JP4639344B2 - 水素検知材料とその製造方法 - Google Patents
水素検知材料とその製造方法 Download PDFInfo
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- JP4639344B2 JP4639344B2 JP2006043558A JP2006043558A JP4639344B2 JP 4639344 B2 JP4639344 B2 JP 4639344B2 JP 2006043558 A JP2006043558 A JP 2006043558A JP 2006043558 A JP2006043558 A JP 2006043558A JP 4639344 B2 JP4639344 B2 JP 4639344B2
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- Prior art keywords
- palladium
- hydrogen
- palladium oxide
- detection material
- hydrogen detection
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- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Physical Vapour Deposition (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Description
(2)アルゴンガスで希釈した濃度1%の水素を100ml/minの流速で、試料セル内を20分間ガス置換する、
(3)水素が吸着した後の試料の透過光強度Iを計測する、
(4)I/ I0により水素吸着による光の透過率の変化を評価した。
Claims (7)
- 水素を含んだ雰囲気に曝した時の光学的な透過率の変化を計測することにより水素の検知を行う光学式水素検知材料であって、
(1)上記水素検知材料の主成分が酸化パラジウムであり、その構造が薄膜であり、
(2)上記水素検知材料の表面上に触媒層が形成されており、
(3)上記酸化パラジウム膜は、透明基板上に蒸着したパラジウムを空気又は酸素雰囲気下で熱酸化して形成されたものである、ことを特徴とする水素検知材料。 - 上記酸化パラジウム薄膜が可視光域の光を透過し、700℃までの加熱に対して熱的に安定な基板上に形成されている請求項1記載の水素検知材料。
- 上記酸化パラジウム薄膜の厚さが1μm以下である、請求項1記載の水素検知材料。
- 上記酸化パラジウム薄膜の表面にパラジウム、白金、金のいずれかの触媒層が堆積されている、請求項1乃至請求項3のいずれかに記載の水素検知材料。
- 上記酸化パラジウム膜は、透明基板上に蒸着したパラジウムを空気又は酸素雰囲気下で500℃〜700℃の温度で熱処理を行って形成された正方晶の酸化パラジウム(PbO)であることを特徴とする請求項1乃至請求項4のいずれかに記載の水素検知材料。
- 透明基板と、
当該透明基板上の正方晶の酸化パラジウム(PbO)層と、
当該酸化パラジウム層上に堆積している、パラジウム、白金、金から選択される触媒金属層と、
を具備する水素検知材料。 - 透明基板上にパラジウム金属を蒸着し、
当該パラジウム金属を空気又は酸素雰囲気下で500℃〜700℃の温度で熱酸化して酸化パラジウム膜を形成し、
当該酸化パラジウム膜上に、パラジウム、白金、金から選択される触媒金属を堆積させる、
工程を具備する水素検知材料の作製方法。
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JP2006043558A JP4639344B2 (ja) | 2006-02-21 | 2006-02-21 | 水素検知材料とその製造方法 |
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JP2006043558A JP4639344B2 (ja) | 2006-02-21 | 2006-02-21 | 水素検知材料とその製造方法 |
Publications (2)
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JP2007225299A JP2007225299A (ja) | 2007-09-06 |
JP4639344B2 true JP4639344B2 (ja) | 2011-02-23 |
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JP2006043558A Expired - Fee Related JP4639344B2 (ja) | 2006-02-21 | 2006-02-21 | 水素検知材料とその製造方法 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101015088B1 (ko) * | 2008-08-04 | 2011-02-17 | 연세대학교 산학협력단 | 초 고감도 수소 센서에 사용되는 환원된 PdO 박막과그것을 제조하기 위한 방법 |
KR100959245B1 (ko) * | 2009-11-20 | 2010-05-20 | 권기영 | 수소 감지 센서 |
US8048384B1 (en) * | 2010-08-31 | 2011-11-01 | University Of Central Florida Research Foundation, Inc. | Chemochromic hydrogen sensors |
JP2013124897A (ja) * | 2011-12-14 | 2013-06-24 | Japan Atomic Energy Agency | 光学的水素ガス検知素子 |
US11686698B2 (en) * | 2018-05-14 | 2023-06-27 | Canon Kabushiki Kaisha | Reducing gas detection material and reducing gas detection sensor |
JP7329236B2 (ja) | 2019-07-11 | 2023-08-18 | 学校法人 東洋大学 | 水素センサ用組成物およびその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005233740A (ja) * | 2004-02-19 | 2005-09-02 | Hitachi Ltd | 光検知式水素検出素子及び水素検出装置 |
JP2005345338A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 水素ガス検知用塗膜顔料、水素ガス検知用塗膜、及び水素ガス検知テープ |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05196569A (ja) * | 1992-01-22 | 1993-08-06 | Nippon Sheet Glass Co Ltd | 水素センサ |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005233740A (ja) * | 2004-02-19 | 2005-09-02 | Hitachi Ltd | 光検知式水素検出素子及び水素検出装置 |
JP2005345338A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 水素ガス検知用塗膜顔料、水素ガス検知用塗膜、及び水素ガス検知テープ |
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