KR102657752B1 - A method of manufacturing a fluid transfer double pipe used in semiconductor manufacturing - Google Patents

Abstract

The present invention relates to a double pipe manufacturing method and a pipeline constructed by the method. A preparation step of preparing a transfer pipe and connection parts to connect the transfer pipe to form a fluid transfer pipeline; A first welding step of fixing the parts prepared through the preparation step to the end of the transfer pipe; A heat transfer pipe positioning step of securing a sealed space between the transfer pipe and the heat transfer pipe by surrounding the transfer pipe and part of the component with a heat transfer pipe having a relatively large diameter compared to the transfer pipe; A secondary welding step of joining the connection parts and the heat transfer pipe; A working fluid injection step of injecting a working fluid into the sealed space; A sealing step of sealing the heat transfer pipe into which the working fluid is injected; It includes a heating unit mounting step of mounting the heating unit on the heat pipe.
In the double pipe manufacturing method of the present invention as described above, the connecting parts between the transport pipes constituting the pipeline are joined to the transport pipe by automatic welding, thereby preventing heat damage to the electrolytic polished surface on the inner surface of the transport pipe. , it does not cause an increase in the flow resistance of the fluid, and thus enables precise temperature control of the fluid passing through the transfer pipe.

Description

{A method of manufacturing a fluid transfer double pipe used in semiconductor manufacturing}

The present invention relates to a method of manufacturing a double pipe that allows precise control of the heating temperature of a fluid by applying uniform heat without partial temperature deviation to the outer peripheral surface of the pipe, and to a pipeline constructed by the method.

The semiconductor manufacturing process can be divided into pre-process and post-process. The preprocessing process involves depositing a thin film on a wafer and etching the deposited thin film to leave a designed pattern. In addition, the post-process is the process of separating the semiconductor chips made in the pre-process into individual pieces and combining them with a lead frame to make a finished product.

In these semiconductor manufacturing processes, various types of reaction gases or process gases are used. The gas used in the manufacturing process is purified after being discharged through the exhaust line along with the reaction by-products after the process is completed. For example, in the case of a chemical vapor deposition facility, the gas exhausted from the process chamber after the deposition process passes through an exhaust line and moves to a gas scrubber, and is then processed by the gas scrubber and then discharged.

However, while the exhaust gas passes through the exhaust line, powder in the form of fine dust may be generated inside the exhaust line. When powder is deposited on the inner wall of the exhaust line, the cross-sectional flow area within the pipe becomes narrow, making it difficult to discharge exhaust gases. If this phenomenon becomes severe, it may cause defects in the process.

This phenomenon of narrowing of the exhaust line becomes more severe as the temperature of the gas passing through the exhaust line decreases. If the temperature of the gas is maintained sufficiently high, the occurrence of narrowing phenomenon is reduced.

Accordingly, various devices for heating the exhaust line are being developed, and as a background technology for related inventions, an insulating heating jacket and a method of manufacturing the same are disclosed in Korean Patent Registration No. 10-0990157.

The disclosed heating jacket has an empty inner space to surround the gas discharge pipe, and is formed so that one end and the other end are in contact with the slot. In the heating jacket, the heating jacket includes an insulating sheet surrounding the gas discharge pipe, and an insulating sheet arranged on the outer surface of the insulating sheet. It includes a heating wire that is fixed in place, an insulating material bonded to the outer surface of the insulating sheet to which the heating wire is fixed, a protective film coated on the outer surface of the insulating material, and an insulating tube that is inserted into the insulating sheet and the insulating material to surround the insulating sheet and the insulating material, and the protective film is insulated. It has a structure that is coated on the outer surface of the tube.

Domestic Patent Publication No. 10-0990157 (Insulating heating jacket and manufacturing method thereof) Domestic Patent Publication No. 10-2095201 (Fluid Line Heating Jacket)

The present invention was created to solve the above problems, and the connection parts between pipes constituting the pipeline are joined by automatic welding, thereby preventing heat damage to the electrolytic polished surface on the inner side of the pipe, and a double pipe manufacturing method and the above The purpose is to provide a pipeline structured by a method.

