JP4775708B2 - 水素ガス検知材とその被膜方法 - Google Patents
水素ガス検知材とその被膜方法 Download PDFInfo
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- JP4775708B2 JP4775708B2 JP2006102809A JP2006102809A JP4775708B2 JP 4775708 B2 JP4775708 B2 JP 4775708B2 JP 2006102809 A JP2006102809 A JP 2006102809A JP 2006102809 A JP2006102809 A JP 2006102809A JP 4775708 B2 JP4775708 B2 JP 4775708B2
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- hydrogen gas
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- tungsten oxide
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims description 108
- 238000001514 detection method Methods 0.000 title claims description 57
- 239000000463 material Substances 0.000 title claims description 55
- 238000000576 coating method Methods 0.000 title claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 41
- 229910052739 hydrogen Inorganic materials 0.000 claims description 41
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 35
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 35
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 34
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 24
- 238000004544 sputter deposition Methods 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 229910052786 argon Inorganic materials 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- -1 polyethylene Polymers 0.000 claims description 10
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 10
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 10
- 238000001179 sorption measurement Methods 0.000 claims description 10
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 8
- 229910001882 dioxygen Inorganic materials 0.000 claims description 8
- 239000010408 film Substances 0.000 claims description 6
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 229920001328 Polyvinylidene chloride Polymers 0.000 claims description 4
- 229910003445 palladium oxide Inorganic materials 0.000 claims description 4
- 229920000515 polycarbonate Polymers 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 239000005033 polyvinylidene chloride Substances 0.000 claims description 4
- 238000005477 sputtering target Methods 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 229920001155 polypropylene Polymers 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 description 15
- 238000002834 transmittance Methods 0.000 description 14
- 230000008859 change Effects 0.000 description 12
- 230000031700 light absorption Effects 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000003973 paint Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000002803 fossil fuel Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000035622 drinking Effects 0.000 description 1
- 230000005183 environmental health Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229920006298 saran Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/783—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Composite Materials (AREA)
- Biochemistry (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Description
実施例1では、被膜した酸化タングステンの結晶構造の評価、及び水素検知特性の最適化を行うために、縦20 mm、横20 mm、厚さ 0.5 mmの石英ガラス基板の表面上に酸化タングステン薄膜を被膜した。酸化タングステンの被膜に際しては、タングステンをターゲットに使用し、基板とターゲットとの間の距離を10 cm にし、基板温度を室温に、雰囲気をアルゴンガス分圧148 mPa、及び酸素分圧 22 mPaに制御し、金属タングステンターゲットを50 W の電力にて30 分間スパッタリングを行った。酸化タングステンの膜厚さは、0.3 μm程度であった。
