KR102351319B1 - Heating assembly - Google Patents

Abstract

The present invention may provide a heating assembly that reduces heat loss and improves heat transfer efficiency. One embodiment of the present invention discloses a heating assembly which comprises: a heating member which is formed to generate heat; a heating body unit which receives the heat generated by the heating member; and a heat transfer member which is disposed in at least one region between the heating body unit and the heating member.

Description

Heating assembly

The present invention relates to a heating assembly.

With the development of technology, various electrical and electronic devices are being manufactured and used, and electrical or electronic properties of these electronic devices may be formed through various processes.

In addition, in various processes for forming electrical or electronic properties in these electronic devices, a semiconductor process using gas or plasma generated from the gas is used.

In order to prevent agglomeration of the gas during the semiconductor process, an apparatus including a heating member to apply heat to the gas may be used.

On the other hand, there is a limit in effectively transferring heat when using a heating member according to various conditions and types of the semiconductor process.

The present invention may provide a heating assembly that reduces heat loss and improves heat transfer efficiency.

An embodiment of the present invention includes a heating member formed to generate heat, a heating body portion receiving heat generated from the heating member, and a heat transfer member disposed in at least one region between the heating body portion and the heating member, and , The heating body part includes a groove formed to correspond to the heat transfer member, the heating member is disposed to face at least one region of the inner surface of the groove, the heat transfer member is between the heating member and the inner surface of the groove In Disclosed is a heating assembly comprising a side member formed to face the inner surface of the heating member and the groove.

In the present embodiment, when the heat transfer member is disposed in the groove, at least one region may protrude from the groove.

In this embodiment, the heat transfer member may be formed to include an upper member formed to cover the upper surface of the heating member.
In this embodiment, the side member is connected to the upper member and may be formed to correspond to at least opposite side surfaces of the heating member.
In this embodiment, the upper member may include an opposing surface facing the heating member, and the opposing surface of the upper member may include a shape corresponding to the upper surface of the heating member.
In this embodiment, the heat transfer member may include a lower member connected to the side member and disposed to face the upper member with the heating member interposed therebetween.
In this embodiment, it may include a jig portion disposed on the heating body portion and formed to support a region of the heat transfer member.
In this embodiment, the jig part may include fixing the heating member by a method of applying pressure to a region of the outer surface of the heat transfer member.
In the present embodiment, the jig part may include a spaced apart from the inner space of the groove, not corresponding to the inner space of the groove.
In this embodiment, the jig part may include a shape extending from a region spaced apart from the groove on one surface of the heating body part to correspond to a position overlapping with at least one region of the groove.
In the present embodiment, the jig part may include a curved shape between an area spaced apart from the groove and an area overlapping at least one area of the groove.
In this embodiment, it may include a spaced space formed in at least one area between the side member and the heating member.

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Other aspects, features and advantages other than those described above will become apparent from the following drawings, claims, and detailed description of the invention.

The heating assembly according to the present invention can reduce heat loss and easily improve heat transfer efficiency.

1 is a schematic cross-sectional view showing a heating assembly according to an embodiment of the present invention.
FIG. 2 is an exemplary perspective view of the heating assembly of FIG. 1 viewed from one direction.
3 is a perspective view exemplarily illustrating a heating member of the heating assembly of FIG. 2 .
4 is a perspective view illustrating a heat transfer member of the heating assembly of FIG. 2 .
5 is an exemplary diagram for use of a heating assembly according to an embodiment of the present invention.
6 is a schematic enlarged view of B of FIG. 5 .

Hereinafter, the configuration and operation of the present invention will be described in detail with reference to the embodiments of the present invention shown in the accompanying drawings.

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when described with reference to the drawings, the same or corresponding components are given the same reference numerals, and the overlapping description thereof will be omitted. .

In the following embodiments, terms such as first, second, etc. are used for the purpose of distinguishing one component from another, not in a limiting sense.

In the following examples, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components will be added is not excluded in advance.

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

In the following embodiments, the x-axis, the y-axis, and the z-axis are not limited to three axes on a Cartesian coordinate system, and may be interpreted in a broad sense including them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may refer to different directions that are not orthogonal to each other.

