JP7285867B2 - Heater plate and method for manufacturing heater plate - Google Patents

Heater plate and method for manufacturing heater plate Download PDF

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Publication number
JP7285867B2
JP7285867B2 JP2021010294A JP2021010294A JP7285867B2 JP 7285867 B2 JP7285867 B2 JP 7285867B2 JP 2021010294 A JP2021010294 A JP 2021010294A JP 2021010294 A JP2021010294 A JP 2021010294A JP 7285867 B2 JP7285867 B2 JP 7285867B2
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groove portion
heater
sheath
plug member
forge
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JP2022114131A (en
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克己 渡邊
昭 福地
英憲 ▲桑▼田
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UACJ Foundry & Forging Corporation
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UACJ Foundry & Forging Corporation
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Priority to KR1020210151285A priority patent/KR102637053B1/en
Priority to CN202210080186.0A priority patent/CN114793375A/en
Priority to TW111102936A priority patent/TW202231119A/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21J—FORGING; HAMMERING; PRESSING METAL; RIVETING; FORGE FURNACES
    • B21J13/00—Details of machines for forging, pressing, or hammering
    • B21J13/02—Dies or mountings therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2213/00—Aspects relating both to resistive heating and to induction heating, covered by H05B3/00 and H05B6/00
    • H05B2213/07—Heating plates with temperature control means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Forging (AREA)

Description

本明細書が開示する技術は、ヒータプレート及びヒータプレートの製造方法に関する。 The technology disclosed in this specification relates to a heater plate and a method for manufacturing the heater plate.

従来のヒータプレートの一例として下記特許文献１に記載されたものが知られている。特許文献１に記載のヒータプレートは、アルミニウム又はアルミニウム合金基部材に内部部品としてシースヒータが収納され、その上から接合用アルミニウム又はアルミニウム合金部材を鍛圧圧接して密封した構造を持ち、液晶製造装置等の各種薄型ディスプレー（ＦＰＤ）製造装置や半導体製造装置のヒータプレートとして使用可能である。 As an example of a conventional heater plate, one described in Patent Document 1 below is known. The heater plate described in Patent Document 1 has a structure in which a sheath heater is housed as an internal part in an aluminum or aluminum alloy base member, and a joining aluminum or aluminum alloy member is forged and sealed from thereon. It can be used as a heater plate for various flat panel display (FPD) manufacturing equipment and semiconductor manufacturing equipment.

特許第４８０６１７９号公報Japanese Patent No. 4806179

しかしながら、特許文献１において、シースヒータと接合用アルミニウム又はアルミニウム合金部材との密着性が不足することにより、熱伝導性が低下するという問題があった。 However, in Patent Literature 1, there is a problem that the thermal conductivity is lowered due to insufficient adhesion between the sheath heater and the bonding aluminum or aluminum alloy member.

本明細書に記載の技術は、上記のような事情に基づいて完成されたものであって、シースヒータと接合用アルミニウム又はアルミニウム合金部材との間の高い密着性を実現できるヒータプレート及びその製造方法を提供することを目的とする。 The technique described in the present specification has been completed based on the above circumstances, and is a heater plate capable of achieving high adhesion between a sheath heater and an aluminum or aluminum alloy member for bonding, and a method of manufacturing the same. intended to provide

（１）本明細書に記載の技術に関わるヒータプレートは、互いに鍛接接合しているアルミニウムまたはアルミニウム合金製の第１部材と第２部材とによって、温度調整シースが挟み込まれて保持されたヒータプレートであって、前記第１部材には、前記第２部材が入る第２溝部と、前記第２溝部の底面において前記温度調整シースが入る第１溝部と、が設けられており、前記第１部材と前記第２部材との少なくとも一方に、前記温度調整シースの外形に沿った形状のグレンフローが形成されている。 (1) A heater plate related to the technology described in this specification is a heater plate in which a temperature control sheath is sandwiched and held by a first member and a second member made of aluminum or an aluminum alloy butt-welded to each other. wherein the first member is provided with a second groove portion into which the second member is inserted, and a first groove portion into which the temperature control sheath is inserted at a bottom surface of the second groove portion, and the first member and the second member, a grain flow having a shape along the outer shape of the temperature regulating sheath is formed.

（２）また、上記ヒータプレートは、上記（１）に加え、前記第１部材及び前記第２部材には、前記第２溝部の側面を跨ぐよう配されるとともに前記第２溝部の側面に対して交差するよう延びる形状の第２のグレンフローが形成されてもよい。 (2) In addition to the above (1), the heater plate is arranged in the first member and the second member so as to straddle the side surface of the second groove portion, A second grain flow having a shape extending to intersect with the grain may be formed.

（３）また、上記ヒータプレートは、上記（１）または上記（２）に加え、前記第２部材は、幅が前記温度調整シースの外径よりも大きくされており、前記第１部材は、前記第２溝部が前記第１溝部よりも幅広になるよう構成されてもよい。 (3) In addition to (1) or (2) above, the heater plate may have a width larger than the outer diameter of the temperature control sheath, and the first member may be: The second groove may be configured to be wider than the first groove.

（４）また、上記ヒータプレートは、上記（３）に加え、前記第１部材は、前記第２溝部の底面に複数の前記第１溝部が開口するよう構成されてもよい。 (4) In the heater plate, in addition to (3) above, the first member may be configured such that a plurality of the first grooves are opened in the bottom surface of the second grooves.

（５）また、上記ヒータプレートは、上記（３）または上記（４）に加え、前記第１部材は、前記第１溝部の深さが前記温度調整シースの外径の半分よりも大きくてもよい。 (5) In addition to (3) or (4) above, the heater plate may be such that the depth of the first groove portion of the first member is larger than half the outer diameter of the temperature adjusting sheath. good.

（６）また、上記ヒータプレートは、上記（５）に加え、前記温度調整シースの外径の半分を「ｒ」とし、前記第１溝部の深さを「Ｄ」としたとき、前記第１部材は、前記第１溝部の深さが次の式（１）を満たすよう構成されてもよい。 (6) Further, in addition to (5) above, the heater plate has the first The member may be configured such that the depth of the first groove satisfies the following formula (1).

Ｄ≦ｒ＋ｒ・ｓｉｎ５４° （１） D≦r+r·sin54° (1)

（７）また、上記ヒータプレートは、上記（１）から上記（６）のいずれかに加え、前記グレンフローは、少なくとも前記第２部材のうちの前記温度調整シースと対向する部分に形成されてもよい。 (7) Further, in addition to any one of (1) to (6) above, the heater plate is such that the grain flow is formed at least in a portion of the second member facing the temperature control sheath. good too.

（８）また、上記ヒータプレートは、上記（１）から上記（７）のいずれかに加え、前記グレンフローは、少なくとも前記第１部材のうちの前記第１溝部の溝縁に形成されてもよい。 (8) In addition to any one of (1) to (7) above, the heater plate may be such that the grain flow is formed at least on the groove edge of the first groove portion of the first member. good.

（９）また、上記ヒータプレートは、上記（１）から上記（８）のいずれかに加え、前記第１部材及び第２部材は、互いに鍛接接合される前記第２溝部の側面と前記第２部材の側面とが共に鍛接方向に対して傾斜するよう構成されてもよい。 (9) In addition to any one of (1) to (8) above, the heater plate is such that the first member and the second member are forge-welded to each other on the side surface of the second groove portion and the second groove portion. The side surface of the member may be configured to be inclined with respect to the forge welding direction.

（１０）本明細書に記載の技術に関わるヒータプレートの製造方法は、アルミニウムまたはアルミニウム合金製の第１部材と第２部材とを鍛接接合ヒータプレートの製造方法することにより、温度調整シースを挟み込んで保持させる鍛接工程を含むヒータプレートの製造方法であって、前記第１部材には、前記第２部材が入る第２溝部と、前記第２溝部の底面において前記温度調整シースが入る第１溝部と、が設けられており、前記鍛接工程では、前記第１部材と前記第２部材との少なくとも一方に、前記温度調整シースの外形に沿った形状のグレンフローが形成されるように鍛接接合する。 (10) A method of manufacturing a heater plate according to the technology described in this specification is to forge-bond a first member and a second member made of aluminum or an aluminum alloy, thereby sandwiching a temperature control sheath. wherein the first member includes a second groove for receiving the second member, and a first groove for receiving the temperature control sheath at the bottom surface of the second groove. and are provided, and in the forge welding step, at least one of the first member and the second member is forge welded so that a grain flow having a shape along the outer shape of the temperature adjustment sheath is formed. .

本明細書に記載の技術によれば、温度調整シースと第２部材との間の高い密着性を実現できるヒータプレート及びその製造方法を提供することができる。 According to the technique described in this specification, it is possible to provide a heater plate and a method of manufacturing the same that can achieve high adhesion between the temperature control sheath and the second member.

実施形態１に係るヒータプレートの断面図Sectional view of a heater plate according to Embodiment 1 ヒータプレートの平面図Top view of heater plate ヒータプレートのＡ－Ａ線断面図AA sectional view of the heater plate ヒータプレートを構成するパネル部材、ヒータシース及びプラグ部材の断面を撮影した写真Photograph of the cross section of the panel member, heater sheath and plug member that make up the heater plate 図４を拡大してプラグ部材のグレンフローを示す写真Photograph showing the grain flow of the plug member by enlarging FIG. 図４を拡大してパネル部材のグレンフローを示す写真Photograph showing the grain flow of the panel member by enlarging FIG. パネル部材及びプラグ部材の断面を撮影した写真であって、第２のグレンフローを示す写真A photograph of a cross section of the panel member and the plug member showing the second grain flow. ヒータプレートの製造方法に含まれる鍛接工程においてヒータシースを第１溝部に入れる前の状態を示す断面図FIG. 5 is a cross-sectional view showing a state before the heater sheath is inserted into the first groove in the forge welding process included in the method of manufacturing the heater plate; 鍛接工程においてプラグ部材を第２溝部に入れる前の状態を示す断面図FIG. 5 is a cross-sectional view showing a state before inserting the plug member into the second groove portion in the forge welding process; 鍛接工程においてプラグ部材を第２溝部に入れる途中の状態を示す断面図FIG. 5 is a cross-sectional view showing a state in which the plug member is being inserted into the second groove portion in the forge welding process; 化学的気相成長処理装置の概略的な断面図Schematic cross-sectional view of a chemical vapor deposition apparatus 実施形態２に係るヒータプレートを構成するパネル部材、ヒータシース及びプラグ部材の断面図Sectional view of a panel member, a heater sheath and a plug member that constitute a heater plate according to Embodiment 2. 鍛接工程においてプラグ部材を第２溝部に入れる途中の状態を示す断面図FIG. 5 is a cross-sectional view showing a state in which the plug member is being inserted into the second groove portion in the forge welding process; 実施形態３に係るヒータプレートを構成するパネル部材、ヒータシース及びプラグ部材の断面図Sectional view of a panel member, a heater sheath and a plug member that constitute a heater plate according to Embodiment 3.

本明細書において、内部にヒータシース（シースヒータ）を配設したヒータプレートは、金属部材にヒータシースを密着させたもので、ヒータシースの発熱がヒータプレートの金属部材に伝えられる。また、ヒータシースはヒータプレートを均一な温度に加熱するようにヒータプレートの内部に配設されているものである。例えば、ヒータシースを蛇行、渦巻状等に配設してヒータプレートが均一な温度に加熱されるようにしている。またヒータシースは、ステンレス鋼例えばＳＵＳ３０４、ニッケル合金例えばインコロイ、チタンのシース材（パイプ）の中に電熱線と絶縁材が封入されているものである。 In this specification, a heater plate having a heater sheath (sheathed heater) disposed therein is a heater sheath that is in close contact with a metal member, and heat generated by the heater sheath is transmitted to the metal member of the heater plate. The heater sheath is arranged inside the heater plate so as to heat the heater plate to a uniform temperature. For example, the heater sheath is arranged in a meandering, spiral shape, etc., so that the heater plate is heated to a uniform temperature. The heater sheath is a sheath material (pipe) made of stainless steel such as SUS304, nickel alloy such as Incoloy, or titanium, in which a heating wire and an insulating material are enclosed.

本明細書において、内部にヒータシースを配設したヒータプレートは、半導体や液晶等の製造装置の真空容器（真空チャンバー）内でヒータプレートとして用いられるものである。図１１に、内部にヒータシースを配設したヒータプレートの使用例を示す。図１１は化学的気相成長（ＣＶＤ）処理装置を示し、真空チャンバー１２２内にヒータシース１２３を配設したヒータプレート１２１が支持部材１２４により設けられている。ヒータプレート１２１には基板１２５が載置される。また真空チャンバー１２２内には、ＣＶＤ処理のためのガス供給部１２６が設けられており、供給口１２７よりガスを供給して化学的気相成長により基板１２５に成膜するものである。 In this specification, a heater plate having a heater sheath disposed therein is used as a heater plate in a vacuum vessel (vacuum chamber) of a manufacturing apparatus for semiconductors, liquid crystals, or the like. FIG. 11 shows a usage example of a heater plate in which a heater sheath is arranged. FIG. 11 shows a chemical vapor deposition (CVD) processing apparatus in which a heater plate 121 having a heater sheath 123 disposed within a vacuum chamber 122 is provided by support members 124 . A substrate 125 is placed on the heater plate 121 . A gas supply unit 126 for CVD processing is provided in the vacuum chamber 122, and a gas is supplied from a supply port 127 to form a film on the substrate 125 by chemical vapor deposition.

