TWI429314B - Heating plate and heating plate manufacturing method - Google Patents

Description

Heating plate and heating plate manufacturing method

The present invention relates to a heating plate for manufacturing a semiconductor or a liquid crystal display device in which a sheath heater used for heating in a vacuum container (vacuum chamber) is incorporated, and a heating plate used for drying, preheating, or the like in the process and manufacturing thereof method. In addition to the above, for example, a heating plate of a thin display (FPD) manufacturing apparatus as a PDP, FED, or ELD can be used. The invention is also generally applicable to heating plates for the manufacture of PTP sheets.

Conventionally, in various fields such as a semiconductor manufacturing apparatus or a liquid crystal display manufacturing apparatus, a heating plate in which a heater is incorporated in a metal base is used. As the heater of such a heating plate, a sheathed heater made of stainless steel is generally used. In the structure of the heating plate, there is a structure in which aluminum is cast to a sheath heater (casting type), a sheath heater is sandwiched between aluminum or stainless steel plates, and a bolt-locked structure (bolt lock type), a clamp The outer peripheral portion of the plate body of the sheathed heater is welded (welded type), and further, two members sandwiching the sheathed heater by pressurization in a vacuum or in a predetermined gas atmosphere Brazing, soldering, and diffusion bonding (brazing, diffusion bonding), or forming an annular groove and an annular projection over the entire periphery of the joint surface of the plate body sandwiching the sheath heater, by forging Compression to join (forging and crimping type).

Fig. 12 is a schematic configuration showing a conventional casting type heating plate 101 having a built-in sheath heater 102. The sheathed heater 102 is a structure in which a heating element is passed through a stainless steel protective tube and electrically insulated from each other by an insulating material. The tubular sheathed heater 102 is bent into a predetermined pattern, cast on an aluminum base, and the heating plate 101 is produced by performing processing such as cutting or surface polishing.

Fig. 13 is a view showing a schematic configuration of a conventional bolt-and-lock type heating plate 103. In this configuration, the metal base is divided into upper and lower portions, and the same sheath heater 102 is provided in the groove 104a formed by the lower base 104 made of aluminum, stainless steel or the like, so that the upper base is provided. 105 is close to each other, and the two are locked and integrated in an appropriate position.

Fig. 14 is a view showing a schematic configuration of a conventional fusion-type heating plate 106. Also in this configuration, the metal base is divided into upper and lower portions, and the same sheath heater 102 is provided in the groove 107a formed by the lower base 107 made of aluminum, stainless steel or the like, so that the upper base 108 is provided. It is in close contact with each other, and only the edge portion 109 is welded and integrated.

Fig. 15 shows a schematic configuration of a conventional brazing and diffusion bonding type heating plate 110. Also in this configuration, the metal base is divided into upper and lower portions, and the same sheath heater 102 as that described above is provided in the groove 107a partitioned between the lower base 107 and the upper base 108 made of metal. The state in which one or both of the upper susceptor 108 and the lower susceptor 107 are plastically deformed covers the entire surface, and is joined by one of brazing, soldering, and diffusion bonding to achieve integration.

Fig. 16 shows a schematic configuration of a conventional forging pressure type heating plate 111. Also in this configuration, the metal base is divided into upper and lower portions, and a quadrangular or polygonal or circular annular groove and an annular projection are formed on the entire outer circumference of the joint faces of the aluminum members 112 and 113, and are pressed by forging. The sealing portion 114 is sealed and metal-bonded.

Patent Document 1

Japanese special Kaiping 11-285775

Patent Document 2

Japan Special Open 2000-311932

Patent Document 3

Japan Special Open 2000-243542

[Question to be solved by the invention]

In recent years, the heating plate has been rapidly increasing in size, and has changed from 730 mm × 920 mm in the fourth generation, 1100 mm × 1300 mm in the fifth generation, and 1500 × 1800 mm in the sixth generation. Seven generations of 2100mm × 2400mm. Along with the enlargement of such a heating plate, problems are particularly caused in terms of increasing the service life of the heating plate or simplifying the cost reduction achieved by the manufacturing method.

In the configuration of the heating plate described in the above conventional configuration, the casting type heating plate, the sheath heater is in close contact with the aluminum casting, although the thermal conductivity of the heater is good, but due to the protection of the sheath heater The metal used in the tube, such as stainless steel, inconel material, and aluminum, which is a metal base, have different thermal expansion coefficients. Therefore, at high temperatures, the thermal stress may cause the heater to deform, and the repeated use may be This causes a wire breakage, which may cause problems such as deformation of the heater in different situations.

On the other hand, the bolt-on type heating plate of the aluminum base has a gap in the groove, the gap becomes a heat insulating layer, and the parts are physically contacted, so the upper and lower bases and the sheath heater or the base are mutually connected The tightness is low, the thermal conductivity is very poor, and in some cases there may be a disadvantage of local heating and damage to the heater. This problem is also the same in the fusion type heating plate. Further, the fusion-type heating plate has a large strain due to welding, and has a problem in shape maintenance.

In the environment of vacuum welding or diffusion bonding, the entire surface of the opposing member is press-bonded in a vacuum or in an atmosphere such as nitrogen gas. Therefore, a large-sized member cannot be joined, and bonding of a hard solder material, a soft solder material, or the like is required. The problem of the third joining member used.

In the forging-type heating plate, the concave portion or the convex portion for fitting is formed in the outer peripheral portion of the two plate members and the vicinity of the heating portion in accordance with the enlargement of the heating plate, and the fitting is performed by forging and crimping. The method disclosed in Japanese Laid-Open Patent Publication No. 2000-311932, which is subjected to creep deformation at a high temperature of 300 to 500 ° C for a long period of time, is in the vicinity of the outer peripheral portion and the vicinity of the heater or the center of the plate inside the heater. Such a disadvantage is caused by the deformation of the thermal stress and the inability to use the heating plate.

On the other hand, there is a need to improve the forging pressure bonding method up to now, from the problem of deformation of the above-described heating plate caused by the enlargement of the heating plate and the problem of an increase in manufacturing cost.

The present invention has been made in view of the problems of the above conventional techniques, and provides a heating plate and a method of manufacturing the same, which can prevent deformation caused by thermal stress of the heating plate, and the thermal conductivity of the heating plate is excellent and durability is high.

[Means to solve the problem]

In the first aspect of the present invention for solving the above problems, a sheath heater is housed in a groove portion provided in an aluminum or aluminum alloy base member, and an aluminum or aluminum alloy member for joining is fitted in the groove. The aluminum or aluminum alloy member for joining and the aluminum or aluminum alloy base member are joined by a press-bonding method.

According to a second aspect of the present invention, the aluminum or aluminum alloy member for joining is composed of an integral member.

According to a third aspect of the invention, the aluminum or aluminum alloy member for joining is composed of a plurality of members in a planar direction of the aluminum or aluminum alloy base member.

According to a fourth aspect of the invention, the aluminum or aluminum alloy member for joining is composed of a plurality of members in a vertical direction of the aluminum or aluminum alloy base member.

According to a fifth aspect of the present invention, the arrangement of the sheath heater is symmetrical to at least one of two central axes perpendicular to each other of the aluminum or aluminum alloy base member, or is opposite to the center Point symmetry.

According to a sixth aspect of the invention, the aluminum or aluminum alloy base member is a plate material.

According to a seventh aspect of the invention, the cross-sectional area of the aluminum or aluminum alloy member for joining is larger than a cross-sectional area of the grooved portion formed in the aluminum or aluminum alloy base member minus a sectional area of the sheath heater. Effective sectional area.

According to an eighth aspect of the invention, the cross-sectional shape of the aluminum or aluminum alloy member for joining has a rectangular shape, and the width of the cross section is the same as or slightly larger than the width of the groove portion.

According to a ninth aspect of the present invention, at least a part of the aluminum or aluminum alloy member for joining has a predetermined taper so that the both sides in the embedding direction are narrowed toward the lower side.

According to a tenth aspect of the invention, the height of the aluminum or aluminum alloy member for joining is 1 or more and 5 or less with respect to a ratio of a taper lower width of the cross section or a member lowermost width.

According to an eleventh aspect of the invention, the taper angle of the tapered portion of the aluminum or aluminum alloy member for joining is more than 0° and not more than 45°.

