JP4794901B2 - 振動型アクチュエータの駆動システムおよびその駆動方法 - Google Patents

振動型アクチュエータの駆動システムおよびその駆動方法 Download PDF

Info

Publication number
JP4794901B2
JP4794901B2 JP2005136371A JP2005136371A JP4794901B2 JP 4794901 B2 JP4794901 B2 JP 4794901B2 JP 2005136371 A JP2005136371 A JP 2005136371A JP 2005136371 A JP2005136371 A JP 2005136371A JP 4794901 B2 JP4794901 B2 JP 4794901B2
Authority
JP
Japan
Prior art keywords
electrode
vibration
electrodes
signal
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005136371A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006314179A (ja
JP2006314179A5 (enExample
Inventor
新治 山本
信行 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005136371A priority Critical patent/JP4794901B2/ja
Priority to US11/411,111 priority patent/US7365474B2/en
Publication of JP2006314179A publication Critical patent/JP2006314179A/ja
Publication of JP2006314179A5 publication Critical patent/JP2006314179A5/ja
Application granted granted Critical
Publication of JP4794901B2 publication Critical patent/JP4794901B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2005136371A 2005-05-09 2005-05-09 振動型アクチュエータの駆動システムおよびその駆動方法 Expired - Fee Related JP4794901B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005136371A JP4794901B2 (ja) 2005-05-09 2005-05-09 振動型アクチュエータの駆動システムおよびその駆動方法
US11/411,111 US7365474B2 (en) 2005-05-09 2006-04-26 Driving system for vibrating type actuator and method of driving vibrating type actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005136371A JP4794901B2 (ja) 2005-05-09 2005-05-09 振動型アクチュエータの駆動システムおよびその駆動方法

Publications (3)

Publication Number Publication Date
JP2006314179A JP2006314179A (ja) 2006-11-16
JP2006314179A5 JP2006314179A5 (enExample) 2008-06-19
JP4794901B2 true JP4794901B2 (ja) 2011-10-19

Family

ID=37393435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005136371A Expired - Fee Related JP4794901B2 (ja) 2005-05-09 2005-05-09 振動型アクチュエータの駆動システムおよびその駆動方法

Country Status (2)

Country Link
US (1) US7365474B2 (enExample)
JP (1) JP4794901B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
US7786648B2 (en) * 2008-08-18 2010-08-31 New Scale Technologies Semi-resonant driving systems and methods thereof
US8304960B2 (en) * 2009-10-29 2012-11-06 New Scale Technologies Methods for reducing power consumption of at least partially resonant actuator systems and systems thereof
JP5429140B2 (ja) * 2010-01-19 2014-02-26 Ｔｄｋ株式会社 圧電アクチュエータ
JP5765993B2 (ja) * 2011-03-31 2015-08-19 キヤノン株式会社 振動型駆動装置
JP6501487B2 (ja) * 2014-10-27 2019-04-17 キヤノン株式会社 超音波モータ及び超音波モータを用いた駆動装置
JP6478665B2 (ja) 2015-01-30 2019-03-06 キヤノン株式会社 振動体の駆動制御回路、振動体の駆動方法、振動型駆動装置及び撮像装置
US10419653B2 (en) * 2015-06-19 2019-09-17 Canon Kabushiki Kaisha Vibration drive device capable of generating click feeling and image pickup apparatus
EP3435535A1 (en) 2017-07-25 2019-01-30 Physik Instrumente (PI) GmbH & Co. Kg Method for closed-loop motion control of an ultrasonic motor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4888514A (en) * 1987-10-16 1989-12-19 Matsushita Electric Industrial Co., Ltd. Driving apparatus for ultrasonic motor
JPH033678A (ja) * 1989-05-31 1991-01-09 Nisca Corp 超音波モータ装置
US5136200A (en) * 1989-07-27 1992-08-04 Olympus Optical Co., Ltd. Ultransonic motor
JP3118251B2 (ja) * 1990-11-21 2000-12-18 ニスカ株式会社 超音波駆動装置及びその方法
JPH07170768A (ja) * 1993-12-14 1995-07-04 Nikon Corp 超音波モータ
JPH07274552A (ja) * 1994-04-01 1995-10-20 Nikon Corp リニアモータ
JPH099655A (ja) * 1995-04-19 1997-01-10 Nikon Corp 振動アクチュエータ及びこれを用いる駆動装置
JPH11178369A (ja) * 1997-12-09 1999-07-02 Seiko Instruments Inc 超音波モータおよび超音波モータ付電子機器
JP4054092B2 (ja) * 1997-09-30 2008-02-27 オリンパス株式会社 アクチュエータ
DE19938954A1 (de) * 1999-08-17 2001-03-08 Pi Ceramic Gmbh Keramische Tec Piezoelektrischer Antrieb, insbesondere zur Erzeugung von Rotations- oder Translationsbewegungen, die stetig oder schrittweise erfolgen können
JP4261964B2 (ja) 2003-04-11 2009-05-13 キヤノン株式会社 振動型駆動装置および制御システム

Also Published As

Publication number Publication date
US20060250047A1 (en) 2006-11-09
JP2006314179A (ja) 2006-11-16
US7365474B2 (en) 2008-04-29

Similar Documents

Publication Publication Date Title
JP5506552B2 (ja) 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP4261964B2 (ja) 振動型駆動装置および制御システム
JP4617359B2 (ja) リニア超音波圧電モータ
JPH07274552A (ja) リニアモータ
JP5037767B2 (ja) 振動型アクチュエータの制御装置
JP4794901B2 (ja) 振動型アクチュエータの駆動システムおよびその駆動方法
JP5110833B2 (ja) 振動制御装置、及び振動制御方法
JP2009225503A (ja) 多自由度駆動装置
JP2008278711A (ja) 駆動装置
JP2009089586A (ja) 振動波駆動装置の制御装置、及び、振動波駆動装置の制御方法
JP5792951B2 (ja) 振動型アクチュエータの制御装置
JP2017539199A (ja) 圧電モータを制御するための方法および装置
JP4814948B2 (ja) 振動型アクチュエータの制御装置
JP2012055111A (ja) 振動型駆動装置の制御装置および振動型駆動装置の出力特性検出方法
JP5843911B2 (ja) 装置及び振動型アクチュエータの駆動方法
JP2006314179A5 (enExample)
JP2008236820A (ja) 駆動装置
JP5315434B2 (ja) 駆動装置
JP4594034B2 (ja) 振動型駆動装置、その制御装置及びその制御方法
JPH11171320A (ja) 楕円振動フィーダの駆動制御方法及びその装置
JP2011221308A (ja) 振動型駆動装置
US20130063054A1 (en) Driving apparatus for vibration-type actuator
JP7379285B2 (ja) 振動型駆動装置、機器、振動型アクチュエータの制御装置
JP3401092B2 (ja) 超音波モータの駆動装置
JP3641902B2 (ja) 駆動装置

Legal Events

Date Code Title Description
RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20070626

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080507

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080507

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110209

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110411

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110726

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110727

R151 Written notification of patent or utility model registration

Ref document number: 4794901

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140805

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees