KR100875388B1 - Method for manufacturing hot plate for TF-LC, semiconductor and ODL manufacturing equipment - Google Patents

Abstract

The present invention relates to a method for manufacturing a hot plate for a TFT-LCD, a semiconductor and an OLED manufacturing equipment, and in particular, the present invention is hypothesized in a vacuum chamber requiring a medium vacuum of the manufacturing equipment line, such as TFT-LCD, semiconductor In an aluminum hot plate for seating and heating a glass substrate or a silicon wafer of a semiconductor, a sheath heater and a temperature sensor (T) embedded in a hot plate made of aluminum or an aluminum alloy (hereinafter referred to as hot plate). / C) is made of aluminum material which is the same metal as the aluminum hot plate, so that the aluminum sheath heater and aluminum T / C are seated in the recess of the hot plate and the T / C and heater lines are externally connected through the hot plate shaft. When drawing out, draw out the drawing hole of the aluminum fastening block interposed between the aluminum hot plate body and the aluminum shaft, and then Weld and seal around the aluminum heater and aluminum T / C lead-out area drawn out by using the aluminum heater, and then weld the aluminum fastening block and the aluminum shaft to minimize the welding of the aluminum fastening block. The present invention relates to a method for manufacturing a hot plate for a TFT-LCD, a semiconductor, and an OLED manufacturing facility, characterized by blocking air.

Among the components of the present invention, the fastening method of the aluminum hot plate body and the aluminum fastening block may be a bolt type fastening method or a welding method, and the fastening method by welding selected in the fastening method of the aluminum hot plate and the aluminum fastening block is vacuum. It is not related to leakage.

In addition, in the present invention, the concept of covering the outside of the sheath heater and T / C with an aluminum tube is a concept of replacing the conventional sheath heater and the sealing cap for welding sealing T / C using a conventional aluminum sealing cap Sealing of sheath heater and T / C breaks out the complicated welding method of welding by sealing a large area over the entire line of the sealing cap, and it welds and seals only the aluminum fastening block made of the same material and sheath heater and T / C lead-out part. By reducing the welding area, the manufacturing cost of the product can be significantly reduced and the vacuum leakage problem can be solved. The sheath heater and T / which are placed in the insertion groove of the aluminum hot plate to improve the heat conduction and adhesion of the sheath heater and T / C line The C-line is covered with a sealing cap, and either the prefabricated or intermittent spot welding method of assembling the sealing cap to the hot plate by bolting can be performed. May be entered into by choosing to improve the heat transfer and adhesion of the sheath heater and T / C line, this coupling method is independent of the vacuum leakage.

In addition, the present invention is the dismantling of components such as heater caps, sheath heaters and fastening blocks from the aluminum hot plate since the elements such as aluminum hot plate and heater cap are intermittent spot welding or bolting method even in the case of repair work in the event of a problem. And easy assembly can be performed economically maintenance.

In the present invention as described above, since the fastening of the aluminum hot plate body and the hot plate fastening block has nothing to do with vacuum leakage, when the bolt assembly is not welding, the material of the external appearance of the fastening block, shaft, heater, and T / C is made of stainless steel. It is also possible to substitute a steel (SUS) material and combine them using a stainless steel welding method such as conventional argon welding.

In addition, when the fastening block is configured to extend for a long time, since the fastening block itself shares the shaft function, it is not necessary to couple the shaft to the fastening block. In this case, the lead hole of the fastening block and the periphery of the lead wire such as a heater may be welded and sealed. Instead of welding, the O-ring may be replaced with an O-ring around the lead-out hole of the fastening block and the heater to prevent vacuum leakage.

In addition, in the present invention, when components such as a sheath heater and T / C additionally, a cooling tube and a gas tube are embedded or installed in an aluminum hot plate, the cooling tube is configured in the same manner as the structure of the sheath heater to cover the aluminum tube to the outside. And embedding them in a hot plate, and then welding and sealing only the parts drawn out of the aluminum fastening block.In the case of gas pipes, the gas pipes themselves are made of aluminum pipes, and the aluminum hot plates and aluminum pipes are welded and fastened. In addition, by welding, sealing the lead portion of the gas pipe in the fastening block is characterized in that the configuration to block the vacuum leakage.