The double pipe manufacturing method of the present invention as a means of solving the problem for achieving the above object includes a preparation step of preparing a transfer pipe and connection parts to connect the transfer pipe to form a pipeline for fluid transfer; A first welding step of fixing the parts prepared through the preparation step to the end of the transfer pipe; A heat transfer pipe positioning step of securing a sealed space between the transfer pipe and the heat transfer pipe by surrounding the transfer pipe and part of the component with a heat transfer pipe having a relatively large diameter compared to the transfer pipe; A secondary welding step of joining the connection parts and the heat transfer pipe; A working fluid injection step of injecting a working fluid into the sealed space; It includes a sealing step of sealing the heat transfer pipe into which the working fluid is injected.

In addition, as a process following the sealing step, a heating unit mounting step of mounting the heating unit to the heat transfer pipe is further included.

In addition, the connection parts prepared during the preparation step include; A connecting tube having the same diameter as the transport pipe and having a spacer on the outer peripheral surface is included, and the first welding step includes; This is a process of welding the cross section of the end of the transfer pipe and the end of the connecting tube using an automatic welding method, and the second welding step is; This is a process of aligning the end of the heat transfer pipe with the spacer and then welding the end of the heat transfer pipe and the spacer.

In addition, the connection parts prepared during the preparation step include: It includes a micro elbow connecting two neighboring transport pipes and an outer elbow surrounding the micro elbow, and the first welding step includes; This is the process of fixing the cross section of the end of the micro elbow to the cross section of the end of the transfer pipe using an automatic welding method. The second welding step is; This is the process of welding the outer elbow to the end of the heat pipe.

In addition, some of the heat transfer pipes are made of a tube half divided into two, and the secondary welding step is; This is the process of wrapping a transport pipe with two tube halves and then welding the tube halves to each other.

In addition, an injection hole for injecting a working fluid is formed in the heat transfer pipe, and the sealing step includes; It includes a welding sealing process that seals the injection hole by welding.

In addition, the spacer is a fixed ring that takes the shape of a ring and is integrated with the outer peripheral surface of the tube body of the connecting tube.

And, the pipeline of the present invention as a means of solving the problem for achieving the above object includes a preparation step of preparing a transfer pipe and connection parts to connect the transfer pipe to form a pipeline for fluid transfer; A first welding step of fixing the parts prepared through the preparation step to the end of the transfer pipe; A heat transfer pipe positioning step of securing a sealed space between the transfer pipe and the heat transfer pipe by surrounding the transfer pipe and part of the component with a heat transfer pipe having a relatively large diameter compared to the transfer pipe; A secondary welding step of joining the connection parts and the heat transfer pipe; A working fluid injection step of injecting a working fluid into the sealed space; It is manufactured through a sealing step that seals the heat transfer pipe into which the working fluid is injected.

In the double pipe manufacturing method of the present invention as described above, the connecting parts between pipes constituting the pipeline are joined by automatic welding, thereby preventing heat damage to the electrolytic polished surface on the inner side of the pipe and increasing the flow resistance of the fluid. and thus enables precise temperature control of the fluid passing through the pipe.

Figure 1 is a flowchart for explaining a double pipe manufacturing method according to an embodiment of the present invention.
Figure 2 is a diagram schematically showing the manufacturing method shown in Figure 1.
FIG. 3 is a partial cross-sectional view of a pipeline constructed by the manufacturing method shown in FIG. 1.
Figure 4 is a flowchart showing a modified example of the double pipe manufacturing method according to an embodiment of the present invention.
Figure 5 is a diagram schematically showing the manufacturing method shown in Figure 4.
Figure 6 is a perspective view showing an example of a pipeline implemented through the manufacturing method of Figure 4.
Figure 7 is an exploded perspective view of the pipeline of Figure 6.

Hereinafter, one embodiment according to the present invention will be described in more detail with reference to the attached drawings.

Figure 1 is a flowchart for explaining a method of manufacturing a double pipe according to an embodiment of the present invention, and Figure 2 is a diagram schematically showing the manufacturing method shown in Figure 1.

As shown, the double pipe manufacturing method according to this embodiment includes a preparation step (101), a primary welding step (103), a heat transfer pipe positioning step (105), a secondary welding step (107), and working fluid injection. It includes step 109, sealing step 111, heating unit mounting step 113, and insulation mounting step 115.

