TWI429314B - Heating plate and heating plate manufacturing method - Google Patents
Heating plate and heating plate manufacturing method Download PDFInfo
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- TWI429314B TWI429314B TW094105906A TW94105906A TWI429314B TW I429314 B TWI429314 B TW I429314B TW 094105906 A TW094105906 A TW 094105906A TW 94105906 A TW94105906 A TW 94105906A TW I429314 B TWI429314 B TW I429314B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
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Description
本發明,是關於內置有在真空容器(真空室)內加熱所使用的護套加熱器的半導體或液晶顯示器製造用加熱板、及在其製程使用於乾燥、預熱等用途的加熱板與其製造方法。除了上述情況之外,例如可使用作為PDP、FED、ELD的薄型顯示器(FPD)製造裝置的加熱板。本發明一般也可適用於PTP薄板製造用的加熱板。The present invention relates to a heating plate for manufacturing a semiconductor or a liquid crystal display device in which a sheath heater used for heating in a vacuum container (vacuum chamber) is incorporated, and a heating plate used for drying, preheating, or the like in the process and manufacturing thereof method. In addition to the above, for example, a heating plate of a thin display (FPD) manufacturing apparatus as a PDP, FED, or ELD can be used. The invention is also generally applicable to heating plates for the manufacture of PTP sheets.
以往,在例如半導體製造裝置或液晶顯示器製造裝置等的各種領域,是使用在金屬基座內置有加熱器的加熱板。作為這種加熱板的加熱器,一般來說是使用不鏽鋼製的護套加熱器。而在加熱板的構造,有將鋁澆鑄到護套加熱器的構造(澆鑄型)、以鋁或不鏽鋼板夾住護套加熱器再以螺栓鎖裝的構造(螺栓鎖裝型)、將夾入護套加熱器的板體的外周部進行熔接(熔接型)的構造,並且還有,藉由在真空中或在預定的氣體環境下進行加壓,將夾著護套加熱器的兩構件進行硬焊、軟焊及擴散接合(硬焊、擴散接合型),或者在夾住護套加熱器的板體的接合面的整個外周形成環狀溝槽與環狀突出部,而藉由鍛壓壓縮來進行接合(鍛壓壓接型)的方式。Conventionally, in various fields such as a semiconductor manufacturing apparatus or a liquid crystal display manufacturing apparatus, a heating plate in which a heater is incorporated in a metal base is used. As the heater of such a heating plate, a sheathed heater made of stainless steel is generally used. In the structure of the heating plate, there is a structure in which aluminum is cast to a sheath heater (casting type), a sheath heater is sandwiched between aluminum or stainless steel plates, and a bolt-locked structure (bolt lock type), a clamp The outer peripheral portion of the plate body of the sheathed heater is welded (welded type), and further, two members sandwiching the sheathed heater by pressurization in a vacuum or in a predetermined gas atmosphere Brazing, soldering, and diffusion bonding (brazing, diffusion bonding), or forming an annular groove and an annular projection over the entire periphery of the joint surface of the plate body sandwiching the sheath heater, by forging Compression to join (forging and crimping type).
第12圖是顯示有內置護套加熱器102的傳統的澆鑄型的加熱板101的概略構造。護套加熱器102,是將發熱體通到不鏽鋼製保護管內,以絕緣材料使兩者之間電絕緣的構造。將該管狀的護套加熱器102彎曲加工成預定的圖案,澆鑄於鋁基座,藉由實施切削、表面研磨等的加工來製作加熱板101。Fig. 12 is a schematic configuration showing a conventional casting type heating plate 101 having a built-in sheath heater 102. The sheathed heater 102 is a structure in which a heating element is passed through a stainless steel protective tube and electrically insulated from each other by an insulating material. The tubular sheathed heater 102 is bent into a predetermined pattern, cast on an aluminum base, and the heating plate 101 is produced by performing processing such as cutting or surface polishing.
在第13圖是顯示傳統的螺栓鎖裝型加熱板103的概略構造。在該構造中,是將金屬基座分割為上下兩部分,在由鋁、不鏽鋼等所構成的下側基座104所形成的溝槽104a設置上述同樣的護套加熱器102,使上側基座105緊貼,在適當的位置將兩者鎖裝而一體化。Fig. 13 is a view showing a schematic configuration of a conventional bolt-and-lock type heating plate 103. In this configuration, the metal base is divided into upper and lower portions, and the same sheath heater 102 is provided in the groove 104a formed by the lower base 104 made of aluminum, stainless steel or the like, so that the upper base is provided. 105 is close to each other, and the two are locked and integrated in an appropriate position.
第14圖是顯示傳統熔接型加熱板106的概略構造。在該構造也是,將金屬基座分割為上下兩部分,在由鋁、不鏽鋼等所構成的下側基座107所形成的溝槽107a設置上述同樣的護套加熱器102,使上側基座108緊貼,僅在該緣部109將兩者熔接而一體化。Fig. 14 is a view showing a schematic configuration of a conventional fusion-type heating plate 106. Also in this configuration, the metal base is divided into upper and lower portions, and the same sheath heater 102 is provided in the groove 107a formed by the lower base 107 made of aluminum, stainless steel or the like, so that the upper base 108 is provided. It is in close contact with each other, and only the edge portion 109 is welded and integrated.
第15圖則顯示傳統的硬焊、擴散接合型加熱板110的概略構造。在該構造也是,將金屬基座分割為上下兩部分,在區劃於由金屬構成的下側基座107與上側基座108之間的溝槽107a設置與上述同樣的護套加熱器102,在使上側基座108與下側基座107的其中一方或兩方塑性變形的狀態,涵蓋整個面,藉由硬焊、軟焊及擴散接合的其中一種方式,進行接合而達到一體化。Fig. 15 shows a schematic configuration of a conventional brazing and diffusion bonding type heating plate 110. Also in this configuration, the metal base is divided into upper and lower portions, and the same sheath heater 102 as that described above is provided in the groove 107a partitioned between the lower base 107 and the upper base 108 made of metal. The state in which one or both of the upper susceptor 108 and the lower susceptor 107 are plastically deformed covers the entire surface, and is joined by one of brazing, soldering, and diffusion bonding to achieve integration.
第16圖則顯示傳統的鍛壓壓接型加熱板111的概略構造。在該構造也是,將金屬基座分割為上下兩部分,在鋁構件112、113的接合面的整個外周形成四角形或多角形或圓形的環狀溝槽與環狀突出部,藉由鍛壓壓縮,以鎖裝部114進行密閉、金屬接合。Fig. 16 shows a schematic configuration of a conventional forging pressure type heating plate 111. Also in this configuration, the metal base is divided into upper and lower portions, and a quadrangular or polygonal or circular annular groove and an annular projection are formed on the entire outer circumference of the joint faces of the aluminum members 112 and 113, and are pressed by forging. The sealing portion 114 is sealed and metal-bonded.
日本特開平11-285775Japanese special Kaiping 11-285775
日本特開2000-311932Japan Special Open 2000-311932
日本特開2000-243542Japan Special Open 2000-243542
加熱板,近年來隨著液晶電視的大型化,而急速大型化,在這幾年從第四代的730mm × 920mm、第五代的1100mm × 1300mm,變化到第六代的1500 × 1800mm、第七代的2100mm × 2400mm。伴隨著這種加熱板的大型化,特別是在增長加熱板的使用壽命或簡化製造方法所達成的降低成本方面會產生問題。In recent years, the heating plate has been rapidly increasing in size, and has changed from 730 mm × 920 mm in the fourth generation, 1100 mm × 1300 mm in the fifth generation, and 1500 × 1800 mm in the sixth generation. Seven generations of 2100mm × 2400mm. Along with the enlargement of such a heating plate, problems are particularly caused in terms of increasing the service life of the heating plate or simplifying the cost reduction achieved by the manufacturing method.
在上述傳統構造所說明的加熱板的構造中,澆鑄型的加熱板,護套加熱器是與鋁鑄造物緊貼著,雖然加熱器的熱傳導性很好,可是由於在護套加熱器的保護管所使用的不鏽鋼、鎳鉻鐵耐蝕合金(inconel)材料等的金屬、與作為金屬基座的鋁的熱膨脹係數不同,所以在高溫時,其熱應力會導致加熱器變形,而反覆使用可能會造成斷線,而在不同的情況可能會產生加熱器全體變形這樣的問題。In the configuration of the heating plate described in the above conventional configuration, the casting type heating plate, the sheath heater is in close contact with the aluminum casting, although the thermal conductivity of the heater is good, but due to the protection of the sheath heater The metal used in the tube, such as stainless steel, inconel material, and aluminum, which is a metal base, have different thermal expansion coefficients. Therefore, at high temperatures, the thermal stress may cause the heater to deform, and the repeated use may be This causes a wire breakage, which may cause problems such as deformation of the heater in different situations.
另一方面,鋁基座的螺栓鎖裝型加熱板,在溝槽具有間隙,該間隙成為隔熱層,並且各部分是物理性地接觸,所以上下基座與護套加熱器或基座彼此的緊密性較低,熱傳導性很差,在不同的情況可能會有局部昇溫而損傷加熱器這樣的缺點。這種問題在熔接型的加熱板也是一樣。並且,熔接型的加熱板,熔接所導致的應變很大,在形狀維持方面也有問題。On the other hand, the bolt-on type heating plate of the aluminum base has a gap in the groove, the gap becomes a heat insulating layer, and the parts are physically contacted, so the upper and lower bases and the sheath heater or the base are mutually connected The tightness is low, the thermal conductivity is very poor, and in some cases there may be a disadvantage of local heating and damage to the heater. This problem is also the same in the fusion type heating plate. Further, the fusion-type heating plate has a large strain due to welding, and has a problem in shape maintenance.
硬焊、擴散接合方式,在真空中或氮氣等的環境中,將相對向的構件的整個面進行加壓接合,所以不能接合大型的構件,並且有需要硬焊材、軟焊材等的接合用的第三接合用構件這樣的問題。In the environment of vacuum welding or diffusion bonding, the entire surface of the opposing member is press-bonded in a vacuum or in an atmosphere such as nitrogen gas. Therefore, a large-sized member cannot be joined, and bonding of a hard solder material, a soft solder material, or the like is required. The problem of the third joining member used.
在鍛壓型的加熱板,伴隨著加熱板的大型化,在兩枚板材的外周部與加熱部附近加工出嵌合用的凹部或凸部,使其嵌合,藉由鍛壓壓接的方式將其接合的如日本特開2000-311932所揭示的方法,藉由在300~500℃的高溫長時間使用會產生蠕變變形,在外周部與加熱器附近部或加熱器內側的板中心附近,會由於熱應力導致變形,而無法使用加熱板,會有這樣的缺點。In the forging-type heating plate, the concave portion or the convex portion for fitting is formed in the outer peripheral portion of the two plate members and the vicinity of the heating portion in accordance with the enlargement of the heating plate, and the fitting is performed by forging and crimping. The method disclosed in Japanese Laid-Open Patent Publication No. 2000-311932, which is subjected to creep deformation at a high temperature of 300 to 500 ° C for a long period of time, is in the vicinity of the outer peripheral portion and the vicinity of the heater or the center of the plate inside the heater. Such a disadvantage is caused by the deformation of the thermal stress and the inability to use the heating plate.
而需要從伴隨加熱板的大型化所產生的上述加熱板的變形的問題與製造成本增大的問題,來改善至今的鍛壓壓接方法。On the other hand, there is a need to improve the forging pressure bonding method up to now, from the problem of deformation of the above-described heating plate caused by the enlargement of the heating plate and the problem of an increase in manufacturing cost.
本發明,鑒於上述傳統技術的問題,要提供一種加熱板及其製造方法,能防止加熱板的熱應力所導致的變形,並且加熱板的熱傳導性很好,耐久性很高。The present invention has been made in view of the problems of the above conventional techniques, and provides a heating plate and a method of manufacturing the same, which can prevent deformation caused by thermal stress of the heating plate, and the thermal conductivity of the heating plate is excellent and durability is high.
用來解決上述課題的本發明的第1方式,在鋁或鋁合金基底構件所設置的溝槽部,收容著護套加熱器,並且,將接合用鋁或鋁合金構件嵌合在上述溝槽部,上述接合用鋁或鋁合金構件、與上述鋁或鋁合金基底構件,是藉由鍛壓壓接方式來進行金屬接合。In the first aspect of the present invention for solving the above problems, a sheath heater is housed in a groove portion provided in an aluminum or aluminum alloy base member, and an aluminum or aluminum alloy member for joining is fitted in the groove. The aluminum or aluminum alloy member for joining and the aluminum or aluminum alloy base member are joined by a press-bonding method.
本發明的第2方式,上述接合用鋁或鋁合金構件,是由一體的構件所構成。According to a second aspect of the present invention, the aluminum or aluminum alloy member for joining is composed of an integral member.
本發明的第3方式,上述接合用鋁或鋁合金構件,在上述鋁或鋁合金基底構件的平面方向,是由複數構件所構成。According to a third aspect of the invention, the aluminum or aluminum alloy member for joining is composed of a plurality of members in a planar direction of the aluminum or aluminum alloy base member.
本發明的第4方式,上述接合用鋁或鋁合金構件,在上述鋁或鋁合金基底構件的垂直方向,是由複數構件所構成。According to a fourth aspect of the invention, the aluminum or aluminum alloy member for joining is composed of a plurality of members in a vertical direction of the aluminum or aluminum alloy base member.
本發明的第5方式,上述護套加熱器的配設的佈置方式,是對稱於上述鋁或鋁合金基底構件的互相垂直相交的兩個中心軸的至少其中一個,或者相對於中心處而為點對稱。According to a fifth aspect of the present invention, the arrangement of the sheath heater is symmetrical to at least one of two central axes perpendicular to each other of the aluminum or aluminum alloy base member, or is opposite to the center Point symmetry.
本發明的第6方式,上述鋁或鋁合金基底構件,是板材。According to a sixth aspect of the invention, the aluminum or aluminum alloy base member is a plate material.
