JP4838992B2 - Heater plate and heater plate manufacturing method - Google Patents

Description

  The present invention relates to a heater plate for manufacturing a semiconductor or a liquid crystal display, in particular a sheath heater used by heating in a vacuum vessel (vacuum chamber), a heater plate used for drying / preheating in the manufacturing process, and a manufacturing method therefor It is about. In addition to the above, for example, it can be used as a heater plate in a thin display (FPD) manufacturing apparatus of PDP, FED, ELD. The present invention can also be applied to a heater plate for manufacturing a PTP sheet.

  Conventionally, in various fields such as a semiconductor manufacturing apparatus and a liquid crystal display manufacturing apparatus, a heater plate having a heater built in a metal base has been used. As a heater of such a heater plate, a stainless steel sheath heater is generally used. The heater plate has a structure in which a sheath heater is cast in aluminum (casting type), a sheath heater is sandwiched between aluminum or stainless steel plates and fastened with bolts (bolt fastening type), and the outer periphery of the plate in which the sheath heater is sandwiched Brazing, soldering and diffusion bonding (brazing, diffusion bonding type) of two parts sandwiching the sheath heater by pressurizing in a vacuum or in a predetermined gas atmosphere by welding parts (welding type) Alternatively, there is a type in which an annular groove and an annular protrusion are formed on the entire circumference of the joining surface of the plates sandwiching the sheath heater and joined by forging pressure welding (forging pressure welding type).

FIG. 7 shows a schematic structure of a conventional cast-in type heater plate 101 incorporating a sheath heater 102. In the sheath heater 102, a heating element is passed through a protective pipe made of stainless steel, and the two are electrically insulated by an insulating material. The pipe-shaped sheath heater 102 is bent into a predetermined pattern, cast into an aluminum base, and subjected to processing such as cutting and surface polishing, whereby the heater plate 101 is manufactured.

FIG. 8 shows a schematic structure of a conventional bolt fastening type heater plate 103. In this structure, the metal base is divided into upper and lower parts, and a sheath heater 102 similar to the above is installed in a groove 104a formed in the lower base 104 made of aluminum, stainless steel or the like, the upper base 105 is brought into close contact, and both are placed in place. It is integrated by fastening with bolts.

FIG. 9 shows a schematic structure of a conventional welded heater plate 106. Even in this structure, the metal base is divided into two parts, and the same sheath heater 102 is installed in the groove 107a formed in the lower base 107 made of aluminum, stainless steel, etc., and the upper base 108 is brought into close contact with each other. They are integrated by welding only at the edge 109.

FIG. 10 shows a schematic structure of a conventional brazing and diffusion bonding type heater plate 110. In this structure as well, the metal base is divided into two parts, and the same sheath heater 102 is installed in a groove 107a defined between the lower base 107 and the upper base 108 made of metal, and the upper base 108 and the lower base 107 are arranged. In a state where one or both of these are plastically deformed, they are integrally joined by brazing, soldering or diffusion bonding over the entire surface.

Further, FIG. 11 shows a schematic structure of a conventional forging pressure welding heater plate 111. Even in this structure, the metal base is divided into upper and lower parts, a rectangular, polygonal or circular annular groove and an annular protruding part are formed on the entire circumference of the joining surface of the aluminum members 112 and 113, and sealed with the fastening part 114 by forging pressure welding. , Metal bonded.
JP-A-11-285775 JP 2000-311932 A JP 2000-243542

In recent years, the size of heater plates has increased rapidly with the increase in size of liquid crystal televisions and the like. In recent years, the fourth generation 730 mm × 920 mm and the fifth generation 1100 mm × 1300 mm to the sixth generation have been developed. 1500 × 1800 mm, and the 7th generation 2100 mm × 2400 mm. Along with such an increase in the size of the heater plate, there is a problem of cost reduction due to a longer life of the heater plate and a simplified manufacturing method.

Of the heater plate structures described in the above prior art, the cast-in type heater plate is made of stainless steel used for the protective pipe of the sheath heater, although the sheath heater is in close contact with the aluminum casting, so that the heater has good thermal conductivity. Since the thermal expansion coefficients of metals such as steel and Inconel differ from those of aluminum as a metal base, the heater deforms due to its thermal stress at high temperatures and may be disconnected due to repeated use, or in some cases the entire heater plate There is a problem that is deformed.

On the other hand, since the aluminum-based bolt-clamped heater plate has a gap in the groove, and this gap becomes a heat insulation layer and each part is only in physical contact, the upper and lower bases and the sheath heater or between the bases There is a problem that the adhesiveness is low and the thermal conductivity is poor, and in some cases, the temperature is locally raised and the heater is damaged. The same applies to a welded heater plate. Further, the welding type heater plate is greatly distorted by welding, and there is a problem in maintaining the shape.

