JP4805887B2 - 半導体レーザ装置 - Google Patents
半導体レーザ装置 Download PDFInfo
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- JP4805887B2 JP4805887B2 JP2007230192A JP2007230192A JP4805887B2 JP 4805887 B2 JP4805887 B2 JP 4805887B2 JP 2007230192 A JP2007230192 A JP 2007230192A JP 2007230192 A JP2007230192 A JP 2007230192A JP 4805887 B2 JP4805887 B2 JP 4805887B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/16—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/223—Buried stripe structure
- H01S5/2231—Buried stripe structure with inner confining structure only between the active layer and the upper electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1039—Details on the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Geometry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
Description
図1は本発明の実施形態にかかる半導体レーザ装置を表し、図1(a)は模式斜視図、図1(b)はA−A線に沿った模式断面図、図1(c)は模式正面図である。
n型GaNのような基板20の上に、n型クラッド層22、n型光ガイド層24、活性層26、オーバーフロー防止層28、p型光ガイド層30、p型クラッド層32、並びにコンタクト層34を含んだ積層体が形成されている。この積層体は、例えばMOCVD(Metal Organic Chemical Vapor Deposition )法やMBE(Molecular Beam Epitaxy)法を用いてこの順序で結晶成長することにより形成できる。
図3は比較例にかかる半導体レーザ装置を表し、図3(a)は模式斜視図、図3(b)はA−A線に沿った模式断面図である。この比較例では、端面160、162近傍に電極を設けずに電流非注入領域148とする。電流が実質的にゼロであると、非発光再結合が殆ど生じず、発熱によるバンドギャップの狭小化を抑制でき、CODレベルの低下も抑制できる。しかし、電極136の端部と電極非形成領域148との境界149(ドットで表す)の近傍には、応力を生じ活性層126の近傍に応力歪を生じる。この境界149が光軸に沿った活性層126の内部の深い位置を含むと、応力歪が結晶内部に与える影響がより大きくなり、特性や信頼性を低下させる。この場合、応力歪を生じた結晶内部への注入電流が大きいと特性及び信頼性の低下が促進される可能性がある。
Claims (5)
- 活性層と、前記活性層の上に設けられたクラッド層と、前記クラッド層の上に設けられたコンタクト層と、を含み、前記活性層から放射される光の共振器を形成する第1及び第2の端面を有する積層体と、
前記コンタクト層の上に設けられ、前記活性層に電流を注入するオーミック部と、前記オーミック部の一方の端部と前記第1の端面との間に設けられ、Auを含まない第1の電流調整部と、を含む電極と、
を備え、
前記オーミック部は、前記第1の電流調整部を構成するいずれの金属の仕事関数よりも小さい仕事関数を有する金属と、前記第1の電流調整部を構成する前記金属と、を前記コンタクト層と接触する側に含み、前記コンタクト層との間でオーミック接合をなし、
前記第1の電流調整部は、前記コンタクト層との間で前記オーミック接合のコンタクト抵抗よりも高いコンタクト抵抗を有する接合をなすことを特徴とする半導体レーザ装置。 - 前記電極は、前記オーミック部の他方の端部と前記第2の端面との間に設けられた第2の電流調整部をさらに有することを特徴とする請求項1記載の半導体レーザ装置。
- 前記共振器の光軸に沿った長さと、前記共振器の前記光軸に沿った前記オーミック部の長さと、の差が100μm以下であることを特徴とする請求項1または2に記載の半導体レーザ装置。
- 前記活性層は、InxGa1−xN/InyGa1−yN(0.05≦x≦1、0≦y≦1、x>y)からなる多重量子井戸であり、
前記クラッド層はAltGa1−tN(0<t≦0.05)からなり、
前記コンタクト層はGaNからなることを特徴とする請求項1〜3のいずれか1つに記載の半導体レーザ装置。 - 前記電流調整部は、NiまたはPtを含み、
前記オーミック部は、Au、Auを含む金属積層、Auを含む合金層、のうちのいずれか1つを含むことを特徴とする請求項1〜4のいずれか1つに記載の半導体レーザ装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007230192A JP4805887B2 (ja) | 2007-09-05 | 2007-09-05 | 半導体レーザ装置 |
US12/204,223 US7830930B2 (en) | 2007-09-05 | 2008-09-04 | Semiconductor laser device |
Applications Claiming Priority (1)
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JP2007230192A JP4805887B2 (ja) | 2007-09-05 | 2007-09-05 | 半導体レーザ装置 |
Publications (2)
Publication Number | Publication Date |
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JP2009064886A JP2009064886A (ja) | 2009-03-26 |
JP4805887B2 true JP4805887B2 (ja) | 2011-11-02 |
