JP4780770B2 - 振動アクチュエータ - Google Patents

振動アクチュエータ Download PDF

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Publication number
JP4780770B2
JP4780770B2 JP2006107670A JP2006107670A JP4780770B2 JP 4780770 B2 JP4780770 B2 JP 4780770B2 JP 2006107670 A JP2006107670 A JP 2006107670A JP 2006107670 A JP2006107670 A JP 2006107670A JP 4780770 B2 JP4780770 B2 JP 4780770B2
Authority
JP
Japan
Prior art keywords
vibration
piezoelectric element
stators
rotors
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006107670A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007282424A (ja
Inventor
正己 高三
洋彦 石川
和夫 清木
中村　　健太郎
貞行 上羽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Tokyo Institute of Technology NUC
Original Assignee
Toyota Industries Corp
Tokyo Institute of Technology NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006107670A priority Critical patent/JP4780770B2/ja
Application filed by Toyota Industries Corp, Tokyo Institute of Technology NUC filed Critical Toyota Industries Corp
Priority to US12/083,124 priority patent/US7851972B2/en
Priority to KR1020087016476A priority patent/KR101053805B1/ko
Priority to PCT/JP2007/053175 priority patent/WO2007129497A1/ja
Priority to DE112007001099T priority patent/DE112007001099T5/de
Priority to CN2007800015734A priority patent/CN101361258B/zh
Priority to TW096108111A priority patent/TWI330929B/zh
Publication of JP2007282424A publication Critical patent/JP2007282424A/ja
Application granted granted Critical
Publication of JP4780770B2 publication Critical patent/JP4780770B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/0035—Cylindrical vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2006107670A 2006-04-10 2006-04-10 振動アクチュエータ Expired - Fee Related JP4780770B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2006107670A JP4780770B2 (ja) 2006-04-10 2006-04-10 振動アクチュエータ
KR1020087016476A KR101053805B1 (ko) 2006-04-10 2007-02-21 진동 액츄에이터
PCT/JP2007/053175 WO2007129497A1 (ja) 2006-04-10 2007-02-21 振動アクチュエータ
DE112007001099T DE112007001099T5 (de) 2006-04-10 2007-02-21 Schwingungsaktuator
US12/083,124 US7851972B2 (en) 2006-04-10 2007-02-21 Vibration actuator
CN2007800015734A CN101361258B (zh) 2006-04-10 2007-02-21 振动致动器
TW096108111A TWI330929B (en) 2006-04-10 2007-03-09 Vibration actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006107670A JP4780770B2 (ja) 2006-04-10 2006-04-10 振動アクチュエータ

Publications (2)

Publication Number Publication Date
JP2007282424A JP2007282424A (ja) 2007-10-25
JP4780770B2 true JP4780770B2 (ja) 2011-09-28

Family

ID=38667607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006107670A Expired - Fee Related JP4780770B2 (ja) 2006-04-10 2006-04-10 振動アクチュエータ

Country Status (7)

Country Link
US (1) US7851972B2 (ko)
JP (1) JP4780770B2 (ko)
KR (1) KR101053805B1 (ko)
CN (1) CN101361258B (ko)
DE (1) DE112007001099T5 (ko)
TW (1) TWI330929B (ko)
WO (1) WO2007129497A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011142732A (ja) * 2010-01-06 2011-07-21 Olympus Corp 超音波モータ
KR101676786B1 (ko) * 2010-02-26 2016-11-16 삼성전자주식회사 압전 모터
JP5571521B2 (ja) * 2010-09-29 2014-08-13 太平洋セメント株式会社 超音波モータおよびその駆動方法
KR101542814B1 (ko) * 2011-07-19 2015-08-07 마우저-베르케 오베른도르프 마쉬넨바우 게엠베하 재조절 시스템
JP5959950B2 (ja) * 2012-06-15 2016-08-02 キヤノン株式会社 振動型アクチュエータの駆動装置
CN103853363B (zh) * 2012-11-29 2017-09-29 联想(北京)有限公司 一种触觉反馈的方法及电子设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT382262B (de) * 1982-04-16 1987-02-10 Ki Polt I Piezoelektrischer motor
DE3433768A1 (de) * 1983-09-16 1985-04-18 Hitachi Maxell, Ltd., Ibaraki, Osaka Piezo-elektrischer motor
JPS6154883A (ja) * 1984-08-24 1986-03-19 Hitachi Maxell Ltd 両端面回転型圧電モ−タ
JP2546205B2 (ja) * 1987-04-17 1996-10-23 株式会社ニコン 振動波モータ
JP2614635B2 (ja) * 1988-04-12 1997-05-28 日立マクセル株式会社 電歪公転子及び単相超音波モータ
JPH0538170A (ja) * 1991-07-26 1993-02-12 Asmo Co Ltd 振動モータ
JP3155034B2 (ja) * 1991-09-17 2001-04-09 セイコーインスツルメンツ株式会社 超音波モータを用いた小型移動装置
JP3245245B2 (ja) * 1993-02-05 2002-01-07 沖電気工業株式会社 超音波モータ及び超音波搬送装置
FR2715780B1 (fr) * 1994-02-01 1996-04-05 Imra Europe Sa Stator de moteur rotatif piézoélectrique et moteur rotatif piézoélectrique comportant un tel stator.
JP2766835B2 (ja) * 1996-06-17 1998-06-18 日本特殊陶業株式会社 回転駆動体
GB9617076D0 (en) * 1996-08-14 1996-09-25 Intelligent Manufacturing Syst Bearings and supports
JP4077923B2 (ja) 1997-11-27 2008-04-23 キヤノン株式会社 振動型アクチュエータ
JP4328412B2 (ja) * 1999-05-14 2009-09-09 キヤノン株式会社 振動型アクチュエータおよび振動型駆動装置
CN2454985Y (zh) * 2000-12-08 2001-10-17 南京航空航天大学 纵扭复合型超声电机
JP4354342B2 (ja) * 2004-06-15 2009-10-28 日本電信電話株式会社 トルク制御機構付超音波モータ及び超音波モータ搭載ロボット
JP4788451B2 (ja) * 2006-04-10 2011-10-05 株式会社豊田自動織機 振動アクチュエータ
CN101072001B (zh) * 2007-04-05 2010-08-04 南京航空航天大学 无齿行波旋转超声电机及工作模态和电激励方式

Also Published As

Publication number Publication date
US7851972B2 (en) 2010-12-14
US20090267450A1 (en) 2009-10-29
KR101053805B1 (ko) 2011-08-03
KR20080108077A (ko) 2008-12-11
TW200740101A (en) 2007-10-16
JP2007282424A (ja) 2007-10-25
DE112007001099T5 (de) 2009-04-02
CN101361258A (zh) 2009-02-04
WO2007129497A1 (ja) 2007-11-15
TWI330929B (en) 2010-09-21
CN101361258B (zh) 2013-08-21

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