以下、本明細書の好ましい実施の形態を図面に基づいて説明する。図１は、実施形態１に係るヒータプレート１の断面図である。ヒータプレート１は、パネル部材（第１部材）２に内部部品としてヒータシース（温度調整シース）３が収容され、その上をプラグ部材（第２部材）４で密封された構造を持つ。パネル部材２及びプラグ部材４は、いずれもアルミニウムまたはアルミニウム合金製とされる。また、ヒータシース３は、断面形状が円形とされる。 Preferred embodiments of the present specification will be described below with reference to the drawings. FIG. 1 is a sectional view of a heater plate 1 according to Embodiment 1. FIG. The heater plate 1 has a structure in which a heater sheath (temperature control sheath) 3 is accommodated as an internal component in a panel member (first member) 2 and a plug member (second member) 4 is sealed thereon. Both the panel member 2 and the plug member 4 are made of aluminum or an aluminum alloy. Further, the heater sheath 3 has a circular cross-sectional shape.

図２は、ヒータプレート１の平面図である。ヒータプレート１は、平面形状が図２に示すような矩形状であってもよいし、また円形状であってもよい。ヒータプレート１のレイアウト形状は、互いに直交する２つの中心軸の少なくとも１つに対して対称であるか、又は中心に対して点対称であるのが好ましい。パネル部材２は、図２に示すように、ヒータプレート１と同じ平面形状で板状をなしている。プラグ部材４は、パネル部材２の板面に沿って延在するとともに蛇行するような平面形状とされる。ヒータシース３は、プラグ部材１３と同様の平面形状とされる。 FIG. 2 is a plan view of the heater plate 1. FIG. The heater plate 1 may have a rectangular planar shape as shown in FIG. 2, or may have a circular planar shape. The layout shape of the heater plate 1 is preferably symmetrical with respect to at least one of two central axes perpendicular to each other, or point-symmetrical with respect to the center. As shown in FIG. 2, the panel member 2 has the same planar shape as the heater plate 1 and has a plate shape. The plug member 4 extends along the plate surface of the panel member 2 and has a meandering planar shape. The heater sheath 3 has a planar shape similar to that of the plug member 13 .

図３は、図２のＡ－Ａ線断面図である。パネル部材２は、図３に示すように、一方の板面にヒータシース３とプラグ部材４とを収容する溝部５が開口して設けられている。溝部５は、ヒータシース３が入る奥側（深い側）の第１溝部５Ａと、プラグ部材４が入る手前側（浅い側）第２溝部５Ｂと、が連通する構成とされる。ヒータプレート１の製造に際しては、第１溝部５Ａにヒータシース３を収容した後に、第２溝部５Ｂにプラグ部材４を収容し、パネル部材２とプラグ部材４とを鍛接接合している。このときの鍛接方向は、図３に示すＺ軸方向（上下方向）と一致している。ヒータシース３は、パネル部材２とプラグ部材４とにより挟み込まれて密着状態で保持される。 3 is a cross-sectional view taken along the line AA of FIG. 2. FIG. As shown in FIG. 3, the panel member 2 is provided with a groove portion 5 that is open to accommodate the heater sheath 3 and the plug member 4 in one plate surface. The groove portion 5 is configured such that a first groove portion 5A on the inner side (deep side) into which the heater sheath 3 is inserted and a second groove portion 5B on the front side (shallower side) in which the plug member 4 is inserted are communicated with each other. When manufacturing the heater plate 1, after the heater sheath 3 is accommodated in the first groove portion 5A, the plug member 4 is accommodated in the second groove portion 5B, and the panel member 2 and the plug member 4 are welded together. The forge welding direction at this time coincides with the Z-axis direction (vertical direction) shown in FIG. The heater sheath 3 is sandwiched between the panel member 2 and the plug member 4 and held in close contact.

次に、パネル部材２及びプラグ部材４について詳しく説明する。プラグ部材４は、図３に示すように、断面形状が略矩形とされているが、ヒータシース３に接する面がヒータシース３の外形に沿って円弧状に凹んでいる。プラグ部材４は、両側面４Ａが鍛接方向に沿ってほぼ真っ直ぐな面となっている。プラグ部材４は、その幅Ｗがヒータシース３の外径Ｒよりも大きい。 Next, the panel member 2 and the plug member 4 will be explained in detail. As shown in FIG. 3 , the plug member 4 has a substantially rectangular cross-sectional shape, but the surface in contact with the heater sheath 3 is recessed in an arc shape along the contour of the heater sheath 3 . Both side surfaces 4A of the plug member 4 are substantially straight surfaces along the forge welding direction. The width W of the plug member 4 is larger than the outer diameter R of the heater sheath 3 .

第１溝部５Ａの断面形状が略Ｕ字型とされるとともに、第２溝部５Ｂの断面形状が矩形とされる。詳しくは、第１溝部５Ａは、その幅が、鍛接方向の手前側では最大値Ｗ１でほぼ一定とされるが、鍛接方向の奥側では奥端に近づくほど小さくなるよう可変とされる。第１溝部５Ａは、その幅の最大値Ｗ１がヒータシース３の外径Ｒとほぼ一致している。第１溝部５Ａは、その周面が、鍛接方向の奥側にある円弧状面５Ａ１と、鍛接方向の手前側にあって鍛接方向に沿ってほぼ真っ直ぐな真直面５Ａ２と、からなる。円弧状面５Ａ１は、その曲率半径がヒータシース３の曲率半径とほぼ同じとされており、第１溝部５Ａに入ったヒータシース３の外周面に接触される。真直面５Ａ２は、一対が幅Ｗ１分の間隔を空けて対向するよう配されており、第１溝部５Ａに入ったヒータシース３の外周面とは殆ど非接触とされる。 The cross-sectional shape of the first groove portion 5A is substantially U-shaped, and the cross-sectional shape of the second groove portion 5B is rectangular. Specifically, the width of the first groove portion 5A is substantially constant at the maximum value W1 on the front side in the forge welding direction, but is variable so as to decrease toward the rear end on the far side in the forge welding direction. The maximum width W1 of the first groove portion 5A substantially matches the outer diameter R of the heater sheath 3 . The peripheral surface of the first groove portion 5A is composed of an arcuate surface 5A1 on the far side in the forging direction and a straight surface 5A2 on the front side in the forging direction and substantially straight along the forging direction. The radius of curvature of the arc-shaped surface 5A1 is substantially the same as that of the heater sheath 3, and is brought into contact with the outer peripheral surface of the heater sheath 3 entering the first groove 5A. A pair of straight faces 5A2 are arranged to face each other with an interval of width W1, and are almost non-contact with the outer peripheral surface of the heater sheath 3 in the first groove portion 5A.

第２溝部５Ｂは、その幅Ｗ２が鍛接方向についてほぼ一定とされる。第２溝部５Ｂは、その周面が、鍛接方向に沿ってほぼ真っ直ぐな側面５Ｂ１と、鍛接方向に対してほぼ直交する底面５Ｂ２と、からなる。側面５Ｂ１は、底面５Ｂ２からほぼ垂直に立ち上がる面である。第２溝部５Ｂは、その幅Ｗ２が第１溝部５Ａの幅の最大値Ｗ１よりも大きい。つまり、第２溝部５Ｂの幅Ｗ２は、ヒータシース３の外径Ｒよりも大きい。従って、第１溝部５Ａは、幅広な第２溝部５Ｂの底面５Ｂ２における中央側部分をさらに凹ませて形成されている、と言え、残存する第２溝部５Ｂの底面５Ｂ２における両端側部分によって挟み込まれている。また、第１溝部５Ａは、第２溝部５Ｂにおける幅方向（図３の左右方向）についてのほぼ中央位置に配されている。 The width W2 of the second groove portion 5B is substantially constant in the forge welding direction. The second groove portion 5B has a peripheral surface composed of a side surface 5B1 that is substantially straight along the forge welding direction and a bottom surface 5B2 that is substantially perpendicular to the forge welding direction. The side surface 5B1 is a surface rising substantially vertically from the bottom surface 5B2. The width W2 of the second groove portion 5B is larger than the maximum value W1 of the width of the first groove portion 5A. That is, the width W2 of the second groove portion 5B is larger than the outer diameter R of the heater sheath 3. As shown in FIG. Therefore, it can be said that the first groove portion 5A is formed by further recessing the center side portion of the bottom surface 5B2 of the wide second groove portion 5B. ing. Further, the first groove portion 5A is arranged at a substantially central position in the width direction (horizontal direction in FIG. 3) of the second groove portion 5B.

そして、第１溝部５Ａは、その深さＤがヒータシース３の外径Ｒよりも小さい。従って、第１溝部５Ａに入ったヒータシース３は、その一部が第２溝部５Ｂ側に突き出した状態となっている。一方、第１溝部５Ａは、その深さＤがヒータシース３の外径Ｒの半分（半径）ｒよりも大きい。従って、ヒータシース３が第１溝部５Ａに入った状態では、ヒータシース３の中心Ｃが第１溝部５Ａ内に存在していて第２溝部５Ｂの底面５Ｂ２よりも低い配置となる。この状態では、ヒータシース３の外周面のうち、第１溝部５Ａ内に存在し且つ中心Ｃよりも高い部分（第２溝部５Ｂ側の部分）については、第１溝部５Ａの周面のうちのヒータシース３の中心Ｃよりも高い部分との間に隙間が生じていて当該部分とは非接触となっている。ヒータシース３の外周面のうちの第１溝部５Ａの周面との非接触部分３Ａは、ヒータシース３の中心Ｃを挟んで左右に２箇所存在している。非接触部分３Ａは、ヒータシース３において中心Ｃを通る２つの半径によって切り取られる扇形部分の円弧となっている。ヒータシース３の外周面は、上記した２つの非接触部分３Ａを除いた部分がパネル部材２及びプラグ部材４に対して接触した状態とされる。 The depth D of the first groove portion 5A is smaller than the outer diameter R of the heater sheath 3 . Therefore, the heater sheath 3 that has entered the first groove portion 5A is in a state in which a portion thereof protrudes toward the second groove portion 5B. On the other hand, the depth D of the first groove portion 5A is larger than the half (radius) r of the outer diameter R of the heater sheath 3 . Therefore, when the heater sheath 3 is in the first groove portion 5A, the center C of the heater sheath 3 exists in the first groove portion 5A and is positioned lower than the bottom surface 5B2 of the second groove portion 5B. In this state, the portion of the outer peripheral surface of the heater sheath 3 that exists within the first groove portion 5A and is higher than the center C (the portion on the side of the second groove portion 5B) is the heater sheath portion of the peripheral surface of the first groove portion 5A. There is a gap with the part higher than the center C of 3 and it is not in contact with the part. Two non-contact portions 3A of the outer peripheral surface of the heater sheath 3 with respect to the peripheral surface of the first groove portion 5A are present on both sides of the center C of the heater sheath 3. As shown in FIG. The non-contact portion 3A is an arc of a sector cut by two radii passing through the center C of the heater sheath 3 . The outer peripheral surface of the heater sheath 3 is in contact with the panel member 2 and the plug member 4 except for the two non-contact portions 3A.

さらには、第１溝部５Ａは、その深さＤが次の式（２）を満たすよう構成されている。ここで、式（２）の中の「ｒ・ｓｉｎ５４°」は、ヒータシース３の中心Ｃを通る底辺と、その底辺に対して５４°の角度をなし且つ中心Ｃを通る斜辺と、を有する直角三角形の高さを表している。従って、第１溝部５Ａの深さＤが式（２）を満たしていれば、ヒータシース３の中心Ｃと第２溝部５Ｂの底面５Ｂ２との間の鍛接方向についての距離Ｌが、「ｒ・ｓｉｎ５４°」よりも小さくなる。一方、ヒータシース３において、中心角が５４°となる扇形部分の円弧の長さが、ヒータシース３の外周長さに占める割合は、１５％となっている。従って、第１溝部５Ａの深さＤが式（２）を満たしていれば、ヒータシース３の非接触部分３Ａの長さが、ヒータシース３の外周長さに占める割合が３０％未満となる。つまり、第１溝部５Ａの深さＤが式（２）を満たしていれば、鍛接接合に伴って塑性変形したプラグ部材４が第１溝部５Ａ内に充填されなかった場合には、ヒータシース３の外周面がパネル部材２及びプラグ部材４に対して非接触となる非接触面積の割合が３０％未満となる。 Furthermore, the first groove portion 5A is configured such that its depth D satisfies the following formula (2). Here, "r·sin 54°" in Equation (2) is a right angle having a base passing through the center C of the heater sheath 3 and an oblique side forming an angle of 54° with respect to the base and passing through the center C. represents the height of the triangle. Therefore, if the depth D of the first groove portion 5A satisfies the formula (2), the distance L in the forge welding direction between the center C of the heater sheath 3 and the bottom surface 5B2 of the second groove portion 5B is "r·sin 54 °”. On the other hand, in the heater sheath 3, the arc length of the fan-shaped portion having a central angle of 54° accounts for 15% of the outer peripheral length of the heater sheath 3. Therefore, if the depth D of the first groove portion 5A satisfies the formula (2), the length of the non-contact portion 3A of the heater sheath 3 accounts for less than 30% of the outer circumference of the heater sheath 3. That is, if the depth D of the first groove portion 5A satisfies the formula (2), and the plug member 4 plastically deformed due to the forge welding is not filled in the first groove portion 5A, the depth of the heater sheath 3 is The ratio of the non-contact area where the outer peripheral surface does not contact the panel member 2 and the plug member 4 is less than 30%.