According to a twelfth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and the slightly T-shaped vertical rod portion and the horizontal rod portion are joined to the aluminum or aluminum alloy base member.

According to a thirteenth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and is a part or all of the vertical rod portion for pressing the heater and the remaining portion including the horizontal rod portion. Partially divided into different individuals.

According to a fourteenth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and is located at a position other than the position of the vertical rod portion of the slightly T-shaped portion, that is, at a lower side of the horizontal rod portion. The position where the sheath heater is not present, and the fitting convex portion or the concave portion is provided, and the aluminum or aluminum alloy base member is opposed to the fitting convex portion or the concave portion of the aluminum or aluminum alloy member for joining. A recess or a convex portion fitted thereto is provided in the groove portion of the above-described aluminum or aluminum alloy base member.

According to a fifteenth aspect of the invention, the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and the bottom surface of the horizontal portion of the slightly T-shaped portion is a Y-shaped shape having a gentle slope toward the center. .

According to a sixteenth aspect of the invention, in the aluminum or aluminum alloy member for the joining of the slightly T-shaped type, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less.

According to a thirteenth aspect of the present invention, in the aluminum or aluminum alloy member for the joint of the slightly T-shaped type of the thirteenth aspect, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less.

According to a thirteenth aspect of the present invention, in the aluminum or aluminum alloy member for the joint of the slightly T-shaped type of the fourth aspect, the ratio of the height of each of the vertical rod portions and the fitting convex portion or the concave portion to the width is 1 Above, 4 or less.

According to a ninth aspect of the present invention, in the aluminum or aluminum alloy member for joining described above, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less.

According to a twentieth aspect of the invention, the surface of the surface of the aluminum or aluminum alloy member for joining that is in contact with the sheath heater is a plane parallel to the surface of the aluminum or aluminum alloy base member, or A curved surface of the curvature of the outer circumference of the heater in the same direction.

According to a twenty-first aspect of the invention, the member width of the face portion of the aluminum or aluminum alloy member for joining that is in contact with the sheath heater is larger than the width of the sheath heater.

According to a twenty-second aspect of the present invention, the cross-sectional area of the aluminum or aluminum alloy member for joining before the forging and pressing is larger than the sectional area of the groove portion formed by the aluminum or aluminum alloy base member. The effective sectional area of the cross-sectional area of the heater is set, and when the aluminum or aluminum alloy member for bonding is fitted to the groove portion of the aluminum or aluminum alloy base member, at least a part of the side surface has a gap.

According to a twenty-third aspect of the present invention, in the sheath heater, one or a plurality of grooves are provided in the aluminum or aluminum alloy base member, or a plurality of grooves are disposed in each of the plurality of grooves.

According to a twenty-fourth aspect of the present invention, in the plurality of sheathed heaters, one or a plurality of grooves provided in the aluminum or aluminum alloy base member are arranged in a plurality of rows in parallel.

According to a twenty-fifth aspect of the present invention, in the plurality of sheath heaters, one or a plurality of grooves provided in the aluminum or aluminum alloy base member are stacked in a plurality of rows in the height direction.

According to a twenty-sixth aspect of the present invention, the sheath heater is a tubular structure having a circular cross section or a substantially rectangular shape (including a substantially square shape) having a corner portion having a predetermined curvature or The structure in which the thin strips are braided into a tubular shape.

According to a twenty-seventh aspect of the present invention, the heating plate for accommodating the sheath heater is excellent in thermal conductivity to the sheath portion of the sheath heater.

According to a twenty-eighth aspect of the present invention, the heating plate for accommodating the sheath heater has airtightness.

According to a twenty-ninth aspect of the present invention, the sheath heater for accommodating the heating plate of the sheath heater has higher electrical insulation.

According to a thirtieth aspect of the invention, the aluminum or aluminum alloy member for joining and the aluminum or aluminum alloy base member are one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. Made up of alloys.

According to a thirty-first aspect of the invention, in the method of manufacturing a hot plate, the groove portion is formed in the aluminum or aluminum alloy base member, the sheath heater is accommodated in the groove portion, and the aluminum or aluminum for the joint is used. The alloy member is housed in the sheath heater, and the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are joined by a press-bonding method.

According to a thirtieth aspect of the invention, the aluminum or aluminum alloy member for joining is formed by a forging or pressure-bonding method using a member integrally or divided into a plurality of members.

According to a thirteenth aspect of the invention, the aluminum or aluminum alloy member for joining is formed by a forging and press-bonding method using a member that is divided into a plurality of portions in a planar direction or a cross-sectional direction of the aluminum or aluminum alloy base member. .

According to a thirty-fourth aspect of the invention, the cross-sectional area of the aluminum or aluminum alloy member for joining is larger than a cross-sectional area of the grooved portion formed in the aluminum or aluminum alloy base member minus the sectional area of the sheath heater. Effective sectional area.

According to a thirty-fifth aspect of the invention, when the aluminum or aluminum alloy member for joining is divided into a plurality of portions, a plurality of members are forged and pressure-bonded in a predetermined order.

According to a thirty-sixth aspect of the present invention, in the aluminum or aluminum alloy base member, metal joining is performed by a forging and pressing method using a plate material.

According to a thirty-seventh aspect of the present invention, in the aluminum or aluminum alloy member for joining, the shape of the cross section is a rectangle, and the width of the cross section is the same as or larger than the width of the groove portion, and is crimped by forging. The way to make metal joints.

According to a thirty-eighth aspect of the invention, the aluminum or aluminum alloy member for joining is formed by a forging and pressing method using a member having a taper having a taper angle of more than 0° and not more than 45°.

According to a ninth aspect of the present invention, as the aluminum or aluminum alloy member for joining, a member having a substantially T-shaped or Y-shaped cross-sectional shape is used, and metal joining is performed by a forging and pressing method.

According to a 40th aspect of the present invention, in the method of manufacturing a hot plate, the cross-sectional shape of the aluminum or aluminum alloy member for joining is slightly T-shaped, and the other position of the vertical rod portion of the slightly T-shaped portion is In the position where the sheathing heater is not present on the lower side of the horizontal bar portion, the fitting convex portion or the concave portion is provided, and the position of the fitting convex portion or the concave portion facing the bonding aluminum or aluminum alloy member is the aluminum Or the aluminum alloy base member is provided with a concave portion or a convex portion fitted thereto, and the vertical rod portion of the joining aluminum or aluminum alloy member, the fitting convex portion or the concave portion, and the aluminum or aluminum alloy base member having the concave portion Or the groove portion of the convex portion is fitted, and metal joining is performed by a forging pressure bonding method.

According to a forty-first aspect of the present invention, in the aluminum or aluminum alloy member for joining, a surface of the surface portion that is in contact with the sheath heater is a plane parallel to a surface of the aluminum or aluminum alloy base member, or It is a member having a curved surface having a curvature in the same direction as the outer circumference of the sheath heater, and metal joining is performed by a forging pressure bonding method.

According to a forty-second aspect of the invention, the height of the aluminum or aluminum alloy member for joining, and the groove portion obtained by subtracting a height of the sheath heater from a depth of a groove portion of the aluminum or aluminum alloy base member The members having the same effective depth or larger are metal-bonded by forging and crimping.

According to a thirteenth aspect of the invention, the ratio of the height of the cross section of the aluminum or aluminum alloy member for joining to the width is 1 or more and 4 or less.

According to a forty-fourth aspect of the present invention, the cross-sectional area of the aluminum or aluminum alloy member for joining before the forging and pressing is larger than the sectional area of the groove portion formed from the aluminum or aluminum alloy base member minus the sheath heating The effective sectional area of the cross-sectional area of the device, and when fitted to the groove portion, the aluminum or aluminum alloy member for bonding having at least a part of the side surface and the aluminum or aluminum alloy base member are pressed by forging The joining method is used for metal joining.

According to a forty-fifth aspect of the invention, the aluminum or aluminum alloy base member and the aluminum or aluminum alloy member for joining are: JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. A member made of an alloy is joined by a press-bonding method.

According to a 46th aspect of the invention, the aluminum or aluminum alloy base member and the forging pressure-bonding of the aluminum or aluminum alloy member for joining are carried out in a range of from 250 ° C to 500 ° C.

A 47th aspect of the present invention is the method for preventing deformation of a hot plate using the method for producing a hot plate according to the thirty-first aspect.