  The brazing and diffusion bonding types perform pressure bonding on the entire surface of the opposing members in a vacuum or in an atmosphere such as nitrogen gas, so large-sized members cannot be bonded, and brazing material, solder, etc. can be bonded. Therefore, there is a problem that a third joining member is required.

Further, in the forging pressure welding type heater plate, with the increase in size of the heater plate, a recess or projection for fitting is processed in the vicinity of the outer peripheral portion of the two plates and the vicinity of the heater portion, and these are fitted to each other. In the method disclosed in Japanese Patent Laid-Open No. 2000-311932, the creep deformation occurs when used at a high temperature of 300 to 500 ° C. for a long time, and the thermal stress is applied to the outer periphery and the vicinity of the heater, the vicinity of the center of the plate inside the heater, and the like. Due to the deformation, the heater plate could not be used.

  Due to the above-described problem of deformation of the heater plate and the problem of increase in manufacturing cost caused by the increase in size of the heater plate, it is necessary to improve the conventional forging and pressure welding method.

  The present invention has been made in view of the above-described problems of the prior art, and provides a heater plate having high thermal conductivity and high durability, and a method for manufacturing the same, while preventing deformation of the heater plate due to thermal stress. The purpose is to do.

  According to a first aspect of the present invention for solving the above problems, a sheath heater is housed in a groove provided in an aluminum or aluminum alloy base member, and a joining aluminum or aluminum alloy member is fitted into the groove, A heater plate in which aluminum for bonding or an aluminum alloy member and the aluminum or aluminum alloy base member are metal-bonded by forging pressure welding, and the shape of the cross section of the aluminum or aluminum alloy member for bonding has a rectangular shape and the width of the cross section The heater plate is characterized in that is equal to or slightly larger than the width of the groove.

According to a second aspect of the present invention, there is provided a heater plate, wherein the joining aluminum or aluminum alloy member is an integral member.

In a third aspect of the present invention, the joining aluminum or aluminum alloy member is
A heater plate comprising a plurality of members in a plane direction of the aluminum or aluminum alloy base member.

According to a fourth aspect of the present invention, the bonding aluminum or aluminum alloy member comprises:
A heater plate comprising a plurality of members in a direction perpendicular to the aluminum or aluminum alloy base member.

In a fifth aspect of the present invention, the layout of the sheath heater is symmetric with respect to at least one of two central axes orthogonal to each other of the aluminum or aluminum alloy base member, or is point-symmetric with respect to the center. It is a heater plate characterized by being.

A sixth aspect of the present invention is the heater plate according to the invention, wherein the aluminum or aluminum alloy base member is a plate material.

According to a seventh aspect of the present invention, the shape of the surface of the bonding aluminum or aluminum alloy member contacting the sheath heater is a plane parallel to the plate surface of the aluminum or aluminum alloy base member or the same as the outer periphery of the sheath heater. A heater plate having a curved surface having a curvature in a direction.

An eighth aspect of the present invention is a heater plate characterized in that a member width of a surface of the joining aluminum or aluminum alloy member contacting the sheath heater is larger than a width of the sheath heater.

According to a ninth aspect of the present invention, the sheath heater has a pipe-like shape having a circular cross section or a substantially rectangular shape (including a substantially square shape) whose corner portion is a curve having a predetermined curvature. The heater plate is knitted into a shape.

A tenth aspect of the present invention is characterized in that a plurality of the sheath heaters are disposed in the grooves provided in the aluminum or aluminum alloy base member, or one each in the plurality of grooves. This is a heater plate.

In an eleventh aspect of the present invention, in the case where a plurality of sheath heaters are disposed in the groove provided in the aluminum or aluminum alloy base member, the plurality of sheath heaters are disposed in parallel or the height in the groove. A heater plate, wherein a plurality of heater plates are arranged in a direction.

According to a twelfth aspect of the present invention, the heater plate that houses the sheath heater is excellent in thermal conductivity with the sheath portion of the heater.

A thirteenth aspect of the present invention is a heater plate characterized in that a heater plate that houses the sheath heater has airtightness.

A fourteenth aspect of the present invention is a heater plate characterized in that the sheath heater of the heater plate that houses the sheath heater has higher electrical insulation.

According to a fifteenth aspect of the present invention, the bonding aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are any one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. A heater plate made of an alloy.

In a sixteenth aspect of the present invention, the groove portion is processed in the aluminum or aluminum alloy base member, the sheath heater is stored in the groove portion, and the bonding aluminum or aluminum member is stored on the sheath heater. A method for manufacturing a heater plate for solid-phase metal bonding of aluminum or an aluminum member for joining and the aluminum or aluminum alloy base member by forging pressure welding, wherein the shape of the cross section of the joining aluminum or aluminum alloy member is rectangular. A method of manufacturing a heater plate, characterized in that metal bonding is performed by forging pressure welding using a member having a cross-sectional width equal to or larger than the width of the groove.

