TW202247697A - Heating assembly - Google Patents

Abstract

One embodiment of the invention discloses a heating element, which comprises: a heating member formed to generate heat; a heating body unit for receiving the heat generated by the heating member; and a heat transfer member disposed in at least one region between the heating body unit and the heating member. The heating body unit includes a groove formed corresponding to the heat transfer member. The heating member is configured to face at least one area of the inner surface of the groove. The heat transfer member includes a side member formed between the heating member and the inner surface of the groove to face the heating member and the inner surface of the groove.

Description

Heating element

The invention relates to a heating element.

With the development of technology, various electrical and electronic components are manufactured and used, and these electronic components can form electrical or electronic characteristics through various processes.

In addition, semiconductor processes using gas or plasma generated from gas are used in various processes for forming electrical or electronic characteristics in these electronic components.

In order to prevent the gas from agglomerating during such a semiconductor process, a device including a heating element may be used to apply heat to the gas.

On the other hand, when a heating member is used according to various conditions and types of semiconductor processes, there is a limitation in efficiently transferring heat.

The present invention can provide a heating element that reduces heat loss and improves heat transfer efficiency.

Technical solutions

An embodiment of the present invention discloses a heating element including: a heating part formed to generate heat; a heating body part receiving heat generated by the heating part; and a heat transfer part disposed on the At least one area between the heating body and the heating component, the heating body includes a groove formed corresponding to the heat transfer component, and the heating component is configured to be in contact with the inner surface of the groove At least one region faces, and the heat transfer member includes a side member formed between the heating member and the inner surface of the groove so as to face the heating member and the inner surface of the groove.

In this embodiment, at least one region of the heat transfer member may be arranged protruding from the groove when arranged in the groove.

In this embodiment, the heat transfer part may be formed to include an upper part formed to cover the upper surface of the heating part.

In this embodiment, the side part may be connected to the upper part and formed to correspond to at least two facing sides of the heating part.

In this embodiment, the upper member may include a facing surface facing the heating member, and the facing surface of the upper member is formed to have a shape corresponding to the upper surface of the heating member.

In this embodiment, the heat transfer member includes a lower member connected to the side member and arranged to face the upper member via the heating member.

In this embodiment, the heating element may include a clamp portion disposed on the heating body portion and formed to support an area of the heat transfer member.

In this embodiment, the jig portion may fix the heating member in a method of applying pressure to an area outside the heat transfer member.

In this embodiment, the jig portion may be configured not to correspond to and be spaced apart from the inner space of the groove.

In this embodiment, the jig part may be formed to have a shape corresponding to a position extending from a region spaced apart from the groove in one face of the heating body part to overlap at least one region of the groove. .

In this embodiment, the jig portion may be formed to have a curved form between a region spaced apart from the groove and a region overlapping at least one region of the groove.

In this embodiment, the heating element may be formed with spaced apart spaces in at least one area between the side member and the heating member.

Other aspects, features and advantages besides those mentioned above will become apparent from the following drawings, claims and detailed description of the invention.

The effect of the invention

The heating element of the present invention can reduce heat loss and easily improve heat transfer efficiency.

The constitution and function of the present invention will be described in detail below with reference to the embodiments of the present invention shown in the drawings.

While the present invention can be variously modified and has various embodiments, some specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and methods for achieving them will become clear in the course of referring to the embodiments described in detail later with reference to the drawings. However, the present invention is not limited to the embodiments disclosed below, but can be realized in various forms.

Embodiments of the present invention will be described in detail below with reference to the drawings, and in describing with reference to the drawings, the same or corresponding constituent elements are given the same drawing symbols and repeated descriptions thereof will be omitted.

In the following embodiments, the terms first, second, etc. are used for the purpose of distinguishing one constituent element from another, and are not used in a limiting sense.

In the following embodiments, unless clearly defined differently in the context, singular expressions include plural expressions.

In the following embodiments, terms such as including or having refer to the presence of the features or constituent elements described in the specification, and do not preclude the possibility of adding more than one other feature or constituent element.

In the drawings, the sizes of constituent elements may be exaggerated or reduced for convenience of description. For example, the size and thickness of each member shown in the drawings are arbitrarily shown for convenience of description, and thus the present invention is not limited to the illustrations.