According to a 48th aspect of the present invention, in the method for producing a hot plate according to the 31st aspect, the method for improving the adhesion between the aluminum or aluminum alloy member for bonding the heating plate and the aluminum or aluminum alloy base member by forging and pressing is used. .

According to a 49th aspect of the present invention, there is provided a method for improving the service life of a heater for a method for improving adhesion between an aluminum or aluminum alloy member for joining a heating plate and an aluminum or aluminum alloy base member according to the 48th aspect.

According to a 50th aspect of the present invention, a sheath heater is housed in a groove portion provided in a metal or alloy base member, and a joining metal or alloy member made of a metal or an alloy of the same kind is fitted to the groove. In the groove portion, the joining metal or alloy member and the metal or alloy base member are joined by press bonding to perform metal joining.

According to a fifty-first aspect of the invention, the metal or alloy base member and the joining metal or alloy member are both copper or a copper alloy.

[effect of the invention]

According to the invention, the sheath heater and the aluminum or aluminum alloy member for joining are housed in the groove portion provided in the aluminum or aluminum alloy base member, and the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are used. Forging and crimping for metal joining maintains a high degree of tightness between the aluminum or aluminum alloy base member and the sheathed heater, and has an effect of ensuring high thermal conductivity.

According to the present invention, the metal joining of the aluminum or aluminum alloy member for joining to the aluminum or aluminum alloy base member by the forging and pressing method is performed in the vicinity of the temperature of the heating region using the hot plate, and the heating can be reduced. The stress caused by the difference in linear expansion between the aluminum or aluminum alloy base member of the use temperature region of the plate and the sheath material of the internal heater can avoid deformation or breakage of the sheath heater, deformation of the heating plate, and the like. At the same time, the adhesion or thermal conductivity of the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member can also be improved. According to the effects of the present invention, any metal other than aluminum or aluminum alloy can be applied to copper or a copper alloy as long as it is a metal that is press-compression-bonded and excellent in thermal conductivity. Copper or copper alloys have high heat resistance, so they are suitable for use at higher temperatures than hot plates made of aluminum or aluminum alloy.

In the heating plate in which the sheath heater is disposed inside the present invention, the sheath heater is brought into close contact with the metal member, so that the heat generated by the sheath heater is transmitted to the metal member of the heating plate. The sheath heater is disposed inside the heating plate in such a manner that the heating plate is heated to a uniform temperature. For example, the sheath heater is configured in various shapes to heat the heating plate to a uniform temperature. The sheathed heater is sealed with a heating wire and an insulating material in a stainless steel such as SUS304, a nickel alloy such as incoloy (high temperature iron nickel chromium base), and a titanium sheath material (tube body). The number of grooves and heaters, as will be described later, is appropriately selected as needed.

The heating plate in which the sheath heater is disposed by the present invention is used as a heating plate in a vacuum container (vacuum chamber) of a semiconductor or liquid crystal manufacturing apparatus. Fig. 17 is a view showing an example of use of a heating plate in which a sheath heater is disposed inside. Fig. 17 is a chemical vapor deposition (CVD) processing apparatus in which a heating plate 121 in which a sheath heater 123 is disposed in a vacuum chamber 122 is provided by a support member 124. The substrate 125 is placed on the heating plate 121. In the vacuum chamber 122, a gas supply portion 126 for performing a CVD process is provided, and a gas is supplied from the supply port 127 and deposited on the substrate 125 by chemical vapor deposition.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described based on the drawings.

Fig. 1 is a representative example of a cross-sectional view of a heating plate of the present embodiment. In the first embodiment, the heating plate 1 is a structure in which a sheath heater 3 as an internal component is housed in an aluminum or aluminum alloy base member 2, and an upper portion thereof is sealed by an aluminum or aluminum alloy member 4 for joining. The aluminum or aluminum alloy member 4 for joining of the present invention has a cross-sectional shape as shown in the first embodiment (a), or as shown in Fig. 1(b), at least a part of the opposite sides is oriented toward the embedding direction. The interval is narrowed and tapered. Fig. 2 is a plan view showing the heating plate 1, and Fig. 3 and Fig. 4 are sectional views showing A-A' of Fig. 2; Fig. 3 and Fig. 4 are cross-sectional views corresponding to the heating plate 1 in Fig. 1 (a) and Fig. 1 (b), respectively.

In addition to the above-described embodiments, the cross-sectional shape of the aluminum or aluminum alloy member for bonding may be slightly T-shaped or slightly Y-shaped, although not shown.

The aluminum or aluminum alloy base member 2 is provided with a groove portion 5 for accommodating the sheath heater 3 and the aluminum or aluminum alloy member 4 for joining. The aluminum or aluminum alloy base member 2 may also be a member having a relatively thick thickness, and for practical use, a plate material is preferred.

After the sheath heater 3 is housed in the groove portion 5, the aluminum or aluminum alloy member 4 for joining is housed, and the aluminum or aluminum alloy base member 2 and the aluminum or aluminum alloy member 4 for joining are forged and pressure-bonded.

Fig. 2 is a view showing an embodiment in which the aluminum or aluminum alloy member 4 for joining is composed of an integral member. On the other hand, Fig. 5 shows an embodiment in which the aluminum or aluminum alloy member for joining is composed of a plurality of members as seen from the plan view of the aluminum or aluminum alloy base member 2. Similarly, as shown in FIGS. 8(b) and 8(d) to be described later, the aluminum or aluminum alloy member 4 for joining may be composed of a plurality of members as viewed in the cross-sectional direction of the aluminum or aluminum alloy base member 2. Therefore, if necessary, the aluminum or aluminum alloy member 4 for joining may not be integrated, and may be divided into a plurality of members for forging and pressing as shown in Fig. 5 or Fig. 8 (b) and (d).

In the heating plate of the present invention, the shape of the heating plate may be a rectangle as shown in Fig. 2, or a circular shape as shown in Fig. 6, and the arrangement shape of the heating plate is two centers perpendicular to each other. At least one of the axes is symmetrical or point symmetrical to the center. That is to say, in Fig. 2, it is symmetrical with respect to the central axis 6, and in Fig. 6(a), it is symmetrical with respect to the central axis 51. In Fig. 6(b), it is preferable that the center 53 is point symmetrical. In the joining member of the present invention, when the joining member is positioned in an aluminum or aluminum alloy base member composed of a rectangular shape, a slightly T-shaped shape, a slightly Y-shaped shape, a tapered shape or the like, positioning is facilitated. In the case of a rectangular cross section, the end portion of the contact surface of the aluminum or aluminum alloy member for bonding and the heater is slightly chamfered, whereby positioning can be easily performed.

Although not specifically illustrated, in the same arrangement as the arrangement of FIG. 2, FIG. 6(a), and FIG. 6(b), in the groove of the aluminum or aluminum alloy base member, two The heaters are juxtaposed or stacked in parallel in the depth direction of the grooves. A plurality of heaters are housed in at least one or more grooves of the base member to constitute a heating plate.

Alternatively, the heater may be provided in a plurality of grooves to form a heating plate. The groove provided with the sheath heater can be designed to heat the heating plate to a predetermined temperature, and a substantially uniform temperature can be obtained. The number of the groove structure and the heater can be one or more, or appropriate Ground selection.

Next, the shape of the aluminum or aluminum alloy member 4 for joining will be described in detail.

The case where the cross-sectional shape of the aluminum or aluminum alloy member for joining is a rectangular shape is demonstrated in detail in FIG. Fig. 3 is a view showing a groove provided in an aluminum or aluminum alloy base member, a sheath heater is housed, and an aluminum or aluminum alloy member for joining is fitted to the groove portion, and the joint is joined by forging and pressing. The result of joining the member to the base member described above. As shown in the figure, the aluminum or aluminum alloy member 4 for bonding and the groove portion 5 of the aluminum or aluminum alloy base member 2 and the sheath heater 3 are brought into close contact with each other by a forging press method.

As shown in Fig. 3(b), the width w1 of the cross section of the aluminum or aluminum alloy member 4 for joining is the same as the width w2 of the groove portion 5 provided in the aluminum or aluminum alloy base member 2. On the other hand, the ratio of the height h to the width w1 shown in Fig. 3(b) is preferably 1 or more and 4 or less in consideration of the longitudinal bending deformation of the joining member. It is more preferably 1 or more and 3 or less in consideration of the resistance received from the side surface of the groove portion of the base member at the time of forging pressure bonding. The joining can be performed even if it is 1 or less, and it is preferable that it is 1 or more in consideration of the thermal deformation in the use of the hot plate of the forging crimping part or the strength of the joint portion, and therefore the lower limit value here is 1 or more. Here, regarding the shape of the joining member, the member width in the vicinity of the tip end of the joining member is processed into two rectangular overlapping shapes which are narrower than the groove width, or the joining member which is slightly trimmed is also included in the present invention. The scope. The volume of the joining member needs to be larger than the remaining effective volume minus the volume of the sheath heater from the groove portion volume of the base member. The length of the joining member described above is required to be the same length as or longer than the necessary length of the necessary volume for completely burying the groove portion.

The reason for this is that the bonding member 4 is made to have the width w1 of the cross section of the bonding aluminum or the alloy member 4 equal to or slightly larger than the width w2 of the groove portion 5 provided in the aluminum or aluminum alloy base member 2. Since the groove portion is plastically deformed, the metal joining can be performed by forging pressure bonding between the joining member and the base member. Specifically, when a sheath heater of 10 ψ is used, the groove width of the base member is 11 mm, and the member for the joint has a member width of about 12 mm. When the joining member is fitted to the base member, since the groove wall portion is subjected to compressive stress and plastically deformed, a structure in which the joining member is slightly larger than the groove width of the base member may be used. The difference in the size of the groove width with respect to the joining member inserted into the groove portion of the base member is the maximum range allowed to be insertable, and the allowable range is considered to be larger than the groove width by a larger mm. As shown in Fig. 3(b), the ratio of the height h1 to the width w1 is preferably 1 or more and 4 or less, more preferably 1 or more and 3 or less.

The volume of the joining member is larger than the remaining effective volume minus the volume of the sheath heater from the volume of the groove portion of the base member, and the length of the joining member is required and used completely The necessary length of the necessary volume for embedding the groove portion is the same or a slightly longer length. The reason is that if this is not the case, the joining member is not completely filled with the groove, and the base member is completely metal-bonded.

As shown in Fig. 3, when the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is rectangular, the shape of the surface in direct contact with the sheath heater 3 is parallel to the surface of the aluminum or aluminum alloy base member 2. The plane or the curvature in the same direction as the outer circumference of the sheath heater 3 is preferable. An example of the aluminum or aluminum alloy member 4 for bonding having a surface in direct contact with the sheath heater 3 in the same direction as the outer circumference of the sheath heater 3 is shown in Fig. 10(a). By forming the face 31 in direct contact with the sheath heater 3 in such a shape, the aluminum or aluminum alloy base member 2 and the sheath of the aluminum or aluminum alloy member 4 and the sheath heater 3 for bonding can be performed without a gap. The joint of the part provides high airtightness and excellent thermal conductivity. Further, by improving the soundness of the sheath portion, the internal insulating material is protected, and high electrical insulation can be maintained.

Fig. 10(b) is a view showing that the cross-sectional shape of the face portion in contact with the sheathed heater of the aluminum or aluminum alloy member 4 for joining has the same direction as that of the sheath heater, and the aluminum or aluminum alloy member 4 for joining is used. The component width is greater than the sheath heater width X. By making the width of the large joining member, it is possible to ensure that the material flows into the outer peripheral side portion of the heater cross section, and the adhesion between the sheath heater and the joining member can be improved.

Fig. 10(c) is a view showing a case where the width of the joining member is parallel to the plate surface of the base member, and the width of the joining member is larger than the sheath heater width X, when the lowermost portion of the joining member is parallel to the base member. In the case of the plate surface, it is particularly effective in that the material flows into the outer peripheral side portion of the heater cross section as compared with the case where the face portion of the sheath heater has the same direction as the sheath heater. Here, when the width of the joining member is made large, the width of the base member naturally increases in accordance with the amount of expansion of the width of the joining member.

Next, a structure in which the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is a rectangular shape will be described in detail.

Fig. 7 is a view showing an embodiment of the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining of the present invention. In Fig. 7, at least a part of the opposite sides of the aluminum or aluminum alloy member 4 for joining has a tapered shape which is narrowed in the direction of the embedding. In Fig. 7(a), the opposite sides 11 and 12 are formed in a tapered shape with an inclination of an angle α with respect to the vertical line. Fig. 7 (b) and (c) show an example of a tapered structure in which the cross-sectional shape has two inclinations. In Fig. 7(b), the side portions 13, 15 are vertically parallel to each other, and the side portions 14, 16 are also formed in a tapered shape with an inclination of an angle α with respect to the vertical line. Further, in Fig. 7(c), the side portions 17 and 19 also have an inclination of an angle α with respect to the vertical line, and the side portions 18 and 20 are formed in a tapered shape with an inclination of the angle β with respect to the vertical line.

Although not shown, the member width of the face portion of the aluminum or aluminum alloy member 4 for joining that is in contact with the sheath heater can be made larger than the sheath heater width. By increasing the width of the joining member, it is possible to ensure that the material flows into the outer peripheral side portion of the heater cross section, and the adhesion between the sheath heater and the joining member can be improved. When the width of the joining member is increased, the width of the base member is also increased in accordance with the amount of expansion of the width of the joining member.

In the case of Figs. 7(b) and 7(c), the member width of the face portion that is in contact with the sheath heater is made larger than the sheath heater width, and the material is allowed to flow into the outer peripheral side of the heater cross section. It is effective in the adhesion of the sheath heater and the joining member. In the case where the present invention is other than the above, the member width of the face portion of the joining aluminum or aluminum alloy member 4 that is in contact with the sheath heater is larger than the sheath heater width, and the material is allowed to flow into the outer periphery of the heater section. The side aspect is very effective.

The taper angles α and β of the tapered portion of the aluminum or aluminum alloy member for joining shown in Fig. 7 are preferably 0° or more and 45° or less, and more preferably 1° or more and 30° or less. The reason is that when the angle of the taper portion is increased, the hydrostatic stress received by the taper member from the base member groove wall portion during forging and pressing is reduced, and the bondability is lowered, so that a good metal joint state cannot be obtained, and The size of the aluminum or aluminum alloy member for joining can be increased to an undesired extent. Here, the joining member having a partial taper shape is defined by the dimension W1 of the tapered portion and the dimension W2 and the taper angle of the lower portion of the tapered portion. The height of the entire member is expressed as h1. It is also possible to form the gentle curve without making the tapered portion straight. In this case, although the angle of the taper portion cannot be determined, a straight angle at which the start point and the end point of the taper portion are connected by a straight line can be applied. The scope of the present invention is also included when the joining member is a curved portion that joins the tapered portion.

By forming the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining of the present invention into a tapered shape as in the embodiment shown in Fig. 7, the aluminum or aluminum alloy member 4 for joining can be surely inserted into the sheath. The heater 3 is forged and pressure bonded.

When the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining of the present invention is a tapered shape as shown in Fig. 7, in order to reliably press-bond the aluminum or aluminum alloy base member 2, aluminum or aluminum alloy for joining is used. The sectional area of the member 4 is preferably larger than the effective sectional area of the sectional area of the groove portion 5 formed from the aluminum or aluminum alloy base member 2 minus the sectional area of the sheathed heater 3. The reason is that if this is not done, the joining member cannot be sufficiently filled in the groove to be sufficiently metal-bonded. A gap is formed between the sheath heater and the joining member, and the thermal conductivity of the heater is lowered.

In Fig. 7, the relationship between the height h1 of the aluminum or aluminum alloy member 4 for joining and the width W3 of the lower portion of the taper portion or the width W2 of the lowermost portion of the member is such that the longitudinal bending resistance can be increased by adjusting the taper angle, so even if there is no limit However, in consideration of the relationship between the total thickness of the heating plate and the diameter of the heater or the longitudinal bending resistance when the taper angle is close to 0, it is preferably 1 or more and 5 or less, and considering the taper side from the forging pressure bonding. The resistance to be received is preferably 1 or more and 3 or less. Although bonding is possible at 1 or less, it is preferable to use 1 or more in consideration of thermal deformation or joint strength during use of the hot plate of the forging crimping portion, and therefore the lower limit is 1 or more. For example, when the sheath heater has a diameter of 10 ,, the upper width W1, the lower width W2, and the height h of Fig. 7(a) may be 15 mm, 10 mm, or 30 mm. By using the taper-shaped joining member to guide the taper portion and fitting it, the adhesion between the sheath heater and the joining member 4 is improved, and the material is sufficiently filled in the base member 2 The groove can be obtained in a solid metal joint state.

