JP2006258727A5 - - Google Patents

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Publication number
JP2006258727A5
JP2006258727A5 JP2005079605A JP2005079605A JP2006258727A5 JP 2006258727 A5 JP2006258727 A5 JP 2006258727A5 JP 2005079605 A JP2005079605 A JP 2005079605A JP 2005079605 A JP2005079605 A JP 2005079605A JP 2006258727 A5 JP2006258727 A5 JP 2006258727A5
Authority
JP
Japan
Prior art keywords
substrate
transmission illumination
inspection apparatus
disposed
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005079605A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006258727A (ja
JP4780984B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005079605A priority Critical patent/JP4780984B2/ja
Priority claimed from JP2005079605A external-priority patent/JP4780984B2/ja
Publication of JP2006258727A publication Critical patent/JP2006258727A/ja
Publication of JP2006258727A5 publication Critical patent/JP2006258727A5/ja
Application granted granted Critical
Publication of JP4780984B2 publication Critical patent/JP4780984B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005079605A 2005-03-18 2005-03-18 基板搬送装置 Expired - Fee Related JP4780984B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005079605A JP4780984B2 (ja) 2005-03-18 2005-03-18 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005079605A JP4780984B2 (ja) 2005-03-18 2005-03-18 基板搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010290236A Division JP2011082561A (ja) 2010-12-27 2010-12-27 基板搬送装置

Publications (3)

Publication Number Publication Date
JP2006258727A JP2006258727A (ja) 2006-09-28
JP2006258727A5 true JP2006258727A5 (enrdf_load_stackoverflow) 2008-04-24
JP4780984B2 JP4780984B2 (ja) 2011-09-28

Family

ID=37098143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005079605A Expired - Fee Related JP4780984B2 (ja) 2005-03-18 2005-03-18 基板搬送装置

Country Status (1)

Country Link
JP (1) JP4780984B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842746B2 (ja) * 2006-09-20 2011-12-21 オリンパス株式会社 基板搬送装置
JP5332142B2 (ja) * 2007-06-29 2013-11-06 株式会社Ｉｈｉ 浮上搬送装置
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
JP5422925B2 (ja) * 2008-06-09 2014-02-19 株式会社Ｉｈｉ 浮上搬送装置
JP5363802B2 (ja) * 2008-12-26 2013-12-11 東レエンジニアリング株式会社 レーザスクライブ加工装置
DE102009029945A1 (de) * 2009-06-19 2010-12-23 Rena Gmbh Prozessmodul zur Inline-Behandlung von Substraten
JP5776940B2 (ja) * 2012-01-25 2015-09-09 日本電気硝子株式会社 ガラス板の端部検査装置
JP5939678B2 (ja) * 2012-05-09 2016-06-22 大塚電子株式会社 光学特性測定装置及び光学特性測定方法
CN108106996B (zh) * 2017-12-25 2024-05-28 通彩智能科技集团有限公司 一种玻璃检测盛放平台

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439814Y2 (enrdf_load_stackoverflow) * 1975-11-26 1979-11-24
JPS55135024A (en) * 1979-04-05 1980-10-21 Matsushita Electric Works Ltd Conveying system
JPH0694440A (ja) * 1992-09-11 1994-04-05 Omron Corp 形状検査装置
BE1009814A5 (nl) * 1995-11-06 1997-08-05 Framatome Connectors Belgium Werkwijze en inrichting voor het aanbrengen van elektronische onderdelen in een plaat met gedrukte schakelingen.
JPH10316232A (ja) * 1997-05-20 1998-12-02 Nihon Dennetsu Keiki Co Ltd 搬送装置
JP3859859B2 (ja) * 1998-03-18 2006-12-20 セントラル硝子株式会社 透明板状体の欠陥検出方法および装置
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
DE10057036C2 (de) * 2000-11-17 2002-12-12 Basler Ag Inspektionssystem für Flachgläser in der Displayfertigung
JP2002181714A (ja) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP4307872B2 (ja) * 2003-03-18 2009-08-05 オリンパス株式会社 基板検査装置

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