本發明的第7方式,上述接合用鋁或鋁合金構件的剖面積,是大於:從形成於上述鋁或鋁合金基底構件的溝槽部的剖面積減去上述護套加熱器的剖面積的有效剖面積。According to a seventh aspect of the invention, the cross-sectional area of the aluminum or aluminum alloy member for joining is larger than a cross-sectional area of the grooved portion formed in the aluminum or aluminum alloy base member minus a sectional area of the sheath heater. Effective sectional area.
本發明的第8方式,上述接合用鋁或鋁合金構件的剖面的形狀,是具有長方形,上述剖面的寬度,是與上述溝槽部的寬度相同或稍大。According to an eighth aspect of the invention, the cross-sectional shape of the aluminum or aluminum alloy member for joining has a rectangular shape, and the width of the cross section is the same as or slightly larger than the width of the groove portion.
本發明的第9方式,在上述接合用鋁或鋁合金構件的至少一部分,其朝向埋入方向的兩邊部,是以朝向下方其間隔變窄的方式,具有預定的錐度。According to a ninth aspect of the present invention, at least a part of the aluminum or aluminum alloy member for joining has a predetermined taper so that the both sides in the embedding direction are narrowed toward the lower side.
本發明的第10方式,上述接合用鋁或鋁合金構件的高度,對於上述剖面的錐度下部寬度或構件最下部寬度的比值,是1以上,5以下。According to a tenth aspect of the invention, the height of the aluminum or aluminum alloy member for joining is 1 or more and 5 or less with respect to a ratio of a taper lower width of the cross section or a member lowermost width.
本發明的第11方式,上述接合用鋁或鋁合金構件的上述錐部的錐度角,是超過0°,而在45°以下。According to an eleventh aspect of the invention, the taper angle of the tapered portion of the aluminum or aluminum alloy member for joining is more than 0° and not more than 45°.
本發明的第12方式,上述接合用鋁或鋁合金構件的剖面形狀具有略T字型,將上述略T字型的縱棒部分與橫棒部分一起與上述鋁或鋁合金基底構件接合在。According to a twelfth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and the slightly T-shaped vertical rod portion and the horizontal rod portion are joined to the aluminum or aluminum alloy base member.
本發明的第13方式,上述接合用鋁或鋁合金構件的剖面形狀呈略T字型,是將用來按壓加熱器的上述縱棒部分的一部分或全部、與包含上述橫棒部分的剩餘的部分作成不同個體予以分割。According to a thirteenth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and is a part or all of the vertical rod portion for pressing the heater and the remaining portion including the horizontal rod portion. Partially divided into different individuals.
本發明的第14方式,上述接合用鋁或鋁合金構件的剖面形狀呈略T字型,在上述略T字型的上述縱棒部分的位置的其他位置,也就是在上述橫棒部分下側的不存在護套加熱器的位置,設置嵌合用凸部或凹部,並且在上述鋁或鋁合金基底構件的與上述接合用鋁或鋁合金構件的嵌合用凸部或凹部相對向的位置,將與其嵌合的凹部或凸部設置在上述鋁或鋁合金基底構件的溝槽部。According to a fourteenth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and is located at a position other than the position of the vertical rod portion of the slightly T-shaped portion, that is, at a lower side of the horizontal rod portion. The position where the sheath heater is not present, and the fitting convex portion or the concave portion is provided, and the aluminum or aluminum alloy base member is opposed to the fitting convex portion or the concave portion of the aluminum or aluminum alloy member for joining. A recess or a convex portion fitted thereto is provided in the groove portion of the above-described aluminum or aluminum alloy base member.
本發明的第15方式,上述接合用鋁或鋁合金構件的剖面形狀呈略T字型,上述略T字型的上述橫棒部分的底面,是具有朝向中心的緩和的斜度的Y字型。According to a fifteenth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and the bottom surface of the horizontal portion of the slightly T-shaped portion is a Y-shaped shape having a gentle slope toward the center. .
本發明的第16方式,在第12方式的上述略T字型的上述接合用鋁或鋁合金構件中,上述縱棒部分的剖面的高度對於寬度的比值為1以上,4以下。According to a sixteenth aspect of the invention, in the aluminum or aluminum alloy member for the joining of the slightly T-shaped type, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less.
本發明的第17方式,在第13方式的上述略T字型的上述接合用鋁或鋁合金構件中,上述縱棒部分的剖面的高度對於寬度的比值為1以上,4以下。According to a thirteenth aspect of the present invention, in the aluminum or aluminum alloy member for the joint of the slightly T-shaped type of the thirteenth aspect, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less.
本發明的第18方式,在第14方式的上述略T字型的上述接合用鋁或鋁合金構件中,上述縱棒部分及嵌合用凸部或凹部的各剖面的高度對於寬度的比值為1以上,4以下。According to a thirteenth aspect of the present invention, in the aluminum or aluminum alloy member for the joint of the slightly T-shaped type of the fourth aspect, the ratio of the height of each of the vertical rod portions and the fitting convex portion or the concave portion to the width is 1 Above, 4 or less.
本發明的第19方式,在第15方式的上述略Y字型的上述接合用鋁或鋁合金構件中,上述縱棒部分的剖面的高度對於寬度的比值為1以上,4以下。According to a ninth aspect of the present invention, in the aluminum or aluminum alloy member for joining described above, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less.
本發明的第20方式,上述接合用鋁或鋁合金構件的與護套加熱器相接的面部的形狀,是與上述鋁或鋁合金基底構件的板面平行的平面、或是具有與上述護套加熱器的外周同方向的曲率的曲面。According to a twentieth aspect of the invention, the surface of the surface of the aluminum or aluminum alloy member for joining that is in contact with the sheath heater is a plane parallel to the surface of the aluminum or aluminum alloy base member, or A curved surface of the curvature of the outer circumference of the heater in the same direction.
本發明的第21方式,上述接合用鋁或鋁合金構件的與護套加熱器相接的面部的構件寬度,是大於護套加熱器的寬度。According to a twenty-first aspect of the invention, the member width of the face portion of the aluminum or aluminum alloy member for joining that is in contact with the sheath heater is larger than the width of the sheath heater.
本發明的第22方式,上述接合用鋁或鋁合金構件的進行鍛壓壓接前的剖面積,是大於從在上述鋁或鋁合金基底構件所形成的上述溝槽部的剖面積減去上述護套加熱器的剖面積的有效剖面積,且當將上述接合用鋁或鋁合金構件嵌合在上述鋁或鋁合金基底構件的上述溝槽部時,在側面的至少其中一部分,是具有間隙。According to a twenty-second aspect of the present invention, the cross-sectional area of the aluminum or aluminum alloy member for joining before the forging and pressing is larger than the sectional area of the groove portion formed by the aluminum or aluminum alloy base member. The effective sectional area of the cross-sectional area of the heater is set, and when the aluminum or aluminum alloy member for bonding is fitted to the groove portion of the aluminum or aluminum alloy base member, at least a part of the side surface has a gap.
本發明的第23方式,上述護套加熱器,是在鋁或鋁合金基底構件上所設置的一個或複數溝槽配置有複數條、或在複數的溝槽各配設有一條。According to a twenty-third aspect of the present invention, in the sheath heater, one or a plurality of grooves are provided in the aluminum or aluminum alloy base member, or a plurality of grooves are disposed in each of the plurality of grooves.
本發明的第24方式,上述複數條的護套加熱器,在鋁或鋁合金基底構件所設置的一個或複數的各溝槽,是並排地配設有複數條。According to a twenty-fourth aspect of the present invention, in the plurality of sheathed heaters, one or a plurality of grooves provided in the aluminum or aluminum alloy base member are arranged in a plurality of rows in parallel.
本發明的第25方式,上述複數條的護套加熱器,在鋁或鋁合金基底構件所設置的一個或複數的各溝槽,是在高度方向重疊配設有複數條。According to a twenty-fifth aspect of the present invention, in the plurality of sheath heaters, one or a plurality of grooves provided in the aluminum or aluminum alloy base member are stacked in a plurality of rows in the height direction.
本發明的第26方式,上述護套加熱器,是剖面為圓形的構造、或角落部具有由預定的曲率的曲線所構成的略長方形(也包含略正方形)的形狀的管狀的構造、或將細條部編成管狀形狀的構造。According to a twenty-sixth aspect of the present invention, the sheath heater is a tubular structure having a circular cross section or a substantially rectangular shape (including a substantially square shape) having a corner portion having a predetermined curvature or The structure in which the thin strips are braided into a tubular shape.
本發明的第27方式,用來收容上述護套加熱器的加熱板,對於與護套加熱器的護套部的熱傳導性很優異。According to a twenty-seventh aspect of the present invention, the heating plate for accommodating the sheath heater is excellent in thermal conductivity to the sheath portion of the sheath heater.
本發明的第28方式,用來收容上述護套加熱器的加熱板,具有氣密性。According to a twenty-eighth aspect of the present invention, the heating plate for accommodating the sheath heater has airtightness.
本發明的第29方式,用來收容上述護套加熱器的加熱板的護套加熱器,具有更高的電絕緣性。According to a twenty-ninth aspect of the present invention, the sheath heater for accommodating the heating plate of the sheath heater has higher electrical insulation.
本發明的第30方式,上述接合用鋁或鋁合金構件及上述鋁或鋁合金基底構件,是由:JIS1050、1100、3003、3004、5005、5052、6063、6061、7003、7N01的其中一種的合金所構成。According to a thirtieth aspect of the invention, the aluminum or aluminum alloy member for joining and the aluminum or aluminum alloy base member are one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. Made up of alloys.
本發明的第31方式,是加熱板的製造方法,在上述鋁或鋁合金基底構件加工出上述溝槽部,在上述溝槽部收容上述護套加熱器,並且,將上述接合用鋁或鋁合金構件收容在上述護套加熱器上,上述接合用鋁或鋁合金構件、與上述鋁或鋁合金基底構件,是藉由鍛壓壓接方式來進行金屬接合。According to a thirty-first aspect of the invention, in the method of manufacturing a hot plate, the groove portion is formed in the aluminum or aluminum alloy base member, the sheath heater is accommodated in the groove portion, and the aluminum or aluminum for the joint is used. The alloy member is housed in the sheath heater, and the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are joined by a press-bonding method.
本發明的第32方式,作為上述接合用鋁或鋁合金構件,是使用一體或分割為複數部分的構件,藉由鍛壓壓接方式來進行金屬接合。According to a thirtieth aspect of the invention, the aluminum or aluminum alloy member for joining is formed by a forging or pressure-bonding method using a member integrally or divided into a plurality of members.
本發明的第33方式,作為上述接合用鋁或鋁合金構件,是使用在上述鋁或鋁合金基底構件的平面方向或剖面方向分割為複數部分的構件,藉由鍛壓壓接方式來進行金屬接合。According to a thirteenth aspect of the invention, the aluminum or aluminum alloy member for joining is formed by a forging and press-bonding method using a member that is divided into a plurality of portions in a planar direction or a cross-sectional direction of the aluminum or aluminum alloy base member. .
本發明的第34方式,上述接合用鋁或鋁合金構件的剖面積,是大於:從形成於上述鋁或鋁合金基底構件的溝槽部的剖面積減去上述護套加熱器的剖面積的有效剖面積。According to a thirty-fourth aspect of the invention, the cross-sectional area of the aluminum or aluminum alloy member for joining is larger than a cross-sectional area of the grooved portion formed in the aluminum or aluminum alloy base member minus the sectional area of the sheath heater. Effective sectional area.
本發明的第35方式,當上述接合用鋁或鋁合金構件分割為複數部分時,是以預定的順序將複數的構件進行鍛壓壓接。According to a thirty-fifth aspect of the invention, when the aluminum or aluminum alloy member for joining is divided into a plurality of portions, a plurality of members are forged and pressure-bonded in a predetermined order.
本發明的第36方式,在上述鋁或鋁合金基底構件,使用板材,藉由鍛壓壓接方式來進行金屬接合。According to a thirty-sixth aspect of the present invention, in the aluminum or aluminum alloy base member, metal joining is performed by a forging and pressing method using a plate material.
本發明的第37方式,在上述接合用鋁或鋁合金構件,是使用上述剖面的形狀為長方形,且上述剖面的寬度與上述溝槽部的寬度相同或較大的構件,藉由鍛壓壓接方式來進行金屬接合。According to a thirty-seventh aspect of the present invention, in the aluminum or aluminum alloy member for joining, the shape of the cross section is a rectangle, and the width of the cross section is the same as or larger than the width of the groove portion, and is crimped by forging. The way to make metal joints.
本發明的第38方式,作為上述接合用鋁或鋁合金構件,是使用具有其錐度角超過0°而在45°以下的錐部的構件,藉由鍛壓壓接方式來進行金屬接合。According to a thirty-eighth aspect of the invention, the aluminum or aluminum alloy member for joining is formed by a forging and pressing method using a member having a taper having a taper angle of more than 0° and not more than 45°.
本發明的第39方式,作為上述接合用鋁或鋁合金構件,是使用剖面形狀為略T字型或Y字型的構件,藉由鍛壓壓接方式來進行金屬接合。According to a ninth aspect of the present invention, as the aluminum or aluminum alloy member for joining, a member having a substantially T-shaped or Y-shaped cross-sectional shape is used, and metal joining is performed by a forging and pressing method.
本發明的第40方式,是加熱板的製造方法,上述接合用鋁或鋁合金構件的剖面形狀呈略T字型,在上述略T字型的上述縱棒部分的位置的其他位置,也就是在上述橫棒部分下側的不存在護套加熱器的位置,設置嵌合用凸部或凹部,並且在朝向上述接合用鋁或鋁合金構件的嵌合用凸部或凹部的位置,是在上述鋁或鋁合金基底構件設置與其嵌合的凹部或凸部,使上述接合用鋁或鋁合金構件的上述縱棒部分及上述嵌合用凸部或凹部、與上述鋁或鋁合金基底構件的具有上述凹部或凸部的溝槽部嵌合,藉由鍛壓壓接方式來進行金屬接合。According to a 40th aspect of the present invention, in the method of manufacturing a hot plate, the cross-sectional shape of the aluminum or aluminum alloy member for joining is slightly T-shaped, and the other position of the vertical rod portion of the slightly T-shaped portion is In the position where the sheathing heater is not present on the lower side of the horizontal bar portion, the fitting convex portion or the concave portion is provided, and the position of the fitting convex portion or the concave portion facing the bonding aluminum or aluminum alloy member is the aluminum Or the aluminum alloy base member is provided with a concave portion or a convex portion fitted thereto, and the vertical rod portion of the joining aluminum or aluminum alloy member, the fitting convex portion or the concave portion, and the aluminum or aluminum alloy base member having the concave portion Or the groove portion of the convex portion is fitted, and metal joining is performed by a forging pressure bonding method.