In cases where certain embodiments may be implemented otherwise, a specific process sequence may be performed different from the described sequence. For example, two processes described in succession may be performed substantially simultaneously, or may be performed in an order opposite to the order described.

1 is a schematic cross-sectional view showing a heating assembly according to an embodiment of the present invention.

The heating assembly 100 of this embodiment may include a heating member HB, a heating body part 110 and a heat transfer member 120 .

The heating element HB described herein may be used in a variety of applications. As an example, one or more gases, ions, or plasma may be used to apply heat to an apparatus for processing a target material such as a substrate or a wafer (eg SW of FIG. 5 ).

As a specific example, the heating member HB may be applied to an apparatus that performs an etching process, a cleaning process, an ashing process, a deposition process, or an ion implantation process on the material to be treated.

As an alternative embodiment, the heating member HB may be adjacent to a shower head (eg, SH of FIG. 5 ) for supplying gas in the direction of the material to be treated, or may be used to transfer heat to the shower head.

The heating member HB may be formed to generate heat. For example, it may be formed to generate heat by a heating element installed inside a hollow pipe or hot water circulating inside the hollow pipe.

As an optional embodiment, the heating member HB may be formed to generate heat by applying a current from a power source, and as a specific example, may have a coil-shaped heating element formed of a metal material.

As an optional embodiment, the heating member HB may have a curved surface based on the thickness direction, for example, the heating member HB may have a cross-sectional shape close to a circular shape.

The heating body part 110 may be formed to receive heat generated from the heating member HB. The heating body part 110 may receive heat generated from the heating member HB and transmit it to a member in a direction adjacent to the heating body part 110 . As an optional embodiment, the heating body unit 110 may transfer heat to a shower head (SH) or a gas supply unit (not shown) or a dielectric window (eg, DEW in FIG. 5 ).

The heating body part 110 may be formed of various materials, and may be formed of a metal material to effectively transfer heat, and may contain, for example, aluminum, steel, or the like, or an alloy thereof. As a specific example, it may be formed of an aluminum-based material.

A heating member HB may be disposed in an area of the upper surface of the heating body 110 .

As an optional embodiment, the heating body part 110 may include a groove 111 in one region of the upper surface. A heating member HB may be disposed in the groove 111 of the heating body part 110 .

The shape of the groove 111 of the heating body part 110 may be various, for example, it may have the shape of a groove having a depth in a thickness direction of the heating body part 110 and a width in a direction crossing it. have. In this case, the width of the groove 111 may be constant according to the depth. However, as another example not shown, the width of the groove 111 may vary depending on the depth, and as a specific example, the inner surface of the groove 111 may be formed to have a curved shape.

As an optional embodiment, the groove 111 of the heating body part 110 may be formed to have a shape corresponding to the heat transfer member 120 to be suitable for the arrangement of the heat transfer member 120 to be described later, for example, the heat transfer member ( 120) may be formed to have a shape corresponding to or in close contact with the outer surface.

In addition, as an optional embodiment, the heating body part 110 may be formed to have a spaced part SA, and this spaced part SA is an area in which the heating body part 110 is not formed, for example, an opening shape. can As a specific example, the spacer SA may correspond to an area for inflow or progress of a raw material gas used in a process for a material to be treated.

The heat transfer member 120 may be formed to be disposed in at least one area between the heating body part 110 and the heating member HB. Through this, the heating member (HB) is exposed to the air outside the heating body part 110 to reduce or prevent heat dissipation into the air, and heat generated in at least one area or the whole of the heating member (HB) is transferred to the heat transfer member It may be transmitted to the heating body part 110 through 120 . To improve heat transfer efficiency, the heat transfer member 120 may be formed of a material having good heat conduction properties, for example, a metal material.

As an optional embodiment, the heat transfer member 120 may be formed of the same material as the heating body unit 110, for example, may be formed of an aluminum-based material.