ｒ＜Ｄ≦ｒ＋ｒ・ｓｉｎ５４° （２） r<D≦r+r·sin54° (2)

上記のような構成のパネル部材２及びプラグ部材４は、間にヒータシース３を挟み込んだ状態で鍛接接合されている。そして、鍛接接合されたパネル部材２及びプラグ部材４のうちのヒータシース３を取り囲む部分には、図４から図６に示すように、ヒータシース３の外形に沿う形状のグレンフロー（鍛流線）６が形成されている。「グレンフロー」とは、金属材料を鍛造等した際にみられる繊維状の金属組織の流れのことである。図４は、パネル部材２、ヒータシース３及びプラグ部材４の断面を撮影した写真である。図５は、図４を拡大した写真であって、プラグ部材４のグレンフロー６を示す写真である。図６は、図４を拡大した写真であって、パネル部材２のグレンフロー６を示す写真である。図４には、ヒータシース３の外形をなぞった破線を併記している。また、図５及び図６には、グレンフロー６をなぞった破線を併記している。プラグ部材４のうちのヒータシース３と対向する部分には、図５に示すように、ヒータシース３のうちの第２溝部５Ｂ側に突き出した部分の外形に沿う形状のグレンフロー６が形成されている。パネル部材２のうちのヒータシース３と対向する部分には、図６に示すように、ヒータシース３のうちの第１溝部５Ａに収容された部分の外形に沿う形状のグレンフロー６が形成されている。パネル部材２及びプラグ部材４に形成されたグレンフロー６は、いずれもヒータシース３の外形に沿うよう曲線状をなすとともに鍛接方向に対して交差するよう延在している。 The panel member 2 and the plug member 4 configured as described above are welded together with the heater sheath 3 interposed therebetween. 4 to 6, a portion of the panel member 2 and the plug member 4 which are forge-welded to surround the heater sheath 3 is provided with a grain flow 6 having a shape along the outer shape of the heater sheath 3. is formed. "Glen flow" refers to the flow of fibrous metal structure that is observed when metal materials are forged. FIG. 4 is a photograph of cross sections of the panel member 2, the heater sheath 3 and the plug member 4. FIG. FIG. 5 is an enlarged photograph of FIG. 4 showing the grain flow 6 of the plug member 4 . FIG. 6 is an enlarged photograph of FIG. 4 showing the grain flow 6 of the panel member 2 . FIG. 4 also shows a dashed line tracing the contour of the heater sheath 3 . 5 and 6 also show a dashed line tracing the grain flow 6. As shown in FIG. As shown in FIG. 5, a portion of the plug member 4 that faces the heater sheath 3 is formed with a grain flow 6 having a shape that follows the outline of the portion of the heater sheath 3 that protrudes toward the second groove portion 5B. . As shown in FIG. 6, a portion of the panel member 2 facing the heater sheath 3 is formed with a grain flow 6 having a shape that conforms to the outer shape of the portion of the heater sheath 3 that is accommodated in the first groove portion 5A. . The grain flows 6 formed in the panel member 2 and the plug member 4 are curved along the contour of the heater sheath 3 and extend to intersect the forge welding direction.

上記のように、ヒータシース３の外形に沿った形状のグレンフロー６が形成される程にヒータシース３を強く押し付けた状態でパネル部材２とプラグ部材４とが鍛接接合されているので、ヒータシース３に対してパネル部材２とプラグ部材４とを高い密着度合いで密着させることができる。従って、ヒータシース３の熱を効率的にパネル部材２とプラグ部材４とに伝導させることができる。これにより、加熱されたヒータシース３の温度と、ヒータシース３からの伝熱によって加熱されたパネル部材２及びプラグ部材４の温度と、に生じ得る差が小さくなる。この温度差が小さくなることで、ヒータシース３の加熱温度を無駄に高くせずに済んで省エネ化を図ることができるとともに、ヒータシース３の熱膨張量と、パネル部材２及びプラグ部材４の各熱膨張量と、の差が低減されて、ヒータシース３が熱膨張時にパネル部材２とプラグ部材４とから受ける圧縮応力と引張応力とを低減できる。その結果、加熱サイクルにおけるヒータシース３の繰り返し応力を抑制することができ、ヒータシース３の疲労破壊が低減され、ヒータシース３の長寿命化を実現できる。 As described above, the panel member 2 and the plug member 4 are forge-welded in a state in which the heater sheath 3 is strongly pressed to the extent that the grain flow 6 having a shape along the outer shape of the heater sheath 3 is formed. In contrast, the panel member 2 and the plug member 4 can be brought into close contact with each other with a high degree of close contact. Therefore, heat from the heater sheath 3 can be efficiently conducted to the panel member 2 and the plug member 4 . As a result, the difference between the temperature of the heated heater sheath 3 and the temperature of the panel member 2 and the plug member 4 heated by heat transfer from the heater sheath 3 is reduced. By reducing this temperature difference, the heating temperature of the heater sheath 3 does not needlessly increase, and energy saving can be achieved. Since the difference between the amount of expansion and the amount of expansion is reduced, the compressive stress and tensile stress that the heater sheath 3 receives from the panel member 2 and the plug member 4 during thermal expansion can be reduced. As a result, the repeated stress of the heater sheath 3 in the heating cycle can be suppressed, the fatigue failure of the heater sheath 3 can be reduced, and the life of the heater sheath 3 can be extended.

鍛接接合されたパネル部材２のうちの第２溝部５Ｂの溝縁と、プラグ部材４のうちの側縁部と、には、図７に示すように、第２のグレンフロー７が形成されている。図７は、パネル部材２及びプラグ部材４の断面を撮影した写真である。また、図７には、第２のグレンフロー７をなぞった破線を併記している。第２のグレンフロー７は、第２溝部５Ｂの側面５Ｂ１に対して交差するよう延在しており、第２溝部５Ｂの側面５Ｂ１を跨ぐようパネル部材２及びプラグ部材４の双方に設けられている。第２のグレンフロー７は、プラグ部材４側の方が低くなるのに対してパネル部材２側の方が高くなるよう傾くとともに曲線状をなしている。また、第２のグレンフロー７は、グレンフロー６と同様に、鍛接方向に対して交差するよう延在している。 As shown in FIG. 7, a second grain flow 7 is formed on the groove edge of the second groove portion 5B of the forge-welded panel member 2 and the side edge portion of the plug member 4. there is FIG. 7 is a photograph of cross sections of the panel member 2 and the plug member 4. FIG. In addition, FIG. 7 also shows a dashed line tracing the second grain flow 7 . The second grain flow 7 extends to cross the side surface 5B1 of the second groove portion 5B, and is provided on both the panel member 2 and the plug member 4 so as to straddle the side surface 5B1 of the second groove portion 5B. there is The second grain flow 7 is inclined and curved so that the plug member 4 side is lower and the panel member 2 side is higher. Further, the second grain flow 7 extends so as to intersect with the forge welding direction, similarly to the grain flow 6 .

上記のように、第２溝部５Ｂの側面５Ｂ１を跨ぐよう配されるとともに第２溝部５Ｂの側面５Ｂ１に対して交差するよう延びる形状の第２のグレンフロー７が形成される程にパネル部材２とプラグ部材４とが鍛接接合されているので、プラグ部材４がパネル部材２に対して強固に保持される。これにより、ヒータシース３に対してパネル部材２とプラグ部材４とをより高い密着度合いで密着させることができる。 As described above, the panel member 2 is arranged so as to straddle the side surface 5B1 of the second groove portion 5B and extend so as to intersect the side surface 5B1 of the second groove portion 5B. and the plug member 4 are forge welded together, the plug member 4 is firmly held to the panel member 2 . As a result, the panel member 2 and the plug member 4 can be brought into close contact with the heater sheath 3 with a higher degree of contact.

また、パネル部材２は、第１溝部５Ａの深さＤが上記した式（２）を満たすよう構成されているので、ヒータシース３の外周面がパネル部材２及びプラグ部材４に対して非接触となる非接触面積の割合が３０％未満となっている。仮にヒータシースの外周面がパネル部材２及びプラグ部材４に対して非接触となる非接触面積の割合が３０％を超えると、ヒータシース３からパネル部材２及びプラグ部材４への伝熱性能が悪化することが懸念されるものの、そのような事態を避けることができる。これにより、ヒータシース３からパネル部材２及びプラグ部材４への伝熱性能を良好に保つことができる。 In addition, since the panel member 2 is configured such that the depth D of the first groove portion 5A satisfies the above formula (2), the outer peripheral surface of the heater sheath 3 does not come into contact with the panel member 2 and the plug member 4. The non-contact area ratio is less than 30%. If the ratio of the non-contact area where the outer peripheral surface of the heater sheath is not in contact with the panel member 2 and the plug member 4 exceeds 30%, the heat transfer performance from the heater sheath 3 to the panel member 2 and the plug member 4 deteriorates. Although it is a concern, such a situation can be avoided. As a result, good heat transfer performance from the heater sheath 3 to the panel member 2 and the plug member 4 can be maintained.

本実施形態に係るヒータプレート１は以上のような構造であり、続いてヒータプレート１の製造方法を、構造に基づく作用及び効果と共に説明する。本実施形態に係るヒータプレート１の製造方法では、予めパネル部材２、ヒータシース３及びプラグ部材４をそれぞれ製造しておき、パネル部材２とプラグ部材４とを鍛接接合（鍛圧圧接）することにより、ヒータシース３を挟み込んで保持させる鍛接工程を行うようにしている。鍛接工程の前処理として、水、湯、または硝酸などを用いた洗浄処理、硝酸などを用いた表面の油取り処理などをパネル部材２やプラグ部材４に行うことも可能である。このような前処理を行うことで、パネル部材２とプラグ部材４との接合性が向上する。 The heater plate 1 according to the present embodiment has the structure described above, and the method for manufacturing the heater plate 1 will be described together with the functions and effects based on the structure. In the method of manufacturing the heater plate 1 according to the present embodiment, the panel member 2, the heater sheath 3, and the plug member 4 are manufactured in advance, and the panel member 2 and the plug member 4 are forge-welded (forge pressure welding) to achieve A forge welding process is performed in which the heater sheath 3 is sandwiched and held. As a pretreatment for the forge welding process, the panel member 2 and the plug member 4 may be subjected to a cleaning treatment using water, hot water, nitric acid, or the like, or a surface oil removing treatment using nitric acid or the like. By performing such pretreatment, the bondability between the panel member 2 and the plug member 4 is improved.

鍛接工程について図８から図１０を用いて詳しく説明する。図８は、ヒータシース３を第１溝部５Ａ内に入れる前の状態を示す断面図である。図９は、ヒータシース３を第１溝部５Ａ内に入れた後にプラグ部材４を第２溝部５Ｂ内に入れる前の状態を示す断面図である。図１０は、プラグ部材４を第２溝部５Ｂ内に入れる途中の状態を示す断面図である。鍛接工程では、図８に示すように、まずパネル部材２の第１溝部５Ａ内にヒータシース３を入れる作業が行われる。ヒータシース３を第１溝部５Ａに入れる際には、ヒータシース３が第２溝部５Ｂを通される。この第２溝部５Ｂの幅Ｗ２がヒータシース３の外径Ｒよりも大きいので、第２溝部５Ｂを通過するヒータシース３が第２溝部５Ｂの側面５Ｂ１に干渉する事態が生じ難く、ヒータシース３を第１溝部５Ａに入れやすい。第１溝部５Ａに入れられたヒータシース３は、図９に示すように、一部（上端部）が第２溝部５Ｂ側に突き出した状態とされるとともに、中心Ｃが第２溝部５Ｂの底面５Ｂ２よりも低い配置となっている。 The forge welding process will be described in detail with reference to FIGS. 8 to 10. FIG. FIG. 8 is a cross-sectional view showing a state before the heater sheath 3 is inserted into the first groove portion 5A. FIG. 9 is a sectional view showing a state before inserting the plug member 4 into the second groove portion 5B after inserting the heater sheath 3 into the first groove portion 5A. FIG. 10 is a cross-sectional view showing a state in which the plug member 4 is being inserted into the second groove portion 5B. In the forge welding process, as shown in FIG. 8, the heater sheath 3 is inserted into the first groove portion 5A of the panel member 2 first. When inserting the heater sheath 3 into the first groove portion 5A, the heater sheath 3 is passed through the second groove portion 5B. Since the width W2 of the second groove portion 5B is larger than the outer diameter R of the heater sheath 3, the heater sheath 3 passing through the second groove portion 5B is less likely to interfere with the side surface 5B1 of the second groove portion 5B. It is easy to put in the groove part 5A. As shown in FIG. 9, the heater sheath 3 inserted in the first groove portion 5A is in a state in which a part (upper end portion) protrudes toward the second groove portion 5B, and the center C is the bottom surface 5B2 of the second groove portion 5B. It is positioned lower than

続いて、鍛接工程では、図９に示すように、パネル部材２の第２溝部５Ｂ内にプラグ部材４を入れてパネル部材２及びプラグ部材４を鍛接接合する作業が行われる。なお、第２溝部５Ｂ内に入れられる前のプラグ部材４の底面４Ｂは、第２溝部５Ｂの底面５Ｂ２に並行するほぼ平らな面となっている。プラグ部材４の幅Ｗが第２溝部５Ｂの幅Ｗ２よりもわずかに大きくされているので、プラグ部材４は、その側面４Ａが第２溝部５Ｂの側面５Ｂ１に接した状態で第２溝部５Ｂ内の奥方へと押し込まれる。従って、プラグ部材４の側面４Ａ及び第２溝部５Ｂの側面５Ｂ１は、鍛接接合に際して摩擦抵抗を生じさせるとともにプラグ部材４の変位を拘束し得る箇所である、と言える。プラグ部材４は、幅Ｗがヒータシース３の外径Ｒよりも大きいので、仮にプラグ部材の幅がヒータシース３の外径Ｒと同じとされる場合に比べると、プラグ部材４の強度が高い。従って、プラグ部材４を第２溝部５Ｂに入れて鍛接接合する際にプラグ部材４に座屈変形などの不用意な変形が生じ難くなっている。 Subsequently, in the forge welding process, as shown in FIG. 9, the plug member 4 is inserted into the second groove portion 5B of the panel member 2 and the panel member 2 and the plug member 4 are forge welded together. The bottom surface 4B of the plug member 4 before being inserted into the second groove portion 5B is a substantially flat surface parallel to the bottom surface 5B2 of the second groove portion 5B. Since the width W of the plug member 4 is slightly larger than the width W2 of the second groove portion 5B, the plug member 4 can be inserted into the second groove portion 5B with its side surface 4A in contact with the side surface 5B1 of the second groove portion 5B. pushed deep into the Therefore, it can be said that the side surface 4A of the plug member 4 and the side surface 5B1 of the second groove portion 5B are locations that can restrain displacement of the plug member 4 while generating frictional resistance during forge welding. Since the width W of the plug member 4 is larger than the outer diameter R of the heater sheath 3 , the strength of the plug member 4 is higher than if the width of the plug member were the same as the outer diameter R of the heater sheath 3 . Therefore, when the plug member 4 is inserted into the second groove portion 5B and forge-welded, the plug member 4 is less likely to undergo unintentional deformation such as buckling deformation.

