JP4796336B2 - 研磨流体の中断のない流れを維持する方法及び研磨流体の中断のない流れを維持する装置 - Google Patents

研磨流体の中断のない流れを維持する方法及び研磨流体の中断のない流れを維持する装置 Download PDF

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Publication number
JP4796336B2
JP4796336B2 JP2005171647A JP2005171647A JP4796336B2 JP 4796336 B2 JP4796336 B2 JP 4796336B2 JP 2005171647 A JP2005171647 A JP 2005171647A JP 2005171647 A JP2005171647 A JP 2005171647A JP 4796336 B2 JP4796336 B2 JP 4796336B2
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JP
Japan
Prior art keywords
container
valve
outlet
abrasive material
slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2005171647A
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English (en)
Japanese (ja)
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JP2006007411A (ja
JP2006007411A5 (enExample
Inventor
マイケル・ウィリアム・ガッド
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Disco Corp
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Disco Corp
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Publication of JP2006007411A5 publication Critical patent/JP2006007411A5/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP2005171647A 2004-06-11 2005-06-10 研磨流体の中断のない流れを維持する方法及び研磨流体の中断のない流れを維持する装置 Expired - Lifetime JP4796336B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG200403796-6 2004-06-11
SG200403796A SG118271A1 (en) 2004-06-11 2004-06-11 Uninterrupted abrasive fluid supply

Publications (3)

Publication Number Publication Date
JP2006007411A JP2006007411A (ja) 2006-01-12
JP2006007411A5 JP2006007411A5 (enExample) 2008-07-31
JP4796336B2 true JP4796336B2 (ja) 2011-10-19

Family

ID=35506543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005171647A Expired - Lifetime JP4796336B2 (ja) 2004-06-11 2005-06-10 研磨流体の中断のない流れを維持する方法及び研磨流体の中断のない流れを維持する装置

Country Status (3)

Country Link
US (1) US7232360B2 (enExample)
JP (1) JP4796336B2 (enExample)
SG (1) SG118271A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7455573B2 (en) * 2006-09-06 2008-11-25 Lightmachinery Inc. Fluid jet polishing with constant pressure pump
JP2008229795A (ja) * 2007-03-22 2008-10-02 Towa Corp 加工装置及び加工方法
KR20100017695A (ko) * 2007-05-09 2010-02-16 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 재료 혼합과 분배를 위한 시스템 및 방법
JP5636583B2 (ja) * 2007-08-21 2014-12-10 アブレイシブ・カッティング・テクノロジー・リミテッドＡｂｒａｓｉｖｅ Ｃｕｔｔｉｎｇ Ｔｅｃｈｎｏｌｏｇｙ Ｌｔｄ 流体／研磨材の噴流切断装置用の制御システム
JP2011506110A (ja) * 2007-12-06 2011-03-03 フォアサイト プロセッシング，エルエルシー 流体を含む加工材料混合物を搬送するシステムおよび方法
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
CN110561275B (zh) * 2019-10-17 2023-09-05 群福电子科技(上海)有限公司 研磨液供应方法
CN113561064A (zh) * 2021-07-28 2021-10-29 重庆交通大学 水上漂浮物切割系统构建方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2810991A (en) * 1955-02-18 1957-10-29 William H Mead Abrasive blasting apparatus
JPS5340797B2 (enExample) * 1974-11-25 1978-10-28
DE2943396A1 (de) * 1979-10-26 1981-05-14 Krupp Polysius Ag, 4720 Beckum Anlage zur foerderung von feinkoernigem gut
US4381897A (en) * 1980-10-06 1983-05-03 Krupp Polysius Ag Installation for transporting fine-grained material
DE3131002A1 (de) * 1981-08-05 1983-03-24 Sergiu Dipl.-Ing. 8000 München Caftanat Automatische druckstrahlanlage mit genauer und reproduzierbarer dosierung des strahlmittels und kontinuierlichem betrieb
US4723387A (en) * 1986-10-06 1988-02-09 Ingersoll-Rand Company Abrasive-jet cutting system
SE462116B (sv) * 1988-09-27 1990-05-07 Atlas Copco Mct Ab Anordning foer bearbetning av haart material
DE3939420C2 (de) * 1989-11-29 1995-06-22 Neubauer Geb Costas Perez Merc Verfahren und Vorrichtung zum Schneiden widerstandsfähiger Werkstoffe mit einem Wasserstrahl
CH680274A5 (en) * 1989-12-05 1992-07-31 Heinz Kiener Sand blasting device - has changeover equipment connecting nozzle hose to sand pressure vessels alternately
IT1249665B (it) * 1991-06-19 1995-03-09 Cie Dentalfarm S R L Sistema di microsabbiatura e valvola pneumatica utilizzata in tale sistema
JPH0733530B2 (ja) * 1991-06-25 1995-04-12 新日本製鐵株式会社 粉体吹込方法
DE4122979A1 (de) * 1991-07-11 1993-01-14 Kaltenbach & Voigt Bearbeitungsgeraet zum bearbeiten von feinwerktechnischen, insbesondere dentaltechnischen werkstuecken in einem von einem gehaeuse umgebenen bearbeitungsraum
US5334019A (en) * 1991-12-06 1994-08-02 American Dental Technologies, Inc. Dental air abrasive system
TW277020B (en) * 1994-04-22 1996-06-01 Richihil Kk Separating device of blasting particle
JPH10329890A (ja) * 1997-05-30 1998-12-15 Koei:Kk 粉粒体供給装置
JP3538042B2 (ja) * 1998-11-24 2004-06-14 松下電器産業株式会社 スラリー供給装置及びスラリー供給方法
US6200203B1 (en) * 1999-01-26 2001-03-13 Jet Edge Division Of Tm/American Monorail, Inc. Abrasive delivery system
US6848979B2 (en) * 2000-12-11 2005-02-01 Paul Michael Fennessy Concrete blasting device with clear wand, stiff brush, recovery cylinder, and recirculating cylinder

Also Published As

Publication number Publication date
SG118271A1 (en) 2006-01-27
US20050287930A1 (en) 2005-12-29
JP2006007411A (ja) 2006-01-12
US7232360B2 (en) 2007-06-19

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