heater is pressed and forging pressure welding is performed, so that the power of the forging press can be reduced as compared with the case where the entire plate is pressed and joined. Further, since the area of the material pressing portion of the press machine can be reduced, the press machine can be prevented from being enlarged, and further, the labor of processing can be reduced as compared with the case where the two plate members are forged and pressed.

  In the present invention, the bonding aluminum or aluminum alloy member 4 has a taper portion, or when the bonding aluminum or aluminum alloy member 4 is fitted into the groove portion 5 of the aluminum or aluminum alloy base member 2, the groove portion 5. By providing a gap in at least a part of the side surface, it becomes possible to reliably insert the bonding aluminum or aluminum alloy member 4 to the position where it contacts the sheath heater 3 by forging pressure.

    The forging technique is made of aluminum or an aluminum alloy. However, as in the present invention, aluminum or an aluminum alloy can be used as long as it is a material that can join the joining member and the metal base member containing the sheath heater by forging pressure welding and has high thermal conductivity. However, any metal material may be used, and a material having a large thermal expansion coefficient is more preferable in consideration of the heater life. Such materials include copper or copper alloys. A similar heater plate can be obtained using copper or a copper alloy.

FIG. 1 is a cross-sectional view of a heater plate according to an embodiment of the present invention. FIG. 2 is a plan view of the heater plate according to the embodiment of the present invention. FIG. 3 is a cross-sectional view taken along the line A-A ′ of FIG. 2. FIG. 4 is a plan view of a heater plate according to another embodiment of the present invention. FIG. 5 is a plan view of a circular heater plate. FIG. 5A is an example that is symmetric with respect to the central axis, and FIG. 5B is an example that is symmetric with respect to the center. FIG. 6 is a cross-sectional view of the joining aluminum or aluminum alloy member of the present invention. FIG. 6A shows a cross-sectional shape that is entirely tapered. FIG. 6B shows a cross-sectional shape in which a part is tapered. FIG. 6C shows a cross-sectional shape in which a taper having two kinds of angle inclinations is formed. FIG. 7 shows an embodiment of the joining aluminum or aluminum alloy member having a substantially T-shaped cross section according to the present invention. FIG. 7A shows an integral T-shaped cross-sectional shape. FIG. 7B shows a T-shaped cross-sectional shape divided into a plurality of parts. FIG.7 (c) shows another T-shaped cross-sectional shape of an integrated type. FIG. 7D shows another T-shaped cross-sectional shape divided into a plurality of parts. FIG. 7E shows a T-shaped cross-sectional shape in which the horizontal bar portion is tapered. FIG. 8 shows an embodiment in which the cross-sectional shape of the joining aluminum or aluminum alloy member of the present invention is Y-shaped. FIG. 9 is a view showing a cross-sectional shape of a bonding aluminum or aluminum alloy member in which the shape of the surface directly in contact with the sheath heater of the present invention has a curvature in the same direction as the heater. FIG. 10 is a diagram showing a schematic structure of a conventional cast-in type heater plate incorporating a sheath heater. FIG. 11 is a diagram showing a schematic structure of a bolt fastening type heater plate. FIG. 12 is a view showing a schematic structure of a conventional welded heater plate. FIG. 13 is a view showing a schematic structure of a brazing and diffusion bonding type heater plate. FIG. 14 is a diagram showing a schematic structure of a forging pressure welding heater plate. FIG. 15 is a diagram showing a schematic structure of a chemical vapor deposition (CVD) processing apparatus having a sheath heater disposed therein.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 101, 103, 106, 110, 111, 121 ... Heater plate 2 ... Aluminum or aluminum alloy base member 3, 102, 123 ... Sheath heater 4 ... Joining aluminum or aluminum alloy member 5 ... Groove part 6, 7, 51, 52 ... Center shaft 11, 12, 13, 14, 15, 16, 17, 18, 19, 20 ... Aluminum 31 or aluminum alloy member side 31 ... T-shaped vertical bar 32 ... T-shaped horizontal bar portion 34... Vertical bar portion 33, 35... Divided position 36, 37... Lower side 38 of Y-shaped horizontal bar portion at a position where no heater is present immediately below the horizontal bar. ... Contact surface 53 with the sheath heater ... Center 104, 107 ... Lower base 104a, 107a ... Groove 105, 108 ... Upper base 109 ... Edge 112, 113 ... Aluminum members 114 ... fastening section 122 ... vacuum chamber 124 ... support members 125 ... substrate 126 ... gas supply unit 127 ... supply port