本發明的第41方式,在上述接合用鋁或鋁合金構件,是使用:與上述護套加熱器相接的面部的形狀,是與上述鋁或鋁合金基底構件的板面平行的平面、或是具有與上述護套加熱器的外周同方向的曲率的曲面的構件,藉由鍛壓壓接方式來進行金屬接合。According to a forty-first aspect of the present invention, in the aluminum or aluminum alloy member for joining, a surface of the surface portion that is in contact with the sheath heater is a plane parallel to a surface of the aluminum or aluminum alloy base member, or It is a member having a curved surface having a curvature in the same direction as the outer circumference of the sheath heater, and metal joining is performed by a forging pressure bonding method.
本發明的第42方式,是使用:上述接合用鋁或鋁合金構件的高度,與從上述鋁或鋁合金基底構件的溝槽部的深度減去上述護套加熱器的高度的上述溝槽部的有效深度相等或較大的構件,藉由鍛壓壓接方式來進行金屬接合。According to a forty-second aspect of the invention, the height of the aluminum or aluminum alloy member for joining, and the groove portion obtained by subtracting a height of the sheath heater from a depth of a groove portion of the aluminum or aluminum alloy base member The members having the same effective depth or larger are metal-bonded by forging and crimping.
本發明的第43方式,上述接合用鋁或鋁合金構件的上述剖面的高度對於寬度的比值為1以上,4以下。According to a thirteenth aspect of the invention, the ratio of the height of the cross section of the aluminum or aluminum alloy member for joining to the width is 1 or more and 4 or less.
本發明的第44方式,上述接合用鋁或鋁合金構件的鍛壓壓接前的剖面積,是大於從上述鋁或鋁合金基底構件所形成的上述溝槽部的剖面積減去上述護套加熱器的剖面積的有效剖面積,且當嵌合於上述溝槽部時,側面的至少一部分具有間隙的上述接合用鋁或鋁合金構件、與上述鋁或鋁合金基底構件,是藉由鍛壓壓接方式來進行金屬接合。According to a forty-fourth aspect of the present invention, the cross-sectional area of the aluminum or aluminum alloy member for joining before the forging and pressing is larger than the sectional area of the groove portion formed from the aluminum or aluminum alloy base member minus the sheath heating The effective sectional area of the cross-sectional area of the device, and when fitted to the groove portion, the aluminum or aluminum alloy member for bonding having at least a part of the side surface and the aluminum or aluminum alloy base member are pressed by forging The joining method is used for metal joining.
本發明的第45方式,作為上述鋁或鋁合金基底構件及上述接合用鋁或鋁合金構件,是使用由:JIS1050、1100、3003、3004、5005、5052、6063、6061、7003、7N01的其中一種的合金所構成的構件,藉由鍛壓壓接方式來進行金屬接合。According to a forty-fifth aspect of the invention, the aluminum or aluminum alloy base member and the aluminum or aluminum alloy member for joining are: JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. A member made of an alloy is joined by a press-bonding method.
本發明的第46方式,上述鋁或鋁合金基底構件、與上述接合用鋁或鋁合金構件的鍛壓壓接,是在250℃~500℃的範圍來進行的。According to a 46th aspect of the invention, the aluminum or aluminum alloy base member and the forging pressure-bonding of the aluminum or aluminum alloy member for joining are carried out in a range of from 250 ° C to 500 ° C.
本發明的第47方式,是使用第31方式所記載的加熱板的製造方法的加熱板的變形防止方法。A 47th aspect of the present invention is the method for preventing deformation of a hot plate using the method for producing a hot plate according to the thirty-first aspect.
本發明的第48方式,是使用第31方式所記載的加熱板的製造方法,利用鍛壓壓接,對於加熱板的接合用鋁或鋁合金構件與鋁或鋁合金基底構件的緊貼性提昇方法。According to a 48th aspect of the present invention, in the method for producing a hot plate according to the 31st aspect, the method for improving the adhesion between the aluminum or aluminum alloy member for bonding the heating plate and the aluminum or aluminum alloy base member by forging and pressing is used. .
本發明的第49方式,使用第48方式所記載的對於加熱板的接合用鋁或鋁合金構件與鋁或鋁合金基底構件的緊貼性提昇方法的加熱器使用壽命的提昇方法。According to a 49th aspect of the present invention, there is provided a method for improving the service life of a heater for a method for improving adhesion between an aluminum or aluminum alloy member for joining a heating plate and an aluminum or aluminum alloy base member according to the 48th aspect.
本發明的第50方式,在金屬或合金基底構件所設置的溝槽部,收容護套加熱器,並且,將由與其同種類的金屬或合金所構成的接合用金屬或合金構件嵌合在上述溝槽部,將上述接合用金屬或合金構件與上述金屬或合金基底構件,藉由鍛壓壓接來進行金屬接合。According to a 50th aspect of the present invention, a sheath heater is housed in a groove portion provided in a metal or alloy base member, and a joining metal or alloy member made of a metal or an alloy of the same kind is fitted to the groove. In the groove portion, the joining metal or alloy member and the metal or alloy base member are joined by press bonding to perform metal joining.
本發明的第51方式,上述金屬或合金基底構件與接合用金屬或合金構件,都是銅或銅合金。According to a fifty-first aspect of the invention, the metal or alloy base member and the joining metal or alloy member are both copper or a copper alloy.
藉由本發明,在設置於鋁或鋁合金基底構件的溝槽部,收容護套加熱器與接合用鋁或鋁合金構件,藉由將接合用鋁或鋁合金構件與鋁或鋁合金基底構件進行鍛壓壓接,來進行金屬接合,則在鋁或鋁合金基底構件與護套加熱器之間可維持高度的緊密性,而具有能確保高熱傳導性的效果。According to the invention, the sheath heater and the aluminum or aluminum alloy member for joining are housed in the groove portion provided in the aluminum or aluminum alloy base member, and the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are used. Forging and crimping for metal joining maintains a high degree of tightness between the aluminum or aluminum alloy base member and the sheathed heater, and has an effect of ensuring high thermal conductivity.
藉由本發明,藉由鍛壓壓接方式,來對接合用鋁或鋁合金構件與鋁或鋁合金基底構件進行的金屬接合,是在使用加熱板的加熱區域的溫度附近進行的,而可以減輕加熱板的使用溫度區域的鋁或鋁合金基底構件與內部加熱器的護套材料的線膨脹差異所導致的應力,可以避免護套加熱器的變形或破損、加熱板的變形等情形。同時,也可改善接合用鋁或鋁合金構件與鋁或鋁合金基底構件的緊貼性或熱傳導性。本發明的效果,即使是鋁或鋁合金以外的金屬,只要是可鍛壓壓接且熱傳導性優異的金屬即可,也可適用於銅或銅合金。銅或銅合金的耐熱性較高,所以適合在較鋁或鋁合金製的加熱板更高溫度使用的情況。According to the present invention, the metal joining of the aluminum or aluminum alloy member for joining to the aluminum or aluminum alloy base member by the forging and pressing method is performed in the vicinity of the temperature of the heating region using the hot plate, and the heating can be reduced. The stress caused by the difference in linear expansion between the aluminum or aluminum alloy base member of the use temperature region of the plate and the sheath material of the internal heater can avoid deformation or breakage of the sheath heater, deformation of the heating plate, and the like. At the same time, the adhesion or thermal conductivity of the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member can also be improved. According to the effects of the present invention, any metal other than aluminum or aluminum alloy can be applied to copper or a copper alloy as long as it is a metal that is press-compression-bonded and excellent in thermal conductivity. Copper or copper alloys have high heat resistance, so they are suitable for use at higher temperatures than hot plates made of aluminum or aluminum alloy.
在本發明的內部配設有護套加熱器的加熱板,是使護套加熱器緊貼在金屬構件,所以護套加熱器的發熱,會傳達到加熱板的金屬構件。護套加熱器,是以將加熱板加熱成均勻的溫度的方式,配設在加熱板的內部。例如,將護套加熱器配設成各種形狀,來將加熱板加熱成均勻的溫度。而護套加熱器,是在不鏽鋼例如SUS304、鎳合金例如incoloy(高溫鐵鎳鉻基)、鈦的護套材料(管體)中,封入電熱線與絕緣材料。溝槽與加熱器的數量,如後述,是因應需要來作適當選擇的。In the heating plate in which the sheath heater is disposed inside the present invention, the sheath heater is brought into close contact with the metal member, so that the heat generated by the sheath heater is transmitted to the metal member of the heating plate. The sheath heater is disposed inside the heating plate in such a manner that the heating plate is heated to a uniform temperature. For example, the sheath heater is configured in various shapes to heat the heating plate to a uniform temperature. The sheathed heater is sealed with a heating wire and an insulating material in a stainless steel such as SUS304, a nickel alloy such as incoloy (high temperature iron nickel chromium base), and a titanium sheath material (tube body). The number of grooves and heaters, as will be described later, is appropriately selected as needed.
在藉由本發明所製造的內部配設有護套加熱器的加熱板,是在半導體或液晶的製造裝置的真空容器(真空室)內使用作為加熱板。在第17圖,是顯示在內部配設有護套加熱器的加熱板的使用例子。第17圖是化學氣相沉積(CVD)處理裝置,在真空室122內配設有護套加熱器123的加熱板121,是藉由支承構件124所設置。在加熱板121是載置有基板125。在真空室122內,是設置有用來進行CVD處理的氣體供給部126,從供給口127供給氣體,藉由化學氣相沉積在基板125進行沉積。The heating plate in which the sheath heater is disposed by the present invention is used as a heating plate in a vacuum container (vacuum chamber) of a semiconductor or liquid crystal manufacturing apparatus. Fig. 17 is a view showing an example of use of a heating plate in which a sheath heater is disposed inside. Fig. 17 is a chemical vapor deposition (CVD) processing apparatus in which a heating plate 121 in which a sheath heater 123 is disposed in a vacuum chamber 122 is provided by a support member 124. The substrate 125 is placed on the heating plate 121. In the vacuum chamber 122, a gas supply portion 126 for performing a CVD process is provided, and a gas is supplied from the supply port 127 and deposited on the substrate 125 by chemical vapor deposition.
以下根據圖面來說明本發明的較佳實施方式。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described based on the drawings.
第1圖是本實施方式的加熱板的剖面圖的代表例子。在第1圖中,加熱板1,是在鋁或鋁合金基底構件2收容了作為內部零件的護套加熱器3,以接合用鋁或鋁合金構件4將其上部密封的構造。本發明的接合用鋁或鋁合金構件4,其剖面形狀如第1圖(a)所示的長方形,或如第1圖(b)所示,成為相對向的兩邊至少一部分是朝向埋入方向而間隔變窄的錐狀。在第2圖顯示加熱板1的俯視圖,在第3圖及第4圖顯示第2圖的A-A’的剖面圖。第3圖及第4圖,分別是第1圖(a)及第1圖(b)的對應於加熱板1的剖面圖。Fig. 1 is a representative example of a cross-sectional view of a heating plate of the present embodiment. In the first embodiment, the heating plate 1 is a structure in which a sheath heater 3 as an internal component is housed in an aluminum or aluminum alloy base member 2, and an upper portion thereof is sealed by an aluminum or aluminum alloy member 4 for joining. The aluminum or aluminum alloy member 4 for joining of the present invention has a cross-sectional shape as shown in the first embodiment (a), or as shown in Fig. 1(b), at least a part of the opposite sides is oriented toward the embedding direction. The interval is narrowed and tapered. Fig. 2 is a plan view showing the heating plate 1, and Fig. 3 and Fig. 4 are sectional views showing A-A' of Fig. 2; Fig. 3 and Fig. 4 are cross-sectional views corresponding to the heating plate 1 in Fig. 1 (a) and Fig. 1 (b), respectively.
上述方式之外,雖然省略圖示,而接合用鋁或鋁合金構件的剖面形狀,是略T字型或略Y字型也可以。In addition to the above-described embodiments, the cross-sectional shape of the aluminum or aluminum alloy member for bonding may be slightly T-shaped or slightly Y-shaped, although not shown.
在鋁或鋁合金基底構件2,是設置有:用來收容護套加熱器3與接合用鋁或鋁合金構件4的溝槽部5。鋁或鋁合金基底構件2,也可以用厚度較厚的構件,而為了實用性,用板材較佳。The aluminum or aluminum alloy base member 2 is provided with a groove portion 5 for accommodating the sheath heater 3 and the aluminum or aluminum alloy member 4 for joining. The aluminum or aluminum alloy base member 2 may also be a member having a relatively thick thickness, and for practical use, a plate material is preferred.
在將護套加熱器3收容於溝槽部5之後,收容接合用鋁或鋁合金構件4,將鋁或鋁合金基底構件2與接合用鋁或鋁合金構件4進行鍛壓壓接。After the sheath heater 3 is housed in the groove portion 5, the aluminum or aluminum alloy member 4 for joining is housed, and the aluminum or aluminum alloy base member 2 and the aluminum or aluminum alloy member 4 for joining are forged and pressure-bonded.
第2圖,是顯示接合用鋁或鋁合金構件4由一體的構件所構成的實施例。相對的,在第5圖是顯示,從鋁或鋁合金基底構件2的俯視方向來看,接合用鋁或鋁合金構件由複數構件所構成的一實施例。同樣地,如後述的第8圖(b)、(d)所示,從鋁或鋁合金基底構件2的剖面方向來看,接合用鋁或鋁合金構件4由複數構件構成也可以。於是,在必要的情況,接合用鋁或鋁合金構件4也可不是一體的,如第5圖或第8圖(b)、(d)所示分割為複數構件進行鍛壓壓接。Fig. 2 is a view showing an embodiment in which the aluminum or aluminum alloy member 4 for joining is composed of an integral member. On the other hand, Fig. 5 shows an embodiment in which the aluminum or aluminum alloy member for joining is composed of a plurality of members as seen from the plan view of the aluminum or aluminum alloy base member 2. Similarly, as shown in FIGS. 8(b) and 8(d) to be described later, the aluminum or aluminum alloy member 4 for joining may be composed of a plurality of members as viewed in the cross-sectional direction of the aluminum or aluminum alloy base member 2. Therefore, if necessary, the aluminum or aluminum alloy member 4 for joining may not be integrated, and may be divided into a plurality of members for forging and pressing as shown in Fig. 5 or Fig. 8 (b) and (d).