Next, a case where the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is slightly T-shaped or Y-shaped will be described.

Fig. 8 is a view showing an embodiment of a joint aluminum or aluminum alloy member 4 having a substantially T-shaped cross-sectional shape. In Fig. 8(a), the vertical rod portion 31 and the horizontal rod portion 32 of the T-shaped aluminum or aluminum alloy member 4 for joining are joined to the aluminum or aluminum alloy base member 2. That is, in addition to pressing the T-shaped vertical bar portion 31 of the sheath heater 3, the T-shaped horizontal bar portion 32 is also joined to the aluminum or aluminum alloy base member 2. In this case, in the aluminum or aluminum alloy base member 2, a fitting recessed portion is provided at a position facing the T-shaped aluminum or aluminum alloy member 4 for joining. In Fig. 8(b), the T-shaped vertical bar portion 31 and the horizontal bar portion 32 for pressing the heater are divided into different individuals at the position 33, and are divided and joined. In Fig. 8(b), although the entire vertical rod portion 31 is divided into different individuals, only a part of the vertical rod portion 31 may be different. Regardless of whether the longitudinal rod portion is integral or different, the ratio of the width to the length of the longitudinal rod portion 31 can be joined even if it is 1 or less, taking into account the thermal deformation or bonding in use of the heating plate of the forging crimping portion. The strength of the portion is preferably 1 or more, and in consideration of the longitudinal bending strength of the convex portion, it is preferably 4 or less. In consideration of the resistance received by the joining member at the time of forging from the side surface of the base member, it is particularly preferably 1 or more and 3 or less. Therefore, when the diameter of the longitudinal rod portion is 10 ψ , the width w and the height h of Fig. 8(b) may be 10 mm or 30 mm.

In Fig. 8(c), the aluminum or aluminum alloy member 4 for joining is not protected except for the vertical rod portion 31 and the horizontal rod portion 32 of the T-shape of Fig. 8(a). The position of the heater is also provided with a longitudinal rod portion 34. In this case, in the aluminum or aluminum alloy base member 2, a concave portion or a convex portion is provided at a position to be fitted to the aluminum or aluminum alloy member 4 for joining. 34 of Fig. 8(c) is a convex portion extending downward, and 34 may be a concave portion, and on the other hand, a convex portion may be provided at a position facing the aluminum or aluminum alloy base member 2. The volume of the vertical rod portion 34 provided as the convex portion is preferably larger than the concave portion provided in the aluminum or aluminum alloy base member 2 for fitting therewith. The width of the fitting concave portion and the width of the joining member convex portion are larger than the convex portion width, and the ratio of the width of the convex portion to the length of the convex portion is similar to that of the case of Fig. 8(b), and is 1 or more and 4 or less. Good, especially 1 or more and 3 or less. By making such a projection, the joining of the aluminum or aluminum alloy member 4 for joining to the aluminum or aluminum alloy base member 2 can be made stronger.

Fig. 8(d) shows the same cross-sectional shape as that of Fig. 8(c), and similarly to the case of Fig. 8(b), the T-shaped vertical rod portion for pressing the sheath heater 3 31 and other parts are divided into different individuals at position 35, and are structures that are divided and joined. In this case, only a part of the vertical rod portion 31 may be made into different individuals. On the other hand, in Fig. 8(d), although the position of the vertical rod portion 34 is different from that of Fig. 8(c), the position of the vertical rod portion 34 can be adjusted as needed. Further, as shown in Fig. 8(e), the length of the horizontal bar portion of the aluminum or aluminum alloy member for joining, and the size of the groove portion fitted to the horizontal bar portion of the groove formed in the aluminum or aluminum alloy base member, The width A1 of the horizontal bar portion of the bonding member is larger than the width A2 of the groove portion, or the surface width A1a at the end portion of the horizontal bar portion is larger than the width A1b of the lower portion of the end portion of the horizontal bar portion, and has a tapered shape in the thickness direction. It is better than the groove width of the base member to which it is fitted. The ratio of the width A to the height B of the T-shaped horizontal bar portion does not need to be particularly limited, but if the width is not required to be excessive, the material is wasted, so the maximum is only the width of the housing portion of the heater. 5 to 6 times is enough. The thickness is sufficient as long as it has sufficient strength to fix the joining member, and therefore it is necessary to have a thickness of 5 mm to 20 mm. If the diameter of the sheath heater is 10 ψ , the width A of the horizontal bar is 50 to 60 mm, and the height B is 5 to 20 mm. Of course, the width can also be made 30~40mm.

Next, an embodiment in which the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is Y-shaped is shown in Fig. 9. The shape of the horizontal bar portion 32 is a rectangle with respect to the T-shape shown in Fig. 8, and the lower sides 36 and 37 of the Y-shaped horizontal bar shown in Fig. 9 are inclined toward the center. degree. The cross-sectional area of the horizontal rod portion of the T-shaped or Y-shaped portion and the sectional area of the vertical rod portion are required to be larger than the corresponding portion of the groove of the base member when viewed independently, and a section larger than the horizontal rod portion of the groove is required. The area, and the cross-sectional area of the groove except the heater portion inserted into the vertical rod portion. The reason for this is that in order to sufficiently complete the joining of the T-shaped or Y-shaped joining member and the base member, it is necessary to sufficiently bond the horizontal bar portion and the vertical rod portion to the base member metal.

When the cross-sectional area of the aluminum or aluminum alloy member 4 for joining of the present invention is a substantially T-shaped or Y-shaped, the cross-sectional area of the aluminum or aluminum alloy member 4 for joining is larger than that formed from the aluminum or aluminum alloy base member 2. The effective sectional area of the cross-sectional area of the groove portion 5 minus the sectional area of the sheath heater 3 is preferable.

By making at least a portion of the width of the aluminum or aluminum alloy member 4 for joining smaller than the width of the groove portion 5 of the aluminum or aluminum alloy base member 2, when the aluminum or aluminum alloy member 4 for joining is fitted to aluminum or aluminum In the case of the groove portion 5 of the alloy base member 2, it is preferable that at least a part of the side surface of the groove portion 5 has a gap. Thereby, the aluminum or aluminum alloy member 4 for joining can be further penetrated into the groove, and the sheath heater and the joining member can be brought into close contact with each other.

In the case where the cross-sectional shape of the aluminum or aluminum alloy member 4 of the present invention is a slightly T-shaped or Y-shaped, the ratio of the height to the width of the vertical rod portions 31 and 34 is preferably 1 or more and 4 or less. Comparing the width of the vertical portion with the groove width of the base member corresponding thereto, the groove width of the base member is large, and the sectional area of the vertical rod needs to be larger than the groove portion of the base member from the portion of the longitudinal rod. The sectional area of the portion of the cross-sectional area minus the sectional area of the heater. As a result, when the joining member is forged and compressed in the grooved space of the base member, the groove portion of the base member that is in contact with the vertical rod portion and the metal of the vertical rod portion of the joining member can be realized. Engage.

The shape of the face portion directly in contact with the sheath heater 3 having the aluminum or aluminum alloy member 4 for bonding of various shapes described above is a plane having a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2, or A curved surface having a curvature in the same direction as the outer circumference of the sheath heater 3 is preferable. An example of the aluminum or aluminum alloy member 4 for bonding which has a curvature in the same direction as the outer circumference of the sheath heater 3 on the surface directly in contact with the sheath heater 36 is shown in Fig. 11. By forming the shape of the face portion 38 in direct contact with the sheath heater 3, the aluminum or aluminum alloy base member 2 and the aluminum or aluminum alloy member 4 for bonding and the jacket of the sheath heater 3 can be carried out without a gap. The joint of the part provides high airtightness and excellent thermal conductivity. Further, by improving the soundness of the sheath portion, the internal insulating material can be protected, and high electrical insulation can be maintained.

The aluminum or aluminum alloy base member of the heating plate of the present invention and the aluminum or aluminum alloy member for joining are alloys using one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01.

Another embodiment of the heating plate of the present invention is a structure in which the sheath heater 3 has a circular cross-sectional shape, or a tubular shape in which a corner portion is formed by a predetermined curvature curve (also including a square shape). The structure or the structure in which the thin strips are braided into a tubular shape.