Description

A manufatoring method of hot plate for TFT-LCD and semiconductor device}

1 is an overall exploded perspective view of components for constructing the aluminum hot plate of the present invention,

2 to 4 is a cross-sectional view for each step showing the assembled state of the present invention,

5 is a plan view showing a sealed state of the bottom surface of the aluminum hot plate in the present invention,

FIG. 6 is a cross-sectional view taken along the line A-A of FIG. 4, showing the welding sealing state of the fastening block, the sheath heater and the T / C in the present invention.

(A) and (b) of FIG. 7 are exemplary views of the aluminum sheath heater applied to the present invention.

Figure 8 (a), (b), (c) is an example of the configuration of aluminum T / C applied to the present invention,

Figure 9 (a), (b), (c) is a cross-sectional view showing an embodiment for coupling the sheath heater of the present invention with a sealing cap,

(A) is an illustration of the bolted state,

(B) is an exemplary view showing the spot welding coupling state

(C) is an exemplary view showing a state where the aluminum sheath heater is directly welded to the insertion groove of the hot plate by spot welding.

10 is an exemplary view of another embodiment of the present invention,

11 is an exemplary view showing a welding state of a conventional hot plate,

12 is a cross-sectional view of the same.

* Explanation of symbols for the main parts of the drawings

10: Hot Plate Part 11: Side Sheath Heater

12,13: inner sheath heater embedded groove 14: center T / C embedded groove

15,16: Side T / C recess 20: Sheath heater

21: side sheath heater 22,23: inner sheath heater

31,32: Side T / C 33: Center T / C

30: T / C 40: sealing cap

       41: nude bolt 50: fastening block portion 51: withdrawal ball

       52: guide welding surface 53: fastening flange 60: shaft portion

       100: hot plate 101: sheath heater 102: home

       103: sealing cap 104: T / C 105,106: line welding

The present invention relates to a method for manufacturing a hot plate for a TFT-LCD, a semiconductor and an OLED manufacturing equipment, and in particular, the present invention is hypothesized in a vacuum chamber requiring a medium vacuum of the manufacturing equipment line, such as TFT-LCD, semiconductor In an aluminum hot plate for seating and heating a glass substrate or a silicon wafer of a semiconductor, a sheath heater and a temperature sensor (T) embedded in a hot plate made of aluminum or an aluminum alloy (hereinafter referred to as hot plate). / C) is made of aluminum material which is the same metal as the aluminum hot plate, so that the aluminum sheath heater and aluminum T / C are seated in the recess of the hot plate and the T / C and heater lines are externally connected through the hot plate shaft. When drawing out, draw out the drawing hole of the aluminum fastening block interposed between the aluminum hot plate body and the aluminum shaft, and then Weld and seal around the aluminum heater and aluminum T / C lead-out area drawn out by using the aluminum heater, and then weld the aluminum fastening block and the aluminum shaft to minimize the welding of the aluminum fastening block. The present invention relates to a method for manufacturing a hot plate for a TFT-LCD, a semiconductor, and an OLED manufacturing facility, characterized by blocking air.

Among the components of the present invention, the fastening method of the aluminum hot plate body and the aluminum fastening block may be a bolt type fastening method or a welding method, and the fastening method by welding selected in the fastening method of the aluminum hot plate and the aluminum fastening block is vacuum. It is not related to leakage.

In addition, in the present invention, the concept of covering the outside of the sheath heater and T / C with an aluminum tube is a concept of replacing the conventional sheath heater and the sealing cap for welding sealing T / C using a conventional aluminum sealing cap Sealing of sheath heater and T / C is remarkable by welding sealing only aluminum fastening block and sheath heater and T / C lead-out part of the same material, avoiding the complicated welding method of sealing by large area welding over the entire line of sealing cap. By reducing the welding area, the manufacturing cost of the product can be significantly reduced and the vacuum leakage problem can be solved. The sheath heater and T placed in the insertion groove of the aluminum hot plate to improve the heat conduction and adhesion of the sheath heater and the T / C line. Either prefabricated or welded by intermittent spot welding where the C / C line is covered with a sealing cap and the sealing cap is assembled to the hot plate by bolting. By adopting and tightening, it is possible to improve the heat conduction and adhesion of the sheath heater and T / C line, and this fastening method is independent of vacuum leakage.

In addition, the present invention is the dismantling of components such as heater caps, sheath heaters and fastening blocks from the aluminum hot plate since the elements such as aluminum hot plate and heater cap are intermittent spot welding or bolting method even in the case of repair work in the event of a problem. And easy assembly can be performed economically maintenance.