The preparation step 101 is a process of preparing the transfer pipe 10 and parts. The transfer pipe 10 is an internal pipe accommodated inside the pipeline 40 to be manufactured, so to speak, and has various shapes and sizes. That is, in Figure 2a, the transport pipe 10 simply takes the form of a straight pipe, but a bent transport pipe is also included.

Additionally, the parts include all piping accessories used to connect the transport pipe (10). For example, an elbow, a tee, or a connecting tube (21) described later are also included in 'parts'. (In Figure 2, the connecting tube 21 is used as an example of the part, and in Figure 4, the micro elbow and the connecting tube are used as an example.) The inner surfaces of these parts are subjected to electrolytic polishing.

The connecting tube 21 consists of a tube body (21a) and a fixing ring (21c). The tube body (21a) is a straight pipe with the same diameter as the transport pipe (10). The connecting tube 21 and the transfer pipe 10 may be made of the same material. The fixing ring 21c is a ring-shaped member formed integrally with the outer peripheral surface of the tube body 21a. The height of the fixing ring (21c) with respect to the outer peripheral surface of the tube body (21a) is constant.

As shown in Figure 2a, if the transport pipe 10 and the connecting tube 21 as a connecting part are prepared, the first welding step 103 is performed. The first welding step 103 is a process of welding the butted portions with the ends of the connecting tube 21 butted against both ends of the transport pipe 10. That is, the end surface of the transfer pipe and the end end of the tube body 21a are brought into close contact with each other, and then the close contact portion is welded. (See Figure 2b) Welding at this time is automatic welding. In this way, the reason for automatic butt welding of the transport pipe 10 and the connecting tube 21 is to minimize damage to the electrolytic polished surface inside the transport pipe 10.

The heat transfer pipe positioning step 105 is a pipe that covers a portion of the transfer pipe 10 and the connecting tube 21 with the heat transfer pipe 23. The heat transfer pipe 23 is a pipe extending parallel to the moving pipe 10, and its inner diameter is the same as the outer diameter of the fixed ring 21c. Additionally, the length of the heat transfer pipe 23 is equal to the distance between the fixed rings 21c on both sides.

Therefore, when the transfer pipe 10 is inserted into the heat transfer pipe 23, as shown in FIG. 2C, the fixing ring 21c is positioned at both ends of the heat transfer pipe 23, and the heat transfer pipe 23 A sealed space 22 is formed by the inner peripheral surface, the outer peripheral surface of the transport pipe 10, and the fixed rings 21c on both sides. The closed space 22 is filled with working fluid (100 in FIG. 3).

In this way, since the transfer pipe 10 is surrounded by the heat transfer pipe 23, a 'double pipe' is formed. In the description of this embodiment, the double pipe includes all pipes that provide the closed space 22 and have a dual structure of the transport pipe 10 and the heat transfer pipe 23. This double pipe may be straight, or may be bent as described later. It can also have various diameters.

An injection hole 23a is formed in the heat transfer pipe 23. The injection hole 23a is an injection hole for injecting the working fluid into the sealed space 22.

If the heat transfer pipe 23 is positioned correctly through the above process, the second welding step 107 is performed. The second welding step 107 is a process of welding the fixing ring 21c and the heat transfer pipe 23. Welding of the fixing ring (21c) and the heat transfer pipe (23) may be automatic welding or manual welding.

If the sealed space 22 is formed through the second welding step 107, the working fluid injection step 109 continues. The working fluid injection step 109 is a process of injecting the working fluid 100 into the sealed space 22 through the injection hole 23a. A description of the working fluid 100 will be provided later.

The sealing step 111 is a process of sealing the injection hole 23a of the heat transfer pipe into which the working fluid is injected. As long as the injection hole 23a can be sealed, various sealing steps can be implemented.

For example, as shown in FIG. 2E, the injection hole 23a can be filled with the sealant 25a. The sealant 25a is a material filled through a known welding and sealing method. The sealant 25a protruding outside the outer circumferential surface of the heat transfer pipe 23 can be removed through machining. Additionally, a sealing screw (25b) and a seal (25c) may be used instead of the sealing material (25a). A seal (25c) is laid on the injection hole (23a) and a sealing screw (25b) is coupled to the injection hole (23a).