Next, a method of manufacturing the heating plate will be described.

The heating plate 1 of the present invention is a groove portion 5 for inserting an inner part, that is, a sheath heater 3 and a joining aluminum or aluminum alloy member 4, and is disposed in advance in the aluminum or aluminum alloy base member 2, in the groove. After the sheath portion 5 accommodates the sheath heater 3, the aluminum or aluminum alloy member 4 for bonding embedded in the space of the groove portion 5 is inserted from above. Further, a hot plate is produced by metal joining the aluminum or aluminum alloy member 4 for joining to the aluminum or aluminum alloy base member 2 by a forging press method. The aluminum or aluminum alloy base member here may be an aluminum alloy plate.

In the method for producing a hot plate according to the present invention, when the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is rectangular, the width w1 of the cross section of the aluminum or aluminum alloy member 4 for joining is set to be the aluminum or aluminum alloy base member 2. The width w2 of the groove portion 5 is the same or larger. Thereby, the side surface of the groove portion 5 of the aluminum or aluminum alloy base member 2 and the side surface of the aluminum or aluminum alloy member 4 for joining can be forged and pressure-bonded without a gap.

In the method for producing a hot plate according to the present invention, the height h1 of the aluminum or aluminum alloy member 4 for joining shown in Fig. 3 is larger than the depth h2 from the groove portion 5 of the aluminum or aluminum alloy base member 2. The value of the width of the heater is preferably a value, and the airtightness between the bottom surface of the aluminum or aluminum alloy member 4 for bonding and the sheath heater can be further improved by forging and pressing.

In the method for producing the heating plate 1 of the present invention, the ratio of the height h to the width w1 of the aluminum or aluminum alloy member 4 for joining of the present invention is preferably 1 or more and 4 or less, particularly preferably 1 or more and 3 or less.

In the method of manufacturing the heating plate 1 of the present invention, the face of the aluminum or aluminum alloy member 4 for bonding which is in contact with the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2, or has a A curved surface of the curvature of the outer circumference of the sheath heater 3 in the same direction.

Next, a method of manufacturing the hot plate of the present invention in the case where the cross-sectional shape of the aluminum or aluminum alloy member 4 for joining is a rectangular shape will be described. The aluminum or aluminum alloy member 4 for joining used for embedding in the groove portion 5 is divided into a plurality of members in the planar direction of the aluminum or aluminum alloy base member 5 as shown in Fig. 5, and is divided. The members are forged at the same time, or they may be forged in sequence in a predetermined order. When the divided members are sequentially forged, the range of the portion to be forged at one time is reduced, and the forging can be performed using a small press. Further, as shown in FIGS. 8(b) and 8(d), when the member is divided into a plurality of members in the cross-sectional direction, the plurality of members may be forged and pressed in sequence, or may be combined for forging and pressing.

In this case, a plurality of aluminum or aluminum alloy members for bonding are used as the length in the direction in which the heater is disposed, the upper surface portion of the member is longer than the lower surface portion of the member, and the end surface of the joining member is tapered, and the joint is used for joining. The length of the upper surface of the member is made longer than the length of the groove for the heater for embedding the base member, and the plurality of members are mutually deformed to be plastically deformed to perform forging pressing, so that the boundary of the plurality of members can be ensured. There is sufficient bonding when forging and crimping. Since the joining of the joining member and the base member is performed only by forging and pressing, the process can be simplified, and the plurality of joining members can be joined by electron beam welding or brazing, or a plurality of The configuration in which the length of the joining member is shorter than the groove length of the base member.

In the method for producing a hot plate according to the present invention, the aluminum or aluminum alloy member 4 for joining is a tapered portion having an angle of more than 0° and not more than 45°, and the tapered portion is inserted into the aluminum or aluminum alloy base member 2. The groove portion 5 is metal bonded by forging and pressure bonding.

In another manufacturing method of the heating plate 1 of the present invention, the cross section of the aluminum or aluminum alloy member 4 for joining has a slightly T-shaped or slightly Y-shaped shape, and the relative orientation of one of the aluminum or aluminum alloy base members 2 The position is provided with a concave portion or a convex portion for fitting with a slightly T-shaped or slightly Y-shaped aluminum or aluminum alloy member 4 for bonding. The aluminum or aluminum alloy member 4 for bonding, which is slightly T-shaped or slightly Y-shaped, is fitted to the concave portion or the convex portion of the aluminum or aluminum alloy base member 2, and is forged and pressure-bonded to perform metal joining. Here, the aluminum or aluminum alloy member 4 for joining may be provided with a convex portion or a concave portion at a position other than the vertical rod portion 31 for pressing the sheath heater 3.

In the method of manufacturing the heating plate 1 of the present invention, the face of the aluminum or aluminum alloy member 4 for bonding that is in contact with the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2, or has A curved surface having the same curvature as the outer circumference of the sheath heater 3.

In the method of manufacturing the heating plate 1 of the present invention, the actual sectional area of the aluminum or aluminum alloy member 4 for joining is larger than the sectional area of the groove portion 5 of the aluminum or aluminum alloy base member 2 minus the sheath heater 3. The effective sectional area of the sectional area can further improve the adhesion of the aluminum or aluminum alloy base member 2 to the sheathed heater 3 by forging and crimping. When the aluminum or aluminum alloy member 4 for joining is fitted to the aluminum or aluminum alloy base member 2, at least a part of the contact surface between the side surface of the groove portion 5 and the side surface of the aluminum or aluminum alloy member 4 for joining has a gap. good. Thereby, the aluminum or aluminum alloy member 4 for joining is reliably inserted into the sheath heater 3 by forging and crimping, whereby the tightness of the aluminum or aluminum alloy base member 2 and the sheath heater 3 can be further improved. Sticky.

In the method for producing a hot plate of the present invention, it is necessary to clean the surface as a pretreatment. For example, in the case of an aluminum or aluminum alloy member, it is appropriate to combine (1) surface degreasing with nitric acid, (2) washing with water, (3) caustic treatment (etching with an alkaline solution), and (4) washing with water, (5) The surface is cleaned by washing with nitric acid, (6) washing with water, and (7) washing with hot water. The reason for this is that the bonding property is improved by cleaning the surface before the forging.

The aluminum or aluminum alloy base member 2 and the aluminum or aluminum alloy member 4 for joining are subjected to forging and pressure bonding, and can be subjected to cutting, polishing, alumina film treatment, and sand blasting. After forging, cutting is performed, and a portion of the base member having a larger effective area is pressed by the joining member at the time of forging and pressing, and the pressed surface of the hot plate after forging and pressing is caused. The deformation in the vicinity of the crimping portion can be removed by cutting and grinding.

The forging temperature at the time of pressure-bonding the aluminum or aluminum alloy base member 2 to the aluminum or aluminum alloy member 4 for joining is preferably metal-bonded in a temperature range of 250 ° C to 500 ° C, and a range of 300 ° C to 450 ° C is preferable. And 350 ° C ~ 420 ° C is more appropriate. The advantage of forging pressure bonding is that it can be joined in a very short time when the joining members are integrated as compared with the welding method.

After natural cooling after forging to normal temperature, stress will be generated due to the difference in shrinkage between the aluminum or aluminum alloy base member and the sheathed heater of the stainless steel. At normal temperature, the aluminum or aluminum alloy base member has a large endurance, so the heating plate does not Deformation. The stainless steel of the sheathed heater is also high in strength, so it does not cause deformation or breakage of the sheath heater. The hot plate forged at around 400 °C will be heated to the temperature range of 400 ° C, which will return to the state of forging. The stress between the aluminum member and the stainless steel sealing material is very small, so no heating plate will be produced. Deformation, deformation or damage of the sheath material.

In the method of manufacturing the heating plate 1 of the present invention, the aluminum or aluminum alloy used for the base member 2 and the joining member 4 is composed of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. One of them is chosen. The material and manufacturing method of the aluminum or aluminum alloy base member 2 are not particularly limited, and in view of leakage resistance, it is preferable to use a rolled plate or a forged member having less internal defects as a material. From the viewpoint of the corrosion resistance of the cleaning gas, the aluminum material is preferably JIS 1050 having a purity of 99.5% or more. Further, in view of preventing creep deformation due to an increase in size of the heating plate, a higher strength alloy such as 1100 or 6061 may be used, and aluminum or an aluminum alloy of one of the above may be used. In addition, the Al-Mg alloy such as 5005 or 5052 having a small magnesium content can also satisfy the pressure bondability, and can be used in a composition range in which metal bonding is ensured.