In the following embodiments, the x-axis, y-axis, and z-axis are not limited to three axes on the orthogonal coordinate system, but can be interpreted broadly to include meanings thereof. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may also refer to mutually different directions that are not orthogonal to each other.

In cases where an embodiment may be implemented differently, a particular process sequence may be performed differently than described. For example, two processes described in succession may be performed substantially simultaneously, or may be performed in an order reverse to that described.

FIG. 1 is a schematic sectional view showing a heating element according to an embodiment of the present invention.

The heating element 100 of this embodiment may include a heating part HB, a heating body 110 and a heat transfer part 120 .

The heating member HB described in the present invention can be used for various purposes. As an example, it can be used to apply heat to a device that processes a material to be processed such as a substrate or a wafer (for example, SW in FIG. 5 ) using more than one gas, ion, or plasma (or called plasma).

As a specific example, the heating part HB may be applied to an apparatus for performing etching process, cleaning process, ashing process, vapor deposition process, or ion implantation process on a material to be processed.

As an optional embodiment, the heating part HB can also be utilized to be adjacent to or transfer heat to a shower head (eg SH in FIG. 5 ) that supplies gas in the direction of the material to be processed.

The heating part HB may be formed to generate heat. For example, heat may be generated by a heating element provided inside the tube having the hollow portion or hot water circulating inside the tube having the hollow portion.

As an optional embodiment, the heating member HB may be formed to generate heat by applying an electric current from a power source, and as a specific example, may have a coil-shaped heating element made of a metal material.

As an optional embodiment, the heating component HB may have a curved surface based on the thickness direction, for example, the heating component HB may also have a nearly circular cross-sectional shape.

The heating body 110 may be formed to receive heat generated by the heating part HB. The heating body part 110 may receive heat generated by the heating part HB and transmit it to parts in a direction adjacent to the heating body part 110 . As an optional embodiment, the heating body part 110 may transfer heat to the showerhead SH or a gas supply part (not shown), or a dielectric window (eg, DEW in FIG. 5 ), etc. FIG.

The heating body 110 may be formed of various materials, may be formed of a metal material so as to be able to efficiently transfer heat, and may also contain, for example, aluminum, steel, etc. or an alloy thereof. As a specific example, it may be formed of aluminum series materials.

The heating member HB may be disposed in a region above the heating body 110 .

As an optional embodiment, the heating body 110 may include a groove 111 in an upper region. The heating member HB may be disposed in the groove 111 of the heating body 110 .

The shape of the groove 111 of the heating body 110 may be various, for example, it may be a groove having a depth in the thickness direction of the heating body 110 and a width in a direction intersecting therewith. At this time, the width of the groove 111 may be constant according to the depth. However, as another example not shown, the width of the groove 111 may vary according to the depth, and, as a specific example, the inner surface of the groove 111 may also be formed to have a curved shape.

As an optional embodiment, the groove 111 of the heating body 110 can be formed to have a shape corresponding to the heat transfer member 120 described later to be suitable for the configuration of the heat transfer member 120, for example, it can be formed to have a shape corresponding to the heat transfer member 120 The outer surface of the body corresponds to or is closely attached to the outer surface.

In addition, as an optional embodiment, the heating body part 110 may be formed to have a spacer SA, and such a spacer SA may be a region where the heating body part 110 is not formed, for example, in the form of an opening. As a specific example, such a spacer SA may correspond to a region for inflow or travel of a source gas or the like used in a process for a material to be processed.

The heat transfer part 120 may be formed to be disposed at least one area between the heating body part 110 and the heating part HB. Thereby, heat dissipation to the air caused by the heating member HB being exposed to the air outside the heating body portion 110 is reduced or prevented, and the heat generated in at least one region or the entirety of the heating member HB can be transferred through heat transfer. The component 120 is passed to the heating body 110 . In order to improve heat transfer efficiency, the heat transfer member 120 may be formed of a material with good thermal conductivity, for example, a metal material.

As an optional embodiment, the heat transfer member 120 may be formed of the same material as that of the heating body 110 , for example, may be formed of aluminum series materials.

The heat transfer member 120 may be disposed on one side of the heating body 110 , for example, may be configured to correspond to the groove 111 of the heating body 110 . As a specific example, it may be formed such that at least one region is accommodated in the groove 111 of the heating body 110 in the thickness direction of the heat transfer member 120 .

The heat transfer member 120 may have various forms, and may include, for example, at least one of an upper side member 123 , a first side member 121 , a second side member 122 , and a lower side member 125 .

The upper part 123 is located on one side of the heating part HB, for example, as the direction opposite to the groove 111, that is, the upper side of the heating part HB. As a specific example, it can be formed to cover the top of the heating part HB. Accordingly, it is possible to effectively reduce the heat generated by the heating member HB from radiating and being lost in a direction away from the upper surface of the heating body portion 110 .

As an optional embodiment, the upper part 123 may have a shape corresponding to the inner surface of the groove 111 , for example, may be formed to be close to or adjacent to the inner surface of the groove 111 .

The upper member 123 may include a facing surface 123C facing the heating member HB. Such facing surface 123C may be connected to the space SR between the first side member 121 and the second side member 122 .

As an optional embodiment, the facing surface 123C may be formed to have a shape corresponding to the upper surface of the heating part HB, for example, may be formed to have a curved surface shape corresponding to the curved surface of the upper surface of the heating part HB.

As a specific example, the facing surface 123C may have a circular or semicircular cross-sectional shape corresponding to a part of a circular cross-section with reference to the thickness direction of the heating member HB. In addition, as an example, at least one region of such facing surface 123C may contact or be in close contact with the upper side of the heating member HB. Thus, heat loss caused by the heat generated by the heating member HB being easily transferred to the upper member 123 or the first side member 121 and the second side member 122 through the facing surface 123C can be effectively reduced, and thermal efficiency can be improved.

In addition, as an example, the heating member HB can be supported by the upper member 123, so that a stable arrangement of the heating member HB can be easily maintained.

As an optional embodiment, the heat transfer component 120 may further include a first side component 121 and a second side component 122 formed to be connected with the upper side component 123 .

The first side part 121 and the second side part 122 of the heat transfer part 120 facing each other can be respectively disposed between the inner side of the groove 111 and the heating part HB. As an optional embodiment, the first side member 121 and the second side member 122 may have shapes corresponding to the inner surface of the groove 111 , for example, may be formed to be close to or adjacent to the inner surface of the groove 111 .

The heat transfer area is increased by the first side part 121 and the second side part 122, thereby increasing the thermal efficiency when the heat generated by the heating part HB is transferred to the heating body part 110 through the inner surface of the groove 111, and can reduce the heat generated by the heating part. The heat generated by part HB is dissipated into the air and lost.

As an optional embodiment, the heat transmission part 120 may also include a lower side part 125, the lower side part 125 is formed to be connected with the first side part 121 and the second side part 122 connected to the upper side part 123, and configured to separate The heating member HB faces the upper member 123 .

The lower part 125 can be accommodated in the groove 111 , for example, can be configured to be in contact with the inner bottom surface of the groove 111 . Thereby, the area where the heat passing through the heating member HB is transferred to the heating body portion 110 in the downward direction is increased, and the heat generated by the heating member HB can be reduced by being dissipated into the air and lost.

The lower side member 125 can have various forms, for example, it can be formed so that it may be connected to the mutually facing inner surface of each of the 1st side member 121 and the 2nd side member 122 which oppose each other.

As an optional embodiment, the upper side part 123 and the first side part 121 and the second side part 122 can have an integrally extended structure, and the lower side part 125 can be combined with the first side part 121 and the second side part facing each other. A region of each inner surface of 122 can be joined by welding, for example. As a specific example, after the heating part HB is housed in the structure in which the upper part 123 and the first side part 121 and the second side part 122 integrally extend, the lower part 125 and the first side part 121, 122 can be welded together. The second side member 122 is joined. On the other hand, instead of welding, it is also possible to join by various methods such as interference fit and screws.

Thus, a structure in which the heating member HB is accommodated inside the heat transfer member 120 can be easily realized, and by arranging such a heat transfer member 120 accommodating the heating member HB in the groove 111, it is possible to effectively realize the heating to the heating body. Part 110 is a structure for transferring heat.

The thickness of the upper side member 123 may vary. For example, there may be a first thickness T1 and a second thickness T2. The second thickness T2 corresponds to the thickness of the area between the facing surface 123C and the upper surface of the upper member 123 (for example, a surface facing in a direction opposite to the direction toward the lower member 125), and may have a variable value, for example, the first Thickness T1 is the maximum value of the thickness between the facing surface 123C and the lower surface of the upper side member 123 (for example, the surface facing the lower side member 125 ) in the area between the facing surface 123C and the first side member 121 and the second side member 122 . value, may have a value greater than the second thickness T2.

