JP4762719B2 - 光電子増倍管 - Google Patents
光電子増倍管 Download PDFInfo
- Publication number
- JP4762719B2 JP4762719B2 JP2005518024A JP2005518024A JP4762719B2 JP 4762719 B2 JP4762719 B2 JP 4762719B2 JP 2005518024 A JP2005518024 A JP 2005518024A JP 2005518024 A JP2005518024 A JP 2005518024A JP 4762719 B2 JP4762719 B2 JP 4762719B2
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- envelope
- photocathode
- photomultiplier tube
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000004044 response Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 41
- 229910052710 silicon Inorganic materials 0.000 description 41
- 239000010703 silicon Substances 0.000 description 41
- 239000011521 glass Substances 0.000 description 39
- 239000003153 chemical reaction reagent Substances 0.000 description 19
- 238000001514 detection method Methods 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 11
- 239000002904 solvent Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
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- 238000004458 analytical method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229940088597 hormone Drugs 0.000 description 1
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- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/08—Cathode arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electron Tubes For Measurement (AREA)
- Measurement Of Radiation (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005518024A JP4762719B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004040405 | 2004-02-17 | ||
| JP2004040405 | 2004-02-17 | ||
| JP2005518024A JP4762719B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
| PCT/JP2005/002302 WO2005078759A1 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2005078759A1 JPWO2005078759A1 (ja) | 2007-10-18 |
| JP4762719B2 true JP4762719B2 (ja) | 2011-08-31 |
Family
ID=34857885
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005518024A Expired - Lifetime JP4762719B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
| JP2005518022A Expired - Lifetime JP5000137B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管及びその製造方法 |
| JP2011115234A Expired - Lifetime JP5254400B2 (ja) | 2004-02-17 | 2011-05-23 | 光電子増倍管及びその製造方法 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005518022A Expired - Lifetime JP5000137B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管及びその製造方法 |
| JP2011115234A Expired - Lifetime JP5254400B2 (ja) | 2004-02-17 | 2011-05-23 | 光電子増倍管及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (6) | US7602122B2 (cg-RX-API-DMAC7.html) |
| EP (3) | EP1717843B1 (cg-RX-API-DMAC7.html) |
| JP (3) | JP4762719B2 (cg-RX-API-DMAC7.html) |
| CN (2) | CN1922710B (cg-RX-API-DMAC7.html) |
| WO (2) | WO2005078760A1 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9514920B2 (en) | 2015-03-03 | 2016-12-06 | Hamamatsu Photonics K.K. | Electron multiplier body, photomultiplier tube, and photomultiplier |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4708118B2 (ja) * | 2005-08-10 | 2011-06-22 | 浜松ホトニクス株式会社 | 光電子増倍管 |
| JP4708117B2 (ja) * | 2005-08-10 | 2011-06-22 | 浜松ホトニクス株式会社 | 光電子増倍管 |