プラグ部材４が第２溝部５Ｂ内に押し込まれる途中の段階で、図１０に示すように、第１溝部５Ａ内に収容されたヒータシース３のうちの第２溝部５Ｂ側に突き出した部分に対してプラグ部材４の底面４Ｂが接する。この状態からさらにプラグ部材４が奥方へと押し込まれると、プラグ部材４の底面４Ｂがヒータシース３によって塑性変形させられ、底面４Ｂにおける中央側部分がほぼ平らな形状からヒータシース３の外周面に沿う円弧形状となる（図３を参照）。このとき、プラグ部材４は、底面４Ｂについては塑性変形する。第１溝部５Ａに入ったヒータシース３の中心Ｃが第２溝部５Ｂの底面５Ｂ２よりも低い配置となっているので、プラグ部材４を鍛接接合する際に、ヒータシース３が第１溝部５Ａから第２溝部５Ｂ側に浮き上がるよう位置ずれする事態が生じ難くなっている。 During the process of pushing the plug member 4 into the second groove portion 5B, as shown in FIG. The bottom surface 4B of the plug member 4 contacts. When the plug member 4 is further pushed inward from this state, the bottom surface 4B of the plug member 4 is plastically deformed by the heater sheath 3, and the central portion of the bottom surface 4B changes from a substantially flat shape to an arc along the outer peripheral surface of the heater sheath 3. shape (see Figure 3). At this time, the bottom surface 4B of the plug member 4 is plastically deformed. Since the center C of the heater sheath 3 entering the first groove portion 5A is lower than the bottom surface 5B2 of the second groove portion 5B, when the plug member 4 is forge-welded, the heater sheath 3 moves from the first groove portion 5A to the second groove portion 5A. It is difficult to cause a positional deviation such as floating on the groove 5B side.

ここで、第２溝部５Ｂは、第１溝部５Ａよりも幅広であることから、第２溝部５Ｂの側面５Ｂ１と第１溝部５Ａに入ったヒータシース３との間には、第２溝部５Ｂの底面５Ｂ２分の距離が空けられている。第２溝部５Ｂの側面５Ｂ１は、鍛接接合におけるプラグ部材４の側面４Ａと第２溝部５Ｂの側面５Ｂ１との間に生じる摩擦抵抗によってプラグ部材４の変位が拘束されるものの、当該箇所からヒータシース３までの距離が底面５Ｂ２の存在によって十分に確保されることで、プラグ部材４の底面４Ｂのうちのヒータシース３と対向する部分がヒータシース３に到達し易くなっている。さらには、プラグ部材４の幅Ｗがヒータシース３の外径Ｒよりも大きいので、プラグ部材４の底面４Ｂが十分に広くなっており、それによりプラグ部材４の底面４Ｂのうちのヒータシース３と対向する部分がヒータシース３の外形に追従するように塑性変形し易くなっている。 Here, since the second groove portion 5B is wider than the first groove portion 5A, the bottom surface of the second groove portion 5B is spaced between the side surface 5B1 of the second groove portion 5B and the heater sheath 3 entering the first groove portion 5A. There is a distance of 5B2 minutes. Although displacement of the plug member 4 is restrained by the frictional resistance generated between the side surface 4A of the plug member 4 and the side surface 5B1 of the second groove portion 5B in forge welding, the side surface 5B1 of the second groove portion 5B does not allow the heater sheath 3 to move from the portion. The presence of the bottom surface 5B2 makes it possible for the portion of the bottom surface 4B of the plug member 4 that faces the heater sheath 3 to reach the heater sheath 3 easily. Furthermore, since the width W of the plug member 4 is larger than the outer diameter R of the heater sheath 3, the bottom surface 4B of the plug member 4 is sufficiently wide, so that the bottom surface 4B of the plug member 4 faces the heater sheath 3. The portion to be covered is easily plastically deformed so as to follow the outer shape of the heater sheath 3 .

図３に示すように、プラグ部材４の底面４Ｂが第２溝部５Ｂの底面５Ｂ２に接する深さまでプラグ部材４が押し込まれると、鍛接工程が完了する。このようにして鍛接工程が行われ、パネル部材２及びプラグ部材４が間にヒータシース３を挟み込んだ状態で鍛接接合されると、パネル部材２及びプラグ部材４のうちのヒータシース３を取り囲む部分には、図４から図６に示すように、ヒータシース３の外形に沿う形状のグレンフロー６が形成される。詳しくは、プラグ部材４のうちのヒータシース３と対向する部分には、図５に示すように、ヒータシース３のうちの第２溝部５Ｂ側に突き出した部分の外形に沿う形状のグレンフロー６が形成される。パネル部材２のうちのヒータシース３と対向する部分には、図６に示すように、ヒータシース３のうちの第１溝部５Ａに収容された部分の外形に沿う形状のグレンフロー６が形成される。 As shown in FIG. 3, when the plug member 4 is pushed to a depth where the bottom surface 4B of the plug member 4 is in contact with the bottom surface 5B2 of the second groove portion 5B, the forge welding process is completed. When the forge welding process is performed in this way and the panel member 2 and the plug member 4 are forge welded with the heater sheath 3 interposed therebetween, the portion of the panel member 2 and the plug member 4 surrounding the heater sheath 3 has , as shown in FIGS. 4 to 6, a grain flow 6 having a shape along the outer shape of the heater sheath 3 is formed. More specifically, as shown in FIG. 5, a portion of the plug member 4 facing the heater sheath 3 is formed with a grain flow 6 having a shape that conforms to the contour of the portion of the heater sheath 3 protruding toward the second groove portion 5B. be done. As shown in FIG. 6, a portion of the panel member 2 facing the heater sheath 3 is formed with a grain flow 6 having a shape that conforms to the outer shape of the portion of the heater sheath 3 that is accommodated in the first groove portion 5A.

ところで、鍛接工程を行う前の状態では、パネル部材２及びプラグ部材４の各周面には、アルミニウムが酸化した状態の酸化皮膜が存在している。一方、鍛接工程が行われると、プラグ部材４の側面４Ａと第２溝部５Ｂの側面５Ｂ１とが互いに接した状態でプラグ部材４が奥方へ押し込まれるので、両側面４Ａ，５Ｂ１同士が擦れ合うことでそれぞれの酸化皮膜が除去される。このとき、両側面４Ａ，５Ｂ１において酸化していないアルミニウム同士の金属結合（金属固相接合）が生じるが、金属結合が生じた状態でさらにプラグ部材４が第２溝部５Ｂの奥方へ押し込まれると、両側面４Ａ，５Ｂ１の間に塑性流動が生じ、それに伴って図７に示される第２のグレンフロー７が形成される。 By the way, before the forge welding process is performed, the peripheral surfaces of the panel member 2 and the plug member 4 have oxide films in which aluminum is oxidized. On the other hand, when the forge welding process is performed, the plug member 4 is pushed inward while the side surface 4A of the plug member 4 and the side surface 5B1 of the second groove portion 5B are in contact with each other. Each oxide film is removed. At this time, metallic bonding (metallic solid phase bonding) occurs between non-oxidized aluminum on both side surfaces 4A and 5B1. , and a plastic flow occurs between the two side surfaces 4A and 5B1, thereby forming a second grain flow 7 shown in FIG.

このように、本実施形態に係るヒータプレート１の製造方法に備わる鍛接工程では、ヒータシース３をパネル部材２とプラグ部材４とにより挟み込んだ状態で、パネル部材２及びプラグ部材４のうちのヒータシース３を取り囲む部分に、ヒータシース３の外形に沿う形状のグレンフロー６が形成される程にパネル部材２とプラグ部材４とを鍛接接合することで、ヒータシース３に対してパネル部材２とプラグ部材４とを高い密着度合いで密着させることができる。しかも、鍛接工程では、第２溝部５Ｂの側面５Ｂ１を跨ぐよう配されるとともに第２溝部５Ｂの側面５Ｂ１に対して交差するよう延びる形状の第２のグレンフロー７が形成される程に金属結合の開始後においてもプラグ部材４を押し込むようにしている。これにより、プラグ部材４の底面４Ｂを強くヒータシース３に押し付けて塑性変形させることができ、ヒータシース３に対してパネル部材２とプラグ部材４とをより高い密着度合いで密着させることができる。従って、ヒータシース３の熱を効率的にパネル部材２とプラグ部材４とに伝導させることができる。これにより、加熱されたヒータシース３の温度と、ヒータシース３からの伝熱によって加熱されたパネル部材２及びプラグ部材４の温度と、に生じ得る差が小さくなる。この温度差が小さくなることで、ヒータシース３の加熱温度を無駄に高くせずに済んで省エネ化を図ることができるとともに、ヒータシース３の熱膨張量と、パネル部材２及びプラグ部材４の各熱膨張量と、の差が低減されて、ヒータシース３が熱膨張時にパネル部材２とプラグ部材４とから受ける圧縮応力を低減できる。その結果、加熱サイクルにおけるヒータシース３の繰り返し応力を抑制することができ、ヒータシース３の疲労破壊が低減され、ヒータシース３の長寿命化を実現できる。 As described above, in the forge welding process included in the method of manufacturing the heater plate 1 according to the present embodiment, the heater sheath 3 of the panel member 2 and the plug member 4 is held between the panel member 2 and the plug member 4 while the heater sheath 3 is sandwiched between the panel member 2 and the plug member 4 . By forge-welding the panel member 2 and the plug member 4 to such an extent that a grain flow 6 having a shape along the outer shape of the heater sheath 3 is formed in the portion surrounding the heater sheath 3, the panel member 2 and the plug member 4 are joined to can be adhered with a high degree of adhesion. Moreover, in the forge welding process, the metallic bonding is such that the second grain flow 7 is formed so as to straddle the side surface 5B1 of the second groove portion 5B and extend so as to cross the side surface 5B1 of the second groove portion 5B. The plug member 4 is pushed in even after the start of. As a result, the bottom surface 4B of the plug member 4 can be strongly pressed against the heater sheath 3 and plastically deformed. Therefore, heat from the heater sheath 3 can be efficiently conducted to the panel member 2 and the plug member 4 . As a result, the difference between the temperature of the heated heater sheath 3 and the temperature of the panel member 2 and the plug member 4 heated by heat transfer from the heater sheath 3 is reduced. By reducing this temperature difference, the heating temperature of the heater sheath 3 does not needlessly increase, and energy saving can be achieved. Since the difference between the amount of expansion and the amount of expansion is reduced, the compressive stress that the heater sheath 3 receives from the panel member 2 and the plug member 4 during thermal expansion can be reduced. As a result, the repeated stress of the heater sheath 3 in the heating cycle can be suppressed, the fatigue failure of the heater sheath 3 can be reduced, and the life of the heater sheath 3 can be extended.

また、鍛接工程を行う際の鍛接温度は、２５０～５００℃の温度範囲が好ましく、３００～４５０℃の温度範囲がより好ましく、３５０～４２０℃がさらに好ましい。また、鍛接工程を行う装置の使用温度に合わせて鍛接温度を適宜に選択することが可能である。また、鍛接工程においては、プラグ部材４の体積を第２溝部５Ｂの体積にて除した比率や鍛接時の圧力などを徐々に大きくするなどし、グレンフロー６や第２のグレンフロー７を形成するための条件出しを行うことができる。また、鍛接工程を行った後には、切削、研磨、アルマイトおよびショットブラストなどの後処理を行うのが好ましい。 The forge welding temperature in the forge welding process is preferably in the range of 250 to 500°C, more preferably in the range of 300 to 450°C, and even more preferably in the range of 350 to 420°C. Also, the forge welding temperature can be appropriately selected in accordance with the operating temperature of the apparatus for performing the forge welding process. In the forge welding process, the ratio of the volume of the plug member 4 divided by the volume of the second groove portion 5B and the pressure during forge welding are gradually increased to form the grain flow 6 and the second grain flow 7. It is possible to set conditions for Further, after performing the forge welding process, post-treatments such as cutting, polishing, alumite and shot blasting are preferably performed.