According to a seventeenth aspect of the present invention, the effective height obtained by subtracting the height of the sheath heater from the height of the joining aluminum or aluminum alloy member is equal to or greater than the depth of the groove portion, and forging pressure welding is used. It is a manufacturing method of a heater plate characterized by carrying out metal joining by.

An eighteenth aspect of the present invention is the method for manufacturing a heater plate, wherein a ratio of a height to a width of the cross section of the joining aluminum or aluminum alloy member is 1 or more and 4 or less.

A nineteenth aspect of the present invention is a method for manufacturing a heater plate, characterized in that metal bonding is performed by forging pressure welding using one or more members as the bonding aluminum or aluminum alloy member.

According to a twentieth aspect of the present invention, the joining aluminum or aluminum alloy member is divided into a plurality in the plane direction of the aluminum or aluminum alloy base member, or a member divided into a plurality in the cross-sectional direction. It is a manufacturing method of a heater plate characterized by carrying out metal joining by forging pressure welding using.

A twenty-first aspect of the present invention is the method of manufacturing a heater plate according to claim 17, wherein the plurality of joining aluminum or aluminum alloy members are sequentially subjected to forging pressure welding.

A twenty-second aspect of the present invention is a method for manufacturing a heater plate, characterized in that a metal material is joined to the aluminum or aluminum alloy base member by forging pressure welding using a plate material.

According to a twenty-third aspect of the present invention, in the joining aluminum or aluminum alloy member, the shape of the surface in contact with the sheath heater is a plane parallel to the plate surface of the aluminum or aluminum alloy base member or the same direction as the outer periphery of the sheath heater. A method for manufacturing a heater plate, characterized in that metal bonding is performed by forging pressure welding using a member having a curved surface having a curvature of 5 mm.

According to a twenty-fourth aspect of the present invention, any one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01 is used as the aluminum or aluminum alloy base member and the joining aluminum or aluminum alloy member. A method of manufacturing a heater plate, characterized in that metal bonding is performed by forging pressure welding using a member made of an alloy.

According to a twenty-fifth aspect of the present invention, there is provided a heater plate manufacturing method, wherein the forging pressure welding of the aluminum or aluminum alloy base member and the joining aluminum or aluminum alloy member is performed in a range of 250 ° C to 500 ° C. is there.

A twenty-sixth aspect of the present invention is a heater plate deformation preventing method using the heater plate manufacturing method according to the twenty-fifth aspect.

According to a twenty-seventh aspect of the present invention, there is provided a method for improving the adhesion between an aluminum or aluminum alloy member for joining to a heater plate and an aluminum or aluminum alloy base member by forging pressure welding by the method according to claim 26.

According to a twenty-eighth aspect of the present invention, there is provided a method for improving the life of a heater using the method for improving the adhesion of a bonding aluminum or aluminum alloy member to a heater plate according to the twenty-seventh aspect.

According to the present invention, the sheath heater and the joining aluminum or aluminum alloy member are accommodated in the groove provided in the aluminum or aluminum alloy base member, and the joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are joined by forging pressure welding. By metal bonding, a high level of confidentiality can be maintained between the aluminum or aluminum alloy base member and the sheath heater, and higher electrical insulation can be ensured.

In addition, according to the present invention, by performing metal joining in which the joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are forged by pressure welding in the vicinity of the temperature of the heating region in which the heater plate is used, Stress due to the difference in linear expansion between the aluminum or aluminum alloy base member and the sheath material of the internal heater in the operating temperature range can be reduced, and deformation or breakage of the sheath heater, deformation of the heater plate, or the like can be avoided. At the same time, the adhesion and thermal conductivity between the joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member can be improved.

  The heater plate in which the sheath heater is disposed in the present invention is a member in which the sheath heater is brought into close contact with the metal member, and heat generated by the sheath heater is transmitted to the metal member of the heater plate. The sheath heater is disposed inside the heater plate so as to heat the heater plate to a uniform temperature. For example, the sheath heater is arranged in a meandering shape or a spiral shape so that the heater plate is heated to a uniform temperature. In addition, the sheath heater is one in which a heating wire and an insulating material are enclosed in a sheath material (pipe) of stainless steel such as SUS304, nickel alloy such as incoloy, or titanium.

