KR20230120021A - Double pipe manufacturing method and Pipeline constructed by the method - Google Patents

Abstract

The present invention relates to a manufacturing method of a double pipe and a pipeline constructed by the method. The manufacturing method of a double pipe comprises: a preparation step of preparing transport pipes and components for connection to connect the transport pipes to construct a pipeline for fluid transport; a primary welding step of fixing the components prepared through the preparation step on ends of the transport pipes; a heat transfer pipe home position step of enclosing a portion of the transport pipes and the components with a heat transfer pipe with a relatively large diameter in comparison to the transport pipes to secure a sealed space between the transport pipes and the heat transfer pipe; a secondary welding step of coupling the components for connection and the heat transfer pipe; a working fluid injection step of injecting working fluid into the sealed space; a sealing step of sealing the heat transfer pipe into which the working fluid is injected; and a heating part mounting step of mounting a heating part on the heat transfer part. Accordingly, the manufacturing method of a double pipe couples the components for connection between the transport pipes making up a pipeline to the transport pipes by an automatic welding method to prevent thermal damage to electropolishing surfaces of the inner surfaces of the transport pipes to prevent an increase in the flow resistance of fluid, thereby precisely controlling the temperature of the fluid passing through the transport pipes.

Description

Double pipe manufacturing method and pipeline constructed by the method {Double pipe manufacturing method and Pipeline constructed by the method}

The present invention relates to a method for manufacturing a double pipe and a pipeline constructed by the method, which enables precise control of the heating temperature of a fluid by applying uniform heat to the outer circumferential surface of the pipe without partial temperature deviation.

The semiconductor manufacturing process can be divided into a pre-process and a post-process. The pre-process is a process of depositing a thin film on a wafer and leaving a designed pattern by etching the deposited thin film. In addition, the post process is a process of separating the semiconductor chips made in the previous process into individual pieces and combining them with lead frames to make a finished product.

In this semiconductor manufacturing process, various types of reaction gases or process gases are used. The gas used in the manufacturing process is discharged through the exhaust line together with the reaction by-products after the process is completed, and is then purified. For example, in the case of a chemical vapor deposition facility, a gas exhausted from a process chamber after a deposition process passes through an exhaust line, moves to a gas scrubber, is treated by the gas scrubber, and is then discharged.

However, while the exhaust gas passes through the exhaust line, there are cases in which fine dust-type powder is generated inside the exhaust line. When the powder is stacked on the inner wall of the exhaust line, the flow cross-sectional area in the pipe is narrowed, so that the exhaust gas is not discharged smoothly, and if this phenomenon becomes severe, it may cause a defect in the process.

This narrowing of the exhaust line becomes more severe as the temperature of the gas passing through the exhaust line is lowered. If the temperature of the gas is kept high enough, the occurrence of narrowing is reduced.

Accordingly, various devices for heating the exhaust line have been developed, and as a background technology for this related invention, Korean Patent Registration No. 10-0990157 discloses an insulated heating jacket and a manufacturing method thereof.

The disclosed heating jacket has an empty inner space to surround the gas discharge pipe, and in the heating jacket formed so that one end and the other end are in contact with each other in the slot, the heating jacket comprises an insulating sheet surrounding the gas discharge pipe and an outer surface of the insulating sheet. It includes a heating wire fixed in a state, an insulating material coupled to the outer surface of the insulating sheet to which the heating wire is fixed, a protective film coated on the outer surface of the insulating material, and an insulating tube inserted into the insulating sheet and the insulating material to surround the insulating sheet and the insulating material, the protective film is insulating It has a structure that is coated on the outer surface of the tube.

Korean Patent Registration No. 10-0990157 (insulation heating jacket and its manufacturing method) Korean Patent Registration No. 10-2095201 (Fluid Line Heating Jacket)

The present invention was created to solve the above problems, and since the connecting parts between the pipes constituting the pipeline are coupled by an automatic welding method, the double pipe manufacturing method and the above It is an object to provide a pipeline configured by the method.