本發明的加熱板,其加熱板的形狀如第2圖所示的矩形也可以,如第6圖所示的圓形也可以,加熱板的佈置形狀,是相對於互相垂直相交的兩個中心軸的至少一個是對稱的,或是對於中心是點對稱的。也就是說,在第2圖對於中心軸6是對稱的,在第6圖(a)是對於中心軸51對稱。而在第6圖(b)中,是對於中心53點對稱較佳。本發明的接合用構件,其特徵在於,當在由長方形、略T字型、略Y字型、錐形等所構成的鋁或鋁合金基底構件定位接合用構件時,容易進行定位。當為長方形剖面時,只要將接合用鋁或鋁合金構件與加熱器的接觸面的端部稍微進行倒角,則能容易進行定位。In the heating plate of the present invention, the shape of the heating plate may be a rectangle as shown in Fig. 2, or a circular shape as shown in Fig. 6, and the arrangement shape of the heating plate is two centers perpendicular to each other. At least one of the axes is symmetrical or point symmetrical to the center. That is to say, in Fig. 2, it is symmetrical with respect to the central axis 6, and in Fig. 6(a), it is symmetrical with respect to the central axis 51. In Fig. 6(b), it is preferable that the center 53 is point symmetrical. In the joining member of the present invention, when the joining member is positioned in an aluminum or aluminum alloy base member composed of a rectangular shape, a slightly T-shaped shape, a slightly Y-shaped shape, a tapered shape or the like, positioning is facilitated. In the case of a rectangular cross section, the end portion of the contact surface of the aluminum or aluminum alloy member for bonding and the heater is slightly chamfered, whereby positioning can be easily performed.
雖然沒有特別圖示,以與第2圖、第6圖(a)、第6圖(b)的佈置方式同樣的佈置方式,而在鋁或鋁合金基底構件的溝槽中,可將兩條加熱器並列,或者在溝槽的深度方向重疊並列兩條以上。將複數條的加熱器收容在上述基底構件的至少一個以上的溝槽,構成了加熱板。Although not specifically illustrated, in the same arrangement as the arrangement of FIG. 2, FIG. 6(a), and FIG. 6(b), in the groove of the aluminum or aluminum alloy base member, two The heaters are juxtaposed or stacked in parallel in the depth direction of the grooves. A plurality of heaters are housed in at least one or more grooves of the base member to constitute a heating plate.
或者也可以將加熱器在複數的溝槽各配設一條來構成加熱板。配設護套加熱器的溝槽,只要設計成能將加熱板加熱到預定溫度,能得到大致均勻的溫度即可,溝構與加熱器的數量都是一條或複數條都可以,也可適當地選擇。Alternatively, the heater may be provided in a plurality of grooves to form a heating plate. The groove provided with the sheath heater can be designed to heat the heating plate to a predetermined temperature, and a substantially uniform temperature can be obtained. The number of the groove structure and the heater can be one or more, or appropriate Ground selection.
接著,針對接合用鋁或鋁合金構件4的形狀,詳細加以說明。Next, the shape of the aluminum or aluminum alloy member 4 for joining will be described in detail.
針對接合用鋁或鋁合金構件的剖面形狀為長方形的情況,根據第3圖來詳細說明。第3圖是顯示,在鋁或鋁合金基底構件所設置的溝槽,收容護套加熱器,將接合用鋁或鋁合金構件嵌合在上述溝槽部,藉由鍛壓壓接方式將上述接合用構件與上述基底構件接合的結果。如該圖,藉由鍛壓壓接方式,讓接合用鋁或鋁合金構件4與鋁或鋁合金基底構件2的溝槽部5與護套加熱器3相互緊貼在一起。The case where the cross-sectional shape of the aluminum or aluminum alloy member for joining is a rectangular shape is demonstrated in detail in FIG. Fig. 3 is a view showing a groove provided in an aluminum or aluminum alloy base member, a sheath heater is housed, and an aluminum or aluminum alloy member for joining is fitted to the groove portion, and the joint is joined by forging and pressing. The result of joining the member to the base member described above. As shown in the figure, the aluminum or aluminum alloy member 4 for bonding and the groove portion 5 of the aluminum or aluminum alloy base member 2 and the sheath heater 3 are brought into close contact with each other by a forging press method.
如第3圖(b)所示,其特徵為,接合用鋁或鋁合金構件4的剖面的寬度w1,是與設置在鋁或鋁合金基底構件2的溝槽部5的寬度w2相同大小。而在第3圖(b)所示的高度h與寬度w1的比值,如果考慮到接合用構件的縱彎曲變形等情形,則為1以上4以下的程度較佳。如果考慮到在進行鍛壓壓接時從基底構件溝槽部的側面所受到的阻力的話,則為1以上3以下更好。雖然即使是1以下也可進行接合,而考慮到鍛壓壓接部的加熱板使用中的熱變形或接合部強度的話,是1以上較佳,所以這裡的下限值為1以上。這裡,關於接合用構件的形狀,將接合用構件的前端附近的構件寬度加工成較溝槽寬度更窄的兩個長方形重疊的形狀、或稍微修邊處理過的接合用構件也包含在本發明的範圍。上述接合用構件的體積需要大於,從上述基底構件的溝槽部體積減去護套加熱器的體積的剩餘的有效體積。上述接合用構件的長度,是需要與用來完全埋住溝槽部的必要體積的必要長度相同或稍長的長度。As shown in Fig. 3(b), the width w1 of the cross section of the aluminum or aluminum alloy member 4 for joining is the same as the width w2 of the groove portion 5 provided in the aluminum or aluminum alloy base member 2. On the other hand, the ratio of the height h to the width w1 shown in Fig. 3(b) is preferably 1 or more and 4 or less in consideration of the longitudinal bending deformation of the joining member. It is more preferably 1 or more and 3 or less in consideration of the resistance received from the side surface of the groove portion of the base member at the time of forging pressure bonding. The joining can be performed even if it is 1 or less, and it is preferable that it is 1 or more in consideration of the thermal deformation in the use of the hot plate of the forging crimping part or the strength of the joint portion, and therefore the lower limit value here is 1 or more. Here, regarding the shape of the joining member, the member width in the vicinity of the tip end of the joining member is processed into two rectangular overlapping shapes which are narrower than the groove width, or the joining member which is slightly trimmed is also included in the present invention. The scope. The volume of the joining member needs to be larger than the remaining effective volume minus the volume of the sheath heater from the groove portion volume of the base member. The length of the joining member described above is required to be the same length as or longer than the necessary length of the necessary volume for completely burying the groove portion.
其理由,是藉由讓接合用鋁或與合金構件4的剖面的寬度w1,與設置在鋁或鋁合金基底構件2的溝槽部5的寬度w2相同或稍大,讓上述接合用構件4一邊撐開溝槽部一邊塑性變形,所以藉由上述接合用構件與上述基底構件之間的鍛壓壓接可以進行金屬接合。具體來說,當使用10ψ 的護套加熱器時,基底構件的溝槽寬度為11mm,上述接合用構件,其構件寬度為12mm左右。當上述接合用構件嵌合於上述基底構件時,由於從溝壁部受到壓縮應力而塑性變形,所以使用讓接合用構件稍微大於基底構件的溝槽寬度的構造也可以。相對於插入到基底構件溝槽部的接合用構件的溝槽寬度的尺寸的差異,是允許到可插入的最大範圍,而其允許範圍是考慮了較溝槽寬度更大述mm的程度。如第3圖(b)所示,高度h1與寬度w1的比值為1以上4以下較佳,是1以上3以下更好。The reason for this is that the bonding member 4 is made to have the width w1 of the cross section of the bonding aluminum or the alloy member 4 equal to or slightly larger than the width w2 of the groove portion 5 provided in the aluminum or aluminum alloy base member 2. Since the groove portion is plastically deformed, the metal joining can be performed by forging pressure bonding between the joining member and the base member. Specifically, when a sheath heater of 10 ψ is used, the groove width of the base member is 11 mm, and the member for the joint has a member width of about 12 mm. When the joining member is fitted to the base member, since the groove wall portion is subjected to compressive stress and plastically deformed, a structure in which the joining member is slightly larger than the groove width of the base member may be used. The difference in the size of the groove width with respect to the joining member inserted into the groove portion of the base member is the maximum range allowed to be insertable, and the allowable range is considered to be larger than the groove width by a larger mm. As shown in Fig. 3(b), the ratio of the height h1 to the width w1 is preferably 1 or more and 4 or less, more preferably 1 or more and 3 or less.
與從上述基底構件的溝槽部體積減去護套加熱器的體積的剩餘的有效體積相較,上述接合用構件的體積較大,並且,上述接合用構件的長度,是需要與用來完全埋住溝槽部的必要體積的必要長度相同或稍長的長度。其理由是,如果不是這樣的話,就不能,在使上述接合用構件充滿於溝槽的同時,與上述基底構件完全金屬接合。The volume of the joining member is larger than the remaining effective volume minus the volume of the sheath heater from the volume of the groove portion of the base member, and the length of the joining member is required and used completely The necessary length of the necessary volume for embedding the groove portion is the same or a slightly longer length. The reason is that if this is not the case, the joining member is not completely filled with the groove, and the base member is completely metal-bonded.
如第3圖所示,當接合用鋁或鋁合金構件4的剖面形狀為長方形時,與護套加熱器3直接接觸的面的形狀,是具有與鋁或鋁合金基底構件2的板面平行的平面,或是具有與護套加熱器3的外周同方向的曲率較佳。與護套加熱器3直接接觸的面部具有與護套加熱器3的外周同方向的曲率的接合用鋁或鋁合金構件4的例子在第10圖(a)顯示。藉由將與護套加熱器3直接接觸的面部31作成這種形狀,則可無間隙地進行鋁或鋁合金基底構件2及接合用鋁或鋁合金構件4與護套加熱器3的護套部的接合,可得到高氣密性與優異的熱傳導性。並且,藉由提高護套部的健全性,來保護內部的絕緣材料,可維持高電絕緣性。As shown in Fig. 3, when the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is rectangular, the shape of the surface in direct contact with the sheath heater 3 is parallel to the surface of the aluminum or aluminum alloy base member 2. The plane or the curvature in the same direction as the outer circumference of the sheath heater 3 is preferable. An example of the aluminum or aluminum alloy member 4 for bonding having a surface in direct contact with the sheath heater 3 in the same direction as the outer circumference of the sheath heater 3 is shown in Fig. 10(a). By forming the face 31 in direct contact with the sheath heater 3 in such a shape, the aluminum or aluminum alloy base member 2 and the sheath of the aluminum or aluminum alloy member 4 and the sheath heater 3 for bonding can be performed without a gap. The joint of the part provides high airtightness and excellent thermal conductivity. Further, by improving the soundness of the sheath portion, the internal insulating material is protected, and high electrical insulation can be maintained.
第10圖(b),是顯示,與接合用鋁或鋁合金構件4的護套加熱器相接的面部的剖面形狀具有與護套加熱器相同方向的曲率,接合用鋁或鋁合金構件4的構件寬度是大於護套加熱器寬度X的情況。藉由作大接合用構件的寬度,能確保材料流入到加熱器剖面的外周側部,能改善護套加熱器與接合用構件的緊貼性。Fig. 10(b) is a view showing that the cross-sectional shape of the face portion in contact with the sheathed heater of the aluminum or aluminum alloy member 4 for joining has the same direction as that of the sheath heater, and the aluminum or aluminum alloy member 4 for joining is used. The component width is greater than the sheath heater width X. By making the width of the large joining member, it is possible to ensure that the material flows into the outer peripheral side portion of the heater cross section, and the adhesion between the sheath heater and the joining member can be improved.
第10圖(c)是顯示接合用構件寬度平行於基底構件的板面的情況,而使該接合用構件寬度大於護套加熱器寬度X的方式,當接合用構件的最下部平行於基底構件的板面時,與相接於護套加熱器的面部具有與護套加熱器相同方向的曲率的情況相比,在材料流入到加熱器剖面的外周側部方面,是特別有效。這裡當將接合用構件寬度作大時,基底構件寬度當然也因應接合用構件寬度的擴大量而增大。Fig. 10(c) is a view showing a case where the width of the joining member is parallel to the plate surface of the base member, and the width of the joining member is larger than the sheath heater width X, when the lowermost portion of the joining member is parallel to the base member. In the case of the plate surface, it is particularly effective in that the material flows into the outer peripheral side portion of the heater cross section as compared with the case where the face portion of the sheath heater has the same direction as the sheath heater. Here, when the width of the joining member is made large, the width of the base member naturally increases in accordance with the amount of expansion of the width of the joining member.
接著,針對接合用鋁或鋁合金構件4的剖面形狀為長方形以外的構造,詳細地加以說明。Next, a structure in which the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is a rectangular shape will be described in detail.
