JP4781610B2 - 水素環境中のアニールにより炭化珪素層上に酸化物層を作製する方法 - Google Patents
水素環境中のアニールにより炭化珪素層上に酸化物層を作製する方法 Download PDFInfo
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- JP4781610B2 JP4781610B2 JP2002581576A JP2002581576A JP4781610B2 JP 4781610 B2 JP4781610 B2 JP 4781610B2 JP 2002581576 A JP2002581576 A JP 2002581576A JP 2002581576 A JP2002581576 A JP 2002581576A JP 4781610 B2 JP4781610 B2 JP 4781610B2
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- 238000000137 annealing Methods 0.000 title claims abstract description 98
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 65
- 239000001257 hydrogen Substances 0.000 title claims abstract description 64
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 64
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 61
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims abstract description 46
- 239000007789 gas Substances 0.000 claims abstract description 31
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000001272 nitrous oxide Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 34
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 11
- 229910044991 metal oxide Inorganic materials 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 3
- -1 silicon carbide metal oxide Chemical class 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 abstract description 16
- 239000002243 precursor Substances 0.000 abstract description 5
- 150000002431 hydrogen Chemical class 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 description 22
- 230000003647 oxidation Effects 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000005669 field effect Effects 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005527 interface trap Effects 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000009740 moulding (composite fabrication) Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 239000007845 reactive nitrogen species Substances 0.000 description 2
- 238000003949 trap density measurement Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- SUBDBMMJDZJVOS-DEOSSOPVSA-N esomeprazole Chemical compound C([S@](=O)C1=NC2=CC=C(C=C2N1)OC)C1=NC=C(C)C(OC)=C1C SUBDBMMJDZJVOS-DEOSSOPVSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 238000010405 reoxidation reaction Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
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Description
本発明は、少なくとも部分的に、米国空軍ライト研究所(United States Air Force Wright Labs)の契約番号F33615−99−C−2914の支援によって行われた。米国政府は本発明に一定の権利を有し得る。
Claims (17)
- 炭化珪素電子デバイス中に絶縁体を作製する方法であって、
炭化珪素層上に窒化酸化物層を形成するステップと、
H2とNH3の少なくとも1種を含む環境中で前記窒化酸化物層をアニールするステップとを含み、
前記窒化酸化物層を形成するステップは、酸化窒素と亜酸化窒素の少なくとも1つを含む環境中で、1200℃又はそれ以上の温度で前記炭化珪素層を酸化することによって前記炭化珪素層上に前記窒化酸化物層を形成するステップと、酸化窒素と亜酸化窒素の少なくとも1つを含む環境中で、1175℃又はそれ以上の温度で前記炭化珪素層上に形成された酸化物層をアニールするステップの少なくとも1つを含むことを特徴とする方法。 - 前記炭化珪素層は、4Hポリタイプの炭化珪素を含むことを特徴とする請求項1に記載の方法。
- 前記炭化珪素層は、非炭化珪素基板上の炭化珪素層を含むことを特徴とする請求項1に記載の方法。
- 前記炭化珪素層は、炭化珪素基板の一部を含むことを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、他の処理ステップの一部として、前記窒化酸化物層を水素含有環境中で400℃より高い温度に加熱することを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、前記窒化酸化物層を水素含有環境中で400℃より高い温度でアニールすることを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、前記窒化酸化物層を水素含有環境中で900℃未満の温度でアニールすることを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、前記窒化酸化物層を水素含有環境中で400℃から1000℃の間の温度でアニールすることを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、前記窒化酸化物層を水素含有環境中で400℃から800℃の間の温度でアニールすることを特徴とする請求項1に記載の方法。
- 水素含有環境中で400℃より高い後続の高温処理を実施するステップをさらに含むことを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップの前に、前記窒化酸化物層に結合した半導体デバイスの金属電極を形成するステップを実施することを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、前記窒化酸化物層を水素含有環境中で900℃未満の温度でアニールすることを特徴とする請求項11に記載の方法。
- 前記窒化酸化物層をアニールするステップは、接触アニールを含むことを特徴とする請求項12に記載の方法。