The heating unit installation step 113 is a process of installing the heating unit 27 on the outer peripheral surface of the heat transfer pipe 23. The heating unit 27 heats the heat transfer pipe 23 and may be a planar heating element using polyimide film, an STS etching heater, a CNT heater, or graphene (see Figure 2f).

The reason for heating the heat pipe 23 is to maintain the optimal flow conditions of the internal fluid. For example, this is to prevent foreign substances from sticking to the inside of the transfer pipe and narrowing the flow cross-sectional area, or to maintain the temperature of the moving fluid within a set range.

The subsequent heat insulating part mounting step 115 is a process of installing the insulating part (29 in FIG. 2g) on the outside of the heating part 27. The insulation portion 29 surrounds the heating portion 27 and serves to prevent heat loss from the heating portion. For this purpose, various materials of the insulation portion 29 can be applied.

Through the insulation installation step 115, the production of the pipeline 40 to which the heating jacket 20 is applied is completed. In particular, in order to solve the low efficiency of the conventional heating method of simply wrapping the heating coil around the transfer pipe, the heating jacket in this embodiment completely surrounds the transfer pipe with a phase-changing heating working fluid, making all parts of the transfer pipe identical. Heat to temperature. In other words, heating is performed without variation in the amount of heat along the longitudinal or circumferential direction of the transfer pipe.

FIG. 3 is a partial cross-sectional view for explaining the internal structure of the pipeline 40 constructed by the manufacturing method shown in FIG. 1. Although the pipeline 40 is shown in the form of a simple straight line in Figure 3, the shape of the pipeline naturally varies.

As shown, the pipeline 40 includes a transport pipe 10, a connecting tube 21, a heat transfer pipe 23, a heating unit 27, and an insulating unit 29.

The connecting tube 21 is a hollow pipe-shaped member fixed to both ends of the transport pipe 10, and has a fixing ring 21c as a spacer on the outer peripheral surface. As described above, the inner diameter and outer diameter of the tube body 21a are the same as the inner diameter and outer diameter of the transport pipe 10.

The heat transfer pipe 23 surrounds a portion of the transfer pipe 10 and the connecting tube 21, and both ends are coupled with the fixing ring 21c, and has a closed space 22 between the transfer pipe 10 and the transfer pipe 10. It is a hollow pipe.

The working fluid 100 filled in the sealed space 22 is a fluid that is heated by the heating unit 27 and undergoes a phase change, and may be a freon-based refrigerant, methanol, ethanol, or water. The working fluid 100 heats a part of the transfer pipe 10 and the connecting tube 21 (the part covered by the heat transfer pipe 23) by convection and conduction, maintaining the pipe at a uniform temperature. Let's do it. Heating the transport pipe 10 and the connecting tube 21 means heating the internal flowing fluid.

Since the working fluid completely surrounds the transfer pipe 10 while being filled in the sealed space 22, it transfers heat uniformly to the transfer pipe 10. In other words, heat is provided without variation in the amount of heat in the longitudinal or circumferential direction of the transfer pipe 10.

For reference, conventional heating devices that use heating wires as a heat source were unable to transfer heat uniformly depending on the spacing of the heating wires. In other words, the part in contact with the heating element is easily heated, but the area between the heating elements is heated slowly or at a low temperature. In addition, the thermal resistance at the contact area between the heating wire and the pipe was large, resulting in significant electricity consumption.

The heating unit 27 is a heating means that heats the heat transfer pipe 23 by outputting heat while covering the heat transfer pipe 23. Of course, the heat of the heated heat pipe 23 is transferred to the working fluid. Ultimately, the heating jacket 20 in this embodiment has the principle of heating the heat transfer pipe 23 with the heating unit 27 and allowing the heat transfer pipe 23 to heat the working fluid.

The insulation portion 29 surrounds the heating portion 27 and serves to suppress heat loss from the heating portion. By applying the heat insulating part 29, the heat of the heating part 27 is used to heat the heat transfer pipe 23 without being dissipated to the surroundings. The insulating material constituting the insulating portion 29 may be a general insulating material.