In the present invention as described above, since the fastening of the aluminum hot plate body and the hot plate fastening block has nothing to do with vacuum leakage, when the bolt assembly is not welding, the material of the external appearance of the fastening block, shaft, heater, and T / C is made of stainless steel. It is also possible to substitute a steel (SUS) material and combine them using a stainless steel welding method such as conventional argon welding.

In addition, when the fastening block is extended to the outside of the vacuum chamber, the fastening block itself exhibits the shaft function at the same time, so that the shaft does not need to be coupled to the fastening block. Instead of welding, sealing may be performed by sealing the lead-out hole of the fastening block and the lead wire such as a heater with an O-ring instead of welding to prevent vacuum leakage.

In addition, in the present invention, when components such as a sheath heater and T / C additionally, a cooling tube and a gas tube are embedded or installed in an aluminum hot plate, the cooling tube is configured in the same manner as the structure of the sheath heater to cover the aluminum tube to the outside. And embedding them in a hot plate, and then welding and sealing only the parts drawn out of the aluminum fastening block.In the case of gas pipes, the gas pipes themselves are made of aluminum pipes, and the aluminum hot plates and aluminum pipes are welded and fastened. In addition, by welding, sealing the lead portion of the gas pipe in the fastening block is characterized in that the configuration to block the vacuum leakage.

In general, the vacuum chamber of the vacuum deposition equipment used in the TFT-LCD and semiconductor manufacturing equipment is placed on a transparent glass substrate for manufacturing TFT-LCD or a silicon wafer for semiconductor manufacturing, and is vacuumed while heating or cooling in a vacuum state. It is common to use a hot or cooling plate (hereinafter referred to as a hot plate for convenience).

In addition, in the vacuum chamber as described above, the source material is introduced into the gas phase while the inside of the chamber is evacuated during the vacuum deposition operation, and the vacuum deposition process is performed, and the inside of the vacuum chamber is transparent for manufacturing TFT-LCD in a gas atmosphere under vacuum. By vacuum depositing a glass substrate or a silicon wafer for semiconductor manufacturing, the material of the hot plate is usually made of anodized aluminum or aluminum alloy, and the hot plate has a heater embedded therein so that it can be heated to an appropriate temperature for vacuum deposition. Is produced by the method.

However, these hot plates are generally composed of anodized aluminum or aluminum alloy material, and the heater and temperature sensor (T / C) embedded therein are sheath heaters made of aluminum and other stainless steel tubes (Inconel tubes). Is common.

As shown in FIGS. 11 and 12, a hot plate for manufacturing a TFT-LCD or a semiconductor wafer has various recesses 102 for embedding the sheath heater 101 in the bottom of the hot plate 100. After inserting the sheath heater 101 and the T / C 104 coated with the stainless steel pipe bent in the same pattern as the recess groove 102 and seating it, the recess is formed on the branch line of the pattern. 102, the sealing cap 103 made of aluminum material having the same pattern as the sheath heater 101 is sequentially inserted to seat the sheath heater 101, and then the upper layer portion of the buried groove 102 of the hot plate 100 is placed. The sheath heater 101 is sealed by line welding 105 and 106 of both sides of the sealing cap 103 along the entire line (la) and (lb), and in the same manner, the T / C A method of sealing 104 to prevent vacuum leak is employed.

The sealing of the sheath heater 101 and the T / C 104 of the line welding method is that the sheath heater 101 and the T / C 104 are mostly stainless steel (SUS) different from aluminum of the hot plate 100. It is made of Inconel tube, and it is caused by this, and there is a great concern about vacuum leakage, and there is a risk of causing a malfunction in TFT-LCD and semiconductor manufacturing, and a lot of welding process is required for the manufacture of hot plate. While high cost is required for manufacturing, line welding 105, 106 of hot plate 100 and sealing cap 103 during repair work of hot plate 100 such as replacement of sheath heater 101. After removing and removing all the parts, a complicated process of performing repair work and sealing work again showed that a lot of labor and cost were required for repairing the hot plate.