The lower part 125 may have a third thickness T3.

As an optional embodiment, the first thickness T1 and the second thickness T2 of the upper part 123 may respectively have values greater than the third thickness T3 of the lower part 125 . The thicker upper part 123 can effectively reduce or block the heat loss to the direction away from the upper surface of the heating body 110 , and can improve the heat transfer efficiency to the heating body 110 . In addition, the effect of supporting the heating member HB by the upper member 123 can be easily increased.

In addition, as an optional embodiment, the first thickness T1 and the second thickness T2 of the upper side member 123 may respectively have a thickness greater than that of the first side member 121 and the second side member 122 (for example, in the X-axis direction of FIG. 1 The value of thickness) can increase the effect of reducing heat loss to the upper side, and can improve the effect of direct heat transfer to the first side member 121 and the second side member 122 .

As an optional embodiment, the jig part 130 may be configured in such a manner as to support one region of the heat transfer member 120 . For example, the jig part 130 may be formed to support the upper part 123 of the heat transfer part 120 .

As a specific example, one area of the clamp part 130 can be arranged on the heating body part 110 and can be fixed to one area of the heating body part 110 , and another area extending therefrom can support the upper surface of the upper part 123 of the heat transfer part 120 , pressure may be applied such that the heat transfer member 120 is in close contact with the heating body 110 . Thereby, the heat transferred to the heat transfer member 120 can be efficiently transferred to the heating body portion 110 .

The clip part 130 may be formed of various materials, for example, may be formed of a material different from the heat transfer member 120 , and as a specific example, may be formed of a material having a lower thermal conductivity than the heat transfer member 120 .

As an optional embodiment, the clamp part 130 may also be formed of non-metallic materials, such as plastic series materials.

Thereby, the heat transferred to the heat transfer member 120 can be efficiently transferred to the heating body part 110 instead of the jig part 130 .

The heating member HB that generates heat in this embodiment can be accommodated in the inner space of the heat transfer member 120, and the heat transfer member 120 accommodating the heating member HB can be arranged in the heating body 110, thereby reducing the heat generated by the heating member HB. The heat is emitted or lost in a direction away from the heating body part 110 , and heat can be efficiently transferred to the heating body part 110 . In addition, as an example, the heat transfer member 120 has a form similar to a box on the basis of the thickness direction, and by arranging the heat transfer member 120 in the groove 111 corresponding to the form of the heat transfer member 120, At least one region is accommodated in the groove 111 in the thickness direction. Accordingly, the heat transfer area to the heating body portion 110 can be increased, and the effect of reducing heat loss can be enhanced.

In addition, as an optional embodiment, while maintaining the effect of reducing heat loss and improving the effect of heat transfer by disposing the clamp part 130 configured to support the heat transfer member 120 from the upper side, by fixing the heat transfer member 120 In the heating body part 110, the arrangement of the heat transfer member 120 can be stably maintained even if time passes or a plurality of processes are performed.

FIG. 2 is an exemplary perspective view of the heating element of FIG. 1 viewed from one direction.

3 is a perspective view exemplarily showing a heating part of the heating element of FIG. 2 , and FIG. 4 is a perspective view exemplarily showing a heat transfer part of the heating element of FIG. 2 .

Referring to FIG. 2 , the heating body part 110 of the heating element 100 may be formed to have a curved edge, for example, an edge close to a circle.

In addition, the heating body part 110 may be formed to have a spacer SA in the form of an opening inside, and may be formed to surround the spacer SA as a specific example.

The heating body 110 may include a groove 111 corresponding to the heat transfer member 120, and the groove 111 may have a shape surrounding the spacer SA, for example, may have a circular shape on a plane.

The heat transfer member 120 may be configured to correspond to the groove 111 and have a shape surrounding the spacer SA, for example, may have a circular shape on a plane.

In addition, the heat transfer member 120 may be supported by a plurality of clip parts 130 at a region disposed on the upper side of the groove 111 .

As an optional embodiment, a plurality of clip parts 130 may be configured to be spaced apart from each other, for example, a plurality may be arranged along the circumferential direction of the heat transfer member 120 .