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JP2007230192A Expired - Fee Related JP4805887B2 (ja) | 2007-09-05 | 2007-09-05 | 半導体レーザ装置 |
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US (1) | US7830930B2 (ja) |
JP (1) | JP4805887B2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008014092A1 (de) * | 2007-12-27 | 2009-07-02 | Osram Opto Semiconductors Gmbh | Kantenemittierender Halbleiterlaserchip mit einem strukturierten Kontaktstreifen |
JP5540834B2 (ja) | 2010-03-30 | 2014-07-02 | 豊田合成株式会社 | Iii族窒化物半導体発光素子 |
JP6160141B2 (ja) * | 2012-03-22 | 2017-07-12 | 日亜化学工業株式会社 | 半導体レーザ装置 |
JP6939119B2 (ja) * | 2017-06-19 | 2021-09-22 | 住友電気工業株式会社 | 量子カスケード半導体レーザ、発光装置、半導体レーザを作製する方法 |
JP6939120B2 (ja) * | 2017-06-19 | 2021-09-22 | 住友電気工業株式会社 | 量子カスケード半導体レーザ、発光装置、半導体レーザを作製する方法 |
JP6911567B2 (ja) | 2017-06-22 | 2021-07-28 | 住友電気工業株式会社 | 量子カスケード半導体レーザ |
US10608412B2 (en) * | 2017-06-19 | 2020-03-31 | Sumitomo Electric Industries, Ltd. | Quantum cascade laser, light emitting apparatus |
US10476235B2 (en) * | 2017-06-22 | 2019-11-12 | Sumitomo Electric Industries, Ltd. | Quantum cascade laser |
US10476237B2 (en) * | 2017-06-22 | 2019-11-12 | Sumitomo Electric Industries, Ltd. | Quantum cascade laser |
US10404038B2 (en) * | 2017-06-22 | 2019-09-03 | Sumitomo Electric Industries, Ltd. | Quantum cascade laser |
JP7047668B2 (ja) * | 2018-08-24 | 2022-04-05 | 住友電気工業株式会社 | 量子カスケード半導体レーザ |
JP2021170637A (ja) * | 2020-04-14 | 2021-10-28 | 旭化成株式会社 | 紫外レーザダイオードの製造方法および紫外レーザダイオード |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3462717B2 (ja) * | 1997-06-27 | 2003-11-05 | シャープ株式会社 | 化合物半導体の電極構造及びその形成方法 |
JPH11204887A (ja) * | 1998-01-19 | 1999-07-30 | Toshiba Corp | 低抵抗電極を有する半導体装置 |
JPH11233890A (ja) * | 1998-02-12 | 1999-08-27 | Matsushita Electric Ind Co Ltd | 窒化ガリウム系化合物半導体素子 |
JP2003031894A (ja) * | 2001-07-19 | 2003-01-31 | Sony Corp | 半導体レーザおよびその製造方法 |
JP3933637B2 (ja) | 2004-03-17 | 2007-06-20 | シャープ株式会社 | 窒化ガリウム系半導体レーザ素子 |
JP4401843B2 (ja) * | 2004-03-31 | 2010-01-20 | Hoya株式会社 | 正孔注入電極及び半導体素子 |
DE102004025610A1 (de) * | 2004-04-30 | 2005-11-17 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit mehreren Stromaufweitungsschichten und Verfahren zu dessen Herstellung |
JP2006310413A (ja) | 2005-04-26 | 2006-11-09 | Matsushita Electric Ind Co Ltd | 半導体レーザ装置 |
JP2007081295A (ja) | 2005-09-16 | 2007-03-29 | Furukawa Electric Co Ltd:The | 面発光レーザ素子 |
JP4605024B2 (ja) | 2006-01-12 | 2011-01-05 | セイコーエプソン株式会社 | 面発光型半導体レーザ |
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2007
- 2007-09-05 JP JP2007230192A patent/JP4805887B2/ja not_active Expired - Fee Related
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2008
- 2008-09-04 US US12/204,223 patent/US7830930B2/en not_active Expired - Fee Related
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US7830930B2 (en) | 2010-11-09 |
US20090067464A1 (en) | 2009-03-12 |
JP2009064886A (ja) | 2009-03-26 |
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