In addition, in the aluminum hot plate of such a device, especially a device manufacturing TFT-LCD, as the generation of the TFT-LCD increases, the glass substrate to be processed increases, so that the size of the aluminum hot plate is also relatively high. As the pattern of the sheath heaters is expanded and arranged in various ways and complexity, the means or welding process for suppressing the sealing or vacuum leakage of the sheath heaters becomes complicated, and thus the length or position of the welding line is relatively long and complicated. As a result of this phenomenon, the production and repair of aluminum hot plates are difficult and complicated, which indicates that the manufacturing and processing costs as well as the repair costs are rising.

Therefore, the present invention was created in order to solve the conventional problems as described above, the present invention is a hot plate and the sheath heater and T / C, the sealing cap, the fastening block and the shaft are all embedded in the same metal material aluminum or Made of aluminum alloy, hot plate, sheath heater and T / C are directly welded by focusing on hot plate or fastening block to seal leakage area, minimizing welding work such as welding or brazing of hot plate The purpose is to provide a hot plate and a sheath heater of the hot plate which can completely prevent vacuum leakage while reducing the plate manufacturing cost.

In addition, the present invention, when the aluminum hot plate manufacturing method of fastening the aluminum hot plate body and the hot plate fastening block in the bolt assembly instead of welding, the material of the external appearance of the fastening block, shaft, heater, T / C stainless steel (SUS) ) Is to provide a method of manufacturing a hot plate using a stainless steel welding (SUS welding) to another material.

In addition, the present invention is sealed by embedding the sheath heater inside the hot plate, but by removing the complicated line welding method for all the sheath heater lines by binding the sealing cap with a bolt or sealing only by partial local spot welding It is possible to easily and efficiently dismantle the elements such as aluminum hot plate and sheath heater during the repair work for the plate as well as the reuse. Another purpose is to provide a hotplate that can be used.

In addition, the present invention consists of all elements such as hot plate, sheath heater, sealing cap, bolt, etc. made of aluminum or aluminum alloy material of the same material, the thermal conductivity is good and the heat distribution is uniform and excellent throughout the hot plate work process of the hot plate Another goal is to provide a hotplate that can improve functionality.

The present invention for achieving this object is an aluminum sheath heater and aluminum T / C portion embedded in the embedded groove of the aluminum hot plate; An aluminum sealing cap portion for seating the aluminum sheath heater portion and the aluminum T / C portion; An aluminum fastening block part which draws out the lead ends of the aluminum sheath heater part and the aluminum T / C part into a drawing hole and welds and seals only around the drawing hole and the drawing part of the aluminum sheath heater part and the aluminum T / C part; The sealing sheath of the aluminum sheath heater and the T / C part is fastened to the recess of the hot plate part by a bolt fastening method or a local spot welding method to be sealed. Is as follows.

Figure 1 is an exploded perspective view of the components for constituting the aluminum hot plate of the present invention, the grooves recessed in the bottom of the hot plate and sheath heaters, T / C and sealing caps embedded therein effective for heat distribution according to the pattern 2 to 4 are cross-sectional views for each process showing the assembled state of the present invention, and FIG. 5 is a plan view showing the sealed state of the bottom surface of the aluminum hot plate according to the present invention. 6 is a cross-sectional view taken along the line AA of Figure 4, showing a welded sealing state of the fastening block and the sheath heater and T / C in the present invention, Figure 7 (a), (b) is an aluminum sheath applied to the present invention. 8A, 8B, and 8C are exemplary views of the aluminum T / C applied to the present invention.

As shown in FIG. 1, the present invention provides a side sheath heater embedment groove 11, an inner sheath heater embedment groove 12, 13, and a center T / C embed recess 14 which are summarized in various patterns required on the bottom surface. ) And an aluminum hot plate part 10 provided with side T / C recessed grooves 15 and 16;

The aluminum side sheath heater 21 formed and inserted into a pattern corresponding to the side sheath heater recessed grooves 11 and the inner sheath heater recessed grooves 12 and 13, which are formed in the aluminum hot plate part 10, and are inserted. An aluminum sheath heater 20 composed of aluminum inner sheath heaters 22 and 23;

And aluminum side T / C (31) and (32) embedded in the center T / C embedding groove (14) and the side T / C embedding grooves (15) and (16) of the aluminum hot plate portion (10), respectively. An aluminum T / C portion 30 having an aluminum center T / C 33;