第7圖,是顯示本發明的接合用鋁或鋁合金構件4的剖面形狀的一實施例。在第7圖,接合用鋁或鋁合金構件4的相對向的兩邊的至少其中一部分,是具有朝向埋入方向間隔變窄的錐狀。在第7圖(a),相對向的兩邊11、12相對於垂直線都具有角度α 的傾斜度而形成為錐狀。在第7圖(b)及(c),是顯示了剖面形狀有兩段傾斜度的錐狀構造的例子。在第7圖(b),邊部13、15是垂直的互相平行的形狀,邊部14、16也都相對於垂直線具有角度α的傾斜度形成為錐狀。並且,在第7圖(c),邊部17、19也都相對於垂直線具有角度α 的傾斜度,邊部18、20則相對於垂直線具有角度β 的傾斜度而形成為錐狀。Fig. 7 is a view showing an embodiment of the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining of the present invention. In Fig. 7, at least a part of the opposite sides of the aluminum or aluminum alloy member 4 for joining has a tapered shape which is narrowed in the direction of the embedding. In Fig. 7(a), the opposite sides 11 and 12 are formed in a tapered shape with an inclination of an angle α with respect to the vertical line. Fig. 7 (b) and (c) show an example of a tapered structure in which the cross-sectional shape has two inclinations. In Fig. 7(b), the side portions 13, 15 are vertically parallel to each other, and the side portions 14, 16 are also formed in a tapered shape with an inclination of an angle α with respect to the vertical line. Further, in Fig. 7(c), the side portions 17 and 19 also have an inclination of an angle α with respect to the vertical line, and the side portions 18 and 20 are formed in a tapered shape with an inclination of the angle β with respect to the vertical line.
雖然沒有圖示,而可以使接合用鋁或鋁合金構件4的與護套加熱器相接的面部的構件寬度大於護套加熱器寬度。藉由使接合用構件寬度加大,則可確保材料流入到加熱器剖面的外周側部,可改善護套加熱器與接合用構件的緊貼性。當將接合用構件寬度加大時,當然基底構件寬度也因應接合用構件寬度的擴大量增大。Although not shown, the member width of the face portion of the aluminum or aluminum alloy member 4 for joining that is in contact with the sheath heater can be made larger than the sheath heater width. By increasing the width of the joining member, it is possible to ensure that the material flows into the outer peripheral side portion of the heater cross section, and the adhesion between the sheath heater and the joining member can be improved. When the width of the joining member is increased, the width of the base member is also increased in accordance with the amount of expansion of the width of the joining member.
在第7圖(b)、第7圖(c)的情況,使與護套加熱器相接的面部的構件寬度大於護套加熱器寬度的方式,對於確保材料流入到加熱器剖面的外周側部,及護套加熱器與接合用構件的緊貼性方面很有效。本發明在上述情形以外的情況,使接合用鋁或鋁合金構件4的與護套加熱器相接的面部的構件寬度大於護套加熱器寬度的方式,對於讓材料流入到加熱器剖面的外周側部方面很有效果。In the case of Figs. 7(b) and 7(c), the member width of the face portion that is in contact with the sheath heater is made larger than the sheath heater width, and the material is allowed to flow into the outer peripheral side of the heater cross section. It is effective in the adhesion of the sheath heater and the joining member. In the case where the present invention is other than the above, the member width of the face portion of the joining aluminum or aluminum alloy member 4 that is in contact with the sheath heater is larger than the sheath heater width, and the material is allowed to flow into the outer periphery of the heater section. The side aspect is very effective.
第7圖所示的接合用鋁或鋁合金構件的錐部的錐度角α 及β ,雖然在0°以上45°以下較佳,而錐度角在1°以上30°以下更好。其理由是,錐度部角度變大的話,在鍛壓壓接時從基底構件溝壁部讓錐度構件所受到的靜水壓應力會減少,接合性會降低,而無法得到良好的金屬接合狀態,並且會讓接合用鋁或鋁合金構件的尺寸變大到不需要的程度。這裡的局部具有錐狀形狀的接合用構件,是以錐部上都的尺寸W1與錐部下部的尺寸W2與錐度角度來加以定義。構件全體的高度是表示為h1。也可以將該錐部不作成直線,而作成和緩的曲線。在這種情況,雖然不能決定錐部的角度,而可以適用以直線來連結錐部開始點與結束點的簡略的角度。當接合用構件是以曲線來連結錐部的情況,也包含本發明的範圍。The taper angles α and β of the tapered portion of the aluminum or aluminum alloy member for joining shown in Fig. 7 are preferably 0° or more and 45° or less, and more preferably 1° or more and 30° or less. The reason is that when the angle of the taper portion is increased, the hydrostatic stress received by the taper member from the base member groove wall portion during forging and pressing is reduced, and the bondability is lowered, so that a good metal joint state cannot be obtained, and The size of the aluminum or aluminum alloy member for joining can be increased to an undesired extent. Here, the joining member having a partial taper shape is defined by the dimension W1 of the tapered portion and the dimension W2 and the taper angle of the lower portion of the tapered portion. The height of the entire member is expressed as h1. It is also possible to form the gentle curve without making the tapered portion straight. In this case, although the angle of the taper portion cannot be determined, a straight angle at which the start point and the end point of the taper portion are connected by a straight line can be applied. The scope of the present invention is also included when the joining member is a curved portion that joins the tapered portion.
藉由將本發明的接合用鋁或鋁合金構件4的剖面形狀作成如第7圖所示的實施例的錐狀的形狀,則可將接合用鋁或鋁合金構件4確實地插入到護套加熱器3而進行鍛壓壓接。By forming the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining of the present invention into a tapered shape as in the embodiment shown in Fig. 7, the aluminum or aluminum alloy member 4 for joining can be surely inserted into the sheath. The heater 3 is forged and pressure bonded.
當本發明的接合用鋁或鋁合金構件4的剖面形狀為如第7圖所示的錐狀形狀時,為了確實地在鋁或鋁合金基底構件2進行鍛壓壓接,接合用鋁或鋁合金構件4的剖面積,是大於從鋁或鋁合金基底構件2所形成的溝槽部5的剖面積減去護套加熱器3的剖面積的有效剖面積較佳。其理由是,如果不這樣做的話,無法使上述接合用構件充分地充滿於溝槽而充分地金屬接合。護套加熱器與接合用構件之間會形成間隙,而讓加熱器的熱傳導性降低。When the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining of the present invention is a tapered shape as shown in Fig. 7, in order to reliably press-bond the aluminum or aluminum alloy base member 2, aluminum or aluminum alloy for joining is used. The sectional area of the member 4 is preferably larger than the effective sectional area of the sectional area of the groove portion 5 formed from the aluminum or aluminum alloy base member 2 minus the sectional area of the sheathed heater 3. The reason is that if this is not done, the joining member cannot be sufficiently filled in the groove to be sufficiently metal-bonded. A gap is formed between the sheath heater and the joining member, and the thermal conductivity of the heater is lowered.
在第7圖,接合用鋁或鋁合金構件4的高度h1與錐部下部寬度W3或構件最下部寬度W2的關係,是藉由調整錐度角度,則可以提昇縱彎曲阻力,所以即使沒有設限也可以,可是考慮到加熱板的全體厚度與加熱器直徑的關係或錐度角度接近0°時的縱彎曲阻力的話,最好是1以上5以下,並且,考慮到鍛壓壓接時從錐部側所受到的阻力的話,最好是1以上3以下。雖然在1以下尚可進行接合,而如果考慮到鍛壓壓接部的加熱板使用中的熱變形或接合部強度的話,是1以上較佳,所以在這裡下限值為1以上。例如,當護套加熱器的直徑為10ψ 時,第7圖(a)的上部寬度W1、下部寬度W2與高度h,作成15mm、10mm、30mm即可。而藉由使用錐狀形狀的接合用構件,導引到錐部且進行嵌合,所以讓護套加熱器與接合用構件4的緊貼性提昇,讓材料充分地充滿於設置在基底構件2的溝槽,而可得到堅固的金屬接合狀態。In Fig. 7, the relationship between the height h1 of the aluminum or aluminum alloy member 4 for joining and the width W3 of the lower portion of the taper portion or the width W2 of the lowermost portion of the member is such that the longitudinal bending resistance can be increased by adjusting the taper angle, so even if there is no limit However, in consideration of the relationship between the total thickness of the heating plate and the diameter of the heater or the longitudinal bending resistance when the taper angle is close to 0, it is preferably 1 or more and 5 or less, and considering the taper side from the forging pressure bonding. The resistance to be received is preferably 1 or more and 3 or less. Although bonding is possible at 1 or less, it is preferable to use 1 or more in consideration of thermal deformation or joint strength during use of the hot plate of the forging crimping portion, and therefore the lower limit is 1 or more. For example, when the sheath heater has a diameter of 10 ,, the upper width W1, the lower width W2, and the height h of Fig. 7(a) may be 15 mm, 10 mm, or 30 mm. By using the taper-shaped joining member to guide the taper portion and fitting it, the adhesion between the sheath heater and the joining member 4 is improved, and the material is sufficiently filled in the base member 2 The groove can be obtained in a solid metal joint state.
接著,針對接合用鋁或鋁合金構件4的剖面形狀為略T字型或Y字型的情況加以說明。Next, a case where the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is slightly T-shaped or Y-shaped will be described.
在第8圖是顯示剖面形狀為略T字型的接合用鋁或鋁合金構件4的一實施例。在第8圖(a),是使用T字型的接合用鋁或鋁合金構件4的縱棒部分31與橫棒部分32,與鋁或鋁合金基底構件2接合。也就是說,除了按壓護套加熱器3的T字型的縱棒部分31之外,T字型橫棒部分32也與鋁或鋁合金基底構件2接合。在這種情況,在鋁或鋁合金基底構件2,在與T字型的接合用鋁或鋁合金構件4相對向的位置,設置有嵌合用凹部。在第8圖(b),是在位置33來分割用來按壓加熱器的T字型的縱棒部分31與橫棒部分32而成為不同個體,是分割來使其接合的構造。在第8圖(b),雖然是將縱棒部分31全體分割作為不同個體,而也可以僅將縱棒部分31的其中一部分作為不同個體。而不論縱棒部分是一體的或是不同個體,縱棒部分31的寬度與長度的比率,即使是1以下仍可進行接合,而考慮到鍛壓壓接部的加熱板使用中的熱變形或接合部強度的話,是1以上較佳,而考慮到凸部的縱彎曲強度的話,則是4以下較佳。而考慮到鍛接時的接合用構件從基底構件側面所受到的阻力的話,是1以上3以下特別好。於是縱棒部分的尺寸,當護套加熱器的直徑為10ψ 時,如第8圖(b)的寬度w與高度h,作成10mm、30mm也可以。Fig. 8 is a view showing an embodiment of a joint aluminum or aluminum alloy member 4 having a substantially T-shaped cross-sectional shape. In Fig. 8(a), the vertical rod portion 31 and the horizontal rod portion 32 of the T-shaped aluminum or aluminum alloy member 4 for joining are joined to the aluminum or aluminum alloy base member 2. That is, in addition to pressing the T-shaped vertical bar portion 31 of the sheath heater 3, the T-shaped horizontal bar portion 32 is also joined to the aluminum or aluminum alloy base member 2. In this case, in the aluminum or aluminum alloy base member 2, a fitting recessed portion is provided at a position facing the T-shaped aluminum or aluminum alloy member 4 for joining. In Fig. 8(b), the T-shaped vertical bar portion 31 and the horizontal bar portion 32 for pressing the heater are divided into different individuals at the position 33, and are divided and joined. In Fig. 8(b), although the entire vertical rod portion 31 is divided into different individuals, only a part of the vertical rod portion 31 may be different. Regardless of whether the longitudinal rod portion is integral or different, the ratio of the width to the length of the longitudinal rod portion 31 can be joined even if it is 1 or less, taking into account the thermal deformation or bonding in use of the heating plate of the forging crimping portion. The strength of the portion is preferably 1 or more, and in consideration of the longitudinal bending strength of the convex portion, it is preferably 4 or less. In consideration of the resistance received by the joining member at the time of forging from the side surface of the base member, it is particularly preferably 1 or more and 3 or less. Therefore, when the diameter of the longitudinal rod portion is 10 ψ , the width w and the height h of Fig. 8(b) may be 10 mm or 30 mm.
在第8圖(c),接合用鋁或鋁合金構件4,除了第8圖(a)的T字型的縱棒部分31與橫棒部分32之外,在其正下方的不存在有護套加熱器的位置也設置有縱棒部分34。在這種情況,在鋁或鋁合金基底構件2,在用來與接合用鋁或鋁合金構件4嵌合的相對向位置是設置有凹部或凸部。第8圖(c)的34是朝下方延伸的凸部,而也可以將34作為凹部,而另一方面,在鋁或鋁合金基底構件2的相對向位置設置凸部也可以。作為凸部所設置的縱棒部分34的體積,最好是大於用來與其嵌合的在鋁或鋁合金基底構件2所設置的凹部。嵌合用凹部的寬度與接合用構件凸部的寬度,凹部寬度是大於凸部寬度,凸部的寬度與凸部長度的比率,與第8圖(b)的情況同樣地,1以上4以下較佳,特別是1以上3以下更好。藉由作出這種突起部,則可以使接合用鋁或鋁合金構件4與鋁或鋁合金基底構件2的接合更加堅固。In Fig. 8(c), the aluminum or aluminum alloy member 4 for joining is not protected except for the vertical rod portion 31 and the horizontal rod portion 32 of the T-shape of Fig. 8(a). The position of the heater is also provided with a longitudinal rod portion 34. In this case, in the aluminum or aluminum alloy base member 2, a concave portion or a convex portion is provided at a position to be fitted to the aluminum or aluminum alloy member 4 for joining. 34 of Fig. 8(c) is a convex portion extending downward, and 34 may be a concave portion, and on the other hand, a convex portion may be provided at a position facing the aluminum or aluminum alloy base member 2. The volume of the vertical rod portion 34 provided as the convex portion is preferably larger than the concave portion provided in the aluminum or aluminum alloy base member 2 for fitting therewith. The width of the fitting concave portion and the width of the joining member convex portion are larger than the convex portion width, and the ratio of the width of the convex portion to the length of the convex portion is similar to that of the case of Fig. 8(b), and is 1 or more and 4 or less. Good, especially 1 or more and 3 or less. By making such a projection, the joining of the aluminum or aluminum alloy member 4 for joining to the aluminum or aluminum alloy base member 2 can be made stronger.
第8圖(d),雖然是與第8圖(c)相同的剖面形狀,而與第8圖(b)的情況同樣地,用來按壓護套加熱器3的T字型的縱棒部分31與其他部分是在位置35被分割作成不同個體,是分割來使其接合的構造。在這種情況,縱棒部分31只有一部分作成不同個體也可以。而在第8圖(d)雖然縱棒部分34的位置與第8圖(c)不同,而也可以因應需要來調整縱棒部分34的位置。而如第8圖(e),接合用鋁或鋁合金構件的橫棒部分的長度、與在鋁或鋁合金基底構件所形成的溝槽的橫棒部分所嵌合的溝槽部的尺寸,是上述接合用構件的橫棒部分的寬度A1大於溝槽部的寬度A2,或橫棒部分端部上面部寬度A1a大於橫棒部分端部下面部寬度A1b的在厚度方向具有錐度的形狀,最好是大於與其嵌合的基底構件的溝槽寬度。而T字型橫棒部的寬度A與高度B的比率雖然不需要設置特別的限制,而如果寬度長到不需要的程度,就會浪費材料,所以最大也只要是加熱器的收容部寬度的5~6倍程度就夠了。厚度則只要具有充分的強度來固定接合用構件就可以了,因此,從5mm~20mm的程度是必須的。如果將護套加熱器直徑作成10ψ 的話,橫棒部寬度A即為50~60mm,高度B為5~20mm。當然,寬度也可作成30~40mm。Fig. 8(d) shows the same cross-sectional shape as that of Fig. 8(c), and similarly to the case of Fig. 8(b), the T-shaped vertical rod portion for pressing the sheath heater 3 31 and other parts are divided into different individuals at position 35, and are structures that are divided and joined. In this case, only a part of the vertical rod portion 31 may be made into different individuals. On the other hand, in Fig. 8(d), although the position of the vertical rod portion 34 is different from that of Fig. 8(c), the position of the vertical rod portion 34 can be adjusted as needed. Further, as shown in Fig. 8(e), the length of the horizontal bar portion of the aluminum or aluminum alloy member for joining, and the size of the groove portion fitted to the horizontal bar portion of the groove formed in the aluminum or aluminum alloy base member, The width A1 of the horizontal bar portion of the bonding member is larger than the width A2 of the groove portion, or the surface width A1a at the end portion of the horizontal bar portion is larger than the width A1b of the lower portion of the end portion of the horizontal bar portion, and has a tapered shape in the thickness direction. It is better than the groove width of the base member to which it is fitted. The ratio of the width A to the height B of the T-shaped horizontal bar portion does not need to be particularly limited, but if the width is not required to be excessive, the material is wasted, so the maximum is only the width of the housing portion of the heater. 5 to 6 times is enough. The thickness is sufficient as long as it has sufficient strength to fix the joining member, and therefore it is necessary to have a thickness of 5 mm to 20 mm. If the diameter of the sheath heater is 10 ψ , the width A of the horizontal bar is 50 to 60 mm, and the height B is 5 to 20 mm. Of course, the width can also be made 30~40mm.
接著,在第9圖顯示接合用鋁或鋁合金構件4的剖面形狀為Y字型的一實施例。相對於在第8圖所示的T字型其橫棒部分32的形狀為長方形,而在第9圖所示的Y字型其橫棒的下邊36、37是成為朝向中心緩緩下降的斜度。T字型或Y字型的橫棒部分的剖面積與縱棒部的剖面積,當獨立來看形成在基底構件的溝槽的與其對應的部分的情況,需要大於溝槽橫棒部分的剖面積、與插入縱棒部分的除了加熱器部的溝槽橫剖面積。其理由是,為了要充分地完成T字型或Y字型的接合用構件與基底構件的接合,需要將橫棒部、縱棒部一起充分的與基底構件金屬接合。Next, an embodiment in which the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is Y-shaped is shown in Fig. 9. The shape of the horizontal bar portion 32 is a rectangle with respect to the T-shape shown in Fig. 8, and the lower sides 36 and 37 of the Y-shaped horizontal bar shown in Fig. 9 are inclined toward the center. degree. The cross-sectional area of the horizontal rod portion of the T-shaped or Y-shaped portion and the sectional area of the vertical rod portion are required to be larger than the corresponding portion of the groove of the base member when viewed independently, and a section larger than the horizontal rod portion of the groove is required. The area, and the cross-sectional area of the groove except the heater portion inserted into the vertical rod portion. The reason for this is that in order to sufficiently complete the joining of the T-shaped or Y-shaped joining member and the base member, it is necessary to sufficiently bond the horizontal bar portion and the vertical rod portion to the base member metal.
當本發明的接合用鋁或鋁合金構件4的剖面面積為略T字型或Y字型時,接合用鋁或鋁合金構件4的剖面積,大於從鋁或鋁合金基底構件2所形成的溝槽部5的剖面積減去護套加熱器3的剖面積的有效剖面積較佳。When the cross-sectional area of the aluminum or aluminum alloy member 4 for joining of the present invention is a substantially T-shaped or Y-shaped, the cross-sectional area of the aluminum or aluminum alloy member 4 for joining is larger than that formed from the aluminum or aluminum alloy base member 2. The effective sectional area of the cross-sectional area of the groove portion 5 minus the sectional area of the sheath heater 3 is preferable.
藉由讓接合用鋁或鋁合金構件4的寬度至少一部分,較鋁或鋁合金基底構件2的溝槽部5的寬度更窄,當使接合用鋁或鋁合金構件4嵌合於鋁或鋁合金基底構件2的溝槽部5時,在溝槽部5的側面的至少一部分具有間隙較佳。藉此,可以使接合用鋁或鋁合金構件4更深入溝槽,而可以使護套加熱器與接合用構件緊貼在一起。By making at least a portion of the width of the aluminum or aluminum alloy member 4 for joining smaller than the width of the groove portion 5 of the aluminum or aluminum alloy base member 2, when the aluminum or aluminum alloy member 4 for joining is fitted to aluminum or aluminum In the case of the groove portion 5 of the alloy base member 2, it is preferable that at least a part of the side surface of the groove portion 5 has a gap. Thereby, the aluminum or aluminum alloy member 4 for joining can be further penetrated into the groove, and the sheath heater and the joining member can be brought into close contact with each other.
即使在本發明的鋁或鋁合金構件4的剖面形狀為略T字型或Y字型的情況,其縱棒部分31、34的高度與寬度的比率為1以上4以下較佳。將縱部部分的寬度以及與其對應的基底構件的溝槽寬度比較起來的話,基底構件的溝槽寬度較大,並且縱棒的剖面積,需要大於從收容縱棒部分的基底構件的溝槽部剖面積減去加熱器的剖面積的部分的剖面積。藉此,則在基底構件的作有溝槽的空間內,將接合用構件進行鍛壓壓縮,則可實現基底構件的與縱棒部分相接的溝槽部以及接合用構件的縱棒部的金屬接合。In the case where the cross-sectional shape of the aluminum or aluminum alloy member 4 of the present invention is a slightly T-shaped or Y-shaped, the ratio of the height to the width of the vertical rod portions 31 and 34 is preferably 1 or more and 4 or less. Comparing the width of the vertical portion with the groove width of the base member corresponding thereto, the groove width of the base member is large, and the sectional area of the vertical rod needs to be larger than the groove portion of the base member from the portion of the longitudinal rod. The sectional area of the portion of the cross-sectional area minus the sectional area of the heater. As a result, when the joining member is forged and compressed in the grooved space of the base member, the groove portion of the base member that is in contact with the vertical rod portion and the metal of the vertical rod portion of the joining member can be realized. Engage.
在上述說明的與具有各種形狀的接合用鋁或鋁合金構件4的護套加熱器3直接接觸的面部的形狀,是具有與鋁或鋁合金基底構件2的板面平行的平面,或是具有與護套加熱器3的外周同方向的曲率的曲面較佳。與護套加熱器36直接接觸的面具有與護套加熱器3的外周同方向的曲率的接合用鋁或鋁合金構件4的例子,是顯示在第11圖。藉由將與護套加熱器3直接接觸的面部38作成該形狀,則能無間隙地進行,鋁或鋁合金基底構件2及接合用鋁或鋁合金構件4與護套加熱器3的護套部的接合,可得到高氣密性與優異的熱傳導性。並且,藉由提高護套部的健全性,可保護內部的絕緣材料,能維持高電絕緣性。The shape of the face portion directly in contact with the sheath heater 3 having the aluminum or aluminum alloy member 4 for bonding of various shapes described above is a plane having a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2, or A curved surface having a curvature in the same direction as the outer circumference of the sheath heater 3 is preferable. An example of the aluminum or aluminum alloy member 4 for bonding which has a curvature in the same direction as the outer circumference of the sheath heater 3 on the surface directly in contact with the sheath heater 36 is shown in Fig. 11. By forming the shape of the face portion 38 in direct contact with the sheath heater 3, the aluminum or aluminum alloy base member 2 and the aluminum or aluminum alloy member 4 for bonding and the jacket of the sheath heater 3 can be carried out without a gap. The joint of the part provides high airtightness and excellent thermal conductivity. Further, by improving the soundness of the sheath portion, the internal insulating material can be protected, and high electrical insulation can be maintained.
在本發明的加熱板的鋁或鋁合金基底構件及接合用鋁或鋁合金構件,是使用:JIS1050、1100、3003、3004、5005、5052、6063、6061、7003、7N01的其中一種的合金。The aluminum or aluminum alloy base member of the heating plate of the present invention and the aluminum or aluminum alloy member for joining are alloys using one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01.
作為本發明的加熱板的其他實施例,是護套加熱器3的剖面形狀為圓形的構造、或角落部由預定的曲率的曲線所構成的略長方形(也包含略正方形)所構成的管狀的構造、或將細條部編成管狀形狀的構造。Another embodiment of the heating plate of the present invention is a structure in which the sheath heater 3 has a circular cross-sectional shape, or a tubular shape in which a corner portion is formed by a predetermined curvature curve (also including a square shape). The structure or the structure in which the thin strips are braided into a tubular shape.
接著,針對加熱板的製造方法來加以說明。Next, a method of manufacturing the heating plate will be described.
本發明的加熱板1,是將用來插入內部零件也就是護套加熱器3與接合用鋁或鋁合金構件4的溝槽部5,預先配設在鋁或鋁合金基底構件2,在溝槽部5收容護套加熱器3之後,從其上方插入埋於溝槽部5的空間的接合用鋁或鋁合金構件4。並且藉由鍛壓壓接方式,藉由將接合用鋁或鋁合金構件4與鋁或鋁合金基底構件2進行金屬接合,來製造加熱板。這裡的鋁或鋁合金基底構件,是鋁合金板材也可以。The heating plate 1 of the present invention is a groove portion 5 for inserting an inner part, that is, a sheath heater 3 and a joining aluminum or aluminum alloy member 4, and is disposed in advance in the aluminum or aluminum alloy base member 2, in the groove. After the sheath portion 5 accommodates the sheath heater 3, the aluminum or aluminum alloy member 4 for bonding embedded in the space of the groove portion 5 is inserted from above. Further, a hot plate is produced by metal joining the aluminum or aluminum alloy member 4 for joining to the aluminum or aluminum alloy base member 2 by a forging press method. The aluminum or aluminum alloy base member here may be an aluminum alloy plate.
在本發明的加熱板的製造方法,當接合用鋁或鋁合金構件4的剖面形狀為長方形時,接合用鋁或鋁合金構件4的剖面的寬度w1,與設置在鋁或鋁合金基底構件2的溝槽部5的寬度w2相同或較大較佳。藉此,則可以無間隙地將鋁或鋁合金基底構件2的溝槽部5的側面與接合用鋁或鋁合金構件4的側面之間進行鍛壓壓接。In the method for producing a hot plate according to the present invention, when the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is rectangular, the width w1 of the cross section of the aluminum or aluminum alloy member 4 for joining is set to be the aluminum or aluminum alloy base member 2. The width w2 of the groove portion 5 is the same or larger. Thereby, the side surface of the groove portion 5 of the aluminum or aluminum alloy base member 2 and the side surface of the aluminum or aluminum alloy member 4 for joining can be forged and pressure-bonded without a gap.
在本發明的加熱板的製造方法,在第3圖所示的接合用鋁或鋁合金構件4的高度h1,是大於從鋁或鋁合金基底構件2的溝槽部5的深度h2減去護套加熱器的寬度的大小的值較佳,可藉由鍛壓壓接,進一步提高接合用鋁或鋁合金構件4的底面與護套加熱器之間的氣密性。In the method for producing a hot plate according to the present invention, the height h1 of the aluminum or aluminum alloy member 4 for joining shown in Fig. 3 is larger than the depth h2 from the groove portion 5 of the aluminum or aluminum alloy base member 2. The value of the width of the heater is preferably a value, and the airtightness between the bottom surface of the aluminum or aluminum alloy member 4 for bonding and the sheath heater can be further improved by forging and pressing.
在本發明的加熱板1的製造方法,本發明的接合用鋁或鋁合金構件4,高度h與寬度w1的比率,是1以上4以下,特別是1以上3以下較佳。In the method for producing the heating plate 1 of the present invention, the ratio of the height h to the width w1 of the aluminum or aluminum alloy member 4 for joining of the present invention is preferably 1 or more and 4 or less, particularly preferably 1 or more and 3 or less.
在本發明的加熱板1的製造方法,接合用鋁或鋁合金構件4的與護套加熱器3接觸的面部,是具有與鋁或鋁合金基底構件2的板面平行的平面、或具有與護套加熱器3的外周同方向的曲率的曲面。In the method of manufacturing the heating plate 1 of the present invention, the face of the aluminum or aluminum alloy member 4 for bonding which is in contact with the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2, or has a A curved surface of the curvature of the outer circumference of the sheath heater 3 in the same direction.
接著,針對接合用鋁或鋁合金構件4的剖面形狀為長方形以外的情況的本發明的加熱板的製造方法來加以說明。當用來埋入於溝槽部5的接合用鋁或鋁合金構件4,如第5圖所示是在鋁或鋁合金基底構件5的平面方向分割為複數的構件的情況,將所分割的構件同時進行鍛壓,或者也可以預定的順序依序進行鍛壓。當將所分割的上述構件依序進行鍛壓時,一次進行鍛壓的部位的範圍會減少,所以及使用較小的沖壓機,也可進行鍛壓。而如第8圖(b)、(d)所示,當在剖面方向分割為複數的構件時,也可以依序鍛壓壓接上述複數構件,也可以組合進行鍛壓壓接。Next, a method of manufacturing the hot plate of the present invention in the case where the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is a rectangular shape will be described. The aluminum or aluminum alloy member 4 for joining used for embedding in the groove portion 5 is divided into a plurality of members in the planar direction of the aluminum or aluminum alloy base member 5 as shown in Fig. 5, and is divided. The members are forged at the same time, or they may be forged in sequence in a predetermined order. When the divided members are sequentially forged, the range of the portion to be forged at one time is reduced, and the forging can be performed using a small press. Further, as shown in FIGS. 8(b) and 8(d), when the member is divided into a plurality of members in the cross-sectional direction, the plurality of members may be forged and pressed in sequence, or may be combined for forging and pressing.