Referring to FIG. 3 , the heating part HB may have a curved planar form, and a cross section may have a circular coil form. For example, the heating member HB may be formed to have a circular edge surrounding at least one area of the spacer SA of the heating body part 110 .

Exemplarily, the heating part HB may include a first end part HBT1 and a second end part HBT2 formed to be connected to an external power source or a pump. As a specific example, the first end portion HBT1 and the second end portion HBT2 may be connection portions for connecting the heating part HB with an external part.

When the heating member HB is disposed in the inner space of the heat transfer member 120 , the first end portion HBT1 and the second end portion HBT2 may have a shape protruding to the outside of the heat transfer member 120 .

For example, the first end portion HBT1 and the second end portion HBT2 of the heating member HB may be formed to be spaced apart from each other and protrude toward a direction away from the groove 111 , eg, upward. Thereby, while maintaining the heat generation effect by the heating member HB, connection reliability with a power supply or a pump can be improved.

As an optional embodiment, when a heating body is provided inside the heating component HB, current may be input to one of the first end portion HBT1 and the second end portion HBT2, and current may be output from the other. On the other hand, when hot water circulates inside the heating member HB, hot water may be introduced into one of the first end portion HBT1 and the second end portion HBT2 and drawn out from the other.

Referring to FIGS. 2 and 4 , the heat transfer member 120 may include a penetrating region 120H in such a manner as to extend through the first end portion HBT1 and the second end portion HBT2 of the heating member HB. For example, the penetrating region 120H may be formed in one region of the upper member 123 of the heat transfer member 120 .

The heat transfer member 120 may be formed in a form surrounding the spacer SA, for example, may have a circular planar form corresponding to the heating member HB.

As an exemplary manufacturing method, after inserting the heating member HB into the inner space of the integrated structure of the first side member 121, the second side member 122 and the upper side member 123 on both sides, the lower side member 125 can be combined, as a specific For example, welding may be used to connect the lower part 125 and the first side part 121 and the second side part 122 .

FIG. 5 is an exemplary diagram for use of a heating element related to an embodiment of the present invention, and FIG. 6 is a schematic enlarged diagram of B of FIG. 5 .

Referring to FIG. 5 , as an example, a shower head SH is arranged adjacent to the heating element 100 . For example, the shower head SH may be formed so that one or more types of gas may flow into the material SW to be processed.

In addition, the material SW to be processed by gas distribution or processed by plasma reaction may be arranged under the shower head SH. For example, the material SW to be processed may be of various types such as a substrate or a wafer.

The shower head SH may be arranged in the inner region of the heating body 110 of the heating element 100 , for example, may be arranged adjacent to a region on the lower surface of the heating body 110 on the surface opposite to the surface on which the heating member HB is arranged.

As an optional embodiment, a dielectric window DEW may be arranged in the inner region of the heating body 110 . For example, it may be arranged adjacent to a region on the upper surface of the heating body portion 110 which is the opposite surface to the surface on which the heating member HB is arranged.

The dielectric window DEW may support a gas supply part (not shown) that supplies gas to the shower head SH.

Thus, when the heat generated by the heating member HB is transferred to the shower head SH, the dielectric window DEW, or the gas supply part (not shown) through the heating body part 110, the uniformity of heat transfer can be improved, and the Defects caused by localized heat concentration.

Referring to FIG. 6 , the jig part 130 may include a first contact part 131 in contact with the upper part 123 and a second contact part 132 in contact with the heating body part 110 , and the jig part 130 may be formed as an area of the jig part 130 A space area is formed when it is fixed to the heating body part 110 and another area supports the upper side part 123 of the heat transfer part 120 .

For example, the first spacing area ET of the heating body part 110 and the second spacing area ES of the upper part 123 may be spaced apart from the jig part 130 . In this way, heat generated by the heating part HB can be reduced from unnecessary staying in the jig part 130 or being lost through the jig part 130 after being transferred to the heat transfer part 120 or the heating body part 110 .

As a result, the effects of improving heat transfer characteristics and reducing heat loss by using the heating element 100 can be easily increased.

While the invention has thus been described with reference to the embodiments shown in the drawings, these are examples only and those skilled in the art to which this invention pertains will appreciate that various modifications and equivalent other embodiments may be made therefrom. . Therefore, the true technical protection scope of the present invention should be defined by the technical ideas of the appended patent scope.