  A heater plate in which a sheathed heater is disposed according to the present invention is used as a heater plate in a vacuum container (vacuum chamber) of a semiconductor or liquid crystal manufacturing apparatus. FIG. 12 shows an example of using a heater plate in which a sheath heater is disposed. FIG. 12 shows a chemical vapor deposition (CVD) processing apparatus. A heater plate 121 having a sheath heater 123 disposed in a vacuum chamber 122 is provided by a support member 124. A substrate 125 is placed on the heater plate 121. A gas supply unit 126 for CVD processing is provided in the vacuum chamber 122, and a gas is supplied from a supply port 127 to form a film on the substrate 125 by chemical vapor deposition.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view of a sheath heater according to this embodiment. In FIG. 1, a heater plate 1 has a structure in which a sheath heater 3 is housed as an internal component in an aluminum or aluminum alloy base member 2 and is sealed with a bonding aluminum or aluminum alloy member 4. A plan view of the heater plate 1 is shown in FIG. 2, and a cross-sectional view taken along the line AA 'in FIG. The aluminum or aluminum alloy base member 2 is provided with a groove portion 5 for housing the sheath heater 3 and the joining aluminum or aluminum alloy member 4. The aluminum or aluminum alloy base member 2 may be a thick member, but a plate material is practically preferable.

After housing the sheath heater 3 in the groove portion 5, the joining aluminum or aluminum alloy member 4 is housed, and the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 are pressure contacted. FIG. 3 shows that a sheath heater is housed in a groove provided in an aluminum or aluminum alloy base member, a joining aluminum or aluminum alloy member is fitted into the groove portion, and the joining member and the base member are joined by forging pressure welding. The results are shown. As shown in this figure, the bonding aluminum or aluminum alloy member 4, the groove portion 5 of the aluminum or aluminum alloy base member 2, and the sheath heater 3 are in close contact with each other by forging pressure welding.

    The bonding aluminum or aluminum alloy member 4 of the present invention has a rectangular cross-sectional shape as shown in FIG. 3, and the width w1 of the cross section of the bonding aluminum or aluminum alloy member 4 as shown in FIG. Is characterized by being equal to or larger than the width w2 of the groove 5 provided in the aluminum or aluminum alloy base member 2. In addition, the ratio between the height h and the width w1 shown in FIG. 3B is desirably about 1 or more and 4 or less in consideration of buckling deformation of the joining member. In consideration of the resistance received from the side surface of the base member groove during forging pressure welding, 1 or more and 3 or less are particularly desirable. In addition, although bonding is possible even if it is 1 or less, since 1 or more is preferable in consideration of thermal deformation during use of the heater plate of the forging pressure welding portion, bonding portion strength, and the like, the lower limit value is set to 1 or more here. Here, with respect to the shape of the joining member, the shape of two joined rectangles in which the member width near the tip of the joining member is made narrower than the groove width, or the joining member by trimming slightly, is also within the scope of the present invention. Shall be included. Further, the volume of the joining member needs to be larger than the remaining effective volume obtained by subtracting the volume of the sheath heater from the groove volume of the base member. The length of the joining member needs to be equal to or slightly longer than the length necessary to ensure the volume necessary to completely fill the groove.

This is because the width w1 of the cross section of the bonding aluminum or aluminum alloy member 4 is the same as or slightly larger than the width w2 of the groove 5 provided in the aluminum or aluminum alloy base member 2, so that the bonding member 4 is a groove. Therefore, metal bonding can be performed by forging pressure welding between the joining member and the base member. Specifically, when a 10φ sheath heater is used, the groove width of the base member may be set to 11 mm, and the bonding member having a member width of about 12 mm may be used. That is, when the joining member is fitted to the base member, the joining member may be slightly larger than the groove width of the base member so as to be plastically deformed while receiving a compressive stress from the groove wall. The difference in dimension with respect to the groove width of the joining member to be inserted into the base member groove is allowed up to the maximum insertable range, but it is considered that the allowable range is about several mm larger than the groove width. The ratio of the height h1 and the width w1 shown in FIG. 3B is preferably 1 or more and 4 or less, and particularly preferably 1 or more and 3 or less.

Next, the volume of the joining member is made larger than the remaining effective volume obtained by subtracting the volume of the sheath heater from the groove part volume of the base member, and further, the length of the joining member is necessary to completely fill the groove part. The same or a little longer than the length necessary to secure a sufficient volume. This is because otherwise, the joining member is sufficiently filled in the groove, and at the same time, the base member cannot be completely metal-joined.

FIG. 2 shows an embodiment in which the joining aluminum or aluminum alloy member 4 is formed as an integral member. On the other hand, FIG. 4 shows an embodiment in which the joining aluminum or aluminum alloy member is composed of a plurality of members when viewed in the plane direction of the aluminum or aluminum alloy base member 2. Therefore, if necessary, the joining aluminum or aluminum alloy member 4 can be divided into a plurality of pieces as shown in FIG.