在該情況,複數的接合用鋁或鋁合金構件,作為加熱器配設方向的長度,構件上面部是較構件下面部更長,接合用構件的端面是作成錐狀,且藉由將接合用構件上面部的長度作得較基底構件的加熱器埋設用溝槽長度更長,則複數的構件相互會給予壓力而產生塑性變形,來進行鍛壓壓接,所以可確保複數構件的交界處在進行鍛壓壓接時有充分的接合性。接合用構件與基底構件的接合,僅藉由鍛壓壓接來進行,所以可以簡化製程,而也可以對複數的接合用構件進行電子束焊接或硬焊處理來進行接合,也可以使用讓複數的接合用構件的長度短於基底構件的溝槽長度的構造。In this case, a plurality of aluminum or aluminum alloy members for bonding are used as the length in the direction in which the heater is disposed, the upper surface portion of the member is longer than the lower surface portion of the member, and the end surface of the joining member is tapered, and the joint is used for joining. The length of the upper surface of the member is made longer than the length of the groove for the heater for embedding the base member, and the plurality of members are mutually deformed to be plastically deformed to perform forging pressing, so that the boundary of the plurality of members can be ensured. There is sufficient bonding when forging and crimping. Since the joining of the joining member and the base member is performed only by forging and pressing, the process can be simplified, and the plurality of joining members can be joined by electron beam welding or brazing, or a plurality of The configuration in which the length of the joining member is shorter than the groove length of the base member.
在本發明的加熱板的製造方法,接合用鋁或鋁合金構件4,是具有角度超過0°而在45°以下的錐部,將上述錐部插入到在鋁或鋁合金基底構件2所設置的溝槽部5,藉由鍛壓壓接來進行金屬接合。In the method for producing a hot plate according to the present invention, the aluminum or aluminum alloy member 4 for joining is a tapered portion having an angle of more than 0° and not more than 45°, and the tapered portion is inserted into the aluminum or aluminum alloy base member 2. The groove portion 5 is metal bonded by forging and pressure bonding.
在本發明的加熱板1的其他的製造方法,接合用鋁或鋁合金構件4的剖面具有略T字型或略Y字型的形狀,在其中一方的鋁或鋁合金基底構件2的相對向的位置,是設置有凹部或凸部,用來與略T字型或略Y字型的接合用鋁或鋁合金構件4嵌合。藉由將略T字型或略Y字型的接合用鋁或鋁合金構件4嵌合在鋁或鋁合金基底構件2的上述凹部或凸部,來進行鍛壓壓接來進行金屬接合。這裡的接合用鋁或鋁合金構件4,在用來按壓護套加熱器3的縱棒部分31以外的位置也可以設置凸部或凹部。In another manufacturing method of the heating plate 1 of the present invention, the cross section of the aluminum or aluminum alloy member 4 for joining has a slightly T-shaped or slightly Y-shaped shape, and the relative orientation of one of the aluminum or aluminum alloy base members 2 The position is provided with a concave portion or a convex portion for fitting with a slightly T-shaped or slightly Y-shaped aluminum or aluminum alloy member 4 for bonding. The aluminum or aluminum alloy member 4 for bonding, which is slightly T-shaped or slightly Y-shaped, is fitted to the concave portion or the convex portion of the aluminum or aluminum alloy base member 2, and is forged and pressure-bonded to perform metal joining. Here, the aluminum or aluminum alloy member 4 for joining may be provided with a convex portion or a concave portion at a position other than the vertical rod portion 31 for pressing the sheath heater 3.
在本發明的加熱板1的製造方法,接合用鋁或鋁合金構件4的與護套加熱器3接觸的面部,是具有與鋁或鋁合金基底構件2的板面平行的平面,或者是具有與護套加熱器3的外周相同方向的曲率的曲面。In the method of manufacturing the heating plate 1 of the present invention, the face of the aluminum or aluminum alloy member 4 for bonding that is in contact with the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2, or has A curved surface having the same curvature as the outer circumference of the sheath heater 3.
在本發明的加熱板1的製造方法,接合用鋁或鋁合金構件4的實際剖面積,是大於從鋁或鋁合金基底構件2的溝槽部5的剖面積減去護套加熱器3的剖面積的有效剖面積,藉由鍛壓壓接而可更加提高鋁或鋁合金基底構件2與護套加熱器3的緊貼性。而當使接合用鋁或鋁合金構件4與鋁或鋁合金基底構件2嵌合時,在溝槽部5的側面與接合用鋁或鋁合金構件4的側面的接觸面的至少一部分具有間隙較佳。藉此,接合用鋁或鋁合金構件4,會藉由鍛壓壓接,確實地插入到與護套加熱器3相接,可以更提高鋁或鋁合金基底構件2與護套加熱器3的緊貼性。In the method of manufacturing the heating plate 1 of the present invention, the actual sectional area of the aluminum or aluminum alloy member 4 for joining is larger than the sectional area of the groove portion 5 of the aluminum or aluminum alloy base member 2 minus the sheath heater 3. The effective sectional area of the sectional area can further improve the adhesion of the aluminum or aluminum alloy base member 2 to the sheathed heater 3 by forging and crimping. When the aluminum or aluminum alloy member 4 for joining is fitted to the aluminum or aluminum alloy base member 2, at least a part of the contact surface between the side surface of the groove portion 5 and the side surface of the aluminum or aluminum alloy member 4 for joining has a gap. good. Thereby, the aluminum or aluminum alloy member 4 for joining is reliably inserted into the sheath heater 3 by forging and crimping, whereby the tightness of the aluminum or aluminum alloy base member 2 and the sheath heater 3 can be further improved. Sticky.
在本發明的加熱板的製造方法,作為前處理需要將表面清洗。例如鋁或鋁合金構件的情況,是適當地組合(1)以硝酸進行表面去脂,(2)用水清洗,(3)苛性處理(碱性溶液所進行的蝕刻),(4)用水清洗,(5)以硝酸清洗,(6)用水清洗,(7)用熱水清洗等的製程,來將表面清洗。其理由,是藉由清淨鍛壓接前的表面,讓接合性提昇。In the method for producing a hot plate of the present invention, it is necessary to clean the surface as a pretreatment. For example, in the case of an aluminum or aluminum alloy member, it is appropriate to combine (1) surface degreasing with nitric acid, (2) washing with water, (3) caustic treatment (etching with an alkaline solution), and (4) washing with water, (5) The surface is cleaned by washing with nitric acid, (6) washing with water, and (7) washing with hot water. The reason for this is that the bonding property is improved by cleaning the surface before the forging.
作為將鋁或鋁合金基底構件2與接合用鋁或鋁合金構件4進行鍛壓壓接後的加工,可進行切削、研磨、氧化鋁膜處理及噴砂處理。在鍛接後,進行切削,較基底構件溝槽部的有效面積更多的部分,藉由在鍛壓壓接時將接合用構件壓入,而所導致的鍛壓壓接後的加熱板的按壓面的壓接部附近的變形情形,可藉由切削、研磨加工將其去除。The aluminum or aluminum alloy base member 2 and the aluminum or aluminum alloy member 4 for joining are subjected to forging and pressure bonding, and can be subjected to cutting, polishing, alumina film treatment, and sand blasting. After forging, cutting is performed, and a portion of the base member having a larger effective area is pressed by the joining member at the time of forging and pressing, and the pressed surface of the hot plate after forging and pressing is caused. The deformation in the vicinity of the crimping portion can be removed by cutting and grinding.
將鋁或鋁合金基底構件2與接合用鋁或鋁合金構件4進行壓接時的鍛壓溫度,雖然在250℃~500℃的溫度範圍進行金屬接合,而300℃~450℃的範圍較佳,並且350℃~420℃較適當。鍛壓壓接的優點,與熔接法相比,在接合用構件為一體時,能夠在非常短的時間接合。The forging temperature at the time of pressure-bonding the aluminum or aluminum alloy base member 2 to the aluminum or aluminum alloy member 4 for joining is preferably metal-bonded in a temperature range of 250 ° C to 500 ° C, and a range of 300 ° C to 450 ° C is preferable. And 350 ° C ~ 420 ° C is more appropriate. The advantage of forging pressure bonding is that it can be joined in a very short time when the joining members are integrated as compared with the welding method.
鍛壓後自然冷卻成為常溫後,會由於鋁或鋁合金基底構件與不鏽鋼的護套加熱器的收縮差異而產生應力,在常溫下,鋁或鋁合金基底構件的耐力較大,所以加熱板不會變形。而護套加熱器的不鏽鋼的強度也很高,所以不會導致護套加熱器變形或破損。在400℃附近所鍛壓的加熱板會被加熱到使用溫度區域也就是400℃附近,會回到鍛壓時的狀態,鋁構件與不鏽鋼的密封材料之間的應力非常小,所以不會產生加熱板的變形、護套材料的變形或破損等情形。After natural cooling after forging to normal temperature, stress will be generated due to the difference in shrinkage between the aluminum or aluminum alloy base member and the sheathed heater of the stainless steel. At normal temperature, the aluminum or aluminum alloy base member has a large endurance, so the heating plate does not Deformation. The stainless steel of the sheathed heater is also high in strength, so it does not cause deformation or breakage of the sheath heater. The hot plate forged at around 400 °C will be heated to the temperature range of 400 ° C, which will return to the state of forging. The stress between the aluminum member and the stainless steel sealing material is very small, so no heating plate will be produced. Deformation, deformation or damage of the sheath material.
在本發明的加熱板1的製造方法,基底構件2及接合用構件4所使用的鋁或鋁合金,是由:JIS1050、1100、3003、3004、5005、5052、6063、6061、7003、7N01的其中一種所選擇的。鋁或鋁合金基底構件2,其材質、製造方法雖然沒有特定,考慮到耐洩漏性的話,最好是以內部缺陷較少的軋製板、鍛造構件作為材料。而從對於清洗氣體耐腐蝕性的觀點來看,鋁材質是純度99.5%以上的JIS1050最好。而在防止伴隨加熱板的大型化所產生的蠕變變形的觀點來看,可使用1100、6061等更高強度的合金,也可以使用上述其中一種的鋁或鋁合金。其他,用有少鎂含有量的5005、5052等的Al-Mg合金也可滿足壓接性,在確保金屬接合的組成範圍可以使用。In the method of manufacturing the heating plate 1 of the present invention, the aluminum or aluminum alloy used for the base member 2 and the joining member 4 is composed of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. One of them is chosen. The material and manufacturing method of the aluminum or aluminum alloy base member 2 are not particularly limited, and in view of leakage resistance, it is preferable to use a rolled plate or a forged member having less internal defects as a material. From the viewpoint of the corrosion resistance of the cleaning gas, the aluminum material is preferably JIS 1050 having a purity of 99.5% or more. Further, in view of preventing creep deformation due to an increase in size of the heating plate, a higher strength alloy such as 1100 or 6061 may be used, and aluminum or an aluminum alloy of one of the above may be used. In addition, the Al-Mg alloy such as 5005 or 5052 having a small magnesium content can also satisfy the pressure bondability, and can be used in a composition range in which metal bonding is ensured.
當鋁或鋁合金的基底構件2及接合用構件4為同一材料時,藉由鍛壓壓接時的變形,讓構件彼此壓接,而容易達到物理性的金屬接合。而即使鋁或鋁合金的基底構件2及接合用構件4為不同種類的材料,藉由鍛壓壓縮時的兩構件的塑性變形,讓構件彼此壓接,而可達到物理性的金屬接合,例如,即使是JIS1000類的鋁材料與JIS3000類的鋁材料的不同材料彼此,都可藉由鍛壓壓接達到物理性的金屬接合。 上述的本發明的加熱板的製造方法,可提高鋁或鋁合金基底構件2與護套加熱器3的緊貼性,可以大幅地提高從護套加熱器3傳達到鋁或鋁合金基底構件2的熱傳導性,所以可以提高護套加熱器3的使用壽命。而在本發明的加熱板1的製造方法,是在使用溫度區域也就是400℃附近進行鍛壓,所以使用時,鋁構件與不鏽鋼的護套材料之間的應力非常小,加熱板不易產生變形,而可長時間使用。When the base member 2 and the joining member 4 of aluminum or aluminum alloy are made of the same material, the members are pressed against each other by deformation at the time of press-bonding, and physical metal joining is easily achieved. Further, even if the base member 2 and the joining member 4 of aluminum or aluminum alloy are different kinds of materials, the plastic deformation of the two members during forging compression allows the members to be pressed against each other, thereby achieving physical metal joining, for example, Even if different materials of the JIS1000 type aluminum material and the JIS3000 type aluminum material are mutually bonded, physical metal joining can be achieved by forging pressure bonding. The above-described method for manufacturing a hot plate of the present invention can improve the adhesion between the aluminum or aluminum alloy base member 2 and the sheath heater 3, and can greatly improve the transfer from the sheath heater 3 to the aluminum or aluminum alloy base member 2. The thermal conductivity allows the life of the sheathed heater 3 to be increased. On the other hand, in the method for manufacturing the heating plate 1 of the present invention, the forging is performed in the vicinity of the use temperature region, that is, around 400 ° C. Therefore, the stress between the aluminum member and the sheath material of the stainless steel is extremely small, and the heating plate is less likely to be deformed. It can be used for a long time.