When the base member 2 and the joining member 4 of aluminum or aluminum alloy are made of the same material, the members are pressed against each other by deformation at the time of press-bonding, and physical metal joining is easily achieved. Further, even if the base member 2 and the joining member 4 of aluminum or aluminum alloy are different kinds of materials, the plastic deformation of the two members during forging compression allows the members to be pressed against each other, thereby achieving physical metal joining, for example, Even if different materials of the JIS1000 type aluminum material and the JIS3000 type aluminum material are mutually bonded, physical metal joining can be achieved by forging pressure bonding. The above-described method for manufacturing a hot plate of the present invention can improve the adhesion between the aluminum or aluminum alloy base member 2 and the sheath heater 3, and can greatly improve the transfer from the sheath heater 3 to the aluminum or aluminum alloy base member 2. The thermal conductivity allows the life of the sheathed heater 3 to be increased. On the other hand, in the method for manufacturing the heating plate 1 of the present invention, the forging is performed in the vicinity of the use temperature region, that is, around 400 ° C. Therefore, the stress between the aluminum member and the sheath material of the stainless steel is extremely small, and the heating plate is less likely to be deformed. It can be used for a long time.

In the present invention, the two aluminum or aluminum alloy metals are not joined by forging, but only the portion buried in the sheath heater is forged and crimped, so that the thermal stress of the heating plate can be prevented. Deformation situation. Therefore, even if the heating plate is increased in size, the forging pressure welding is performed only by pressing the vicinity of the sheath heater in the present invention, so that the power of the forging press can be reduced and the press can be reduced as compared with the case where the entire pressing plate is joined. The area of the material pressing portion can prevent the size of the press from being increased, and the processing procedure can be reduced as compared with the case where the two sheets are forged and pressure-bonded.

In the present invention, the aluminum or aluminum alloy member 4 for joining has a tapered portion, or when the aluminum or aluminum alloy member 4 for joining is fitted to the groove portion 5 of the aluminum or aluminum alloy base member 2, At least a part of the side surface of the groove portion 5 is provided with a gap, so that the aluminum or aluminum alloy member 4 for joining can be surely inserted into the position in contact with the sheath heater 3 by forging.

In the present invention, the sheath heater and the aluminum or aluminum alloy member for joining are housed in the groove portion provided in the aluminum or aluminum alloy base member by the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member. Forging and crimping for metal joining maintains a high degree of tightness between the aluminum or aluminum alloy base member and the sheathed heater, and an effect of ensuring high thermal conductivity can be obtained.

According to the present invention, the metal joining by press-bonding the aluminum or aluminum alloy member for bonding to the aluminum or aluminum alloy base member is performed in the vicinity of the temperature of the heating region using the hot plate, and in the heating plate By using the temperature region, the stress caused by the difference in linear expansion between the aluminum or aluminum alloy base member and the sheath material of the internal heater can be alleviated, and deformation or breakage of the sheath heater, deformation of the heating plate, and the like can be avoided. At the same time, the adhesion or thermal conductivity of the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member can also be improved.

The present forging technique is composed of aluminum or an aluminum alloy, and according to the present invention, the metal member for accommodating the joining metal member and the sheathing heater are forged and pressure-bonded, as long as the heat conductivity is high. The material is not limited to aluminum or aluminum alloy. As a metal material for considering the service life of the heater, it is also a material having a large coefficient of linear expansion.

As such a material which can be forged and pressure-bonded, the thermal conductivity is high and the coefficient of thermal expansion is large, there is copper or a copper alloy. The same heating plate can be obtained even with copper or copper alloy. In the case where a hot plate is produced by a forging and pressing method using a copper alloy, forging press bonding is preferably performed at a temperature ranging from 700 ° C to 900 ° C.

Then, in the heating plate of the present invention, the sheath heater is housed in the groove portion provided in the metal or alloy base member, and the joining metal or alloy member made of the same kind of metal or alloy is fitted into the groove. The groove portion is formed by metal bonding by forging and pressing the metal or alloy member for bonding described above with the metal or alloy base member, and is in addition to thermal conductivity or coefficient of linear expansion in terms of workability or workability. A structure in which the forging pressure bonding temperature is low and lightweight is preferable. In this respect, aluminum or an aluminum alloy is preferable. In the present invention, the metal or alloy member for joining and the metal or alloy base member are all made of aluminum or an aluminum alloy.

1, 101, 103, 106, 110, 111, 121. . . Heating plate

2. . . Aluminum or aluminum alloy base member

3, 102, 123. . . Sheath heater

4. . . Aluminum or aluminum alloy member for joining

5. . . Groove

6, 7, 51, 52. . . The central axis

11, 12, 13, 14, 15, 16, 17, 18, 19, 20. . . Edge of aluminum or aluminum alloy member for joining

31. . . T-shaped vertical rod part

32. . . T-shaped horizontal bar section

34. . . There is no vertical bar at the position of the heater directly below the horizontal bar

33, 35. . . Split position

36, 37. . . The lower edge of the Y-shaped horizontal bar portion

38. . . Contact surface with sheathed heater

53. . . Central department

104, 107. . . Lower base

104a, 107a. . . Trench

105, 108. . . Upper base

109. . . Edge

112, 113. . . Aluminum component

114. . . Locking department

122. . . Vacuum chamber

124. . . Support component

125. . . Substrate

126. . . Gas supply port

127. . . Supply port

Fig. 1 is a typical example of a cross-sectional view of a heating plate according to an embodiment of the present invention. Fig. 1(a) shows a heating plate in which the cross-sectional shape of the aluminum or aluminum alloy member for joining is rectangular. Fig. 1(b) shows a heating plate in which the cross-sectional shape of the aluminum or aluminum alloy member for joining is formed into a tapered shape.

Fig. 2 is a plan view of a heating plate according to an embodiment of the present invention.

Fig. 3 is a cross-sectional view taken along line A-A' of Fig. 2, showing a case where the cross-sectional shape of the aluminum or aluminum alloy member for joining is rectangular.

Fig. 4 is a cross-sectional view taken along line A-A' of Fig. 2, showing a case where the cross-sectional shape of the aluminum or aluminum alloy member for joining is tapered.

Fig. 5 is a plan view of a heating plate according to another embodiment of the present invention.

Figure 6 is a plan view of a circular heating plate. It is an example which is symmetrical with respect to the central axis of Fig. 6 (a), and Fig. 6 (b) is an example which is symmetrical with respect to the center point.

Fig. 7 is a cross-sectional view showing the aluminum or aluminum alloy member for joining of the present invention. Fig. 7(a) shows a cross-sectional shape in which the entire shape is tapered. Fig. 7(b) shows a cross-sectional shape in which a portion is formed into a tapered shape. Figure 7 (c) shows the formation of a tapered shape with two angles of inclination.

Fig. 8 is a view showing an embodiment of a joint aluminum or aluminum alloy member having a substantially T-shaped cross-sectional shape according to the present invention. Fig. 8(a) shows the cross-sectional shape of the integrated T-shape. Fig. 8(b) shows a cross-sectional shape of a T-shape divided into a plurality of portions. Fig. 8(c) shows the cross-sectional shape of another T-shaped integrated type. Fig. 8(d) shows the cross-sectional shape of another T-shape divided into a plurality of parts. Fig. 8(e) shows a cross-sectional shape of a T-shape in which a taper process is performed on the horizontal bar portion.

Fig. 9 is a view showing an embodiment in which the cross-sectional shape of the aluminum or aluminum alloy member for joining of the present invention is Y-shaped.

Fig. 10 is a view showing the shape of a face directly contacting the sheath heater of the present invention, which is a cross-sectional shape based on a rectangle of a joint aluminum or aluminum alloy member having a curvature in the same direction as the heater. .

Fig. 11 is a view showing a shape of a face portion directly contacting the sheath heater of the present invention, which is a cross-sectional shape of a tapered portion of a joint aluminum or aluminum alloy member having a curvature in the same direction as the heater.

Fig. 12 is a view showing a schematic structure of a conventional casting type heating plate in which a sheathed heater is incorporated.