Claims (16)

The sheath heater is housed in the groove provided in the aluminum or aluminum alloy base member,
Furthermore, the aluminum or aluminum alloy member for joining is fitted into the groove,
A method of manufacturing a heater plate by metal bonding the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member by forging pressure welding ,
The joining aluminum or aluminum alloy member is
Both side surfaces are inclined so that the width becomes narrower toward the sheath heater,
A method of manufacturing a heater plate , wherein a width of the surface in contact with the sheath heater before forging pressure welding is larger than a width of the sheath heater. The joining aluminum or aluminum alloy member is
The method for manufacturing a heater plate according to claim 1, comprising a single member. The joining aluminum or aluminum alloy member is
The method for manufacturing a heater plate according to claim 1, comprising a plurality of members in a plane direction of the aluminum or aluminum alloy base member. The joining aluminum or aluminum alloy member is
The method for manufacturing a heater plate according to claim 1, comprising a plurality of members in a vertical direction of the aluminum or aluminum alloy base member. The layout of the sheath heater is
Symmetric with respect to at least one of two orthogonal central axes of the aluminum or aluminum alloy base member,
5. The heater plate manufacturing method according to claim 1, wherein the heater plate is point-symmetric with respect to the center. The aluminum or aluminum alloy base member is
It is a board | plate material, The manufacturing method of the heater plate of any one of Claims 1-5 characterized by the above-mentioned. 7. The cross-sectional area of the joining aluminum or aluminum alloy joining member before forging and pressure welding is larger than the effective sectional area obtained by subtracting the sectional area of the sheath heater from the sectional area of the groove portion. The manufacturing method of the heater plate of any one of Claims 1. The ratio of the height (h1) to the width (W2) of the surface in contact with the sheath heater before forging pressure welding of the joining aluminum or aluminum alloy member is 1 or more and 5 or less. 8. The method for manufacturing a heater plate according to any one of 7 above. The method for manufacturing a heater plate according to any one of claims 1 to 8 , wherein an inclination angle of both side surfaces of the joining aluminum or aluminum alloy member is more than 0 ° and not more than 30 °. The shape of the surface of the bonding aluminum or aluminum alloy member in contact with the sheath heater has a flat surface parallel to the plate surface of the aluminum or aluminum alloy base member or a curved surface having a curvature in the same direction of the outer periphery of the sheath heater. The method for manufacturing a heater plate according to any one of claims 1 to 9, characterized in that : The cross-sectional area of the joining aluminum or aluminum alloy member before forging and pressure welding is larger than the effective cross-sectional area obtained by subtracting the cross-sectional area of the sheath heater from the cross-sectional area of the groove portion,
A gap is provided at least between a side surface of the bonding aluminum or aluminum alloy member and the groove when the bonding aluminum or aluminum alloy member is fitted into the groove. The method for manufacturing a heater plate according to any one of claims 1 to 10. 12. The sheath heater according to claim 1, wherein a plurality of the sheath heaters are disposed in the groove portion, or one each in the plurality of the groove portions. Manufacturing method of heater plate. 13. The sheath heater according to claim 1, wherein a plurality of the sheath heaters are arranged in parallel to the groove part, or are arranged to overlap the groove part in a height direction. The manufacturing method of the heater plate of description. The sheath heater is
A pipe having a circular shape or a substantially rectangular or square shape with a circular cross section or a corner having a predetermined curvature;
The method for manufacturing a heater plate according to any one of claims 1 to 13, wherein the narrow strip is knitted into a pipe shape. Manufacturing method of the heater plate as claimed in any one of claims 14, characterized in that for accommodating the sheath heater airtight. The joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are made of any alloy of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. The method for manufacturing a heater plate according to any one of claims 1 to 15.

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