また、鍛接工程が行われた後に自然冷却されて常温になると、パネル部材２とヒータシース３との収縮差により応力が生じるが、常温ではパネル部材２の耐力は大きいのでヒータプレート１が変形することはない。またヒータシース３のステンレス鋼の強度も高いので、ヒータシース３の変形や破損も起こることはない。４００℃近辺で鍛圧されたヒータプレート１が使用温度領域である４００℃近辺に加熱されるということは、鍛圧されたときの状態の戻ることになり、プラグ部材４とヒータシース３のシース材との間の応力は極めて小さくなり、ヒータプレート１の変形、ヒータシース３のシース材の変形や破損が生じる恐れが無くなる。 When the panel member 2 and the heater sheath 3 are naturally cooled after the forge welding process and reach normal temperature, stress is generated due to the difference in contraction between the panel member 2 and the heater sheath 3. At normal temperature, the panel member 2 has a large proof stress, so the heater plate 1 does not deform. no. Further, since the stainless steel of the heater sheath 3 has a high strength, the heater sheath 3 will not be deformed or damaged. Heating the heater plate 1 pressed at around 400° C. to around 400° C., which is the operating temperature range, means that the state at the time of pressing is restored, and the plug member 4 and the sheath material of the heater sheath 3 are in contact with each other. The stress between them becomes extremely small, and there is no danger of deformation of the heater plate 1 and deformation or breakage of the sheath material of the heater sheath 3 .

また、パネル部材２及びプラグ部材４に用いる具体的なアルミニウム材料またはアルミニウム合金材料としては、ＪＩＳ１０５０、１１００、３００３、３００４、５００５、５０５２、６０６３、６０６１、７００３、７Ｎ０１のいずれかを選択することができる。パネル部材２は、材質、製法については特定しないが、耐リーク性を考慮すると内部欠陥の少ない圧延板、鍛造品を素材とするのが望ましい。また、洗浄ガスに対する耐食性の観点からは、アルミ材質は純度９９．５％以上のＪＩＳ１０５０が最も望ましい。ヒータプレート１の大型化に伴いクリープ変形防止の点では、１１００、６０６１等より高強度の合金が使用されるようになりつつあるが、上記のいずれのアルミニウムまたはアルミニウム合金も用いることができる。その他、マグネシウム含有量が少ない５００５、５０５２等のＡｌ－Ｍｇ合金も圧接性を満足し、金属結合が確保できる組成範囲においては用いることができる。 As the specific aluminum material or aluminum alloy material used for the panel member 2 and the plug member 4, any one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01 can be selected. can. Although the material and manufacturing method of the panel member 2 are not specified, it is desirable to use a rolled plate or forged product with few internal defects in consideration of leak resistance. From the viewpoint of corrosion resistance to cleaning gas, JIS 1050 with a purity of 99.5% or higher is the most desirable aluminum material. With the increase in size of the heater plate 1, alloys with higher strength than 1100, 6061, etc. are being used in terms of creep deformation prevention, but any of the above aluminum or aluminum alloys can be used. In addition, Al--Mg alloys such as 5005 and 5052 having a low magnesium content can also be used within a composition range that satisfies pressure welding properties and ensures metallic bonding.

パネル部材２及びプラグ部材４が同一材料の場合には、鍛接接合時の変形により部材同士が圧接し物理的に金属結合し易い。またパネル部材２及びプラグ部材４が異種の材料であっても、鍛接圧縮時の変形により部材同士が圧接し物理的に金属結合するものであり、例えば、ＪＩＳ１０００系のアルミニウム材とＪＩＳ３０００系のアルミニウム材の異なる材料同士であっても鍛接接合により物理的に金属結合する。 When the panel member 2 and the plug member 4 are made of the same material, the members are likely to be brought into pressure contact with each other due to deformation during forge welding, resulting in a physical metal connection. Moreover, even if the panel member 2 and the plug member 4 are made of different materials, the members are pressed against each other due to deformation during forge compression and are physically bonded together. Even different materials are physically metal-bonded by forge welding.

以上説明したように本実施形態のヒータプレート１は、互いに鍛接接合しているアルミニウムまたはアルミニウム合金製のパネル部材（第１部材）２とプラグ部材（第２部材）４とによって、ヒータシース（温度調整シース）３が挟み込まれて保持されたヒータプレート１であって、パネル部材２には、プラグ部材４が入る第２溝部５Ｂと、第２溝部５Ｂの底面５Ｂ２においてヒータシース３が入る第１溝部５Ａと、が設けられており、パネル部材２とプラグ部材４との少なくとも一方に、ヒータシース３の外形に沿った形状のグレンフロー６が形成されている。 As described above, the heater plate 1 of the present embodiment includes a heater sheath (temperature adjustment device) formed by a panel member (first member) 2 and a plug member (second member) 4 made of aluminum or an aluminum alloy and which are forge welded to each other. A heater plate 1 holding a sheath 3 sandwiched therebetween. A panel member 2 has a second groove portion 5B for receiving a plug member 4 and a first groove portion 5A for receiving a heater sheath 3 at a bottom surface 5B2 of the second groove portion 5B. and are provided, and a grain flow 6 having a shape along the outer shape of the heater sheath 3 is formed on at least one of the panel member 2 and the plug member 4 .

ヒータシース３をパネル部材２とプラグ部材４とにより挟み込んだ状態で、パネル部材２とプラグ部材４との少なくとも一方に、ヒータシース３の外形に沿った形状のグレンフロー６が形成される程にパネル部材２とプラグ部材４とを鍛接接合することで、ヒータシース３に対してパネル部材２とプラグ部材４とを高い密着度合いで密着させることができる。従って、ヒータシース３の熱を効率的にパネル部材２とプラグ部材４とに伝導させることができる。これにより、加熱されたヒータシース３の温度と、ヒータシース３からの伝熱によって加熱されたパネル部材２及びプラグ部材４の温度と、に生じ得る差が小さくなる。この温度差が小さくなることで、ヒータシース３の加熱温度を無駄に高くせずに済んで省エネ化を図ることができるとともに、ヒータシース３の熱膨張量と、パネル部材２及びプラグ部材４の各熱膨張量と、の差が低減されて、ヒータシース３が熱膨張時にパネル部材２とプラグ部材４とから受ける圧縮応力と引張応力とを低減できる。その結果、加熱サイクルにおけるヒータシース３の繰り返し応力を抑制することができ、ヒータシース３の疲労破壊が低減され、ヒータシース３の長寿命化を実現できる。 In a state in which the heater sheath 3 is sandwiched between the panel member 2 and the plug member 4, the panel members are joined together so that a grain flow 6 having a shape along the contour of the heater sheath 3 is formed on at least one of the panel member 2 and the plug member 4. 2 and the plug member 4 are forge welded together, the panel member 2 and the plug member 4 can be brought into close contact with the heater sheath 3 with a high degree of adhesion. Therefore, heat from the heater sheath 3 can be efficiently conducted to the panel member 2 and the plug member 4 . As a result, the difference between the temperature of the heated heater sheath 3 and the temperature of the panel member 2 and the plug member 4 heated by heat transfer from the heater sheath 3 is reduced. By reducing this temperature difference, the heating temperature of the heater sheath 3 does not needlessly increase, and energy saving can be achieved. Since the difference between the amount of expansion and the amount of expansion is reduced, the compressive stress and tensile stress that the heater sheath 3 receives from the panel member 2 and the plug member 4 during thermal expansion can be reduced. As a result, the repeated stress of the heater sheath 3 in the heating cycle can be suppressed, the fatigue failure of the heater sheath 3 can be reduced, and the life of the heater sheath 3 can be extended.

また、パネル部材２及びプラグ部材４には、第２溝部５Ｂの側面５Ｂ１を跨ぐよう配されるとともに第２溝部５Ｂの側面５Ｂ１に対して交差するよう延びる形状の第２のグレンフロー７が形成されている。このようにすれば、第１溝部５Ａにヒータシース３を入れた状態で第２溝部５Ｂにプラグ部材４を入れる際に、パネル部材２とプラグ部材４とが鍛接接合されると、ヒータシース３がパネル部材２とプラグ部材４とにより挟み込まれる。このとき、パネル部材２及びプラグ部材４に、第２溝部５Ｂの側面５Ｂ１を跨ぐよう配されるとともに第２溝部５Ｂの側面５Ｂ１に対して交差するよう延びる形状の第２のグレンフロー７が形成される程にパネル部材２とプラグ部材４とを鍛接接合することで、プラグ部材４がパネル部材２に対して強固に保持される。これにより、ヒータシース３に対してパネル部材２とプラグ部材４とをより高い密着度合いで密着させることができる。 A second grain flow 7 is formed in the panel member 2 and the plug member 4 so as to straddle the side surface 5B1 of the second groove portion 5B and extend so as to cross the side surface 5B1 of the second groove portion 5B. It is With this configuration, when the plug member 4 is inserted into the second groove portion 5B with the heater sheath 3 inserted in the first groove portion 5A, if the panel member 2 and the plug member 4 are forge welded together, the heater sheath 3 will be removed from the panel. It is sandwiched between the member 2 and the plug member 4 . At this time, the second grain flow 7 is formed in the panel member 2 and the plug member 4 so as to straddle the side surface 5B1 of the second groove portion 5B and extend so as to cross the side surface 5B1 of the second groove portion 5B. The plug member 4 is firmly held with respect to the panel member 2 by forge-welding the panel member 2 and the plug member 4 to such an extent. As a result, the panel member 2 and the plug member 4 can be brought into close contact with the heater sheath 3 with a higher degree of contact.

また、プラグ部材４は、幅Ｗがヒータシース３の外径Ｒよりも大きくされており、パネル部材２は、第２溝部５Ｂが第１溝部５Ａよりも幅広になるよう構成される。このようにすれば、第１溝部５Ａにヒータシース３を入れた状態で第２溝部５Ｂにプラグ部材４を入れる際に、パネル部材２とプラグ部材４とが鍛接接合されると、ヒータシース３がパネル部材２とプラグ部材４とにより挟み込まれる。プラグ部材４は、幅Ｗがヒータシース３の外径Ｒよりも大きいので、仮にプラグ部材の幅がヒータシース３の外径Ｒと同じとされる場合に比べると、プラグ部材４の強度が高い。従って、プラグ部材４を第２溝部５Ｂに入れて鍛接接合する際にプラグ部材４に座屈変形などの不用意な変形が生じ難くなる。また、ヒータシース３を第１溝部５Ａに入れる際には、ヒータシース３が第２溝部５Ｂを通ることになるが、この第２溝部５Ｂが第１溝部５Ａよりも幅広となっているので、ヒータシース３が第２溝部５Ｂの側面５Ｂ１に干渉する事態が生じ難く、ヒータシース３を第１溝部５Ａに入れやすい。 The width W of the plug member 4 is larger than the outer diameter R of the heater sheath 3, and the panel member 2 is configured such that the second groove portion 5B is wider than the first groove portion 5A. With this configuration, when the plug member 4 is inserted into the second groove portion 5B with the heater sheath 3 inserted in the first groove portion 5A, if the panel member 2 and the plug member 4 are forge welded together, the heater sheath 3 will be removed from the panel. It is sandwiched between the member 2 and the plug member 4 . Since the width W of the plug member 4 is larger than the outer diameter R of the heater sheath 3 , the strength of the plug member 4 is higher than if the width of the plug member were the same as the outer diameter R of the heater sheath 3 . Therefore, when the plug member 4 is inserted into the second groove portion 5B and forge-welded, the plug member 4 is less likely to undergo unintentional deformation such as buckling deformation. Further, when the heater sheath 3 is inserted into the first groove portion 5A, the heater sheath 3 passes through the second groove portion 5B. interfering with the side surface 5B1 of the second groove portion 5B, and the heater sheath 3 can be easily inserted into the first groove portion 5A.

また、パネル部材２は、第１溝部５Ａの深さＤがヒータシース３の外径Ｒよりも小さい。このようにすれば、第１溝部５Ａに入ったヒータシース３の一部が第２溝部５Ｂ側に突き出した状態となる。従って、プラグ部材４をその一部が第１溝部５Ａ側に突き出すような形状としなくても、プラグ部材４をヒータシース３に対して密着させることができる。しかも、第２溝部５Ｂが第１溝部５Ａよりも幅広なので、第２溝部５Ｂの周面には側面５Ｂ１に加えて底面５Ｂ２が含まれている。従って、鍛接接合に際してプラグ部材４の変位が拘束されるものの、第２溝部５Ｂの底面５Ｂ２分の距離が空けられることになるので、プラグ部材４の底面４Ｂのうちのヒータシース３と対向する部分がヒータシース３に到達し易くなっている。さらには、プラグ部材４の幅Ｗがヒータシース３の外径Ｒよりも大きいので、プラグ部材４の底面４Ｂが十分に広くなっており、それによりプラグ部材４の底面４Ｂのうちのヒータシース３と対向する部分がヒータシース３の外形に追従するように塑性変形し易くなっている。以上により、プラグ部材４をヒータシース３に対してより高い密着度合いでもって密着させることができる。 Also, in the panel member 2 , the depth D of the first groove portion 5</b>A is smaller than the outer diameter R of the heater sheath 3 . In this way, a portion of the heater sheath 3 that has entered the first groove portion 5A protrudes toward the second groove portion 5B. Therefore, the plug member 4 can be brought into close contact with the heater sheath 3 even if the plug member 4 does not have a shape in which a portion of the plug member 4 protrudes toward the first groove portion 5A. Moreover, since the second groove portion 5B is wider than the first groove portion 5A, the peripheral surface of the second groove portion 5B includes the bottom surface 5B2 in addition to the side surface 5B1. Therefore, although the displacement of the plug member 4 is restrained during forge welding, since a distance corresponding to the bottom surface 5B2 of the second groove portion 5B is provided, the portion of the bottom surface 4B of the plug member 4 that faces the heater sheath 3 is kept away. The heater sheath 3 is easily reached. Furthermore, since the width W of the plug member 4 is larger than the outer diameter R of the heater sheath 3, the bottom surface 4B of the plug member 4 is sufficiently wide, so that the bottom surface 4B of the plug member 4 faces the heater sheath 3. The portion to be covered is easily plastically deformed so as to follow the outer shape of the heater sheath 3 . As described above, the plug member 4 can be brought into close contact with the heater sheath 3 with a higher degree of close contact.

