HK1089513A1 - Heating plate and manufacturing method thereof - Google Patents

Heating plate and manufacturing method thereof

Info

Publication number
HK1089513A1
HK1089513A1 HK06111147.3A HK06111147A HK1089513A1 HK 1089513 A1 HK1089513 A1 HK 1089513A1 HK 06111147 A HK06111147 A HK 06111147A HK 1089513 A1 HK1089513 A1 HK 1089513A1
Authority
HK
Hong Kong
Prior art keywords
manufacturing
heating plate
heating
plate
Prior art date
Application number
HK06111147.3A
Inventor
Katsumi Watanabe
Akira Fukuchi
Original Assignee
Furukawa Sky Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004295701A external-priority patent/JP4838992B2/en
Priority claimed from JP2004295702A external-priority patent/JP4806179B2/en
Application filed by Furukawa Sky Aluminum Corp filed Critical Furukawa Sky Aluminum Corp
Publication of HK1089513A1 publication Critical patent/HK1089513A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
HK06111147.3A 2004-10-08 2006-10-11 Heating plate and manufacturing method thereof HK1089513A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004295701A JP4838992B2 (en) 2004-10-08 2004-10-08 Heater plate and heater plate manufacturing method
JP2004295702A JP4806179B2 (en) 2004-10-08 2004-10-08 Heater plate manufacturing method

Publications (1)

Publication Number Publication Date
HK1089513A1 true HK1089513A1 (en) 2006-12-01

Family

ID=37141314

Family Applications (1)

Application Number Title Priority Date Filing Date
HK06111147.3A HK1089513A1 (en) 2004-10-08 2006-10-11 Heating plate and manufacturing method thereof

Country Status (3)

Country Link
KR (1) KR101164186B1 (en)
HK (1) HK1089513A1 (en)
TW (1) TWI429314B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8263908B2 (en) 2004-10-08 2012-09-11 Furukawa-Sky Aluminum Corp. Heater plate and a method for manufacturing the heater plate

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4942385B2 (en) * 2006-04-25 2012-05-30 東芝三菱電機産業システム株式会社 Soaking equipment
KR100831241B1 (en) * 2006-12-28 2008-05-22 주식회사 단성일렉트론 Manufacturing method for susceptor and susceptor using this method
KR100780749B1 (en) * 2006-12-28 2007-11-30 주식회사 단성일렉트론 Manufacturing method for susceptor and susceptor using this method
JP6948832B2 (en) * 2017-05-22 2021-10-13 株式会社Ｕａｃｊ鋳鍛 Heat transfer plate for vacuum equipment and its manufacturing method
KR102351319B1 (en) * 2021-05-25 2022-01-17 주식회사 기가레인 Heating assembly

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000068037A (en) * 1998-08-18 2000-03-03 Sakaguchi Dennetsu Kk Plate heater
JP2001176645A (en) * 1999-12-21 2001-06-29 Keihin Sokki Kk Heater plate and its manufacturing method
JP4385533B2 (en) * 2001-03-02 2009-12-16 日本軽金属株式会社 Manufacturing method of heat plate
JP4805466B2 (en) * 2001-03-14 2011-11-02 古河スカイ株式会社 Method for manufacturing a heater plate provided with a sheath heater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8263908B2 (en) 2004-10-08 2012-09-11 Furukawa-Sky Aluminum Corp. Heater plate and a method for manufacturing the heater plate

Also Published As

Publication number Publication date
KR20060031581A (en) 2006-04-12
TW200612769A (en) 2006-04-16
TWI429314B (en) 2014-03-01
KR101164186B1 (en) 2012-07-10

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