  The heater plate of the present invention may have a rectangular shape as shown in FIG. 2 or a circular shape as shown in FIG. Preferably, it is symmetric with respect to at least one of two central axes orthogonal to each other, or is point-symmetric with respect to the center. That is, in FIG. 2, it is a target with respect to the central axis 6, and in FIG. Further, in FIG. 5B, it is preferably point-symmetric with respect to the center 53. Further, in FIG. 5B, it is preferably point-symmetric with respect to the center 53. Although not shown in particular, it is possible to arrange two heaters in parallel in the groove of the base material portion in a layout similar to the layout of FIG. 2, FIG. 5 (a), FIG. 5 (b), or Two or more grooves can be arranged in parallel in the depth direction of the groove. Thus, a heater plate can be configured by housing a plurality of heaters in the groove of the base member. Alternatively, a heater plate can be configured by arranging a plurality of heaters one by one in a plurality of grooves.

In the cross-sectional shape of the bonding aluminum or aluminum alloy member 4 shown in FIG. 3, the shape of the surface directly in contact with the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2 or the outer periphery of the sheath heater 3. It is preferable that it is the aspect which has the curvature of the same direction. FIG. 6A shows an example of the joining aluminum or aluminum alloy member 4 whose surface directly in contact with the sheath heater 3 has a curvature in the same direction as the outer periphery of the sheath heater 3. By forming the surface 31 directly in contact with the sheath heater 3 in such a shape, the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 and the sheath portion of the sheath heater 3 can be joined without a gap, and high airtightness is achieved. And excellent thermal conductivity. Furthermore, by increasing the soundness of the sheath portion, the internal insulating material is protected, and high electrical insulation is maintained. In FIG. 6B, the cross-sectional shape of the surface of the bonding aluminum or aluminum alloy member 4 that contacts the sheath heater has a curvature in the same direction as the sheath heater, but the width of the bonding aluminum or aluminum alloy member 4 is the sheath heater. A case where the width is larger than X is shown. In this way, by increasing the width of the joining member, material inflow to the outer peripheral side portion of the heater cross section is ensured, and the adhesion between the sheath heater and the joining member is improved. FIG. 6C shows the case where the joining member width is parallel to the plate surface of the base member. In this way, the joining member width is made larger than the sheath heater width X. This is particularly effective in terms of material inflow to the outer peripheral side of the cross section of the heater as compared with the case where the surface in contact with the sheath heater has a curvature in the same direction as the sheath heater. Here, when the joining member width is increased, it goes without saying that the base member width is also increased according to the amount of enlargement of the joining member width.

For the aluminum or aluminum alloy base member 2 and the bonding aluminum or aluminum alloy member 4 of the heater plate of the present invention, any one of the alloys of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01 is used. Can be used.

As another embodiment of the heater plate of the present invention, the sheath heater 3 has a pipe shape in which the sectional shape of the sheath heater 3 is a circular shape or a substantially rectangular shape (including a substantially square shape) having a curved portion with a predetermined curvature. Can be knitted.
Next, a method for manufacturing the heater plate will be described.

In the heater plate 1 of the present invention, a groove portion 5 for inserting a sheath heater 3 which is an internal component and a joining aluminum or aluminum alloy member 4 is disposed in the aluminum or aluminum alloy base member 2 in advance, and the sheath heater 3 is placed in the groove portion 5. Then, the joining aluminum or the aluminum alloy member 4 for filling the space of the groove portion 5 is inserted from above. Further, the heater plate is manufactured by metal-bonding the bonding aluminum or aluminum alloy member 4 and the aluminum or aluminum alloy base member 2 by forging pressure welding. Here, the aluminum or aluminum alloy base member may be an aluminum alloy plate.

In the heater plate manufacturing method of the present invention, the joining aluminum or aluminum alloy member 4 has a rectangular cross-sectional shape as described above, and the joining aluminum or aluminum alloy member 4 has a cross-sectional width w1 equal to that of the aluminum or aluminum alloy base member 2. It is preferable that it is the same as or larger than the width w2 of the groove 5 provided. Thereby, the forging pressure welding can be performed between the side surface of the groove portion 5 of the aluminum or aluminum alloy base member 2 and the side surface of the bonding aluminum or aluminum alloy member 4 without a gap.

In the heater plate manufacturing method of the present invention, the height h1 of the bonding aluminum or aluminum alloy member 4 shown in FIG. 3 is set to the width of the sheath heater from the depth h2 of the groove 5 of the aluminum or aluminum alloy base member 2. It is preferable that the value is larger than the subtracted value, and the airtightness between the bottom surface of the joining aluminum or aluminum alloy member 4 and the sheath heater can be enhanced by forging pressure welding.
Moreover, in the manufacturing method of the heater plate 1 of this invention, as for the aluminum or aluminum alloy member 4 for joining of this invention, the ratio of height h and width w1 is 1 or more, 4 or less, Especially preferably, 1 or more and 3 or less are especially preferable.