- 前記窒化酸化物層をアニールするステップは、4%の水素と96%の不活性ガスを有するフォーミングガス中で前記窒化酸化物層をアニールすることを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層を金属酸化物半導体デバイスのゲート酸化物として有する炭化珪素の金属酸化物半導体デバイスを形成することを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層をアニールするステップは、少なくとも2分間行われることを特徴とする請求項1に記載の方法。
- 前記窒化酸化物層を形成するステップは、酸化窒素および亜酸化窒素の少なくとも1つの中で1200℃より高い温度で形成することを特徴とする請求項1に記載の方法。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/834,283 | 2001-04-12 | ||
US09/834,283 US6610366B2 (en) | 2000-10-03 | 2001-04-12 | Method of N2O annealing an oxide layer on a silicon carbide layer |
US29430701P | 2001-05-30 | 2001-05-30 | |
US60/294,307 | 2001-05-30 | ||
US10/045,542 US7067176B2 (en) | 2000-10-03 | 2001-10-26 | Method of fabricating an oxide layer on a silicon carbide layer utilizing an anneal in a hydrogen environment |
US10/045,542 | 2001-10-26 | ||
PCT/US2002/011691 WO2002084727A2 (en) | 2001-04-12 | 2002-04-12 | Method of fabricating an oxide layer on a silicon carbide layer utilizing an anneal in a hydrogen environment |
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JP2004532522A JP2004532522A (ja) | 2004-10-21 |
JP4781610B2 true JP4781610B2 (ja) | 2011-09-28 |
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US (1) | US7067176B2 (ja) |
EP (3) | EP2259288B1 (ja) |
JP (1) | JP4781610B2 (ja) |
KR (1) | KR100855388B1 (ja) |
CN (1) | CN100517607C (ja) |
AT (1) | ATE407449T1 (ja) |
CA (1) | CA2442929C (ja) |
DE (1) | DE60228695D1 (ja) |
WO (1) | WO2002084727A2 (ja) |
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US7022378B2 (en) * | 2002-08-30 | 2006-04-04 | Cree, Inc. | Nitrogen passivation of interface states in SiO2/SiC structures |
US7431967B2 (en) * | 2002-09-19 | 2008-10-07 | Applied Materials, Inc. | Limited thermal budget formation of PMD layers |
US7141483B2 (en) * | 2002-09-19 | 2006-11-28 | Applied Materials, Inc. | Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill |
US7221010B2 (en) | 2002-12-20 | 2007-05-22 | Cree, Inc. | Vertical JFET limited silicon carbide power metal-oxide semiconductor field effect transistors |
US7074643B2 (en) * | 2003-04-24 | 2006-07-11 | Cree, Inc. | Silicon carbide power devices with self-aligned source and well regions and methods of fabricating same |
US6979863B2 (en) * | 2003-04-24 | 2005-12-27 | Cree, Inc. | Silicon carbide MOSFETs with integrated antiparallel junction barrier Schottky free wheeling diodes and methods of fabricating the same |
US7709403B2 (en) * | 2003-10-09 | 2010-05-04 | Panasonic Corporation | Silicon carbide-oxide layered structure, production method thereof, and semiconductor device |
US7528051B2 (en) * | 2004-05-14 | 2009-05-05 | Applied Materials, Inc. | Method of inducing stresses in the channel region of a transistor |
US7118970B2 (en) | 2004-06-22 | 2006-10-10 | Cree, Inc. | Methods of fabricating silicon carbide devices with hybrid well regions |
US7682988B2 (en) * | 2004-08-31 | 2010-03-23 | Texas Instruments Incorporated | Thermal treatment of nitrided oxide to improve negative bias thermal instability |
US7391057B2 (en) * | 2005-05-18 | 2008-06-24 | Cree, Inc. | High voltage silicon carbide devices having bi-directional blocking capabilities |
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EP2259288A3 (en) | 2011-01-05 |
CA2442929C (en) | 2012-06-26 |
EP2259288B1 (en) | 2012-12-05 |
EP1378006A2 (en) | 2004-01-07 |
WO2002084727A3 (en) | 2003-04-10 |
ATE407449T1 (de) | 2008-09-15 |
EP1378006B1 (en) | 2008-09-03 |
EP1968119B1 (en) | 2011-11-23 |
CA2442929A1 (en) | 2002-10-24 |
DE60228695D1 (de) | 2008-10-16 |
KR100855388B1 (ko) | 2008-09-04 |
EP1968119A2 (en) | 2008-09-10 |
WO2002084727A2 (en) | 2002-10-24 |
US7067176B2 (en) | 2006-06-27 |
CN1531746A (zh) | 2004-09-22 |
EP1968119A3 (en) | 2008-10-22 |
EP2259288A2 (en) | 2010-12-08 |
JP2004532522A (ja) | 2004-10-21 |
CN100517607C (zh) | 2009-07-22 |
US20020102358A1 (en) | 2002-08-01 |
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