| JP4819437B2 (ja) * | 2005-08-12 | 2011-11-24 | 浜松ホトニクス株式会社 | 光電子増倍管 |
| JP4331147B2 (ja) * | 2005-08-12 | 2009-09-16 | 浜松ホトニクス株式会社 | 光電子増倍管 |
| US7867807B2 (en) | 2006-03-29 | 2011-01-11 | Hamamatsu Photonics K.K. | Method for manufacturing photoelectric converting device |
| US7403589B1 (en) * | 2007-03-27 | 2008-07-22 | General Electric Company | Photon counting CT detector using solid-state photomultiplier and scintillator |
| JP5290805B2 (ja) * | 2009-02-25 | 2013-09-18 | 浜松ホトニクス株式会社 | 光電子増倍管 |
| JP5290804B2 (ja) * | 2009-02-25 | 2013-09-18 | 浜松ホトニクス株式会社 | 光電子増倍管 |
| US7973272B2 (en) | 2009-03-09 | 2011-07-05 | Bae Systems Information And Electronic Systems Integration, Inc. | Interface techniques for coupling a microchannel plate to a readout circuit |
| US7999216B2 (en) * | 2009-03-09 | 2011-08-16 | Bae Systems Information And Electronic Systems Integration Inc. | Selective channel charging for microchannel plate |
| JP6151505B2 (ja) | 2012-10-30 | 2017-06-21 | 浜松ホトニクス株式会社 | 光検出ユニットおよびその製造方法 |
| KR101395102B1 (ko) | 2013-02-14 | 2014-05-16 | 한국과학기술원 | Pcb 기판을 이용한 실리콘 광전자증배관의 패키징 방법 |
| CN103456594B (zh) * | 2013-08-02 | 2015-08-26 | 西安交通大学 | 一种提高光电倍增器光阴极光利用率的优化设计方法 |
| EP3021351A1 (de) * | 2014-11-17 | 2016-05-18 | Bayer Technology Services GmbH | Sekundärelektronenvervielfacher und verfahren zum herstellen eines solchen |
| EP3631299B1 (en) | 2017-05-30 | 2024-05-22 | Carrier Corporation | Semiconductor film and phototube light detector |
| JP6395906B1 (ja) * | 2017-06-30 | 2018-09-26 | 浜松ホトニクス株式会社 | 電子増倍体 |
| JP6431574B1 (ja) * | 2017-07-12 | 2018-11-28 | 浜松ホトニクス株式会社 | 電子管 |
| US10163599B1 (en) * | 2018-01-03 | 2018-12-25 | Eagle Technology, Llc | Electron multiplier for MEMs light detection device |
| US10734184B1 (en) * | 2019-06-21 | 2020-08-04 | Elbit Systems Of America, Llc | Wafer scale image intensifier |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3244922A (en) * | 1962-11-05 | 1966-04-05 | Itt | Electron multiplier having undulated passage with semiconductive secondary emissive coating |
| US3374380A (en) * | 1965-11-10 | 1968-03-19 | Bendix Corp | Apparatus for suppression of ion feedback in electron multipliers |
| US3375184A (en) * | 1963-10-23 | 1968-03-26 | Solvay | Electrolytic cell with controllable multiple electrodes |
| JPS5016145B1 (cg-RX-API-DMAC7.html) * | 1968-05-31 | 1975-06-11 | ||
| JPH05144410A (ja) * | 1991-05-21 | 1993-06-11 | Commiss Energ Atom | セラミツク製電子増倍構造体、光電子増倍管、およびその製法 |
| US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
| JP2000113851A (ja) * | 1998-10-01 | 2000-04-21 | New Japan Radio Co Ltd | 電子増倍管およびマルチチャンネルプレートならびにそれらの製造方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB503211A (en) | 1936-07-04 | 1939-04-03 | Zeiss Ikon Ag | Improvements in or relating to secondary electron multipliers |
| US3225239A (en) * | 1960-11-15 | 1965-12-21 | Bendix Corp | Electron multiplier |
| JPS4813864B1 (cg-RX-API-DMAC7.html) * | 1967-10-13 | 1973-05-01 | ||
| US3563657A (en) | 1968-08-09 | 1971-02-16 | Univ Iowa State Res Found Inc | Direct-reading spectrometer system and method for narrow range measurements |
| FR2184516B1 (cg-RX-API-DMAC7.html) * | 1972-05-19 | 1978-09-01 | Labo Electronique Physique | |