The double pipe manufacturing method of the present invention as a means of solving the problems for achieving the above object includes a preparation step of preparing a transfer pipe and a connecting part to connect the transfer pipe to construct a fluid transfer pipeline; A first welding step of fixing the part prepared through the preparation step to the end of the transfer pipe; A heat transfer pipe positioning step of enclosing a portion of the transfer pipe and parts with a heat transfer pipe having a relatively larger diameter than the transfer pipe to secure a closed space between the transfer pipe and the heat transfer pipe; a secondary welding step of combining the connecting part and the heating pipe; a working fluid injection step of injecting a working fluid into the closed space; and a sealing step of sealing the heat transfer pipe into which the working fluid is injected.

In addition, as a process following the sealing step, a heating unit mounting step of mounting the heating unit to the heat pipe is further included.

In addition, in the connection parts prepared in the preparation step; A connection tube having the same diameter as the transfer pipe and having a spacer on an outer circumferential surface thereof is included, and the primary welding step includes; It is a process of welding the end face of the transfer pipe and the end face of the connecting tube by an automatic welding method after facing each other, and the second welding step; This is a process of welding the end of the heat pipe and the spacer after matching the end of the heat pipe to the spacer.

And, in the connection parts prepared in the preparation step; A micro elbow connecting two neighboring transfer pipes and an outer elbow surrounding the micro elbow are included, and the primary welding step includes; It is a process of fixing the end face of the micro elbow end to the end face of the transfer pipe using an automatic welding method, and the second welding step; This is the process of welding the outer elbow to the end of the heating pipe.

In addition, some of the heat pipes are made of a tube half divided into two, and the secondary welding step; This is the process of welding the tube halves to each other after wrapping the transfer pipe with two tube halves.

In addition, an injection hole for injection of a working fluid is formed in the heat pipe, and the sealing step; A welding sealing process for sealing the injection hole by welding is included.

In addition, the spacer is a fixed ring that takes the shape of a ring and is integrally formed with the outer circumferential surface of the tube body of the connecting tube.

And, the pipeline of the present invention as a solution to the problem for achieving the above object includes a preparation step of preparing a transfer pipe and a connecting part to connect the transfer pipe to configure the pipeline for fluid transfer; A first welding step of fixing the part prepared through the preparation step to the end of the transfer pipe; A heat transfer pipe positioning step of enclosing a portion of the transfer pipe and parts with a heat transfer pipe having a relatively larger diameter than the transfer pipe to secure a closed space between the transfer pipe and the heat transfer pipe; a secondary welding step of combining the connecting part and the heating pipe; a working fluid injection step of injecting a working fluid into the closed space; It is manufactured through a sealing step of sealing the heat transfer pipe into which the working fluid is injected.

In the method for manufacturing the double pipe of the present invention as described above, since the connecting parts between the pipes constituting the pipeline are coupled by an automatic welding method, thermal damage to the electrolytic polishing surface of the inner surface of the pipe is prevented, and the flow resistance of the fluid is increased. , thereby enabling precise temperature control for the fluid passing through the pipe.

1 is a flowchart illustrating a method for manufacturing a double pipe according to an embodiment of the present invention.
FIG. 2 is a diagram schematically showing the manufacturing method shown in FIG. 1 .
3 is a partial cross-sectional view of a pipeline constructed by the manufacturing method shown in FIG. 1;
Figure 4 is a flow chart showing a modified example of the double pipe manufacturing method according to an embodiment of the present invention.
FIG. 5 is a diagram schematically showing the manufacturing method shown in FIG. 4 .
6 is a perspective view illustrating an example of a pipeline implemented through the manufacturing method of FIG. 4 .
7 is an exploded perspective view of the pipeline of FIG. 6;

Hereinafter, one embodiment according to the present invention will be described in more detail with reference to the accompanying drawings.

1 is a flowchart illustrating a method for manufacturing a double pipe according to an embodiment of the present invention, and FIG. 2 is a diagram schematically showing the manufacturing method shown in FIG.

As shown, the double pipe manufacturing method according to this embodiment includes a preparation step 101, a first welding step 103, a heat transfer pipe placement step 105, a second welding step 107, and a working fluid injection. It includes step 109, sealing step 111, heating part mounting step 113, and heat insulating part mounting step 115.

The preparation step 101 is a process of preparing the transfer pipe 10 and parts. The transfer pipe 10 is accommodated inside the pipeline 40 to be manufactured, so to speak, as an internal pipe, and its shape and size vary. That is, in FIG. 2A, the transfer pipe 10 simply takes the form of a straight pipe, but the bent transfer pipe is also included.

