JP4801346B2 - 発光装置の作製方法 - Google Patents

発光装置の作製方法 Download PDF

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Publication number
JP4801346B2
JP4801346B2 JP2004367648A JP2004367648A JP4801346B2 JP 4801346 B2 JP4801346 B2 JP 4801346B2 JP 2004367648 A JP2004367648 A JP 2004367648A JP 2004367648 A JP2004367648 A JP 2004367648A JP 4801346 B2 JP4801346 B2 JP 4801346B2
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Japan
Prior art keywords
substrate
light
sealing material
film
chamber
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Expired - Fee Related
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JP2004367648A
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English (en)
Japanese (ja)
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JP2005209631A5 (enExample
JP2005209631A (ja
Inventor
吉晴 平形
舜平 山崎
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2004367648A priority Critical patent/JP4801346B2/ja
Publication of JP2005209631A publication Critical patent/JP2005209631A/ja
Publication of JP2005209631A5 publication Critical patent/JP2005209631A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/851—Division of substrate

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  • Electroluminescent Light Sources (AREA)
JP2004367648A 2003-12-26 2004-12-20 発光装置の作製方法 Expired - Fee Related JP4801346B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004367648A JP4801346B2 (ja) 2003-12-26 2004-12-20 発光装置の作製方法

Applications Claiming Priority (3)

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JP2003433025 2003-12-26
JP2003433025 2003-12-26
JP2004367648A JP4801346B2 (ja) 2003-12-26 2004-12-20 発光装置の作製方法

Publications (3)

Publication Number Publication Date
JP2005209631A JP2005209631A (ja) 2005-08-04
JP2005209631A5 JP2005209631A5 (enExample) 2008-01-31
JP4801346B2 true JP4801346B2 (ja) 2011-10-26

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JP2004367648A Expired - Fee Related JP4801346B2 (ja) 2003-12-26 2004-12-20 発光装置の作製方法

