JP4780984B2 - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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Publication number
JP4780984B2
JP4780984B2 JP2005079605A JP2005079605A JP4780984B2 JP 4780984 B2 JP4780984 B2 JP 4780984B2 JP 2005079605 A JP2005079605 A JP 2005079605A JP 2005079605 A JP2005079605 A JP 2005079605A JP 4780984 B2 JP4780984 B2 JP 4780984B2
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Japan
Prior art keywords
substrate
stage
space
levitation stage
roller
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Expired - Fee Related
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JP2005079605A
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English (en)
Japanese (ja)
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JP2006258727A5 (enrdf_load_stackoverflow
JP2006258727A (ja
Inventor
修哉 城ヶ崎
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Olympus Corp
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Olympus Corp
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Priority to JP2005079605A priority Critical patent/JP4780984B2/ja
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Publication of JP2006258727A5 publication Critical patent/JP2006258727A5/ja
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  • Liquid Crystal (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2005079605A 2005-03-18 2005-03-18 基板搬送装置 Expired - Fee Related JP4780984B2 (ja)

Priority Applications (1)

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JP2005079605A JP4780984B2 (ja) 2005-03-18 2005-03-18 基板搬送装置

Applications Claiming Priority (1)

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JP2005079605A JP4780984B2 (ja) 2005-03-18 2005-03-18 基板搬送装置

Related Child Applications (1)

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JP2010290236A Division JP2011082561A (ja) 2010-12-27 2010-12-27 基板搬送装置

Publications (3)

Publication Number Publication Date
JP2006258727A JP2006258727A (ja) 2006-09-28
JP2006258727A5 JP2006258727A5 (enrdf_load_stackoverflow) 2008-04-24
JP4780984B2 true JP4780984B2 (ja) 2011-09-28

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ID=37098143

Family Applications (1)

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JP2005079605A Expired - Fee Related JP4780984B2 (ja) 2005-03-18 2005-03-18 基板搬送装置

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JP (1) JP4780984B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842746B2 (ja) * 2006-09-20 2011-12-21 オリンパス株式会社 基板搬送装置
JP5332142B2 (ja) * 2007-06-29 2013-11-06 株式会社Ｉｈｉ 浮上搬送装置
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
JP5422925B2 (ja) * 2008-06-09 2014-02-19 株式会社Ｉｈｉ 浮上搬送装置
JP5363802B2 (ja) * 2008-12-26 2013-12-11 東レエンジニアリング株式会社 レーザスクライブ加工装置
DE102009029945A1 (de) * 2009-06-19 2010-12-23 Rena Gmbh Prozessmodul zur Inline-Behandlung von Substraten
JP5776940B2 (ja) * 2012-01-25 2015-09-09 日本電気硝子株式会社 ガラス板の端部検査装置
JP5939678B2 (ja) * 2012-05-09 2016-06-22 大塚電子株式会社 光学特性測定装置及び光学特性測定方法
CN108106996B (zh) * 2017-12-25 2024-05-28 通彩智能科技集团有限公司 一种玻璃检测盛放平台

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439814Y2 (enrdf_load_stackoverflow) * 1975-11-26 1979-11-24
JPS55135024A (en) * 1979-04-05 1980-10-21 Matsushita Electric Works Ltd Conveying system
JPH0694440A (ja) * 1992-09-11 1994-04-05 Omron Corp 形状検査装置
BE1009814A5 (nl) * 1995-11-06 1997-08-05 Framatome Connectors Belgium Werkwijze en inrichting voor het aanbrengen van elektronische onderdelen in een plaat met gedrukte schakelingen.
JPH10316232A (ja) * 1997-05-20 1998-12-02 Nihon Dennetsu Keiki Co Ltd 搬送装置
JP3859859B2 (ja) * 1998-03-18 2006-12-20 セントラル硝子株式会社 透明板状体の欠陥検出方法および装置
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
DE10057036C2 (de) * 2000-11-17 2002-12-12 Basler Ag Inspektionssystem für Flachgläser in der Displayfertigung
JP2002181714A (ja) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP4307872B2 (ja) * 2003-03-18 2009-08-05 オリンパス株式会社 基板検査装置

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JP2006258727A (ja) 2006-09-28

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