In addition, the parts include all piping accessory materials used to connect the transfer pipe 10. For example, an elbow, a tee, or a connecting tube 21 to be described later are also included in 'parts'. (The connecting tube 21 is taken as a component in FIG. 2, and the micro elbow and the connecting tube are taken as an example in FIG. 4.) The inner surface of these parts is subjected to electrolytic polishing.

The connection tube 21 is composed of a tube body 21a and a fixing ring 21c. The tube body 21a is a straight tube having the same diameter as the transfer pipe 10. The connection tube 21 and the transfer pipe 10 may be made of the same material. The fixing ring 21c is a ring-shaped member integrally formed on the outer circumferential surface of the tube body 21a. The height of the fixing ring 21c relative to the outer circumferential surface of the tube body 21a is constant.

As shown in FIG. 2A, if the transfer pipe 10 and the connecting tube 21 as a connecting part are prepared, the first welding step 103 is performed. The first welding step (103) is a process of welding the butted parts in a state where the ends of the connection tube 21 are brought into contact with both ends of the transfer pipe 10. That is, the end face of the end of the transfer pipe and the end face of the end of the tube body 21a are welded in a state where they are brought into close contact with each other. (See Fig. 2b) The welding at this time is automatic welding. In this way, the reason for automatic butt-to-butt welding between the transfer pipe 10 and the connection tube 21 is to minimize damage to the electrolytic polishing surface inside the transfer pipe 10 .

In the heat transfer pipe placement step 105, the transfer pipe 10 and the connecting tube 21 are partially covered by the heat transfer pipe 23. The heat transfer pipe 23 is a pipe extending parallel to the movable pipe 10 and has an inner diameter equal to the outer diameter of the fixed ring 21c. In addition, the length of the heat transfer pipe 23 is the same as the distance between the fixing rings 21c on both sides.

Therefore, when the transfer pipe 10 is inserted into the heat pipe 23, as shown in FIG. 2C, the fixing rings 21c are positioned at both ends of the heat pipe 23, and the A sealed space 22 is formed by the inner circumferential surface, the outer circumferential surface of the transfer pipe 10, and both fixing rings 21c. The closed space 22 is filled with a working fluid (100 in FIG. 3).

In this way, since the transfer pipe 10 is wrapped with the heat transfer pipe 23, one 'double pipe' is formed. In the description of this embodiment, the double pipe includes all pipes that provide the closed space 22 and have a double structure of the transfer pipe 10 and the heat transfer pipe 23. This double pipe may be straight or may be in a bent state as will be described later. They can also have various diameters.

An injection hole 23a is formed in the heat transfer pipe 23 . The injection hole 23a is an injection hole for injecting a working fluid into the closed space 22 .

If the heat transfer pipe 23 is positioned in place through the above process, the secondary welding step 107 is performed. The secondary welding step 107 is a process of welding the fixed ring 21c and the heat pipe 23. Welding of the fixed ring 21c and the heating pipe 23 may be automatic welding or manual welding.

If the closed space 22 is formed through the secondary welding step 107, the operating fluid injection step 109 continues. The operating fluid injection step 109 is a process of injecting the operating fluid 100 into the closed space 22 through the injection hole 23a. Description of the working fluid 100 will be described later.

The sealing step 111 is a process of sealing the injection hole 23a of the heat transfer pipe into which the working fluid is injected. As long as the injection hole 23a can be sealed, the sealing step can be implemented in various ways.

For example, as shown in FIG. 2E, the sealing material 25a may be filled in the injection hole 23a. The sealing material 25a is a material filled through a known welding sealing method. The sealing material 25a protruding outside the outer circumferential surface of the heat pipe 23 can be removed through machining. In addition, a sealing screw 25b and a seal 25c may be used instead of the sealing material 25a. A seal 25c is placed on the injection hole 23a and a sealing screw 25b is coupled to the injection hole 23a.