Fig. 13 is a view showing the schematic structure of a bolt-on type heating plate.

Fig. 14 is a view showing a schematic structure of a conventional fusion-type heating plate.

Fig. 15 is a view showing a schematic structure of a brazing and diffusion bonding type heating plate.

Fig. 16 is a view showing a schematic structure of a forging pressure type heating plate.

Fig. 17 is a view showing a schematic configuration of a chemical vapor deposition (CVD) processing apparatus in which a sheath heater is disposed inside.

1. . . Heating plate

2. . . Aluminum or aluminum alloy base member

3. . . Sheath heater

4. . . Aluminum or aluminum alloy member for joining

Claims (26)

A heating plate characterized in that a sheath heater is housed in a groove portion provided in an aluminum or aluminum alloy base member, and an aluminum or aluminum alloy member for joining is fitted to the groove portion, and the joint is used for the joint The aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are metal joined by a press-bonding method, and the cross-sectional area of the aluminum or aluminum alloy member for bonding is larger than: from the aluminum or aluminum alloy base member The cross-sectional area of the formed groove portion minus the effective sectional area of the cross-sectional area of the sheath heater, and at least a part of the aluminum or aluminum alloy member for joining has two sides facing each other in the embedding direction, facing downward And the predetermined taper whose interval is narrowed. The heating plate according to claim 1, wherein the shape of the cross section of the aluminum or aluminum alloy member for joining is a rectangle, and the width of the cross section is the same as or slightly larger than the width of the groove portion. The heating plate according to the first aspect of the invention, wherein the height of the aluminum or aluminum alloy member for joining is 1 or more and 5 or less with respect to a ratio of a taper lower width of the cross section or a member lowermost width. The heating plate according to claim 1, wherein the taper angle of the tapered portion of the aluminum or aluminum alloy member for joining is more than 0° and not more than 45°. The heating plate according to claim 1, wherein the cross-sectional shape of the aluminum or aluminum alloy member for bonding is slightly T-shaped, and the above T The vertical rod portion of the font is joined to the aluminum or aluminum alloy base member together with the horizontal rod portion. The heating plate according to claim 5, wherein the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and is a part or all of the vertical rod portion for pressing the heater, and the horizontal portion The remaining portion of the stick portion is divided into different individuals. The heating plate according to claim 1, wherein the aluminum or aluminum alloy member for bonding has a substantially T-shaped cross-sectional shape, and is different from a position different from a position of the vertical T-shaped portion of the slightly T-shaped portion. That is, a fitting convex portion or a concave portion is provided at a position where the sheath heater is not present on the lower side of the horizontal bar portion, and a fitting convex portion of the aluminum or aluminum alloy base member and the bonding aluminum or aluminum alloy member is provided. The recessed portion or the convex portion to which the portion or the recess is opposed is provided in the groove portion of the aluminum or aluminum alloy base member. The heating plate according to claim 1, wherein the aluminum or aluminum alloy member for joining has a substantially T-shaped cross-sectional shape, and the bottom surface of the horizontal portion of the slightly T-shaped portion has a gentle slope toward the center. The Y shape of the degree. In the heating plate according to the fifth aspect of the invention, in the aluminum or aluminum alloy member for bonding described above, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less. In the heating plate according to the sixth aspect of the invention, in the aluminum or aluminum alloy member for bonding described above, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less. The heating plate according to claim 7, wherein in the aluminum or aluminum alloy member for the joint of the slightly T-shaped type, the ratio of the height of each of the longitudinal rod portions and the fitting convex portion or the concave portion to the width is 1 or more, 4 or less. In the heating plate according to the eighth aspect of the invention, in the aluminum or aluminum alloy member for bonding described above, the ratio of the height of the cross section of the vertical rod portion to the width is 1 or more and 4 or less. The heating plate according to claim 1, wherein the shape of the face portion of the aluminum or aluminum alloy member for joining that is in contact with the sheath heater is a plane parallel to the plate surface of the aluminum or aluminum alloy base member, or It is a curved surface having a curvature in the same direction as the outer circumference of the sheath heater. A heating plate according to claim 1, wherein a width of a member of the face portion of the bonding aluminum or aluminum alloy member that is in contact with the sheath heater is larger than a width of the sheath heater. The heating plate according to claim 1, wherein the cross-sectional area before the forging and pressing of the aluminum or aluminum alloy member for bonding is larger than the sectional area of the groove portion formed from the aluminum or aluminum alloy base member. The effective sectional area of the sectional area of the sheath heater is subtracted, and when the aluminum or aluminum alloy member for bonding is fitted to the groove portion of the aluminum or aluminum alloy base member, at least a part of the side surface is There is a gap. A heating plate according to claim 1, wherein the heating plate for accommodating the sheath heater is excellent in thermal conductivity to a sheath portion of the sheath heater. A heating plate according to claim 1, wherein the heating plate for accommodating the sheath heater is airtight. The sheathing heater of the heating plate for accommodating the above sheathed heater, for example, has a higher electrical insulation. A method for producing a heating plate, wherein a groove portion is formed in an aluminum or aluminum alloy base member, a sheath heater is accommodated in the groove portion, and an aluminum or aluminum alloy member for joining is housed in the sheath heater The aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are metal-bonded by a press-bonding method, and the cross-sectional area of the aluminum or aluminum alloy member for bonding is larger than: formed from the aluminum Or the sectional area of the groove portion of the aluminum alloy base member minus the effective sectional area of the sectional area of the sheath heater. A method for producing a heating plate, wherein a groove portion is formed in an aluminum or aluminum alloy base member, a sheath heater is accommodated in the groove portion, and an aluminum or aluminum alloy member for joining is housed in the sheath heater The aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are joined by a press-bonding method, and when the aluminum or aluminum alloy member for joining is divided into a plurality of portions, the predetermined order is A plurality of members are forged and crimped. A method for producing a heating plate, wherein a groove portion is formed in an aluminum or aluminum alloy base member, a sheath heater is accommodated in the groove portion, and an aluminum or aluminum alloy member for joining is housed in the sheath heater The aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are metal-bonded by a forging and pressing method, and the aluminum or aluminum alloy member for bonding is formed into a rectangular shape in cross section, and the cross section is used. The member having the same width or width as the width of the groove portion is metal-bonded by a forging and pressing method. A method for producing a heating plate, wherein a groove portion is formed in an aluminum or aluminum alloy base member, a sheath heater is accommodated in the groove portion, and an aluminum or aluminum alloy member for joining is housed in the sheath heater The aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are metal-bonded by a forging and pressing method, and the aluminum or aluminum alloy member for bonding is used in combination with the sheathed heater. The shape of the connected face is a flat surface parallel to the plate surface of the aluminum or aluminum alloy base member, or a curved surface having a curvature in the same direction as the outer circumference of the sheath heater, and the metal is pressed by a press-bonding method. Engage. A method for manufacturing a heating plate, wherein a groove portion is formed in an aluminum or aluminum alloy base member, The sheath heater is housed in the groove portion, and the aluminum or aluminum alloy member for joining is housed in the sheath heater, and the aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are borrowed. The metal joining is performed by a forging and pressing method, and the ratio of the height of the cross section of the aluminum or aluminum alloy member for joining to the width is 1 or more and 4 or less. A method for producing a heating plate, wherein a groove portion is formed in an aluminum or aluminum alloy base member, a sheath heater is accommodated in the groove portion, and an aluminum or aluminum alloy member for joining is housed in the sheath heater The aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are metal-bonded by a forging and pressure bonding method, and the cross-sectional area before the forging and pressing of the aluminum or aluminum alloy member for bonding is larger than The cross-sectional area of the groove portion formed by the aluminum or aluminum alloy base member minus the effective sectional area of the sectional area of the sheath heater, and when fitted to the groove portion, at least a part of the side surface has a gap The aluminum or aluminum alloy member for bonding and the aluminum or aluminum alloy base member are joined by a press-bonding method. A method for improving the adhesion of an aluminum or aluminum alloy member for bonding a heating plate to an aluminum or aluminum alloy base member, which is characterized in that the heating plate described in claim 19 is used. The method is performed by forging and crimping. A method for improving the service life of a heater, characterized in that it is a method for improving the adhesion of an aluminum or aluminum alloy member for joining a heating plate to an aluminum or aluminum alloy base member as described in claim 25 of the patent application.