在本發明中,不是藉由鍛壓來使兩枚的鋁或鋁合金金屬接合,而是只有將埋入護套加熱器的部分進行鍛壓壓接,所以可以防止由於加熱板的熱應力所導致的變形情形。於是,即使加熱板大型化,藉由本發明僅壓接護套加熱器附近來進行鍛壓壓接,所以與以往按壓板全體進行接合的情況相比,可以減少鍛壓沖壓的功率,也可減少沖壓機的材料按壓部的面積,可以避免沖壓機的大型化,並且與將兩枚板材進行鍛壓壓接的情況相較,可以減少加工的程序。In the present invention, the two aluminum or aluminum alloy metals are not joined by forging, but only the portion buried in the sheath heater is forged and crimped, so that the thermal stress of the heating plate can be prevented. Deformation situation. Therefore, even if the heating plate is increased in size, the forging pressure welding is performed only by pressing the vicinity of the sheath heater in the present invention, so that the power of the forging press can be reduced and the press can be reduced as compared with the case where the entire pressing plate is joined. The area of the material pressing portion can prevent the size of the press from being increased, and the processing procedure can be reduced as compared with the case where the two sheets are forged and pressure-bonded.
在本發明中,藉由讓接合用鋁或鋁合金構件4具有錐部,或者當使接合用鋁或鋁合金構件4嵌合於鋁或鋁合金基底構件2的溝槽部5時,在溝槽部5的側面的至少其中一部分設置有間隙,所以藉由鍛壓可確實地將接合用鋁或鋁合金構件4插入到接觸於護套加熱器3的位置。In the present invention, the aluminum or aluminum alloy member 4 for joining has a tapered portion, or when the aluminum or aluminum alloy member 4 for joining is fitted to the groove portion 5 of the aluminum or aluminum alloy base member 2, At least a part of the side surface of the groove portion 5 is provided with a gap, so that the aluminum or aluminum alloy member 4 for joining can be surely inserted into the position in contact with the sheath heater 3 by forging.
在本發明,在鋁或鋁合金基底構件所設置的溝槽部,收容護套加熱器與接合用鋁或鋁合金構件,藉由將接合用鋁或鋁合金構件與鋁或鋁合金基底構件進行鍛壓壓接,來進行金屬接合,則在鋁或鋁合金基底構件與護套加熱器之間可維持高度的緊密性,並且能得到確保高熱傳導性的效果。In the present invention, the sheath heater and the aluminum or aluminum alloy member for joining are housed in the groove portion provided in the aluminum or aluminum alloy base member by the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member. Forging and crimping for metal joining maintains a high degree of tightness between the aluminum or aluminum alloy base member and the sheathed heater, and an effect of ensuring high thermal conductivity can be obtained.
藉由本發明,藉由將接合用鋁或鋁合金構件與鋁或鋁合金基底構件進行鍛壓壓接所進行的金屬接合,是在使用加熱板的加熱區域的溫度附近來進行的,在加熱板的使用溫度區域,可以減輕鋁或鋁合金基底構件與內部加熱器的護套材料的線膨脹差異所造成的應力,而可以避免護套加熱器的變形或破損、加熱板的變形等情形。同時,也可改善接合用鋁或鋁合金構件與鋁或鋁合金基底構件的緊貼性或熱傳導性。According to the present invention, the metal joining by press-bonding the aluminum or aluminum alloy member for bonding to the aluminum or aluminum alloy base member is performed in the vicinity of the temperature of the heating region using the hot plate, and in the heating plate By using the temperature region, the stress caused by the difference in linear expansion between the aluminum or aluminum alloy base member and the sheath material of the internal heater can be alleviated, and deformation or breakage of the sheath heater, deformation of the heating plate, and the like can be avoided. At the same time, the adhesion or thermal conductivity of the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member can also be improved.
本鍛接技術,雖然是以鋁或鋁合金所構成,而如本發明,是藉由將收容接合用金屬構件與護套加熱器的金屬基底構件進行鍛壓壓接來進行接合,只要是熱傳導性高的材料,並不限於鋁或鋁合金,作為考慮加熱器使用壽命所用的金屬材料,是線膨脹係數較大的材料也可以。The present forging technique is composed of aluminum or an aluminum alloy, and according to the present invention, the metal member for accommodating the joining metal member and the sheathing heater are forged and pressure-bonded, as long as the heat conductivity is high. The material is not limited to aluminum or aluminum alloy. As a metal material for considering the service life of the heater, it is also a material having a large coefficient of linear expansion.
作為這種可進行鍛壓壓接,熱傳導性高,且熱膨脹係數大的材料,有銅或銅合金。即使使用銅或銅合金也可得到同樣的加熱板。在使用銅合金以鍛壓壓接方式來製造加熱板的情況,以從700℃~900℃的溫度範圍進行鍛壓壓接較佳。As such a material which can be forged and pressure-bonded, the thermal conductivity is high and the coefficient of thermal expansion is large, there is copper or a copper alloy. The same heating plate can be obtained even with copper or copper alloy. In the case where a hot plate is produced by a forging and pressing method using a copper alloy, forging press bonding is preferably performed at a temperature ranging from 700 ° C to 900 ° C.
於是,本發明的加熱板,在金屬或合金基底構件所設置的溝槽部收容護套加熱器,並且,將由與其同種類的金屬或合金所構成的接合用金屬或合金構件嵌合在上述溝槽部,藉由將上述接合用金屬或合金構件與上述金屬或合金基底構件進行鍛壓壓接來金屬接合所構成,而除了熱傳導性或線膨脹係數之外,在加工性或操作性方面,是鍛壓壓接溫度較低且輕量化的構造較佳。在該方面,鋁或鋁合金較佳,在本發明中,上述接合用金屬或合金構件及上述金屬或合金基底構件,都是以鋁或鋁合金所構成。Then, in the heating plate of the present invention, the sheath heater is housed in the groove portion provided in the metal or alloy base member, and the joining metal or alloy member made of the same kind of metal or alloy is fitted into the groove. The groove portion is formed by metal bonding by forging and pressing the metal or alloy member for bonding described above with the metal or alloy base member, and is in addition to thermal conductivity or coefficient of linear expansion in terms of workability or workability. A structure in which the forging pressure bonding temperature is low and lightweight is preferable. In this respect, aluminum or an aluminum alloy is preferable. In the present invention, the metal or alloy member for joining and the metal or alloy base member are all made of aluminum or an aluminum alloy.
1、101、103、106、110、111、121...加熱板1, 101, 103, 106, 110, 111, 121. . . Heating plate
2...鋁或鋁合金基底構件2. . . Aluminum or aluminum alloy base member
3、102、123...護套加熱器3, 102, 123. . . Sheath heater
4...接合用鋁或鋁合金構件4. . . Aluminum or aluminum alloy member for joining
5...溝槽部5. . . Groove
6、7、51、52...中心軸6, 7, 51, 52. . . The central axis
11、12、13、14、15、16、17、18、19、20...接合用鋁或鋁合金構件的邊部11, 12, 13, 14, 15, 16, 17, 18, 19, 20. . . Edge of aluminum or aluminum alloy member for joining
31...T字型的縱棒部分31. . . T-shaped vertical rod part
32...T字型的橫棒部分32. . . T-shaped horizontal bar section
34...在橫棒的正下方不存在有加熱器的位置的縱棒部34. . . There is no vertical bar at the position of the heater directly below the horizontal bar
33、35...分割位置33, 35. . . Split position
36、37...Y字型的橫棒部分的下邊部36, 37. . . The lower edge of the Y-shaped horizontal bar portion
38...與護套加熱器的接觸面38. . . Contact surface with sheathed heater
53...中心部53. . . Central department
104、107...下側基座104, 107. . . Lower base
104a、107a...溝槽104a, 107a. . . Trench
105、108...上側基座105, 108. . . Upper base
109...緣部109. . . Edge
112、113...鋁構件112, 113. . . Aluminum component
114...鎖裝部114. . . Locking department
122...真空室122. . . Vacuum chamber
124...支持構件124. . . Support component
125...基板125. . . Substrate
126...氣體供給口126. . . Gas supply port
127...供給口127. . . Supply port
第1圖是本發明的實施方式的加熱板的剖面圖的代表例。第1圖(a),是顯示接合用鋁或鋁合金構件的剖面形狀為長方形的加熱板。第1圖(b),是顯示接合用鋁或鋁合金構件的剖面形狀是形成為錐狀的加熱板。Fig. 1 is a typical example of a cross-sectional view of a heating plate according to an embodiment of the present invention. Fig. 1(a) shows a heating plate in which the cross-sectional shape of the aluminum or aluminum alloy member for joining is rectangular. Fig. 1(b) shows a heating plate in which the cross-sectional shape of the aluminum or aluminum alloy member for joining is formed into a tapered shape.
第2圖是本發明的實施方式的加熱板的俯視圖。Fig. 2 is a plan view of a heating plate according to an embodiment of the present invention.
第3圖是第2圖的A-A’的剖面圖,是顯示接合用鋁或鋁合金構件的剖面形狀為長方形的情況。Fig. 3 is a cross-sectional view taken along line A-A' of Fig. 2, showing a case where the cross-sectional shape of the aluminum or aluminum alloy member for joining is rectangular.
第4圖是第2圖的A-A’的剖面圖,是顯示接合用鋁或鋁合金構件的剖面形狀為錐形的情況。Fig. 4 is a cross-sectional view taken along line A-A' of Fig. 2, showing a case where the cross-sectional shape of the aluminum or aluminum alloy member for joining is tapered.
第5圖是本發明的其他實施方式的加熱板的俯視圖。Fig. 5 is a plan view of a heating plate according to another embodiment of the present invention.
第6圖是圓形的加熱板的俯視圖。是相對於第6圖(a)的中心軸對稱的例子,第6圖(b)是相對於中心點對稱的例子。Figure 6 is a plan view of a circular heating plate. It is an example which is symmetrical with respect to the central axis of Fig. 6 (a), and Fig. 6 (b) is an example which is symmetrical with respect to the center point.
第7圖是本發明的接合用鋁或鋁合金構件的剖面圖。第7圖(a),是顯示全體形成錐狀的剖面形狀。第7圖(b),是顯示局部形成為錐狀的剖面形狀。第7圖(c),是顯示形成具有兩種角度傾斜度的錐狀。Fig. 7 is a cross-sectional view showing the aluminum or aluminum alloy member for joining of the present invention. Fig. 7(a) shows a cross-sectional shape in which the entire shape is tapered. Fig. 7(b) shows a cross-sectional shape in which a portion is formed into a tapered shape. Figure 7 (c) shows the formation of a tapered shape with two angles of inclination.
第8圖是顯示本發明的剖面形狀為略T字型的接合用鋁或鋁合金構件的一實施例。第8圖(a)是顯示一體型的T字型的剖面形狀。第8圖(b),是顯示分割為複數部分的T字型的剖面形狀。第8圖(c),是顯示一體型的其他的T字型的剖面形狀。第8圖(d),是顯示分割為複數部分的其他的T字型的剖面形狀。第8圖(e),是顯示在橫棒部分實施有錐度處理的T字型的剖面形狀。Fig. 8 is a view showing an embodiment of a joint aluminum or aluminum alloy member having a substantially T-shaped cross-sectional shape according to the present invention. Fig. 8(a) shows the cross-sectional shape of the integrated T-shape. Fig. 8(b) shows a cross-sectional shape of a T-shape divided into a plurality of portions. Fig. 8(c) shows the cross-sectional shape of another T-shaped integrated type. Fig. 8(d) shows the cross-sectional shape of another T-shape divided into a plurality of parts. Fig. 8(e) shows a cross-sectional shape of a T-shape in which a taper process is performed on the horizontal bar portion.
第9圖是顯示本發明的接合用鋁或鋁合金構件的剖面形狀為Y字型的一實施例。Fig. 9 is a view showing an embodiment in which the cross-sectional shape of the aluminum or aluminum alloy member for joining of the present invention is Y-shaped.
第10圖是顯示,本發明的與護套加熱器直接相接的面部的形狀,是以具有與加熱器同方向的曲率的接合用鋁或鋁合金構件的長方形為基本的剖面形狀的圖面。Fig. 10 is a view showing the shape of a face directly contacting the sheath heater of the present invention, which is a cross-sectional shape based on a rectangle of a joint aluminum or aluminum alloy member having a curvature in the same direction as the heater. .
第11圖是顯示,本發明的與護套加熱器直接接觸的面部的形狀,是形成了具有與加熱器同方向的曲率的接合用鋁或鋁合金構件的錐部的剖面形狀的圖面。Fig. 11 is a view showing a shape of a face portion directly contacting the sheath heater of the present invention, which is a cross-sectional shape of a tapered portion of a joint aluminum or aluminum alloy member having a curvature in the same direction as the heater.
第12圖是內置有護套加熱器的以往的澆鑄型的加熱板的概略構造的顯示圖。Fig. 12 is a view showing a schematic structure of a conventional casting type heating plate in which a sheathed heater is incorporated.
第13圖是螺栓鎖裝型的加熱板的概略構造的顯示圖。Fig. 13 is a view showing the schematic structure of a bolt-on type heating plate.
第14圖是以往的熔接型加熱板的概略構造的顯示圖。Fig. 14 is a view showing a schematic structure of a conventional fusion-type heating plate.
第15圖是硬焊、擴散接合型加熱板的概略構造的顯示圖。Fig. 15 is a view showing a schematic structure of a brazing and diffusion bonding type heating plate.
第16圖是鍛壓壓接型加熱板的概略構造的顯示圖。Fig. 16 is a view showing a schematic structure of a forging pressure type heating plate.
第17圖是在內部配設有護套加熱器的化學氣相沉積(CVD)處理裝置的概略構造的顯示圖。Fig. 17 is a view showing a schematic configuration of a chemical vapor deposition (CVD) processing apparatus in which a sheath heater is disposed inside.
1...加熱板1. . . Heating plate
2...鋁或鋁合金基底構件2. . . Aluminum or aluminum alloy base member
3...護套加熱器3. . . Sheath heater
4...接合用鋁或鋁合金構件4. . . Aluminum or aluminum alloy member for joining
Claims (26)
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KR100780749B1 (en) * | 2006-12-28 | 2007-11-30 | 주식회사 단성일렉트론 | Manufacturing method for susceptor and susceptor using this method |
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HK1089513A1 (en) | 2006-12-01 |
KR101164186B1 (en) | 2012-07-10 |
TW200612769A (en) | 2006-04-16 |
KR20060031581A (en) | 2006-04-12 |
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