The heating unit mounting step 113 is a process of installing the heating unit 27 on the outer circumferential surface of the heat pipe 23 . The heating unit 27 heats the electric heating pipe 23, and may be a planar heating element to which a polyimide film is applied, an STS etching heater, a CNT heater, or graphene. (See FIG. 2F)

The reason for heating the heat transfer pipe 23 is to maintain the best flow condition of the internal fluid. For example, this is to prevent a narrowing of the cross-sectional area of the flow due to foreign substances adhering to the inside of the transfer pipe, or to maintain the temperature of the moving fluid within a set range.

In the next heat insulating unit mounting step 115, the heat insulating unit (29 in FIG. 2G) is mounted on the outside of the heating unit 27. The insulator 29 surrounds the heating unit 27 and serves to prevent heat loss from the heating unit. The material of the heat insulating part 29 for this purpose can be applied in various ways.

Manufacturing of the pipeline 40 to which the heating jacket 20 is applied is completed through the heat insulating unit mounting step 115 . In particular, in the heating jacket of this embodiment, in order to solve the low efficiency of the conventional heating method of simply winding a heating coil around the transfer pipe, the transfer pipe is completely wrapped with a phase-changing heating working fluid, so that all parts of the transfer pipe are identical. heat to temperature That is, heating is performed without variation in heat quantity along the longitudinal direction or the circumferential direction of the transfer pipe.

3 is a partial cross-sectional view for explaining the internal structure of the pipeline 40 constructed by the manufacturing method shown in FIG. Although the pipeline 40 is shown in the form of a simple straight line in FIG. 3, the shape of the pipeline is naturally different.

As shown, the pipeline 40 includes a transfer pipe 10, a connecting tube 21, a heat transfer pipe 23, a heating unit 27, and an insulation unit 29.

The connection tube 21 is a hollow pipe-like member fixed to both ends of the transfer pipe 10, and has a fixing ring 21c as a spacer on an outer circumferential surface. As described above, the inner and outer diameters of the tube body 21a are the same as the inner and outer diameters of the transfer pipe 10 .

The heat transfer pipe 23 surrounds a portion of the transfer pipe 10 and the connection tube 21, and has both ends coupled with the fixing ring 21c to have a sealed space 22 between the transfer pipe 10 and the transfer pipe 10. it's a hollow pipe

The working fluid 100 filled in the closed space 22 is a fluid that is phase-changed by being heated by the heating unit 27, and may be a Freon-based refrigerant, methanol, ethanol, or water. The working fluid 100 heats a part of the transfer pipe 10 and the connection tube 21 (the part covered by the heat pipe 23) by convection and conduction, and maintains a uniform temperature in the pipe. let it Heating the transfer pipe 10 and the connecting tube 21 means heating the fluid flowing inside.

Since the working fluid completely surrounds the transfer pipe 10 while filling the closed space 22, it transfers uniform heat to the transfer pipe 10. That is, heat without variation in heat quantity is provided in the longitudinal direction or the circumferential direction of the transfer pipe 10 .

For reference, in the conventional heating device using a hot wire as a heat source, it was impossible to uniformly transfer heat according to the spacing of the hot wire. In other words, the part in contact with the heating wire is easily heated, but the part between the heating wire and the heating wire is heated slowly or at a low temperature. In addition, the thermal resistance at the contact portion between the heating wire and the pipe was large, resulting in severe electricity consumption.

The heating unit 27 is a heating unit that heats the heat transfer pipe 23 by outputting heat while covering the heat transfer pipe 23 . Of course, the heat of the heated electric heat pipe 23 is transferred to the working fluid. After all, the heating jacket 20 in this embodiment has the principle of heating the electric pipe 23 with the heating unit 27 and causing the electric pipe 23 to heat the working fluid.

The insulator 29 surrounds the heating unit 27 and serves to suppress heat loss from the heating unit. By applying the heat insulating part 29, the heat of the heating part 27 is used for heating the heat pipe 23 without dissipating to the surroundings. As the heat insulating material constituting the heat insulating part 29, a general heat insulating material may be used.

4 is a flow chart showing a modified example of a double pipe manufacturing method according to an embodiment of the present invention, and FIG. 5 is a diagram schematically showing the manufacturing method shown in FIG. 4 . 6 is a perspective view showing an example of a pipeline implemented through the manufacturing method of FIG. 4, and FIG. 7 is an exploded perspective view of the pipeline of FIG.