The aluminum side sheath heater 21 and the aluminum inner sheath heaters 22 and 23 of the aluminum sheath heater 20 and the aluminum side T / C 31 and 32 of the aluminum T / C unit 30 as described above. ) And aluminum center T / C (33) side sheath heater embedded grooves (11), inner sheath heater embedded grooves (12), (13) and center T / C embedded grooves (14) and side T / C embedded grooves ( 15), the aluminum sealing cap portion 40 of the same pattern to be securely seated on (16);

The aluminum side sheath heater 21 and the aluminum inner sheath heaters 22 and 23 of the aluminum sheath heater 20 and the aluminum side T / C 31 and 32 of the aluminum T / C unit 30 as described above. ) And a guide welding surface 52 having a plurality of drawing holes 51 for drawing out draw ends of the aluminum center T / C 33 to the outside, and fastening flange 53 on the other side. An aluminum fastening block portion 50 having a cylindrical hat shape;

It consists of a cylindrical aluminum shaft portion 60 that is spoken with the guide welding surface 52 of the aluminum fastening block portion 50.

As shown in (a) and (b) of FIG. 7, the aluminum side sheath heaters 21 and 22 and the inner sheath heater 23 of the aluminum sheath heater unit 20 applied to the present invention are as follows. The outer shell of the heater element consisting of the nichrome wire 20b and the MgO powder 20c may be previously covered with an aluminum tube 20a, and the normal nichrome wire 20b and the MgO powder 20c whose outer shell is made of stainless steel. ) And a conventional sheath heater outer periphery consisting of a stainless steel tube 20d and an aluminum tube 20a may be covered and filled with an MgO powder 20c therebetween. It is one of the main points that the sheath of all sheath heaters is made of or coated with aluminum tube 20a, and it does not depart from the nature and purpose of the sheath heater configuration of the present invention even if any heater configuration is involved in the aluminum tube 20a. It is obvious.

In addition, in the T / C part 30, which is a temperature sensor applied to the present invention, as shown in (a), (b) and (c) of FIG. 8, the conventional T coated with stainless steel or copper pipes. The outer periphery of the / C (30b) is coated with the aluminum tube (30a) and filled with the MgO powder (30c) inside, and the end of the aluminum tube (30a) may be crimped and welded (30w) to seal the interior, The inner cap may be sealed by welding the aluminum cap (30d) to the distal end portion and welding (30w), or may be formed by the T / C portion 30 of the aluminum shell, and the present invention is the T / C portion 30 The outer shell of the main body is covered with the aluminum tube 30a, and no matter what T / C configuration is involved in the inside of the aluminum tube 30a constituting the shell of the T / C unit 30, Of course it does not deviate from the purpose.

Further, the aluminum sheath heater 20 and the aluminum T / C portion 30 may be provided with the side sheath heater embedding groove 11, the inner sheath heater embedding grooves 12, 13, and the side of the aluminum hot plate portion 10. The sealing cap 40 for fixing the aluminum sheath heater 20 and the aluminum T / C 30 by being placed in the T / C recessed grooves 15 and 16 is also a hot plate 10 and sheath heater. It is composed of aluminum or aluminum alloy, which is a metal of the same series as the part 20 and the T / C part 30, and is inserted in accordance with the pattern of the entire embedding groove, so that all heaters 21 and 22 of the sheath heater part 20 are provided. ), (23) is fixed, the sealing cap portion 40 may be formed integrally in the same shape as the pattern and inserted, or divided into cut to any length in accordance with the curvature to be deflected according to the convenience of production And using a nude bolt 41 as shown in FIG. It may be fixed by screwing into (10), or may be fixed by spot welding (w) intermittently as shown in (b) of FIG. 9, and the sealing cap 40 is not used as shown in (c) of FIG. The aluminum sheath heater 20 may be placed in the recess 11, 12, 13 and welded as it is. In this case, the hot plate 10 and the sheath heater 20 All are made of the same aluminum or aluminum alloy material, it is possible to easily perform a direct welding operation.

Further, all configurations of the present invention made of aluminum, that is, the hot plate portion 10, the sheath heater portion 20, the T / C portion 30, the sealing cap portion 40 and the fastening block portion 50, the shaft 60 All components such as) are made of aluminum or aluminum alloy, which is the same material, so it is easy to weld each other and anodizes to form an oxide film to prevent corrosion by gas in the vacuum chamber. Each element may be assembled separately before joining, or may be assembled after joining to prevent corrosion by gases in the vacuum chamber.

The assembly process of the present invention as described above with reference to Figures 2 to 4 as follows.