In the heater plate manufacturing method of the present invention, it is desirable to clean the surface as a pretreatment. For example, in the case of aluminum or aluminum alloy members, (1) oil removal of the surface with nitric acid, (2) washing with water, (3) caustic treatment (etching with an alkaline solution), (4) washing with water, (5) washing with nitric acid, It is preferable to wash the surface by appropriately combining the steps of (6) washing with water and (7) washing with hot water. This is because the bondability is improved by cleaning the surface before forging pressure welding.

In addition, it is desirable to perform cutting, polishing, anodizing, and shot blasting as finishing after the aluminum or aluminum alloy base member 2 and the bonding aluminum or aluminum alloy member 4 are forged and pressure-welded. Here, since cutting is performed after forging, the deformation in the vicinity of the pressing portion of the heater plate pressing surface after forging pressure welding caused by pressing the joining member in excess of the effective volume of the base member groove portion during forging pressing is performed by cutting, It can be removed by polishing or the like.

The forging pressure temperature when the aluminum or aluminum alloy base member 2 and the joining aluminum or aluminum alloy member 4 are pressure-welded is metal-bonded in a temperature range of 250 to 500 ° C., but preferably in the range of 300 to 450 ° C. Furthermore, 350-420 degreeC is suitable. The merit of forging pressure welding can be joined in a very short time when the joining member is integrated as compared with the welding method.

When natural cooling is performed after forging and the temperature reaches room temperature, stress is generated due to the shrinkage difference between the aluminum or aluminum alloy base member and the stainless steel sheath heater, but the heater plate deforms at room temperature because the proof stress of the aluminum or aluminum alloy base member is large. There is no. Further, since the strength of the stainless steel of the sheath heater is high, the sheath heater does not deform or break. When the heater plate forged at around 400 ° C. is heated to around 400 ° C., which is the operating temperature range, the state when it is forged is restored, and between the aluminum member and the stainless steel sheath material. The stress becomes extremely small, and there is no possibility that the heater plate is deformed or the sheath material is deformed or broken.

  In the manufacturing method of the heater plate 1 of the present invention, aluminum or aluminum alloy used for the base member 2 and the joining member 4 is any one of JIS1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. You can choose. The material or manufacturing method of the aluminum or aluminum alloy base member 2 is not specified, but it is desirable to use a rolled plate or a forged product with few internal defects in consideration of leakage resistance. Further, from the viewpoint of corrosion resistance against cleaning gas, JIS1050 having a purity of 99.5% or more is most preferable, but in terms of preventing creep deformation accompanying the increase in the size of the heater plate, the aluminum material has higher strength than 1100, 6061, etc. Although alloys are being used, any of the aluminum or aluminum alloys described above can be used. In addition, Al-Mg alloys such as 5005 and 5052 having a low magnesium content can also be used in a composition range that satisfies the press contact property and can ensure metal bonding.

When the aluminum or aluminum alloy base member 2 and the joining member 4 are made of the same material, the members are pressed against each other by deformation during forging and pressure welding, and are easily metal-joined physically. Further, even if the base member 2 and the joining member 4 made of aluminum or aluminum alloy are different materials, the members are pressed against each other by the plastic deformation of the two members during forge pressure welding, and are physically metal-bonded. Even different materials of JIS 1000 series aluminum material and JIS 3000 series aluminum material are physically metal-bonded by forging pressure welding.

When the bonding aluminum or aluminum alloy member 4 filling the groove 5 is divided into a plurality of members in the plane direction of the aluminum or aluminum alloy base member 2 as shown in FIG. 3, the divided members are simultaneously used. It is possible to forge or to forge sequentially. In the case of sequentially forging the divided members, the range of the portion to be forged at a time is reduced, so that forging can be performed using a smaller press.

In this case, a plurality of joining aluminum or aluminum alloy members have a length in the heater arrangement direction in which the upper surface of the member is longer than the lower surface of the member, the end surface of the joining member has a tapered shape, and the length of the upper surface of the joining member By making the length longer than the heater embedding groove length of the base member, a plurality of members are subjected to forging pressure welding while plastically deforming while exerting pressure on each other, so that sufficient joining at the time of forging pressure welding at the boundary of the plurality of members can be ensured. Although it is desirable to join the joining member and the base member only by forging pressure welding in order to simplify the manufacturing process, by joining the boundaries of a plurality of joining members by electron beam welding or brazing, etc. In addition, it is possible to use a plurality of joining members whose length is shorter than the groove length of the base member.

In the method for manufacturing the heater plate 1 of the present invention, the surface of the bonding aluminum or aluminum alloy member 4 that contacts the sheath heater 3 has a plane parallel to the plate surface of the aluminum or aluminum alloy base member 2 or the outer periphery of the sheath heater 3. It is desirable that the surface has a curvature in the same direction.