Hereinafter, the same reference numerals as the above reference numerals indicate the same members having the same functions.

The manufacturing method shown in FIG. 4 is a method of manufacturing the pipeline 40 having the shape of FIG. 6 . For convenience of description, the configuration of the pipeline 40 will be described first. In the pipeline 40 of FIG. 6, the heating unit and the insulation unit are omitted.

As shown in FIGS. 6 and 7 , the pipeline 40 includes one curved conveying pipe 10 and a straight tubular conveying pipe 10 orthogonal thereto. Whether the transfer pipe 10 is a curved pipe or a straight pipe, the heating jacket 20 can be applied.

One side of the micro elbow 34 is automatically butt-welded to one end of the straight tubular transfer pipe 10 positioned horizontally in the drawing, and the connection tube 21 to the other end. In addition, the other side of the micro elbow 34 is fixed to the lower end of the curved transfer pipe 10, and another connection tube 21 is fixed to the upper end by automatic welding. The straight tubular conveying pipe 10 and the curved conveying pipe are connected at right angles via the micro elbow 34, and also have a connecting tube 21 at each end. In addition, a nut 31 is fitted to the end of each connection tube 21 and the gland 36 is fixed.

On the other hand, in order to form a sealed space around each transfer pipe 10 and micro elbow 34, an outer elbow 35, three straight heat transfer pipes 23, and a pair of pipe halves 23c are used

The outer elbow 35 is composed of two elbow halves 35a. The elbow half 35a is welded while receiving the micro elbow 34 to form the outer elbow 35. Of course, a closed space in which the working fluid can stay is formed inside the outer elbow 35.

A heat transfer pipe 23 is inserted into the straight pipe transfer pipe 10. An outer elbow is welded to one end of the heat pipe 23 and a fixing ring 21c of the connection tube 21 is welded to the other end. The welding method at this time may be manual welding or automatic welding.

In addition, in the curved pipe-type conveying pipe 10, a vertical conveying pipe is inserted into a straight portion in the vertical direction, and a horizontal conveying pipe 10 is inserted into a straight portion in the horizontal direction. The lower end of the vertical conveying pipe is fixed to the upper part of the outer elbow 35 by welding. In addition, one end of the horizontal transfer pipe is welded and fixed to the fixing ring 21c of the connecting tube 21.

The pipe half 23c is a member obtained by dividing the heat transfer pipe 23 in the longitudinal direction. When the two pipe halves 23c are matched and welded, a bent heating pipe 23 is made. The pipe half 23c is installed between the vertical conveying pipe and the horizontal conveying pipe. The welding of the pipe half 23c itself and the welding of the heating pipe to the pipe half may be manual welding or automatic welding.

The manufacturing method of the pipeline 40 having the above configuration includes a preparation step 101, a first welding step 103, a heat transfer pipe placement step 105, a second welding step 107, a working fluid injection step ( 109), a sealing step (111), a heating part mounting step (113), and a heat insulating part mounting step (115).

The manufacturing method shown in FIG. 4 is almost the same as the manufacturing method of FIG. 1, but there are some differences. The slight difference is due to the difference in the shape of the pipeline 40, and the basic procedure of each step is the same.

The preparation parts in the preparation step 101 of FIG. 4 include a micro elbow 34, an outer elbow 35, a gland 36, a nut 31, etc. in addition to the transfer pipe 10 and the connection tube 21. do. As shown in FIG. 5A, the connection tube 21 is butted against one end of the transfer pipe 10 and the micro elbow 34 is opposed to the other end.

As shown in FIGS. 5A to 5C, the first welding step 103 automatically butt-welds the straight tube type transfer pipe 10 on one side of the micro elbow 34 and the bent transfer pipe 10 on the other side. In addition, it is a process of automatically butt-welding the connection tube 21 to the opposite end of the straight tube type transfer pipe 10 and the bent transfer pipe 10, respectively.

In addition, the heat transfer pipe placement step 105 is a process of placing the four heat transfer pipes 23 in place. That is, the heat transfer pipe 23 is placed on the straight tubular transfer pipe 10, both ends of the bent transfer pipe 10, and the bent portion of the bent transfer pipe 10.