(1)水素吸着前の試料の透過光強度I0を測定する。
(2)アルゴンガスで希釈した濃度1%の水素を70 ml/minの流速で、試料セル内を20分間ガス置換する。
(3)水素が吸着した後の試料の透過光強度Iを計測する。
(4)Iと I0により、相対的透過率(I/ I0)、すなわち水素吸着前後の光の透過率の変化を求めた。図4のAに該水素ガス検知材の相対的透過率の測定結果を示す。該水素ガス検知材の相対的透過率は 14 % 、つまり透過率の変化は86 %である。これより該水素ガス検知材は、十分に水素が検知できる性能を持つことがわかる。
(比較例1、2及び実施例2、3)
本願発明では、酸化タングステンの被膜時の酸素分圧の制御が重要である。実施例1の比較例、及びその他の実施例として、酸素分圧を種々の値(比較例1:13 mPa、比較例2:15 mPa、実施例2:42 mPa、実施例3:69 mPa)に制御し、酸化タングステンの膜厚と、その他の被膜条件は実施例1と同様にして酸化タングステン薄膜を被膜した。得られた膜についてのX線回折測定の結果は、実施例1の酸化タングステン薄膜と同様であり、本願発明の被膜方法にて得られた酸化タングステン薄膜は非晶質であることが分かった。実施例1と同様の条件にてパラジウムを酸化タングステン薄膜の表面上に堆積し、実施例1と同様に水素に対する光吸収特性を調べた。該水素ガス検知材の相対的透過率を実施例1の結果とともに図4に示す。酸素圧力が14 mPa 以下の場合、本水素ガス検知材の相対的透過率は87 % 、すなわち透過率の変化が13 %であるため水素の検知は難しい。酸素圧力が14 mPa 以上の場合、水素ガス検知材は水素の吸着により50 %以上透過率が変化することが分かる。したがって、酸素分圧を14 mPa 以上に制御して被膜した酸化タングステン薄膜を用いれば、水素検知が十分可能であることがわかる。
(実施例4から8)
1.2 mm厚のポリカーボネート板、40 μm厚のポリエチレンシート、11μm厚のポリ塩化ビニリデン(旭化成社製サランラップ)、100 μm厚のOHPシート(富士ゼロックス社製)、100 μm厚のポリエチレンテレフタレート(PET)シートをそれぞれ基材にし、被膜条件は実施例1と同様にして水素ガス検知材を被膜した。該水素ガス検知材に対して、実施例1と同様にして、水素ガスに対する光吸収特性を調べた。図5に、該水素ガス検知材についての、水素を曝露した時の相対透過率の時間変化を示す。水素曝露から60秒後における、ポリカーボネート(実施例4)、ポリエチレン(実施例5)、ポリ塩化ビニリデン(実施例6)、OHP(実施例7)、PET(実施例8)に被膜した水素ガス検知材の相対的透過率は、それぞれ20 %、20 %、11 %、9 %、4 %である。この結果から、100 ℃以上の温度に耐熱性の乏しい基材を用いた該水素ガス検知材は、十分に水素を検出できる性能を持つことがわかる。以上の結果から、本願発明による被膜方法により、水素の検知が可能な水素ガス検知材を、基材の種類を選ばずに被膜することができることが分かる。
(実施例9)
Claims (9)
- 主成分が非晶質の酸化タングステンであり、その形状が薄膜である水素ガス検知材であって、酸化タングステンはスパッタリング法を用いて基材の表面上に被膜され、被膜時の基材温度は室温である、水素ガス検知材。
- 上記酸化タングステン薄膜の厚さが1μm以下である、請求項1記載の水素ガス検知材。
- パラジウム及び酸化タングステンの積層構造からなる、請求項1に記載の水素ガス検知材。
- 酸化タングステンの被膜時に、酸素の圧力が制御されて被膜される、請求項1記載の水素ガス検知材。
- 水素吸着により可視光域の光の吸収特性が変化することを特徴とする、請求項1記載の水素ガス検知材。
- 酸素の圧力を制御したスパッタリング法を使用して、請求項1記載の水素ガス検知材を被膜する方法。
- 基材は、ポリカーボネート、ポリエチレン、ポリエチレンテレフタラート(PET)、ポリプロピレン、またはポリ塩化ビニリデンから構成される、請求項1記載のガス検知材。
- スパッタリングの投入電力が50W、基材とスパッタリングターゲットとの距離が10cmであって、酸素ガス圧が14〜80mPa、アルゴンガス圧が130〜170mPaのアルゴンと酸素の混合雰囲気でスパッタリングを行うことにより被膜される、請求項4に記載の水素ガス検知材。
- スパッタリングの投入電力が50W、基材とスパッタリングターゲットとの距離が10cmであって、酸素ガス圧が14〜80mPa、アルゴンガス圧が130〜170mPaのアルゴンと酸素の混合雰囲気でスパッタリングを行う、請求項6に記載の方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006102809A JP4775708B2 (ja) | 2006-04-04 | 2006-04-04 | 水素ガス検知材とその被膜方法 |
US12/225,815 US8052898B2 (en) | 2006-04-04 | 2007-04-04 | Hydrogen gas detecting material and the coating method |
DE112007000853T DE112007000853T5 (de) | 2006-04-04 | 2007-04-04 | Material zur Detektion von Wasserstoffgas sowie Beschichtungsverfahren |
PCT/JP2007/057600 WO2007116919A1 (ja) | 2006-04-04 | 2007-04-04 | 水素ガス検知材とその被膜方法 |
Applications Claiming Priority (1)
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JP2006102809A JP4775708B2 (ja) | 2006-04-04 | 2006-04-04 | 水素ガス検知材とその被膜方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007278744A JP2007278744A (ja) | 2007-10-25 |
JP4775708B2 true JP4775708B2 (ja) | 2011-09-21 |
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JP2006102809A Expired - Fee Related JP4775708B2 (ja) | 2006-04-04 | 2006-04-04 | 水素ガス検知材とその被膜方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8052898B2 (ja) |
JP (1) | JP4775708B2 (ja) |
DE (1) | DE112007000853T5 (ja) |
WO (1) | WO2007116919A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4919228B2 (ja) * | 2007-05-15 | 2012-04-18 | 独立行政法人日本原子力研究開発機構 | 水素ガス検知膜 |