また、パネル部材２は、第１溝部５Ａの深さＤがヒータシース３の外径Ｒの半分ｒよりも大きい。このようにすれば、第１溝部５Ａに入ったヒータシース３の中心Ｃが第２溝部５Ｂの底面５Ｂ２よりも低い配置となるので、プラグ部材４を鍛接接合する際に、ヒータシース３が第１溝部５Ａから第２溝部５Ｂ側に浮き上がるよう位置ずれする事態が生じ難くなる。 In the panel member 2 , the depth D of the first groove portion 5A is larger than half r of the outer diameter R of the heater sheath 3 . With this arrangement, the center C of the heater sheath 3 in the first groove portion 5A is positioned lower than the bottom surface 5B2 of the second groove portion 5B. It becomes difficult to cause a situation in which the position is shifted so as to float from 5A toward the second groove portion 5B.

また、パネル部材２は、第１溝部５Ａの深さＤが次の式（３）を満たすよう構成される。 Further, the panel member 2 is configured such that the depth D of the first groove portion 5A satisfies the following formula (3).

Ｄ≦ｒ＋ｒ・ｓｉｎ５４° （３） D≦r+r·sin54° (3)

第１溝部５Ａの深さＤがヒータシース３の外径Ｒの半分ｒよりも大きいと、ヒータシース３の外周面の一部が、第１溝部５Ａの周面の一部とは非接触となる可能性がある。ここで、仮にヒータシースの外周面がパネル部材２及びプラグ部材４に対して非接触となる非接触面積の割合が３０％を超えると、ヒータシース３からパネル部材２及びプラグ部材４への伝熱性能が悪化することが懸念される。その点、パネル部材２は、第１溝部５Ａの深さＤが上記した式（３）を満たすよう構成されているので、ヒータシース３の外周面がパネル部材２及びプラグ部材４に対して非接触となる非接触面積の割合が３０％未満となる。これにより、ヒータシース３からパネル部材２及びプラグ部材４への伝熱性能を良好に保つことができる。 If the depth D of the first groove portion 5A is larger than half r of the outer diameter R of the heater sheath 3, a portion of the outer peripheral surface of the heater sheath 3 may be out of contact with a portion of the peripheral surface of the first groove portion 5A. have a nature. Here, if the ratio of the non-contact area where the outer peripheral surface of the heater sheath is not in contact with the panel member 2 and the plug member 4 exceeds 30%, the heat transfer performance from the heater sheath 3 to the panel member 2 and the plug member 4 is expected to worsen. In this regard, since the panel member 2 is configured such that the depth D of the first groove portion 5A satisfies the above-described formula (3), the outer peripheral surface of the heater sheath 3 is not in contact with the panel member 2 and the plug member 4. The ratio of the non-contact area becomes less than 30%. As a result, good heat transfer performance from the heater sheath 3 to the panel member 2 and the plug member 4 can be maintained.

また、グレンフロー６は、少なくともプラグ部材４のうちのヒータシース３と対向する部分に形成されている。このようにすれば、ヒータシース３をパネル部材２とプラグ部材４とにより挟み込んだ状態で、プラグ部材４のうちのヒータシース３と対向する部分にグレンフロー６が形成される程にパネル部材２とプラグ部材４とを鍛接接合することで、ヒータシース３に対してパネル部材２とプラグ部材４とを高い密着度合いで密着させることができる。 Moreover, the grain flow 6 is formed at least in a portion of the plug member 4 facing the heater sheath 3 . In this way, the heater sheath 3 is sandwiched between the panel member 2 and the plug member 4, and the panel member 2 and the plug are separated from each other such that the grain flow 6 is formed in the portion of the plug member 4 facing the heater sheath 3. By forge-welding the member 4, the panel member 2 and the plug member 4 can be brought into close contact with the heater sheath 3 with a high degree of adhesion.

また、グレンフロー６は、少なくともパネル部材２のうちの第１溝部５Ａの溝縁に形成されている。このようにすれば、ヒータシース３をパネル部材２とプラグ部材４とにより挟み込んだ状態で、パネル部材２のうちの第１溝部５Ａの溝縁にグレンフロー６が形成される程にパネル部材２とプラグ部材４とを鍛接接合することで、ヒータシース３に対してパネル部材２とプラグ部材４とを高い密着度合いで密着させることができる。 Moreover, the grain flow 6 is formed at least on the groove edge of the first groove portion 5A of the panel member 2 . In this way, in a state where the heater sheath 3 is sandwiched between the panel member 2 and the plug member 4, the panel member 2 and the panel member 2 are separated so that the grain flow 6 is formed at the groove edge of the first groove portion 5A of the panel member 2. By forge-welding the plug member 4, the panel member 2 and the plug member 4 can be brought into close contact with the heater sheath 3 with a high degree of close contact.

また、本実施形態に係るヒータプレート１の製造方法は、アルミニウムまたはアルミニウム合金製のパネル部材２とプラグ部材４とを鍛接接合することにより、ヒータシース３を挟み込んで保持させる鍛接工程を含むヒータプレート１の製造方法であって、パネル部材２には、プラグ部材４が入る第２溝部５Ｂと、第２溝部５Ｂの底面５Ｂ２においてヒータシース３が入る第１溝部５Ａと、が設けられており、鍛接工程では、パネル部材２とプラグ部材４との少なくとも一方に、ヒータシース３の外形に沿った形状のグレンフロー６が形成されるように鍛接接合する。 In addition, the method for manufacturing the heater plate 1 according to the present embodiment includes a forge welding step of forge-welding the panel member 2 and the plug member 4 made of aluminum or an aluminum alloy to sandwich and hold the heater sheath 3. In this manufacturing method, the panel member 2 is provided with a second groove portion 5B for receiving the plug member 4 and a first groove portion 5A for receiving the heater sheath 3 at the bottom surface 5B2 of the second groove portion 5B. Then, at least one of the panel member 2 and the plug member 4 is forge welded so as to form a grain flow 6 having a shape along the outer shape of the heater sheath 3 .

鍛接工程では、ヒータシース３をパネル部材２とプラグ部材４とにより挟み込んだ状態で、パネル部材２とプラグ部材４との少なくとも一方に、ヒータシース３の外形に沿った形状のグレンフロー６が形成される程にパネル部材２とプラグ部材４とを鍛接接合することで、ヒータシース３に対してパネル部材２とプラグ部材４とを高い密着度合いで密着させることができる。従って、ヒータシース３の熱を効率的にパネル部材２とプラグ部材４とに伝導させることができる。これにより、加熱されたヒータシース３の温度と、ヒータシース３からの伝熱によって加熱されたパネル部材２及びプラグ部材４の温度と、に生じ得る差が小さくなる。この温度差が小さくなることで、ヒータシース３の加熱温度を無駄に高くせずに済んで省エネ化を図ることができるとともに、ヒータシース３の熱膨張量と、パネル部材２及びプラグ部材４の各熱膨張量と、の差が低減されて、ヒータシース３が熱膨張時にパネル部材２とプラグ部材４とから受ける圧縮応力を低減できる。その結果、加熱サイクルにおけるヒータシース３の繰り返し応力を抑制することができ、ヒータシース３の疲労破壊が低減され、ヒータシース３の長寿命化を実現できる。 In the forge welding process, a grain flow 6 having a shape along the contour of the heater sheath 3 is formed on at least one of the panel member 2 and the plug member 4 while the heater sheath 3 is sandwiched between the panel member 2 and the plug member 4 . By forge-welding the panel member 2 and the plug member 4 together, the panel member 2 and the plug member 4 can be brought into close contact with the heater sheath 3 with a high degree of close contact. Therefore, heat from the heater sheath 3 can be efficiently conducted to the panel member 2 and the plug member 4 . As a result, the difference between the temperature of the heated heater sheath 3 and the temperature of the panel member 2 and the plug member 4 heated by heat transfer from the heater sheath 3 is reduced. By reducing this temperature difference, the heating temperature of the heater sheath 3 does not needlessly increase, and energy saving can be achieved. Since the difference between the amount of expansion and the amount of expansion is reduced, the compressive stress that the heater sheath 3 receives from the panel member 2 and the plug member 4 during thermal expansion can be reduced. As a result, the repeated stress of the heater sheath 3 in the heating cycle can be suppressed, the fatigue failure of the heater sheath 3 can be reduced, and the life of the heater sheath 3 can be extended.

＜実施形態２＞
実施形態２を図１２または図１３によって説明する。この実施形態２では、パネル部材１２及びプラグ部材１４の構成を変更したものを示す。なお、上記した実施形態１と同様の構造、作用及び効果について重複する説明は省略する。また、本実施形態の説明で登場する上記した実施形態１と同じ名称の構成要素には、同じ符号を用いるとともにその先頭に添え字「１」を付す。 <Embodiment 2>
Embodiment 2 will be described with reference to FIG. 12 or FIG. In this second embodiment, the configurations of the panel member 12 and the plug member 14 are changed. Duplicate descriptions of the structures, functions and effects similar to those of the first embodiment will be omitted. In addition, the same reference numerals are used for components having the same names as those of the above-described first embodiment, which appear in the description of this embodiment, and the suffix "1" is attached to the beginning thereof.

図１２は、ヒータプレート１１を構成するパネル部材１２、ヒータシース１３及びプラグ部材１４の断面図である。本実施形態に係るプラグ部材１４は、図１２に示すように、鍛接方向についての前端側（図１２の下端側）が鍛接方向についての後端側（図１２の上端側）よりも幅狭とされており、断面形状が逆台形状をなしている。これに伴い、パネル部材１２は、第２溝部１５Ｂの断面形状が逆台形状をなすよう構成されている。プラグ部材１４の側面１４Ａ及び第２溝部１５Ｂの側面１５Ｂ１は、共に直線状をなすとともに鍛接方向に対して傾斜状（テーパ状）をなしている。プラグ部材１４の側面１４Ａ及び第２溝部１５Ｂの側面１５Ｂ１は、鍛接方向についての前端側が幅方向（図１２の左右方向）についてヒータシース１３に近くなり、鍛接方向についての後端側が幅方向についてヒータシース１３から遠くなるような勾配とされる。また、プラグ部材１４は、その幅の最小値（底面１４Ｂの幅）Ｗ３がヒータシース１３の外径Ｒよりも大きい。 FIG. 12 is a cross-sectional view of the panel member 12, heater sheath 13 and plug member 14 that constitute the heater plate 11. As shown in FIG. As shown in FIG. 12, the plug member 14 according to the present embodiment has a front end side (lower end side in FIG. 12) in the forge welding direction that is narrower than a rear end side (upper end side in FIG. 12) in the forge welding direction. and has an inverted trapezoidal cross-sectional shape. Along with this, the panel member 12 is configured such that the cross-sectional shape of the second groove portion 15B is an inverted trapezoid. The side surface 14A of the plug member 14 and the side surface 15B1 of the second groove portion 15B are both linear and inclined (tapered) with respect to the forge welding direction. The side surface 14A of the plug member 14 and the side surface 15B1 of the second groove portion 15B are closer to the heater sheath 13 in the width direction (horizontal direction in FIG. 12) on the front end side in the forge welding direction, and closer to the heater sheath 13 in the width direction on the rear end side in the forge welding direction. It is assumed that the gradient is such that it becomes far from Further, the plug member 14 has a minimum width (width of the bottom surface 14</b>B) W<b>3 larger than the outer diameter R of the heater sheath 13 .

また、プラグ部材１４の高さｈ１と幅の最小値Ｗ３との関係（比率）は、鍛接方向に対する側面１４Ａの傾斜角度（テーパ角度）を調整することにより、座屈抵抗を向上できることから特に制約を設けないでも良いが、ヒータプレート１１の全体厚さとヒータシース１３の外径Ｒとの関係や上記傾斜角度が０°に近い場合などの座屈抵抗を考慮すると１以上５以下が好ましく、さらに、鍛接接合時に第２溝部１５Ｂの側面１５Ｂ１から受ける抵抗を考慮すると、１以上３以下とするのが好ましい。 尚、１以下でも接合は可能であるが、鍛接接合される部分のヒータプレート１１使用中の熱変形や接合部強度などを考慮すると１以上が好ましいため、ここでは下限値は１以上とした。 Further, the relationship (ratio) between the height h1 and the minimum width W3 of the plug member 14 is particularly restricted because the buckling resistance can be improved by adjusting the inclination angle (taper angle) of the side surface 14A with respect to the forge welding direction. may not be provided, but considering the relationship between the overall thickness of the heater plate 11 and the outer diameter R of the heater sheath 13 and the buckling resistance when the inclination angle is close to 0°, it is preferably 1 or more and 5 or less. Considering the resistance received from the side surface 15B1 of the second groove portion 15B at the time of forge welding, it is preferable to set it to 1 or more and 3 or less. Although joining is possible with a value of 1 or less, a value of 1 or more is preferable in consideration of thermal deformation during use of the heater plate 11 to be forge-welded and the strength of the joint.