The heat transfer member 120 may be disposed on one surface of the heating body part 110 , for example, may be disposed to correspond to the groove 111 of the heating body part 110 . As a specific example, at least one region in the thickness direction of the heat transfer member 120 may be formed to be accommodated in the groove 111 of the heating body part 110 .

The heat transfer member 120 may have various shapes, and may include, for example, at least one of an upper member 123 , side members 121 and 122 , and a lower member 125 .

The upper member 123 is located on one side of the heating member HB, for example, in the upper direction of the heating member HB, which is the opposite direction to the direction toward the groove 111, and specifically, the upper surface of the heating member HB. It may be formed to cover. Through this, it is possible to effectively reduce the loss of heat generated by the heating member HB by dissipating in a direction away from the upper surface of the heating body part 110 .

As an optional embodiment, the upper member 123 may have a shape corresponding to the inner surface of the groove 111 , and for example, may be formed to be in close contact with or adjacent to the inner surface of the groove 111 .

The upper member 123 may include an opposing surface 123C facing the heating member HB. The facing surface 123C may be connected to the space SR between the side members 121 and 122 .

As an optional embodiment, the opposing surface 123C may be formed to have a shape corresponding to the upper surface of the heating member HB, for example, may be formed to have a curved shape corresponding to the curved surface of the upper surface of the heating member HB. have.

As a specific example, the opposing surface 123C may be formed to have a cross-sectional shape of a circular arc or a semicircle to correspond to a portion of a circular cross-section based on the thickness direction of the heating member HB. In addition, as an example, at least one region of the opposing surface 123C may be in contact with or in close contact with the upper side of the heating member HB. Through this, heat generated in the heating member HB is easily transferred to the upper member 123 or the side members 121 and 122 through the opposite surface 123C, effectively reducing heat loss and improving thermal efficiency. .

In addition, as an example, it is possible to support the heating member HB through the upper member 123 , so that a stable arrangement of the heating member HB can be easily maintained.

As an optional embodiment, the heat transfer member 120 may further include side members 121 and 122 formed to be connected to the upper member 123 .

The opposite side members 121 and 122 of the heat transfer member 120 may be disposed between the inner surface of the groove 111 and the heating member HB, respectively. As an optional embodiment, the side members 121 and 122 may have a shape corresponding to the inner surface of the groove 111 , and for example, may be formed to be in close contact with or adjacent to the inner surface of the groove 111 .

The heat transfer area is increased through the side members 121 and 122, and when the heat generated from the heating member HB is transferred to the heating body part 110 through the inner surface of the groove 111, the thermal efficiency increases and the heating member HB ) can reduce the loss of heat generated by dissipation into the air.

As an optional embodiment, the heat transfer member 120 is formed to be connected to the side members 121 and 122 connected to the upper member 123, and disposed to face the upper member 123 with the heating member HB interposed therebetween. A lower member 125 may be further included.

The lower member 125 may have a shape accommodated in the groove 111 , and for example, may be disposed to contact the inner bottom surface of the groove 111 . Through this, it is possible to increase the area in which the heat through the heating member HB is transferred to the heating body part 110 in the downward direction and to reduce the loss of heat generated by the heating member HB being dissipated into the air.

The lower member 125 may have various shapes, and, for example, may be formed to be connected to each of the opposite inner surfaces of the side members 121 and 122 facing each other.

As an optional embodiment, the upper member 123 and the side members 121 and 122 may have an integrally extended structure, and the lower member 125 may be formed on the inner surface of each of the side members 121 and 122 facing each other. It may be coupled to one region, and may be coupled using, for example, welding. As a specific example, after accommodating the heating member HB in a structure in which the upper member 123 and the side members 121 and 122 are integrally extended, the lower member 125 is welded to the side members 121 and 122 by welding. can be combined. On the other hand, it is also possible to combine by various methods using a force fit or screws instead of welding.

Through this, a structure in which the heating member HB is accommodated inside the heat transfer member 120 can be easily implemented, and the heat transfer member 120 in which the heating member HB is accommodated is disposed in the groove 111 to form a heating body ( 110), it is possible to effectively implement a structure for transferring heat.