  With the above-described heater plate manufacturing method of the present invention, the adhesion between the aluminum or aluminum alloy base member 2 and the sheath heater 3 is enhanced, so that the thermal conductivity from the sheath heater 3 to the aluminum or aluminum alloy base member 2 is greatly increased. Since it is raised, the lifetime of the sheath heater 3 can be improved. Moreover, in the manufacturing method of the heater plate 1 of the present invention, since the forging pressure is performed in the vicinity of 400 ° C. which is the operating temperature range, the stress between the aluminum member and the stainless steel sheath material during use is extremely small, The heater plate can be used for a long time without distortion.

In the present invention, since the two aluminum or aluminum alloys are not metal-bonded by forging pressure, only the portion in which the sheath heater is embedded is forged and pressure-welded, so that deformation of the heater plate due to thermal stress can be prevented. Therefore, even if the heater plate is enlarged, according to the present invention, only the vicinity of the sheath heater is pressed and forging pressure welding is performed, so that the power of the forging press can be reduced as compared with the case where the entire plate is pressed and joined. Further, since the area of the material pressing portion of the press machine can be reduced, the press machine can be prevented from being enlarged, and further, the labor of processing can be reduced as compared with the case where the two plate members are forged and pressed.

The forging technique is made of aluminum or an aluminum alloy. However, as in the present invention, aluminum or an aluminum alloy can be used as long as it is a material that can join the joining member and the metal base member containing the sheath heater by forging pressure welding and has high thermal conductivity. However, any metal material may be used, and a material having a large thermal expansion coefficient is more preferable in consideration of the heater life. Such materials include copper or copper alloys. A similar heater plate can be obtained using copper or a copper alloy.

FIG. 1 is a cross-sectional view of a heater plate according to an embodiment of the present invention. FIG. 2 is a plan view of the heater plate according to the embodiment of the present invention. FIG. 3 is a cross-sectional view taken along the line A-A ′ of FIG. 2. FIG. 4 is a plan view of a heater plate according to another embodiment of the present invention. FIG. 5 is a plan view of a circular heater plate. FIG. 5A is an example that is symmetric with respect to the central axis, and FIG. 5B is an example that is symmetric with respect to the center. FIG. 6 is a cross-sectional view of the joining aluminum or aluminum alloy member of the present invention. FIG. 7 is a diagram showing a schematic structure of a conventional cast-in type heater plate incorporating a sheath heater. FIG. 8 is a view showing a schematic structure of a bolt fastening type heater plate. FIG. 9 is a view showing a schematic structure of a conventional welded heater plate. FIG. 10 is a diagram showing a schematic structure of a brazing and diffusion bonding type heater plate. FIG. 11 is a diagram showing a schematic structure of a forging pressure welding heater plate. FIG. 12 is a diagram showing a schematic structure of a chemical vapor deposition (CVD) processing apparatus having a sheath heater disposed therein.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 101, 103, 106, 110, 111, 121 ... Heater plate 2 ... Aluminum or aluminum alloy base member 3, 102, 123 ... Sheath heater 4 ... Joining aluminum or aluminum alloy member 5 ... Groove part 6, 7, 51, 52 ... Center axis 31 ... Surface 53 in direct contact with sheath heater ... Center 104, 107 ... Lower base 104a, 107a ... Groove 105, 108 ... Upper base 109 ... Edge 112, 113 ... Aluminum member 114 ... Fastening part 122 ... Chamber 124 ... Support member 125 ... substrate 126 ... gas supply unit 127 ... supply port

Claims (26)