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JP (1) JP4801346B2 (enExample)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4539368B2 (ja) 2005-02-24 2010-09-08 ソニー株式会社 表示装置の製造方法
JP2007066775A (ja) * 2005-08-31 2007-03-15 Sanyo Electric Co Ltd 有機ｅｌ素子の製造方法及び有機ｅｌ素子
US7431628B2 (en) 2005-11-18 2008-10-07 Samsung Sdi Co., Ltd. Method of manufacturing flat panel display device, flat panel display device, and panel of flat panel display device
JP2007179977A (ja) 2005-12-28 2007-07-12 Tdk Corp Ｅｌパネル及びその製造方法
KR100793368B1 (ko) * 2006-08-21 2008-01-11 삼성에스디아이 주식회사 수직형 봉지장치 및 그를 이용한 유기전계발광표시장치의제조방법
WO2008102694A1 (ja) 2007-02-21 2008-08-28 Ulvac, Inc. 表示装置、表示装置用の製造装置、及び表示装置の製造方法
JP5007598B2 (ja) * 2007-04-12 2012-08-22 ソニー株式会社 表示装置およびその製造方法
US8810765B2 (en) * 2007-05-15 2014-08-19 Sharp Kabushiki Kaisha Electroluminescence element
WO2009110067A1 (ja) * 2008-03-04 2009-09-11 東北パイオニア株式会社 有機ｅｌパネルの製造方法及び有機ｅｌパネル
WO2009139292A1 (ja) * 2008-05-12 2009-11-19 財団法人山形県産業技術振興機構 有機ｅｌ発光装置およびその製造方法
US12064979B2 (en) 2008-06-13 2024-08-20 Kateeva, Inc. Low-particle gas enclosure systems and methods
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
JPWO2010001831A1 (ja) * 2008-07-04 2011-12-22 コニカミノルタホールディングス株式会社 有機ｅｌパネルおよび有機ｅｌパネルの製造方法
GB2462844B (en) * 2008-08-21 2011-04-20 Cambridge Display Tech Ltd Organic electroluminescent device
CN102100126B (zh) * 2008-09-01 2014-04-16 夏普株式会社 有机电致发光面板、有机电致发光显示器、有机电致发光照明装置和它们的制造方法
JP2010080087A (ja) * 2008-09-24 2010-04-08 Toshiba Corp 平面表示装置の製造方法、平面表示装置の製造装置及び平面表示装置
KR101107158B1 (ko) 2009-07-10 2012-01-25 삼성모바일디스플레이주식회사 유기 발광 표시 장치 및 그 제조 방법
KR101107160B1 (ko) * 2009-07-10 2012-01-25 삼성모바일디스플레이주식회사 유기 발광 표시 장치 및 그 제조 방법
JP5650388B2 (ja) * 2009-10-05 2015-01-07 三菱電機株式会社 有機ｅｌパネル、パネル接合型発光装置、有機ｅｌパネルの製造方法
WO2012077659A1 (ja) * 2010-12-07 2012-06-14 東京エレクトロン株式会社 表示デバイス製造装置、表示デバイスの製造方法、及び表示デバイス
JP2013109836A (ja) * 2011-11-17 2013-06-06 Mitsubishi Heavy Ind Ltd 有機ｅｌパネルの製造方法及び有機ｅｌパネルの封止装置
JP5484429B2 (ja) * 2011-11-18 2014-05-07 三菱電機株式会社 電力変換装置
JP6064351B2 (ja) * 2012-03-27 2017-01-25 凸版印刷株式会社 有機ｅｌ装置およびその製造方法
JP2013211424A (ja) * 2012-03-30 2013-10-10 Toppan Printing Co Ltd 有機ｅｌ素子及び、その製造方法
KR20140026257A (ko) 2012-08-23 2014-03-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
JP5923485B2 (ja) * 2013-12-04 2016-05-24 株式会社ダイセル 光半導体装置の製造方法
EP3087623B1 (en) 2013-12-26 2021-09-22 Kateeva, Inc. Thermal treatment of electronic devices
CN107611287A (zh) * 2014-01-21 2018-01-19 科迪华公司 用于电子装置封装的设备和技术
KR101963489B1 (ko) 2014-04-30 2019-07-31 카티바, 인크. 가스 쿠션 장비 및 기판 코팅 기술
JP2021067763A (ja) * 2019-10-21 2021-04-30 株式会社ジャパンディスプレイ 表示装置及び表示装置の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11327448A (ja) * 1998-05-12 1999-11-26 Idemitsu Kosan Co Ltd 表示装置
JP2000173766A (ja) * 1998-09-30 2000-06-23 Sanyo Electric Co Ltd 表示装置
JP4101529B2 (ja) * 2001-02-22 2008-06-18 株式会社半導体エネルギー研究所 表示装置及びその作製方法
JP2002252089A (ja) * 2001-02-26 2002-09-06 Bando Chem Ind Ltd 両面発光型有機エレクトロルミネッセンス素子
JP2002280169A (ja) * 2001-03-19 2002-09-27 Futaba Corp 有機ｅｌ装置
JP2003025779A (ja) * 2001-07-11 2003-01-29 Challange Five:Kk ファイルとファイルの製造方法
JP2003077658A (ja) * 2001-09-05 2003-03-14 Sharp Corp 有機ｅｌ素子製造用ドナーフィルムおよび有機ｅｌ素子用基板
JP2003173868A (ja) * 2001-09-28 2003-06-20 Sanyo Electric Co Ltd エレクトロルミネッセンスパネルの製造方法
JP3594018B2 (ja) * 2002-02-18 2004-11-24 富士電機ホールディングス株式会社 有機ｅｌディスプレイ
JP2003317934A (ja) * 2002-04-22 2003-11-07 Asahi Glass Co Ltd 有機ｅｌ表示装置とその製造方法
JP4281293B2 (ja) * 2002-05-10 2009-06-17 セイコーエプソン株式会社 電気光学装置の製造方法及び電気光学装置の製造装置

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