Figure 4 is a flowchart showing a modified example of the double pipe manufacturing method according to an embodiment of the present invention, and Figure 5 is a diagram schematically showing the manufacturing method shown in Figure 4. Additionally, Figure 6 is a perspective view showing an example of a pipeline implemented through the manufacturing method of Figure 4, and Figure 7 is an exploded perspective view of the pipeline of Figure 6.

Hereinafter, the same reference numbers as the above reference numbers indicate the same members with the same function.

The manufacturing method shown in FIG. 4 is a method of manufacturing the pipeline 40 having the shape of FIG. 6. For convenience of explanation, the configuration of the pipeline 40 will be explained first. In the pipeline 40 of FIG. 6, the heating unit and the insulating unit are omitted.

As shown in FIGS. 6 and 7, the pipeline 40 includes one curved transport pipe 10 and a straight transport pipe 10 orthogonal thereto. The heating jacket 20 can be applied whether the transfer pipe 10 is a curved pipe or a straight pipe.

In the drawing, one side of the micro elbow (34) is automatically butt-welded to one end of the straight conveying pipe (10) located horizontally, and the connecting tube (21) is butt-welded to the other end. In addition, the other side of the micro elbow 34 is fixed to the lower end of the curved transfer pipe 10, and another connecting tube 21 is fixed to the upper end using an automatic welding method. The straight conveying pipe 10 and the curved conveying pipe are connected at right angles via a micro elbow 34, and each end has a connecting tube 21. In addition, a nut 31 is inserted into the end of each connecting tube 21 and the gland 36 is fixed.

Meanwhile, in order to form a closed space around each transfer pipe (10) and the micro elbow (34), an outer elbow (35), three straight heat transfer pipes (23), and a pair of pipe halves (23c) are installed. It is used.

The outer elbow (35) consists of two elbow halves (35a). The elbow half (35a) is welded while accommodating the micro elbow (34) to form the outer elbow (35). Of course, a closed space where the working fluid can stay is formed inside the outer elbow (35).

A heat transfer pipe (23) is inserted into the straight-type transfer pipe (10). An outer elbow is welded to one end of the heat transfer pipe 23, and a fixing ring 21c of the connecting tube 21 is welded to the other end. The welding method at this time may be manual welding or automatic welding.

In addition, in the curved pipe-type conveying pipe 10, a vertical conveying pipe 10 is inserted into the vertical straight portion, and a horizontal conveying pipe 10 is inserted into the horizontal straight portion. The lower end of the vertical transport pipe is welded and fixed to the upper part of the outer elbow (35). Additionally, one end of the horizontal transport pipe is welded and fixed to the fixing ring 21c of the connecting tube 21.

The pipe half 23c is a member that divides the heat transfer pipe 23 in the longitudinal direction. When two pipe halves (23c) are aligned and welded, a bent heat transfer pipe (23) is created. The pipe half 23c is installed between the vertical transport pipe and the horizontal transport pipe. Welding of the pipe half 23c itself and welding of the heat transfer pipe to the pipe half may be manual welding or automatic welding.

The manufacturing method of the pipeline 40 having the above configuration includes a preparation step (101), a primary welding step (103), a heat transfer pipe positioning step (105), a secondary welding step (107), and a working fluid injection step ( 109), a sealing step (111), a heating part mounting step (113), and an insulating part mounting step (115).

The manufacturing method shown in FIG. 4 is almost the same as the manufacturing method in FIG. 1 with some differences. Slight differences are due to differences in the shape of the pipeline 40, and the basic procedures for each step are the same.

Preparation parts in the preparation step 101 of FIG. 4 include a micro elbow 34, an outer elbow 35, a gland 36, a nut 31, etc. in addition to the transfer pipe 10 and the connection tube 21. do. As shown in FIG. 5A, the connecting tube 21 is abutted to one end of the transfer pipe 10, and the micro elbow 34 is abutted to the other end.

In the first welding step 103, as shown in FIGS. 5A to 5C, the straight transport pipe 10 is automatically welded on one side of the micro elbow 34, and the bent transport pipe 10 is butted on the other side. In addition, it is a process of automatically butt welding the connection tube 21 to the opposite end of the straight transport pipe 10 and the bent transport pipe 10, respectively.