First, the aluminum center T / C insertion groove 14 of the aluminum hot plate portion 10 is screwed into the center of the aluminum hot plate portion 10, and the center T / C insertion groove 14 ) And the outer tabs of the aluminum center T / C 33 are annularly welded (w1) along the outer periphery of the aluminum center T / C 33, and then the respective side shears of the aluminum hot plate portion 10 are sealed. The heater embedding groove 11, the inner sheath heater embedding grooves 12 and 13, and the center T / C embedding groove 14 and the side T / C embedding grooves 15 and 16 are formed in a pattern corresponding to each other. The aluminum side sheath heater 21, the aluminum inner sheath heaters 22, 23, and the aluminum side T / C 31, 32 are drawn out with the outer lead end positioned at the center, and the outside thereof is inserted. Cover with the sealing cap 40 and bonded by spot welding or nude bolts fixed to the aluminum hot plate 10 to seal (see Fig. 2).

After fixing the aluminum side sheath heater 21, the aluminum inner sheath heaters 22, 23, and the aluminum side T / C 31, 32, the aluminum side sheath heater 21 and the aluminum inner sheath heater. (22) and (23) and withdrawal ends of the aluminum side T / C (31) and (32) and center T / C (33) corresponding to the withdrawal end on the guide welding surface (52) of the fastening block part (50). After passing through the plurality of outlet holes 51 and withdrawing to the outside, the fastening flange 53 of the fastening block portion 50 is brought into close contact with the bottom surface of the aluminum hot plate portion 10, and then the bolt 54 3 and 5, the peripheral part of the drawing hole 51 drawn out of the drawing hole 51 and the drawing portion of the aluminum sheath heater part 20 and the aluminum T / C part 30 are fastened and fixed. The welded portion is sealed by welding (w) in an annular shape (see Fig. 3).

After doing this, the aluminum side sheath heater 21, the aluminum inner sheath heater 22, and 23 which are drawn out and penetrated through the drawing hole 51 of the guide welding surface 52 of the aluminum fastening block part 50 are welded and sealed. ) And the lead ends of the aluminum side T / C (31), (32) and the center T / C (33) are guided into the hollow cylindrical aluminum shaft portion (60) and housed therein, and the aluminum shaft portion (60) is made of aluminum. The welding is completed on the guide welding surface 52 of the fastening block part 50. (See FIG. 4).

Therefore, the aluminum sheath heater part is placed in a state in which the aluminum sheath heater part is stably in contact with the aluminum hot plate, so that the heat transfer efficiency is stabilized, and the heat loss to the bottom of the aluminum hot plate is prevented, and the sheath heater and T / Since both C and the fastening block are made of the same aluminum material, the sheath heater and the T / C withdrawal part can be easily welded and completely sealed around the outlet of the fastening block, thereby preventing vacuum leakage. will be.

In the present invention as described above, all elements such as the hot plate part 10, the sheath heater part 20, the T / C part 30, the sealing cap 40 and the fastening block part 50 are made of aluminum or the same material. It is made of an aluminum alloy material to facilitate the welding operation, and also to take out the ends of the sheath heater 20, T / C 30 as a means for preventing vacuum leakage of the fastening block 50 It is an extremely simple work process that welds and seals only around the outlet hole 51 to prevent vacuum leakage, thereby easily and easily dismantling between the hot plate and the sheath heater during repair work for hot plate manufacturing and reuse. The present invention by the configuration method is to produce a high generation (5-9 generation) TFT-LCD of the complex pattern as described above. Hot plate of course 9 It can be widely applied effectively applied to a hot plate in a simple pattern of a low generation (14 family), such as that illustrated.

In addition, although the present invention has been limited to the hot plate for manufacturing a liquid crystal display device, the electrostatic adsorption or vacuum adsorption means provided on the hot plate can be used exclusively as a hot plate for semiconductor manufacturing. It belongs to the same technical category.

In addition, the present invention has been described by taking all components such as a hot plate, sheath heater, T / C, fastening block and shaft as an aluminum or aluminum alloy material, but is not limited to this, in the TFT-LCD, semiconductor manufacturing equipment To achieve the object of preventing vacuum leakage by coating or directly configuring the outside of the mechanical components of all the vacuum processors used, it can be easily carried out from the present invention, of course, It is also apparent that variations are not capable of departing from the basic concepts of the present invention.