BR112013000436B1 (pt) | 2010-07-09 | 2018-07-03 | Nippon Steel & Sumitomo Metal Corporation | Chapa de aço com ni adicionado e método de produção da mesma |
CN103764859B (zh) | 2011-09-28 | 2015-03-25 | 新日铁住金株式会社 | Ni添加钢板及其制造方法 |
US20140379299A1 (en) * | 2012-01-18 | 2014-12-25 | Jawaharlal Nehru Centre For Advanced Scientific Research | System and a method to detect hydrogen leakage using nano-crystallized palladium gratings |
KR101557611B1 (ko) * | 2015-03-20 | 2015-10-05 | 아주대학교산학협력단 | 수소 검출 센서 및 이의 제조방법 |
KR101745128B1 (ko) * | 2015-09-01 | 2017-06-08 | 현대자동차주식회사 | 수소 변색 나노입자, 이의 제조 방법 및 이를 포함하는 수소 센서 |
CN105214646B (zh) * | 2015-09-24 | 2018-04-17 | 福建医科大学 | 一种氧化钨量子点材料在模拟过氧化物酶的应用 |
JP6229986B1 (ja) * | 2016-07-21 | 2017-11-15 | 国立大学法人東北大学 | 鉄鋼材料中の水素の検出器 |
KR101888398B1 (ko) | 2016-09-09 | 2018-08-14 | 하이리움에너지 주식회사 | 수소 센서 및 수소 센싱 잡화물 |
KR101990120B1 (ko) * | 2017-06-08 | 2019-06-19 | 하이리움에너지 주식회사 | 수소 감지 센서, 수소 감지 센서의 제조방법 및 수소 감지 잡화물 |
KR102242201B1 (ko) * | 2019-07-10 | 2021-04-19 | 아주대학교 산학협력단 | 수소 센서 및 이의 제조방법 |
CN114354688B (zh) * | 2022-01-06 | 2024-04-12 | 北京理工大学 | 超低温氢气爆炸流场试验监测系统 |
FR3135144A1 (fr) * | 2022-04-28 | 2023-11-03 | Totalenergies Onetech | Système de mesure et de transmission d’une teneur variable en dihydrogène pour optimiser la combustion d’un flux de gaz naturel |
FR3135143A1 (fr) * | 2022-04-28 | 2023-11-03 | Totalenergies Onetech | Système de mesure et de transmission d’une teneur variable en dihydrogène pour un récepteur externe |
US11808747B1 (en) | 2022-07-06 | 2023-11-07 | King Fahd University Of Petroleum And Minerals | Hydrogen gas sensor, and method of making and using thereof |
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JPS6040945A (ja) * | 1983-08-16 | 1985-03-04 | Hochiki Corp | 半導体ガスセンサ |
JPS60209149A (ja) * | 1984-03-31 | 1985-10-21 | Nippon Sheet Glass Co Ltd | 水素感知器 |
JPS60211348A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
JPS61201143A (ja) * | 1985-03-04 | 1986-09-05 | Agency Of Ind Science & Technol | 水素ガスセンサー |
JP3273952B2 (ja) | 1991-03-06 | 2002-04-15 | 中部電力株式会社 | 水素ガスの漏洩を検知する方法 |
JPH0772080A (ja) * | 1991-09-25 | 1995-03-17 | Kentaro Ito | ガス検出装置 |
JPH08253742A (ja) | 1995-03-16 | 1996-10-01 | Kansai Paint Co Ltd | 水素ガス検知用貼着テープ |
JPH1010048A (ja) * | 1996-06-25 | 1998-01-16 | Tokyo Gas Co Ltd | 新型水素検出子、その製造方法およびガスセンサ |
WO2001086265A2 (en) * | 2000-05-05 | 2001-11-15 | Midwest Research Institute | H02 doped w03, ultra-fast, high-sensitive hydrogen sensors |
WO2003072530A1 (en) | 2002-02-22 | 2003-09-04 | Chevron U.S.A. Inc. | Improved hydrocarbon recovery in a fischer-tropsch process |
JP2005233740A (ja) * | 2004-02-19 | 2005-09-02 | Hitachi Ltd | 光検知式水素検出素子及び水素検出装置 |
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2006
- 2006-04-04 JP JP2006102809A patent/JP4775708B2/ja not_active Expired - Fee Related
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2007
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DE112007000853T5 (de) | 2009-02-19 |
US8052898B2 (en) | 2011-11-08 |
US20090267032A1 (en) | 2009-10-29 |
JP2007278744A (ja) | 2007-10-25 |
WO2007116919A1 (ja) | 2007-10-18 |
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