Additionally, the heat pipe positioning step (105) is a process of positioning the four heat pipes (23). That is, the heat transfer pipe 23 is placed on the straight transport pipe 10, both ends of the bent transport pipe 10, and the bent portion of the bent transport pipe 10.

The second welding step (107) is a process of fixing the positioned heat transfer pipe by welding. That is, both ends of the heat transfer pipe 23 accommodating the straight transfer pipe 10 are welded to the connection tube 21 and the outer elbow 35, and the heat transfer pipe accommodating the vertical part of the bent transfer pipe 10 is welded to the connection tube 21 and the outer elbow 35. The lower part is welded to the upper side of the outer elbow (35), and the horizontal part of the bent transfer pipe is welded to another connection tube (21).

Additionally, a heat transfer pipe 23 made of a pipe half 23c is fixed to the bent portion of the transfer pipe 10. The heat transfer pipe 23 is made up of two pipe halves 23c, and the pipe halves 23c are welded together with the heat transfer pipe 23 in between. In addition, the upper and lower ends of the interconnected pipe halves are welded and joined to other heat transfer pipes. Fixing of the heat transfer pipe 23 is done by manual welding.

The second welding step (107) includes a pipe half welding process (108a) and an elbow half welding process (108b). The pipe half welding process 108a is a process of welding the two pipe halves 23c described above, and then butt welding the ends of the pipe halves 23c to the ends of the other heat transfer pipes 23.

Additionally, the half-elbow welding process 108b is a process of welding a pair of half-elbows 35a. An outer elbow 35 that accommodates the micro elbow 34 is formed by welding the elbow half 35a.

The following working fluid injection step 109, sealing step 111, heating unit mounting step 113, and insulation mounting step 115 are performed in the same manner as described in FIG. 1.

Above, the present invention has been described in detail through specific embodiments, but the present invention is not limited to the above embodiments, and various modifications can be made by those skilled in the art within the scope of the technical idea of the present invention.

10: Transfer pipe 20: Heating jacket 21: Connecting tube
21a: Tube body 21c: Fixing ring 22: Closed space
23: Heat pipe 23a: Injection hole 23c: Pipe half
25a: sealing material 25b: sealing screw 25c: seal
27: Heating part 29: Insulating part 31: Nut
34: Micro elbow 35: Outer elbow 35a: Elbow half
36: Grand 40: Pipeline 100: Working fluid

Claims (8)

delete delete A preparatory step of preparing electropolished transport pipes to construct a fluid transport pipeline;
For connecting the transport pipe, preparing an electropolished connection tube including a tube body electrolytically polished and having the same diameter as the transport pipe, and a spacer protruding from an outer circumferential surface of the tube main body;
A first welding step of automatically welding the cross section of the end of the connecting tube prepared through the preparation step against the cross section of the end of the transport pipe and fixing it while minimizing damage to the electrolytic polished surface inside the transport pipe;
A heat transfer pipe positioning step of securing a sealed space between the transfer pipe and the heat transfer pipe by wrapping the transfer pipe and the spacer of the connecting tube with a heat transfer pipe having a relatively large diameter compared to the transfer pipe;
A secondary welding step of aligning the end of the heat transfer pipe with the spacer and then welding the end of the heat transfer pipe and the spacer together;
A working fluid injection step of injecting a working fluid into the sealed space;
Comprising a sealing step of sealing the heat transfer pipe into which the working fluid is injected,
Double pipe manufacturing method used in semiconductor manufacturing. delete According to paragraph 3,
Some of the above heat transfer pipes are made of a tube half divided into two,
The second welding step is;
A process of wrapping a transport pipe with two tube halves and then welding the tube halves to each other.
Double pipe manufacturing method used in semiconductor manufacturing. According to paragraph 3,
An injection hole for injecting a working fluid is formed in the heat transfer pipe,
The sealing step is;
Including a welding sealing process of sealing the injection hole by welding,
Double pipe manufacturing method used in semiconductor manufacturing. According to paragraph 3,
The spacer is,
It is a fixed ring that takes the shape of a ring and is integrated with the outer peripheral surface of the tube body of the connecting tube.
Double pipe manufacturing method used in semiconductor manufacturing. delete

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