The specific implementation described in the examples is an example and does not limit the scope of the examples in any way. In addition, unless specifically mentioned such as "essentially" and "importantly", it may not be an indispensable constituent element for the application of the present invention.

In the description of the embodiments (especially in the claims), the use of the term "said" and similar indicative terms may correspond to both the singular and the plural. In addition, when a range is described in the examples, the invention including the application of individual values belonging to the range (unless stated to the contrary) is equivalent to stating each individual value constituting the range in the detailed description. value. Finally, with regard to steps constituting the methods of the embodiments, unless the order is explicitly stated or stated to the contrary, these steps may be performed in an appropriate order. The embodiment is not necessarily limited to the described order of these steps. All examples or use of exemplary terms (eg, etc.) in the embodiments are only used to describe the embodiments in detail, and the scope of the embodiments is not limited by these examples or exemplary terms unless defined by the scope of the patent application. In addition, those skilled in the art to which the present invention pertains will understand that various modifications, combinations and changes can be made according to design conditions and factors within the scope of the appended claims or their equivalents.

100: heating element 110: Heating the body 111: Groove 120: heat transfer components 120H: through the area 121: First side part 122: Second side part 123: upper part 123C: opposite side 125: lower part 130: Fixture Department 131: first contact part 132: second contact part DEW: Dielectric window ET: first interval area ES: second interval area HB: heating element HBT1: first end HBT2: second end SA: spacer SH: sprinkler head SR: space between first side part, second side part SW: processed material T1: first thickness T2: second thickness T3: third thickness

FIG. 1 is a schematic sectional view showing a heating element according to an embodiment of the present invention. FIG. 2 is an exemplary perspective view of the heating element of FIG. 1 viewed from one direction. FIG. 3 is a perspective view exemplarily showing a heating part of the heating element of FIG. 2 . FIG. 4 is a perspective view exemplarily showing a heat transfer part of the heating element of FIG. 2 . Figure 5 is an exemplary diagram for the use of a heating element with respect to an embodiment of the present invention. FIG. 6 is a schematic enlarged view of B in FIG. 5 .

100: heating element

110: Heating the body

111: Groove

120: heat transfer components

121: First side part

122: Second side part

123: upper part

123C: opposite side

125: lower part

130: Fixture Department

HB: heating element

SA: spacer

SR: space between first side part, second side part

T1: first thickness

T2: second thickness

T3: third thickness

Claims (12)

A heating element, comprising: a heating element formed to generate heat; a heating body receiving heat generated by the heating element; and a heat transfer member disposed at least in an area between the heating body and the heating member, The heating body includes a groove formed corresponding to the heat transfer member, The heating element is configured to face at least one area of the inner surface of the groove, The heat transfer member includes a side member formed between the heating member and the inner surface of the groove to face the heating member and the inner surface of the groove. The heating element according to claim 1, wherein, At least one region of the heat transfer member is configured to protrude from the groove when disposed in the groove. The heating element according to claim 1, wherein, The heat transfer member is formed to include an upper side member formed to cover the upper surface of the heating member. The heating element according to claim 3, wherein, The side part is connected to the upper part and is formed to correspond to at least two facing side faces of the heating part. The heating element according to claim 4, wherein, The upper part includes a facing surface facing the heating part, The facing surface of the upper member is formed to have a shape corresponding to the upper surface of the heating member. The heating element according to claim 4, wherein, The heat transfer member includes a lower member connected to the side member and arranged to face the upper member via the heating member. The heating element according to claim 1, wherein, A clamp portion is included, which is arranged on the heating body portion and formed to support a region of the heat transfer member. The heating element according to claim 7, wherein, The clamp portion fixes the heating member by applying pressure to an area outside the heat transfer member. The heating element according to claim 7, wherein, The clamp portion is configured not to correspond to and spaced apart from the inner space of the groove. The heating element according to claim 7, wherein, The jig part is formed to have a form corresponding to a position extending from a region spaced apart from the groove in one face of the heating body part to overlap at least one region of the groove. A heating element according to claim 10, wherein, The jig portion is formed to have a curved form between a region spaced apart from the groove and a region overlapping at least one region of the groove. The heating element according to claim 1, wherein, A space apart is formed in at least one area between the side member and the heating member.

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