The sheath heater is housed in the groove provided in the aluminum or aluminum alloy base member,
Furthermore, the aluminum or aluminum alloy member for joining is fitted into the groove,
A heater plate in which the bonding aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are metal-bonded by forging pressure welding,
The width of the cross-sectional shape of the cross section of the bonding aluminum or aluminum alloy member has a rectangular large active slightly or equal to the width of the groove,
A plurality of the sheath heaters are arranged in a height direction in a groove provided in the aluminum or aluminum alloy base member . The joining aluminum or aluminum alloy member is
The heater plate according to claim 1, comprising a single member. The joining aluminum or aluminum alloy member is
The heater plate according to claim 1, comprising a plurality of members in a plane direction of the aluminum or aluminum alloy base member. The joining aluminum or aluminum alloy member is
The heater plate according to claim 1, comprising a plurality of members in a direction perpendicular to the aluminum or aluminum alloy base member. The layout of the sheath heater is
Symmetric with respect to at least one of two orthogonal central axes of the aluminum or aluminum alloy base member,
The heater plate according to claim 1, wherein the heater plate is point-symmetric with respect to the center. The heater plate according to any one of claims 1 to 5, wherein the aluminum or aluminum alloy base member is a plate material. The shape of the surface in contact with the sheath heater of the joining aluminum or aluminum alloy member,
A plane parallel to the plate surface of the aluminum or aluminum alloy base member,
Alternatively, the heater plate according to any one of claims 1 to 6, wherein the heater plate has a curved surface having a curvature in the same direction as the outer periphery of the sheath heater. The heater plate according to any one of claims 1 to 7, wherein a member width of a surface of the joining aluminum or aluminum alloy member contacting the sheath heater is larger than a width of the sheath heater. The sheath heater is
A pipe-like one having a circular cross section or a substantially rectangular shape (including a substantially square shape) in which a corner portion is a curve having a predetermined curvature;
Alternatively, the heater plate according to any one of claims 1 to 8, wherein the narrow strip is knitted into a pipe shape. The heater plate according to any one of claims 1 to 9 , wherein the heater plate that houses the sheath heater is excellent in thermal conductivity with a sheath portion of the heater. The heater plate according to any one of claims 1 to 10 , wherein a heater plate that houses the sheath heater has airtightness. The heater plate according to any one of claims 1 to 11 , wherein the sheath heater of the heater plate that houses the sheath heater has higher electrical insulation. The joining aluminum or aluminum alloy member and the aluminum or aluminum alloy base member are:
The heater plate according to any one of claims 1 to 12 , wherein the heater plate is made of any one of JIS 1050, 1100, 3003, 3004, 5005, 5052, 6063, 6061, 7003, and 7N01. Machining a groove in the A aluminum or aluminum alloy base member,
Then stored plurality of arranged overlapping the sheet Suhita in the height direction in the groove,
Furthermore, aluminum for joining or an aluminum member is stored on the sheath heater,
A method for manufacturing a heater plate for solid-phase metal bonding of the bonding aluminum or aluminum member and the aluminum or aluminum alloy base member by forging pressure welding,
Manufacturing of a heater plate, characterized in that the joining aluminum or aluminum alloy member is metal-bonded by forging pressure welding using a member having a rectangular cross-sectional shape and a cross-sectional width equal to or larger than the groove width. Method. An effective height obtained by subtracting the height of the sheath heater from the height of the joining aluminum or aluminum alloy member is metal joined by forging pressure welding using a member equal to or larger than the depth of the groove. The method for manufacturing a heater plate according to claim 14 . The method of manufacturing a heater plate according to claim 14 or 15 , wherein a ratio of a height to a width of the cross section of the joining aluminum or aluminum alloy member is 1 or more and 4 or less. Method of manufacturing a heater plate according to claims 14 to any one of claims 16, characterized in that the metal joined by forging press with a member of one or more as the bonding aluminum or aluminum alloy member . The joining aluminum or aluminum alloy member is divided into a plurality in the plane direction of the aluminum or aluminum alloy base member,
Or manufacturing method of the heater plate according to claims 14 to any one of claims 17, characterized in that the metal joined by forging press with a member that is divided into a plurality of the cross-sectional direction. 19. The method of manufacturing a heater plate according to claim 18 , wherein the plurality of joining aluminum or aluminum alloy members are sequentially welded and pressure-welded. The method for manufacturing a heater plate according to any one of claims 14 to 17 , wherein the aluminum or aluminum alloy base member is metal-bonded by forging pressure welding using a plate material. In the joining aluminum or aluminum alloy member,
Metal bonding is performed by forging pressure welding using a member having a curved surface in which the shape of the surface in contact with the sheath heater is a plane parallel to the plate surface of the aluminum or aluminum alloy base member or having the same curvature as the outer periphery of the sheath heater. The method for manufacturing a heater plate according to any one of claims 14 to 20 . As the aluminum or aluminum alloy base member and the joining aluminum or aluminum alloy member,
One of claims 14 to claim 21, characterized in that the metal joined by forging press with a member made of one of alloy JIS1050,1100,3003,3004,5005,5052,6063,6061,7003,7N01 A method for manufacturing the heater plate according to claim 1. The forging press of the aluminum or aluminum alloy base member and the bonding aluminum or aluminum alloy member, according to any one of claims 22 claim 16, characterized in that in a range of 500 ° C. from 250 ° C. Heater plate manufacturing method A heater plate deformation preventing method using the heater plate manufacturing method according to claim 23 . A method for improving the adhesion between an aluminum or aluminum alloy member for joining to an heater plate and an aluminum or aluminum alloy base member by forging pressure welding using the method for producing a heater plate according to claim 24 . 26. A method for improving heater life using the method for improving adhesion of aluminum or aluminum alloy member for joining to a heater plate according to claim 25 .

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