In the above description, when components such as cooling pipes and gas pipes are additionally embedded or installed separately from all components such as aluminum hot plates and sheath heaters, T / Cs, fastening blocks, and shafts coupled thereto, the cooling pipes are sheath heaters. It is constructed in the same way as the above, and the aluminum tube is covered and treated outside, embedded in a hot plate, and then welded and sealed only to the part drawn out of the aluminum fastening block, and in the case of a gas pipe, the gas pipe itself is an aluminum pipe. It is also obvious that belonging to the technical scope of the present invention is also configured to weld and fasten the aluminum hot plate and the aluminum tube, and then weld and seal the lead portion of the gas pipe in the fastening block to block vacuum leakage.

In the present invention, the sheath heater and the sealing cap embedded in the hot plate are made of the same aluminum or aluminum alloy material so that no leakage of gas occurs, and the heater is sealed in the hot plate. By eliminating the complicated line welding method for all heater lines, the sealing cap is fixed by bolts to seal the hot plate, making it possible to easily and efficiently perform the repair work for hot plate production and reuse. It is possible to economically manufacture and repair by greatly reducing the cost of rain and repair, and to make all the elements or shells of the same material such as hot plate, sheath heater, sealing cap, fastening block, shaft, and bolt as aluminum, aluminum alloy material or Welding can be performed by using the same metal material of the same series such as stainless steel material. Facilitate the production and the thermal conductivity due to the same material, and preferably will, with a number of characteristics such as to give the thermal distribution to be uniform and excellent in improving the operation processing of the hot-plate throughout the hot plate.

Claims (12)

delete delete delete delete delete In the manufacture of aluminum hotplates used in vacuum chambers for TFT-LCD, semiconductor and OLED manufacturing facilities, the final appearance of sheath heaters and T / C embedded in the bottom of the hotplate body is manufactured using a weldable metal tube and required. After the process is made to be embedded in the hot plate body, and the heater and T / C line embedded in the hot plate body and drawn out to the outside is inserted between the shaft and the hot plate body, which is the outside inlet, the fastening block is pulled out. In the aluminum hot plate for vacuum chamber, the aluminum heater and the T / C lead-out part are welded and sealed around the outlet hole to isolate the outside from the inside of the vacuum chamber to prevent vacuum leakage. When the plate body and the fastening block are fastened by bolts, not by welding, the fastening block, shaft, sheath heater, and T / C exterior are assembled. Method of manufacturing a hot plate for TFT-LCD, semiconductor and OLED manufacturing equipment, characterized in that the alternative configuration of the two stainless steel materials to be joined by a stainless steel welding method. The method according to claim 6, TFT-LCD, semiconductor, and OLED manufacturing, comprising aluminum T / C coated by conventional T / C and crimping the tip of aluminum tube, or combining sealing cap to tip and welding sealing it Method for manufacturing hot plate for equipment. The method of claim 6, A method of manufacturing a hot plate for TFT-LCD, semiconductor and OLED manufacturing equipment, comprising: an aluminum sheath heater formed by covering a tube made of aluminum or an aluminum alloy with a common heating wire made of stainless steel or an Inconel sheath heater. The method of claim 6, The cooling tube, which is embedded or connected separately to the heater on the aluminum hot plate body, is also coated with an aluminum tube in the same way as the sheath heater, and then welded in the same way as the sheath heater in the aluminum fastening block to prevent vacuum leakage. Method for manufacturing hot plates for LCD, semiconductor and OLED manufacturing facilities. The method of claim 6, Gas pipes, which are embedded or connected separately to the heater on the aluminum hot plate body, are welded to the aluminum hot plate and welded in the same way as sheath heaters to prevent vacuum leakage for TFT-LCD, semiconductor and OLED manufacturing facilities. Method for producing hot plate. The method of claim 6, The fastening block is a manufacturing method of the hot plate for TFT-LCD, semiconductor and OLED manufacturing equipment, characterized in that the lower end of the cylindrical through-hole having a through-hole for sealing and welding the lead portion of the T / C. The method of claim 6, The end of the cylindrical fastening block is extended in the longitudinal direction so that the fastening block itself has a shaft function, and welds or O-rings between the lead hole portion of the fastening block and the lead portion of the aluminum heater and the T / C. Method of manufacturing a hot plate for TFT-LCD, semiconductor and OLED manufacturing equipment, characterized in that it further comprises sealing by blocking the vacuum leakage.

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