図１３は、鍛接工程においてプラグ部材１４を第２溝部１５Ｂに入れる途中の状態を示す断面図である。このような構成によれば、鍛接工程において、第１溝部１５Ａにヒータシース１３を入れた状態で第２溝部１５Ｂにプラグ部材１４を入れる際に、図１３に示すように、パネル部材１２の第２溝部１５Ｂの側面１５Ｂ１とプラグ部材１４の側面１４Ａとが互いに鍛接接合されると、ヒータシース１３がパネル部材１２とプラグ部材１４とにより挟み込まれる。鍛接接合に際しては、プラグ部材１４の側面１４Ａと第２溝部１５Ｂの側面１５Ｂ１とが互いに接した状態でプラグ部材１４が奥方へ押し込まれるので、両側面１４Ａ，１５Ｂ１同士が擦れ合うことでそれぞれの酸化皮膜が除去される。ここで、パネル部材１２の第２溝部１５Ｂの側面１５Ｂ１とプラグ部材１４の側面１４Ａとが共に鍛接方向に対して傾斜することで、各側面１４Ａ，１５Ｂ１に存在していた酸化皮膜が剥離され易くなっている。従って、両側面１４Ａ，１５Ｂ１において酸化していないアルミニウム同士が強固に金属結合されるようになっている。また、パネル部材１２及びプラグ部材１４には、上記した実施形態１にて説明したような第２のグレンフローが形成される（図７を参照）。 FIG. 13 is a cross-sectional view showing a state in which the plug member 14 is being inserted into the second groove portion 15B in the forge welding process. According to such a configuration, in the forge welding process, when inserting the plug member 14 into the second groove portion 15B with the heater sheath 13 inserted into the first groove portion 15A, as shown in FIG. When the side surface 15B1 of the groove portion 15B and the side surface 14A of the plug member 14 are welded together, the heater sheath 13 is sandwiched between the panel member 12 and the plug member 14. As shown in FIG. At the time of forge welding, the plug member 14 is pushed inward while the side surface 14A of the plug member 14 and the side surface 15B1 of the second groove portion 15B are in contact with each other. is removed. Here, since both the side surface 15B1 of the second groove portion 15B of the panel member 12 and the side surface 14A of the plug member 14 are inclined with respect to the forge welding direction, the oxide films existing on the side surfaces 14A and 15B1 are easily peeled off. It's becoming Therefore, the aluminum that is not oxidized on both side surfaces 14A and 15B1 is strongly metallically bonded to each other. Further, the second grain flow as described in the first embodiment is formed in the panel member 12 and the plug member 14 (see FIG. 7).

以上説明したように本実施形態によれば、パネル部材１２及びプラグ部材１４は、互いに鍛接接合される第２溝部１５Ｂの側面１５Ｂ１とプラグ部材１４の側面１４Ａとが共に鍛接方向に対して傾斜するよう構成される。このようにすれば、第１溝部１５Ａにヒータシース１３を入れた状態で第２溝部１５Ｂにプラグ部材１４を入れる際に、パネル部材１２の第２溝部１５Ｂの側面１５Ｂ１とプラグ部材１４の側面１４Ａとが互いに鍛接接合されると、ヒータシース１３がパネル部材１２とプラグ部材１４とにより挟み込まれる。鍛接接合に際しては、パネル部材１２の第２溝部１５Ｂの側面１５Ｂ１とプラグ部材１４の側面１４Ａとに存在していた酸化皮膜が剥離されることで、パネル部材１２とプラグ部材１４とが金属結合されるようになっている。ここで、パネル部材１２の第２溝部１５Ｂの側面１５Ｂ１とプラグ部材１４の側面１４Ａとが共に鍛接方向に対して傾斜することで、各側面１４Ａ，１５Ｂ１に存在していた酸化皮膜が剥離され易くなっているので、パネル部材１２とプラグ部材１４とが強固に金属結合されるようになっている。 As described above, according to the present embodiment, the panel member 12 and the plug member 14 are forge-joined together so that the side surface 15B1 of the second groove portion 15B and the side surface 14A of the plug member 14 are both inclined with respect to the forge-welding direction. configured as follows. With this configuration, when inserting the plug member 14 into the second groove portion 15B with the heater sheath 13 inserted into the first groove portion 15A, the side surface 15B1 of the second groove portion 15B of the panel member 12 and the side surface 14A of the plug member 14 are are forge welded together, the heater sheath 13 is sandwiched between the panel member 12 and the plug member 14 . During forge welding, the oxide film existing on the side surface 15B1 of the second groove portion 15B of the panel member 12 and the side surface 14A of the plug member 14 is peeled off, so that the panel member 12 and the plug member 14 are metal-bonded. It has become so. Here, since both the side surface 15B1 of the second groove portion 15B of the panel member 12 and the side surface 14A of the plug member 14 are inclined with respect to the forge welding direction, the oxide films existing on the side surfaces 14A and 15B1 are easily peeled off. Therefore, the panel member 12 and the plug member 14 are firmly metal-bonded.

＜実施形態３＞
実施形態３を図１４によって説明する。この実施形態３では、上記した実施形態２から溝部２５に入れるヒータシース２３の数を変更したものを示す。なお、上記した実施形態１と同様の構造、作用及び効果について重複する説明は省略する。また、本実施形態の説明で登場する上記した実施形態１と同じ名称の構成要素には、同じ符号を用いるとともにその先頭に添え字「２」を付す。 <Embodiment 3>
Embodiment 3 will be described with reference to FIG. In the third embodiment, the number of heater sheaths 23 inserted into the grooves 25 is changed from the second embodiment. Duplicate descriptions of the structures, functions and effects similar to those of the first embodiment will be omitted. In addition, the same reference numerals are used for components having the same names as those of the above-described first embodiment, which appear in the description of this embodiment, and the suffix "2" is attached to the beginning thereof.

図１４は、ヒータプレート２１を構成するパネル部材２２、ヒータシース２３及びプラグ部材２４の断面である。本実施形態に係るパネル部材２２の溝部２５には、図１４に示すように、２つのヒータシース２３が収容されるようになっている。詳しくは、パネル部材２２の溝部２５には、２つの第１溝部２５Ａが含まれており、これら２つの第１溝部２５Ａが第２溝部２５Ｂの底面２５Ｂ２に開口するよう設けられている。２つの第１溝部２５Ａは、幅方向（図１４の左右方向）について間隔を空けた位置に配されている。従って、第２溝部２５Ｂの底面２５Ｂ２は、２つの第１溝部２５Ａのそれぞれに対して幅方向について端側にあって各側面２５Ｂ１に連なる２つの部分と、２つの第１溝部２５Ａの間に挟まれる部分と、の３つに分割されることになる。このように、第２溝部２５Ｂの底面２５Ｂ２に２つの第１溝部２５Ａが開口するよう構成されるのに伴い、プラグ部材２４は、その幅の最小値Ｗ４が上記した実施形態２における幅の最小値Ｗ３よりも拡張されている。具体的には、プラグ部材２４の幅の最小値Ｗ４は、ヒータシース２３の外径Ｒの２倍よりも大きくなっており、プラグ部材２４の底面２４Ｂがより広くなっている。 FIG. 14 is a cross section of the panel member 22, the heater sheath 23 and the plug member 24 that constitute the heater plate 21. FIG. As shown in FIG. 14, two heater sheaths 23 are accommodated in the groove portion 25 of the panel member 22 according to this embodiment. Specifically, the groove portion 25 of the panel member 22 includes two first groove portions 25A, and these two first groove portions 25A are provided to open to the bottom surface 25B2 of the second groove portion 25B. The two first grooves 25A are arranged at positions spaced apart in the width direction (horizontal direction in FIG. 14). Therefore, the bottom surface 25B2 of the second groove portion 25B is sandwiched between the two portions that are on the end sides in the width direction of each of the two first groove portions 25A and are connected to the side surfaces 25B1 and the two first groove portions 25A. It will be divided into three parts: In this way, as the two first groove portions 25A are opened at the bottom surface 25B2 of the second groove portion 25B, the plug member 24 has the minimum width W4 of the minimum width in the second embodiment described above. It is extended more than the value W3. Specifically, the minimum width W4 of the plug member 24 is larger than twice the outer diameter R of the heater sheath 23, and the bottom surface 24B of the plug member 24 is wider.

このような構成によれば、鍛接工程では、２つのヒータシース２３が共通の第２溝部２５Ｂを通して２つの第１溝部２５Ａに対してそれぞれ入れられる。第２溝部２５Ｂにプラグ部材２４を入れる際に、パネル部材２２とプラグ部材２４とを鍛接接合すると、２つの第１溝部２５Ａに入れられた２つのヒータシース２３がパネル部材２２とプラグ部材２４とにより一括して挟み込まれる。しかも、プラグ部材２４の底面２４Ｂが上記した実施形態１よりも広くなっているので、プラグ部材２４の底面２４Ｂのうちのヒータシース２３と対向する部分がヒータシース２３の外形に追従するようにより塑性変形し易くなっている。これにより、プラグ部材２４をヒータシース２３に対してさらに高い密着度合いでもって密着させることができる。 According to such a configuration, in the forge welding process, the two heater sheaths 23 are respectively inserted into the two first grooves 25A through the common second grooves 25B. When the plug member 24 is inserted into the second groove portion 25B, if the panel member 22 and the plug member 24 are forge welded together, the two heater sheaths 23 inserted in the two first groove portions 25A are connected by the panel member 22 and the plug member 24. sandwiched together. Moreover, since the bottom surface 24B of the plug member 24 is wider than that of the first embodiment, the portion of the bottom surface 24B of the plug member 24 facing the heater sheath 23 is plastically deformed so as to follow the contour of the heater sheath 23. It's getting easier. As a result, the plug member 24 can be brought into close contact with the heater sheath 23 with a higher degree of close contact.

以上説明したように本実施形態によれば、パネル部材２２は、第２溝部２５Ｂの底面２５Ｂ２に複数の第１溝部２５Ａが開口するよう構成される。このようにすれば、第２溝部２５Ｂを通して複数の第１溝部２５Ａに対してそれぞれヒータシース２３が入れられる。第２溝部２５Ｂにプラグ部材２４を入れる際に、パネル部材２２とプラグ部材２４とを鍛接接合すると、複数の第１溝部２５Ａの各ヒータシース２３がパネル部材２２とプラグ部材２４とにより一括して挟み込まれる。しかも、第２溝部２５Ｂの底面２５Ｂ２に複数の第１溝部２５Ａが開口するよう構成されていれば、プラグ部材２４の幅の最小値Ｗ４がヒータシース２３の外径Ｒの２倍よりも大きいので、プラグ部材２４の底面２４Ｂがより広くなっている。従って、プラグ部材２４の底面２４Ｂのうちのヒータシース２３と対向する部分がヒータシース２３の外形に追従するようにより塑性変形し易くなる。これにより、プラグ部材２４をヒータシース２３に対してさらに高い密着度合いでもって密着させることができる。 As described above, according to the present embodiment, the panel member 22 is configured such that the plurality of first groove portions 25A are opened to the bottom surface 25B2 of the second groove portion 25B. In this way, the heater sheaths 23 are inserted into the plurality of first grooves 25A through the second grooves 25B. When the panel member 22 and the plug member 24 are forge welded together when the plug member 24 is inserted into the second groove portion 25B, the heater sheaths 23 of the plurality of first groove portions 25A are collectively sandwiched between the panel member 22 and the plug member 24. be Moreover, if the plurality of first groove portions 25A are configured to open to the bottom surface 25B2 of the second groove portion 25B, the minimum value W4 of the width of the plug member 24 is larger than twice the outer diameter R of the heater sheath 23. The bottom surface 24B of the plug member 24 is wider. Therefore, the portion of the bottom surface 24B of the plug member 24 that faces the heater sheath 23 is more likely to be plastically deformed so as to follow the outer shape of the heater sheath 23 . As a result, the plug member 24 can be brought into close contact with the heater sheath 23 with a higher degree of close contact.

＜他の実施形態＞
本明細書が開示する技術は、上記記述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も技術的範囲に含まれる。 <Other embodiments>
The technology disclosed in the present specification is not limited to the embodiments described in the above description and drawings, and includes the following embodiments, for example.

（１）プラグ部材４，１４，２４は、複数の部材（分割プラグ部材）に分割されていても構わない。その場合には、複数の分割プラグ部材を同時に鍛接することも、あるいは順次鍛接していくことも可能である。複数の分割プラグ部材を順次鍛接する場合には、１度に鍛接する部位の範囲が減少することから、より小さなプレス機を用いても鍛接が可能である。 (1) The plug members 4, 14, 24 may be divided into a plurality of members (divided plug members). In that case, it is possible to forge-weld a plurality of split plug members at the same time or sequentially forge-weld them. When forge-welding a plurality of split plug members one after another, the range of portions to be forge-welded at one time is reduced, so forge-welding is possible even with a smaller press machine.

（２）グレンフロー６は、パネル部材２，１２，２２及びプラグ部材４，１４，２４のうちのパネル部材２，１２，２２のみに設けられる場合もあれば、プラグ部材４，１４，２４のみに設けられる場合もある。グレンフロー６の具体的な形状や形成範囲は、各図面以外にもなり得る。 (2) The grain flow 6 may be provided only on the panel members 2, 12, 22 of the panel members 2, 12, 22 and the plug members 4, 14, 24, or may be provided only on the plug members 4, 14, 24. may be set in The specific shape and formation range of the grain flow 6 can be other than those shown in each drawing.

（３）第２のグレンフロー７は、非形成とされる可能性もある。また、第２のグレンフロー７の具体的な形状や形成範囲は、各図面以外にもなり得る。 (3) The second grain flow 7 may also be non-formed. Further, the specific shape and formation range of the second grain flow 7 may be other than those shown in each drawing.