The secondary welding step 107 is a process of fixing the positioned heat pipe by welding. That is, both ends of the heat transfer pipe 23 accommodating the straight tube transfer pipe 10 are welded to the connection tube 21 and the outer elbow 35, and the transfer pipe 10 is bent. The lower part is welded to the upper side of the outer elbow 35, and the horizontal part of the bent transfer pipe is welded to the other connecting tube 21.

In addition, a heat transfer pipe 23 made of a pipe half 23c is fixed to the bent portion of the transfer pipe 10. The heat transfer pipe 23 is composed of two pipe halves 23c, and the pipe halves 23c are welded together with the heat transfer pipe 23 interposed therebetween. In addition, the upper and lower ends of the mutually coupled pipe halves are welded to other heat transfer pipes. The fixing of the heat pipe 23 is performed by manual welding.

The secondary welding step 107 includes a pipe half welding process 108a and an elbow half welding process 108b. The pipe half welding process 108a is a process of welding the two pipe halves 23c described above and butt-welding the ends after welding to the ends of the other heat transfer pipes 23.

In addition, the elbow half welding process 108b is a process of welding a pair of elbow halves 35a. An outer elbow 35 accommodating the micro elbow 34 is formed by welding the elbow half 35a.

The subsequent operation fluid injection step 109, sealing step 111, heating unit mounting step 113, and heat insulation unit mounting step 115 proceed in the same manner as described with reference to FIG.

In the above, the present invention has been described in detail through specific embodiments, but the present invention is not limited to the above embodiments, and various modifications are possible by those skilled in the art within the scope of the technical idea of the present invention.

10: transfer pipe 20: heating jacket 21: connection tube
21a: tube body 21c: fixed ring 22: closed space
23: electric heat pipe 23a: injection hole 23c: pipe half
25a: sealing material 25b: sealing screw 25c: seal
27: heating unit 29: insulation unit 31: nut
34: micro elbow 35: outer elbow 35a: elbow half
36: Grand 40: Pipeline 100: Working fluid

Claims (8)

A preparation step of preparing a transfer pipe and a connecting part to connect the transfer pipe to construct a fluid transfer pipeline;
A first welding step of fixing the part prepared through the preparation step to the end of the transfer pipe;
A heat transfer pipe positioning step of enclosing a portion of the transfer pipe and parts with a heat transfer pipe having a relatively larger diameter than the transfer pipe to secure a closed space between the transfer pipe and the heat transfer pipe;
a secondary welding step of combining the connecting part and the heating pipe;
a working fluid injection step of injecting a working fluid into the closed space;
Including a sealing step of sealing the electric heating pipe into which the working fluid is injected,
How to make a double pipe. According to claim 1,
As a process following the sealing step,
Further comprising a heating unit mounting step of mounting the heating unit to the heat pipe,
How to make a double pipe. According to claim 1,
In the connection parts prepared in the preparation step;
A connection tube having the same diameter as the transfer pipe and having a spacer on the outer circumferential surface is included,
The first welding step;
It is a process of welding the cross section of the end of the transfer pipe and the end of the connecting tube by an automatic welding method after facing each other,
The second welding step;
A process of welding the end of the heat pipe and the spacer after matching the end of the heat pipe to the spacer,
How to make a double pipe. According to claim 1,
In the connection parts prepared in the preparation step;
It includes a micro elbow connecting two neighboring transfer pipes and an outer elbow surrounding the micro elbow,
The first welding step;
It is a process of fixing the cross section of the end of the micro elbow to the cross section of the end of the transfer pipe using an automatic welding method,
The second welding step;
The process of welding the outer elbow to the end of the heat pipe,
How to make a double pipe. According to claim 1,
Some of the heat pipes are made of a tube half divided into two,
The second welding step;
After wrapping the transfer pipe with two tube halves, the process of welding the tube halves to each other,
How to make a double pipe. According to claim 1,
An injection hole for injection of a working fluid is formed in the heat transfer pipe,
The sealing step;
Including a welding sealing process for sealing the injection hole by welding,
How to make a double pipe. According to claim 2,
The spacer is
A fixed ring that takes the shape of a ring and is integral with the outer circumferential surface of the tube body of the connecting tube,
How to make a double pipe. A pipeline constructed by the manufacturing method according to any one of claims 1 to 7.

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