The thickness of the upper member 123 may vary. For example, it may have a first thickness T1 and a second thickness T2. The second thickness T2 is a thickness corresponding to the area between the opposing surface 123C and the upper surface of the upper member 123 (for example, the surface facing the lower member 125 and the opposite direction), for example, For example, it can have a variable value,

The first thickness T1 is the lower surface of the upper member 123 (for example, the surface facing the lower member 125) in the region between the opposing face 123C and the side members 121 and 122 and the opposing face ( 123C), and may have a larger value than the second thickness T2.

The lower member 125 may have a third thickness T3 .

As an optional embodiment, the first thickness T1 and the second thickness T2 of the upper member 123 may be greater than the third thickness T3 of the lower member 125 , respectively. Through the thick upper member 123 , it is possible to effectively reduce or block heat loss in a direction away from the upper surface of the heating body part 110 , and improve heat transfer efficiency to the heating body part 110 . In addition, the supporting effect of the heating member HB through the upper member 123 can be easily increased.

In addition, as an optional embodiment, the first thickness T1 and the second thickness T2 of the upper member 123 are the respective thicknesses of the side members 121 and 122 (for example, in the X-axis direction of FIG. 1 ). thickness), the effect of reducing heat loss toward the upper side may be increased, and the effect of direct heat transfer to the side members 121 and 122 may be improved.

As an optional embodiment, the jig unit 130 may be disposed to support one region of the heat transfer member 120 . For example, the jig unit 130 may be formed to support the upper member 123 of the heat transfer member 120 .

As a specific example, one area of the jig unit 130 is disposed on the heating body unit 110 , and may be fixed to one area of the heating body unit 110 , and another area extending therefrom is the heat transfer member 120 . It is possible to support the upper surface of the upper member 123 of the heat transfer member 120 may be applied to pressure so as to be in close contact with the heating body portion (110). Through this, the heat transferred to the heat transfer member 120 can be effectively transferred to the heating body unit 110 .

The jig unit 130 may be formed of various materials. For example, it may be formed of a material different from that of the heat transfer member 120 , and as a specific example, it may be formed of a material having a lower thermal conductivity than the heat transfer member 120 .

As an optional embodiment, the jig unit 130 may be formed to contain a non-metal material, for example, a plastic-based material.

Through this, the heat transferred to the heat transfer member 120 can be effectively transferred to the heating body part 110 instead of the jig part 130 .

The heating member HB that generates heat of this embodiment may be accommodated in the inner space of the heat transfer member 120, and the heat transfer member 120 in which the heating member HB is accommodated may be disposed in the heating body unit 110. Thereby, it is possible to reduce the heat generated from the heating member HB from being dissipated or lost in a direction away from the heating body part 110 , and to allow the heat to be effectively transferred to the heating body part 110 . In addition, as an example, the heat transfer member 120 has a shape similar to a box based on the thickness direction, and the heat transfer member 120 is disposed in a groove 111 of a shape corresponding to the heat transfer member 120, the heat transfer member ( At least one region in the thickness direction of 120 may be accommodated in the groove 111 . Through this, it is possible to increase the heat transfer area to the heating body part 110 and increase the heat loss reduction effect.

In addition, as an optional embodiment, the heat transfer member 120 is heated to the body part 110 while maintaining the heat loss reduction effect and heat transfer efficiency improvement effect by disposing the jig part 130 arranged to support the heat transfer member 120 from the upper side. It is possible to stably maintain the arrangement of the heat transfer member 120 even when a plurality of processes are performed by fixing the heat transfer member 120 over time.

FIG. 2 is an exemplary perspective view of the heating assembly of FIG. 1 viewed from one direction.

FIG. 3 is a perspective view exemplarily illustrating a heating member of the heating assembly of FIG. 2 , and FIG. 4 is a perspective view illustrating an exemplary heat transfer member of the heating assembly of FIG. 2 .

Referring to FIG. 2 , the heating body part 110 of the heating assembly 100 may be formed to have a curved edge, for example, an edge close to a circle.

In addition, the heating body part 110 may be formed to have an opening-shaped spacer SA on the inside, and may be formed to surround the spaced part SA as a specific example.