（４）パネル部材２，１２，２２は、第１溝部５Ａ，１５Ａ，２５Ａの深さＤがヒータシース３，１３，２３の外径Ｒと同じであってもよく、またヒータシース３，１３，２３の外径Ｒよりも大きくてもよい。いずれの場合においても、プラグ部材４，１４，２４の底面４Ｂには、第１溝部５Ａ，１５Ａ，２５Ａ側に突き出す突部を設けるようにすれば、当該突部をヒータシース３，１３，２３に対して圧接することが可能となる。 (4) In the panel members 2, 12, 22, the depth D of the first grooves 5A, 15A, 25A may be the same as the outer diameter R of the heater sheaths 3, 13, 23. may be larger than the outer diameter R of the In any case, if the bottom surface 4B of the plug member 4, 14, 24 is provided with a projection projecting toward the first groove 5A, 15A, 25A, the projection can be attached to the heater sheath 3, 13, 23. It is possible to press against.

（５）パネル部材２，１２，２２は、第１溝部５Ａ，１５Ａ，２５Ａの深さＤがヒータシース３，１３，２３の外径Ｒの半分ｒと同じであってもよく、またヒータシース３，１３，２３の外径Ｒの半分ｒよりも小さくてもよい。 (5) In the panel members 2, 12, 22, the depth D of the first grooves 5A, 15A, 25A may be the same as the half r of the outer diameter R of the heater sheaths 3, 13, 23. It may be smaller than half r of the outer diameter R of 13,23.

（６）プラグ部材４，１４，２４における幅Ｗと高さ（第２溝部５Ｂ，１５Ｂ，２５Ｂの深さ）との具体的な比率については、図示以外にも適宜に変更可能である。 (6) The specific ratio between the width W and the height (the depth of the second grooves 5B, 15B, 25B) of the plug members 4, 14, 24 can be appropriately changed other than illustrated.

（７）第１溝部５Ａ，１５Ａ，２５Ａの幅の最大値Ｗ１と、第２溝部５Ｂ，１５Ｂ，２５Ｂの幅Ｗ２と、の具体的な比率については、図示以外にも適宜に変更可能である。 (7) The specific ratio between the maximum width W1 of the first grooves 5A, 15A, and 25A and the width W2 of the second grooves 5B, 15B, and 25B can be appropriately changed other than illustrated. .

（８）各図面には、ヒータシース３，１３，２３の非接触部分３Ａが図示されているが、鍛接接合に伴って塑性変形したプラグ部材４，１４，２４が第１溝部５Ａ，１５Ａ，２５Ａ内にほぼ隙間無く充填される場合もあり、その場合はヒータシース３，１３，２３には非接触部分が生じなくなる可能性もある。また、第１溝部５Ａ，１５Ａ，２５Ａにおけるプラグ部材４，１４，２４の充填状況によっては、ヒータシース３，１３，２３の非接触部分３Ａが各図面とは異なる形で残存する可能性もある。 (8) Each drawing shows the non-contact portion 3A of the heater sheaths 3, 13, 23, but the plug members 4, 14, 24 plastically deformed by the forge welding are the first grooves 5A, 15A, 25A. In some cases, the heater sheaths 3, 13, and 23 may be filled with almost no gaps, and in that case, non-contact portions may not occur in the heater sheaths 3, 13, and 23. Also, depending on the filling state of the plug members 4, 14, 24 in the first grooves 5A, 15A, 25A, the non-contact portions 3A of the heater sheaths 3, 13, 23 may remain in a form different from that shown in each drawing.

（９）実施形態１，２に記載の構成において、第１溝部５Ａ，１５Ａが第２溝部５Ｂ，１５Ｂにおける幅方向についての中央位置から偏在していても構わない。 (9) In the configurations described in Embodiments 1 and 2, the first grooves 5A and 15A may be unevenly distributed from the central position in the width direction of the second grooves 5B and 15B.

（１０）実施形態２，３に記載の構成において、プラグ部材１４，２４の側面１４Ａ及び第２溝部１５Ｂ，２５Ｂの側面１５Ｂ１，２５Ｂ１は、直線状でなくて曲線状であってもよい。また、プラグ部材１４，２４の側面１４Ａ及び第２溝部１５Ｂ，２５Ｂの側面１５Ｂ１，２５Ｂ１が鍛接方向に対してなす具体的な角度は、図示以外にも適宜に変更可能である。 (10) In the configurations described in Embodiments 2 and 3, the side surfaces 14A of the plug members 14 and 24 and the side surfaces 15B1 and 25B1 of the second grooves 15B and 25B may be curved rather than linear. Further, the specific angles formed by the side surfaces 14A of the plug members 14 and 24 and the side surfaces 15B1 and 25B1 of the second groove portions 15B and 25B with respect to the forge welding direction can be appropriately changed other than those shown in the drawings.

（１１）実施形態３に記載の構成において、パネル部材２２は、第２溝部２５Ｂの底面２５Ｂ２に３つ以上の第１溝部２５Ａが開口するよう構成されてもよい。その場合、パネル部材２２の溝部２５には、３つ以上のヒータシース２３が収容される。 (11) In the configuration described in Embodiment 3, the panel member 22 may be configured such that three or more first groove portions 25A are opened in the bottom surface 25B2 of the second groove portion 25B. In that case, three or more heater sheaths 23 are accommodated in the groove portion 25 of the panel member 22 .

（１２）第１溝部５Ａ，１５Ａ，２５Ａ内に複数のヒータシース３，１３，２３を鍛接方向に沿って並ぶ形で入れるようにしてもよい。 (12) A plurality of heater sheaths 3, 13, 23 may be arranged in the first grooves 5A, 15A, 25A along the forge welding direction.

（１３）パネル部材２，１２，２２やプラグ部材４，１４，２４に用いる具体的な材料は、アルミニウムを含有している限りにおいて適宜に変更可能である。 (13) Specific materials used for the panel members 2, 12, 22 and the plug members 4, 14, 24 can be appropriately changed as long as they contain aluminum.

（１４）プラグ部材４，１４，２４及びヒータシース３，１３，２３における具体的な平面形状は、図示以外にも適宜に変更可能である。 (14) The specific planar shapes of the plug members 4, 14, 24 and the heater sheaths 3, 13, 23 can be appropriately changed other than those shown in the drawings.

（１５）ヒータプレート１，１１，２１における具体的な平面形状は、図示以外にも円形や楕円形などに変更可能である。 (15) The specific planar shape of the heater plates 1, 11, and 21 can be changed to a circular shape, an elliptical shape, or the like, other than those shown in the drawings.

（１６）伝熱（加熱）を行うための電熱線を有するヒータシース３，１３，２３に代えて、伝熱及び吸熱（冷却）を適宜に行って温度調整する温度調整シースを用いることも可能である。すなわち、温度調整シースを介して、第１部材と第２部材への伝熱が行われてもよいし、第１部材と第２部材から吸熱してもよい。温度調整シースは、伝熱を行うための電熱線等のヒータと、吸熱を行うための冷媒等の熱流体と、を内包してもよい。熱流体は、温度調整シース内を流動し、外部から吸熱するものである。高温の熱流体が流動する温度調整シースを介して第１部材と第２部材を加熱してもよい。このような温度調整シースを用いた場合であっても、ヒータシース３，１３，２３を用いた場合と同様の作用及び効果を得ることができる。 (16) Instead of the heater sheaths 3, 13, and 23 having heating wires for heat transfer (heating), it is also possible to use temperature control sheaths that appropriately perform heat transfer and heat absorption (cooling) to adjust the temperature. be. That is, heat may be transferred to the first member and the second member, or heat may be absorbed from the first member and the second member, through the temperature adjusting sheath. The temperature control sheath may include a heater such as a heating wire for heat transfer and a thermal fluid such as a refrigerant for absorbing heat. A thermal fluid flows inside the temperature regulating sheath and absorbs heat from the outside. The first member and the second member may be heated via a temperature regulating sheath through which a hot thermal fluid flows. Even when such a temperature control sheath is used, the same actions and effects as when the heater sheaths 3, 13 and 23 are used can be obtained.

１，１１，２１…ヒータプレート、２，１２，２２…パネル部材（第１部材）、３，１３，２３…ヒータシース（温度調整シース）、４，１４，２４…プラグ部材（第２部材）、４Ａ，１４Ａ…側面、５Ａ，１５Ａ，２５Ａ…第１溝部、５Ｂ，１５Ｂ，２５Ｂ…第２溝部、５Ｂ１，１５Ｂ１，２５Ｂ１…側面、５Ｂ２，２５Ｂ２…底面、６…グレンフロー、７…第２のグレンフロー、Ｄ…深さ、Ｒ…外径、ｒ…半分、Ｗ…幅 Reference Signs List 1, 11, 21 ... heater plate 2, 12, 22 ... panel member (first member) 3, 13, 23 ... heater sheath (temperature control sheath) 4, 14, 24 ... plug member (second member), 4A, 14A... side surface, 5A, 15A, 25A... first groove portion, 5B, 15B, 25B... second groove portion, 5B1, 15B1, 25B1... side surface, 5B2, 25B2... bottom surface, 6... glen flow, 7... second Glenflow, D...depth, R...outer diameter, r...half, W...width

Claims (10)

互いに鍛接接合しているアルミニウムまたはアルミニウム合金製の第１部材と第２部材とによって、温度調整シースが挟み込まれて保持されたヒータプレートであって、
前記第１部材には、前記第２部材が入る第２溝部と、前記第２溝部の底面において前記温度調整シースが入る第１溝部と、が設けられており、
前記第１部材及び前記第２部材のうちの前記温度調整シースを取り囲む部分に、前記温度調整シースの外形に沿った形状のグレンフローが形成されているヒータプレート。 A heater plate in which a temperature control sheath is sandwiched and held by a first member and a second member made of aluminum or aluminum alloy butt-welded to each other,
The first member is provided with a second groove portion for receiving the second member, and a first groove portion for receiving the temperature control sheath on the bottom surface of the second groove portion,
A heater plate in which a grain flow having a shape along the contour of the temperature control sheath is formed in a portion of the first member and the second member surrounding the temperature control sheath. 前記第１部材及び前記第２部材には、前記第２溝部の側面を跨ぐよう配されるとともに前記第２溝部の側面に対して交差するよう延びる形状の第２のグレンフローが形成されている請求項１記載のヒータプレート。 In the first member and the second member, a second grain flow is formed so as to straddle the side surface of the second groove portion and extend so as to cross the side surface of the second groove portion. The heater plate of claim 1. 前記第２部材は、幅が前記温度調整シースの外径よりも大きくされており、
前記第１部材は、前記第２溝部が前記第１溝部よりも幅広になるよう構成される請求項１または請求項２記載のヒータプレート。 The second member has a width larger than the outer diameter of the temperature control sheath,
3. The heater plate according to claim 1, wherein said first member is configured such that said second groove is wider than said first groove. 前記第１部材は、前記第２溝部の底面に複数の前記第１溝部が開口するよう構成される請求項３記載のヒータプレート。 4. The heater plate according to claim 3, wherein said first member is configured such that a plurality of said first grooves are opened on bottom surfaces of said second grooves. 前記第１部材は、前記第１溝部の深さが前記温度調整シースの外径の半分よりも大きい請求項３または請求項４記載のヒータプレート。 5. The heater plate according to claim 3, wherein the depth of the first groove portion of the first member is larger than half the outer diameter of the temperature control sheath. 前記温度調整シースの外径の半分を「ｒ」とし、前記第１溝部の深さを「Ｄ」としたとき、前記第１部材は、前記第１溝部の深さが次の式（１）を満たすよう構成される請求項５記載のヒータプレート。
Ｄ≦ｒ＋ｒ・ｓｉｎ５４° （１） When the half of the outer diameter of the temperature adjusting sheath is "r" and the depth of the first groove is "D", the depth of the first groove of the first member is expressed by the following formula (1). 6. The heater plate of claim 5 configured to satisfy:
D≦r+r·sin54° (1) 前記グレンフローは、少なくとも前記第２部材のうちの前記温度調整シースと対向する部分に形成されている請求項１から請求項６のいずれか１項に記載のヒータプレート。 7. The heater plate according to any one of claims 1 to 6, wherein the grain flow is formed at least in a portion of the second member facing the temperature control sheath. 前記グレンフローは、少なくとも前記第１部材のうちの前記第１溝部の溝縁に形成されている請求項１から請求項７のいずれか１項に記載のヒータプレート。 8. The heater plate according to any one of claims 1 to 7, wherein the grain flow is formed at least on groove edges of the first groove portion of the first member. 前記第１部材及び第２部材は、互いに鍛接接合される前記第２溝部の側面と前記第２部材の側面とが共に鍛接方向に対して傾斜するよう構成される請求項１から請求項８のいずれか１項に記載のヒータプレート。 The first member and the second member are configured such that the side surface of the second groove portion and the side surface of the second member, which are forge-joined to each other, are both inclined with respect to the forge-welding direction. A heater plate according to any one of the preceding claims. アルミニウムまたはアルミニウム合金製の第１部材と第２部材とを鍛接接合することにより、温度調整シースを挟み込んで保持させる鍛接工程を含むヒータプレートの製造方法であって、
前記第１部材には、前記第２部材が入る第２溝部と、前記第２溝部の底面において前記温度調整シースが入る第１溝部と、が設けられており、
前記鍛接工程では、前記第１部材と前記第２部材との少なくとも一方に、前記温度調整シースの外形に沿った形状のグレンフローが形成されるように鍛接接合するヒータプレートの製造方法。 A method for manufacturing a heater plate including a forge welding step of forge-welding a first member and a second member made of aluminum or an aluminum alloy to sandwich and hold a temperature control sheath,
The first member is provided with a second groove portion for receiving the second member, and a first groove portion for receiving the temperature control sheath on the bottom surface of the second groove portion,
In the forge-welding step, at least one of the first member and the second member is forge-welded so as to form a grain flow having a shape along the outer shape of the temperature control sheath.
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