The heating body part 110 may include a groove 111 corresponding to the heat transfer member 120 , and the groove 111 may have a shape surrounding the separation part SA, for example, a circular shape on a plane. may have the form of

The heat transfer member 120 may be disposed to correspond to the groove 111 and may have a shape surrounding the spacer SA, for example, may have a circular shape on a plane.

In addition, an upper region of the heat transfer member 120 may be supported by the plurality of jig units 130 while being disposed in the groove 111 .

As an optional embodiment, the plurality of jig units 130 may be arranged to be spaced apart from each other, for example, a plurality of jig units 130 may be arranged along the circumferential direction of the heat transfer member 120 .

Referring to FIG. 3 , the heating member HB may have a curved planar shape, and may have a round coil shape in cross section. For example, the heating member (HB) may be formed in a shape having a rounded edge surrounding at least one area of the spaced portion (SA) of the heating body (110).

Exemplarily, the heating member HB may include a first end HBT1 and a second end HBT formed to be connected to an external power source or a pump. As a specific example, the first end HBT1 and the second end HBT may be a connection connector for connecting the heating member HB to an external member.

When the heating member HB is disposed in the inner space of the heat transfer member 120 , the first end HBT1 and the second end HBT may have a shape protruding to the outside of the heat transfer member 120 .

For example, the first end HBT1 and the second end HBT of the heating member HB may be spaced apart from each other and formed to protrude in a direction away from the groove 111 , for example, upward. Through this, it is possible to improve the reliability of the connection with the power source or the pump while maintaining the heating effect through the heating member (HB).

As an optional embodiment, when a heating element is installed inside the heating member HB, a current may be input to one of the first end HBT1 and the second end HBT and a current may be outputted to the other one. On the other hand, when hot water circulates inside the heating member HB, hot water may be introduced into one of the first end HBT1 and the second end HBT and hot water may be withdrawn from the other.

2 and 4 , the heat transfer member 120 may include a through region 120H so that the first end HBT1 and the second end HBT of the heating member HB extend therethrough. For example, the through region 120H may be formed in one region of the upper member 123 of the heat transfer member 120 .

The heat transfer member 120 may be formed in a shape surrounding the spacer SA, for example, may have a circular planar shape corresponding to the heating member HB.

As an exemplary manufacturing method, after inserting the heating member HB into the inner space of the integrated structure of the side members 121 and 122 and the upper member 123 on both sides, the lower member 125 may be coupled, specifically As an example, the lower member 125 and the side members 121 and 122 may be connected by welding.

FIG. 5 is an exemplary view for use of the heating assembly according to an embodiment of the present invention, and FIG. 6 is a schematic enlarged view of FIG. 5B .

Referring to FIG. 5 , as an example, the shower head SH is disposed adjacent to the heating assembly 100 . For example, the shower head SH may be formed to introduce one or more gases into the material to be treated SW.

In addition, the processing target material SW to be processed through gas distribution or processing using plasma reaction may be disposed under the shower head SH. For example, the material to be processed SW may be of various types such as a substrate or a wafer.

The shower head SH may be disposed in the inner region of the heating body part 110 of the heating assembly 100, for example, the heating body part 110 that is the opposite surface of the surface on which the heating member HB is disposed. It may be disposed adjacent to one region of the lower surface.

As an optional embodiment, the dielectric window DEW may be disposed in the inner region of the heating body part 110 . For example, the heating member HB may be disposed to be adjacent to one area of the upper surface of the heating body part 110, which is a surface opposite to the surface on which the heating member HB is disposed.

The dielectric window DEW may support a gas supply unit (not shown) that supplies gas to the shower head SH.

Through this, when the heat generated from the heating member HB is transferred to the shower head SH, the dielectric window DEW, or the gas supply unit (not shown) through the heating body unit 110, the uniformity of heat transfer is improved and the local It is possible to reduce the occurrence of defects due to heat concentration.

Referring to FIG. 6 , the jig part 130 may include a first contact part 131 in contact with the upper member 123 and a second contact part 132 in contact with the heating body part 110 , the jig part 130 . When one region is fixed to the false heating body part 110 and the other region supports the upper member 123 of the heat transfer member 120 , the jig part 130 may be formed such that a spaced region is formed.

For example, the separation area ET of the heating body part 110 and the separation area ES of the upper member 123 may be spaced apart from the jig unit 130 . Through this, after the heat generated in the heating member HB is transferred to the heat transfer member 120 or the heating body part 110, it is possible to reduce unnecessary staying in the jig part 130 or loss through the jig part 130. can

As a result, it is possible to easily increase the effect of improving heat transfer characteristics and reducing heat loss using the heating assembly 100 .

As such, the present invention has been described with reference to the embodiments shown in the drawings, which are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. . Accordingly, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

The specific implementations described in the embodiment are only embodiments, and do not limit the scope of the embodiment in any way. In addition, unless there is a specific reference such as "essential" or "importantly", it may not be a necessary component for the application of the present invention.

In the specification of the embodiments (especially in the claims), the use of the term “above” and similar referential terms may be used in both the singular and the plural. In addition, when a range is described in the embodiment, it includes the invention to which individual values belonging to the range are applied (unless there is a description to the contrary), and each individual value constituting the range is described in the detailed description. . Finally, the steps constituting the method according to the embodiment may be performed in an appropriate order unless the order is explicitly stated or there is no description to the contrary. The embodiments are not necessarily limited according to the order of description of the above steps. The use of all examples or exemplary terms (eg, etc.) in the embodiment is merely for describing the embodiment in detail, and unless it is limited by the claims, the scope of the embodiment is limited by the examples or exemplary terminology. it is not In addition, those skilled in the art will appreciate that various modifications, combinations, and changes may be made according to design conditions and factors within the scope of the appended claims or equivalents thereof.

100: heating assembly 110: heating body part
111: groove 120: heat transfer member
121,122: side member 123: upper member
123C: opposing surface 125: lower member
130: jig portion HB: heating member
SH: shower head SA: spacer
SW: material to be treated DEW: dielectric window

Claims (12)

a heating member configured to generate heat;
a heating body receiving the heat generated by the heating member; and
It includes a heat transfer member disposed in at least one area between the heating body and the heating member,
The heating body part includes a groove formed to correspond to the heat transfer member,
The heating member is disposed to face at least one region of the inner surface of the groove,
The heat transfer member includes a side member formed between the heating member and the inner surface of the groove to face the heating member and the inner surface of the groove. According to claim 1,
The heating assembly including the heat transfer member is disposed so that at least one region protrudes from the groove when disposed in the groove. According to claim 1,
The heat transfer member is formed to include an upper member formed to cover the upper surface of the heating member, the heating assembly. 4. The method of claim 3,
The side member is connected to the upper member and formed to correspond to at least opposite both sides of the heating member, the heating assembly. 5. The method of claim 4,
The upper member includes an opposing surface facing the heating member,
The opposing surface of the upper member comprises that formed to have a shape corresponding to the upper surface of the heating member, the heating assembly. 5. The method of claim 4,
The heat transfer member includes a lower member connected to the side member and disposed to face the upper member with the heating member interposed therebetween. According to claim 1,
A heating assembly including a jig portion disposed on the heating body portion and formed to support a region of the heat transfer member. 8. The method of claim 7,
The jig unit heating assembly comprising fixing the heating member by applying pressure to a region of the outer surface of the heat transfer member. 8. The method of claim 7,
The jig portion does not correspond to the inner space of the groove, and the heating assembly comprising a spaced apart from the inner space of the groove. 8. The method of claim 7,
The heating assembly including a jig portion formed on one surface of the heating body portion to have a shape extending from a region spaced apart from the groove to correspond to a position overlapping with at least one region of the groove. 11. The method of claim 10,
The heating assembly comprising the jig portion formed to have a curved shape between the area spaced apart from the groove and the area overlapping at least one area of the groove. According to claim 1,
A heating assembly comprising a spaced space formed in at least one area between the side member and the heating member.

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