| GB1434053A (en) * | 1973-04-06 | 1976-04-28 | Mullard Ltd | Electron multipliers |
| JPS5110897B2 (cg-RX-API-DMAC7.html) | 1973-06-14 | 1976-04-07 | ||
| US4149106A (en) * | 1977-08-08 | 1979-04-10 | Rca Corporation | Electron multiplier output electron optics |
| JPS61130568A (ja) | 1984-11-28 | 1986-06-18 | 株式会社日本水中作業 | 液中におけるコンクリ−ト構築物等の解体方法 |
| JPH0378905A (ja) | 1989-08-22 | 1991-04-04 | Matsushita Electric Works Ltd | 棚下用照明器具 |
| JPH04359855A (ja) | 1991-06-06 | 1992-12-14 | Hamamatsu Photonics Kk | 二次電子増倍装置 |
| JP3078905B2 (ja) | 1991-12-26 | 2000-08-21 | 浜松ホトニクス株式会社 | 電子増倍器を備えた電子管 |
| US5264693A (en) * | 1992-07-01 | 1993-11-23 | The United States Of America As Represented By The Secretary Of The Navy | Microelectronic photomultiplier device with integrated circuitry |
| US5493111A (en) * | 1993-07-30 | 1996-02-20 | Litton Systems, Inc. | Photomultiplier having cascaded microchannel plates, and method for fabrication |
| DE4429925C1 (de) * | 1994-08-23 | 1995-11-23 | Roentdek Handels Gmbh | Verfahren und Detektoreinrichtung zur elektronischen positionsbezogenen Erfassung von Strahlung |
| US6384519B1 (en) * | 1996-10-30 | 2002-05-07 | Nanosciences Corporation | Micro-dynode integrated electron multiplier |
| CN100446169C (zh) * | 1998-06-01 | 2008-12-24 | 滨松光子学株式会社 | 光电倍增管 |
| JP2936098B1 (ja) * | 1998-07-23 | 1999-08-23 | 岡谷電機産業株式会社 | 紫外線センサ及びその製造方法 |
| US6492657B1 (en) * | 2000-01-27 | 2002-12-10 | Burle Technologies, Inc. | Integrated semiconductor microchannel plate and planar diode electron flux amplifier and collector |
| GB2369720B (en) * | 2000-12-01 | 2005-02-16 | Electron Tubes Ltd | Photomultiplier |
| JPWO2003005408A1 (ja) * | 2001-07-05 | 2004-10-28 | 浜松ホトニクス株式会社 | 電子管及びその製造方法 |
| US7049747B1 (en) | 2003-06-26 | 2006-05-23 | Massachusetts Institute Of Technology | Fully-integrated in-plane micro-photomultiplier |
| GB2409927B (en) | 2004-01-09 | 2006-09-27 | Microsaic Systems Ltd | Micro-engineered electron multipliers |
| JP4359855B2 (ja) | 2007-07-09 | 2009-11-11 | Smc株式会社 | 電磁弁駆動回路及び電磁弁 |
| JP5144410B2 (ja) | 2008-07-14 | 2013-02-13 | 株式会社日本自動車部品総合研究所 | 燃料電池の金属製セパレータの腐食検知装置 |
-
2005
- 2005-02-16 EP EP05710248.5A patent/EP1717843B1/en not_active Expired - Lifetime
- 2005-02-16 JP JP2005518024A patent/JP4762719B2/ja not_active Expired - Lifetime
- 2005-02-16 CN CN2005800051680A patent/CN1922710B/zh not_active Expired - Lifetime
- 2005-02-16 WO PCT/JP2005/002298 patent/WO2005078760A1/ja not_active Ceased
- 2005-02-16 EP EP15191508.9A patent/EP2993685A1/en not_active Withdrawn
- 2005-02-16 JP JP2005518022A patent/JP5000137B2/ja not_active Expired - Lifetime
- 2005-02-16 CN CNB2005800047030A patent/CN100555553C/zh not_active Expired - Lifetime
- 2005-02-16 US US10/586,498 patent/US7602122B2/en not_active Expired - Lifetime
- 2005-02-16 EP EP05719154A patent/EP1717842A4/en not_active Withdrawn
- 2005-02-16 US US10/589,602 patent/US7977878B2/en active Active
- 2005-02-16 WO PCT/JP2005/002302 patent/WO2005078759A1/ja not_active Ceased
-
2011
- 2011-05-23 JP JP2011115234A patent/JP5254400B2/ja not_active Expired - Lifetime
- 2011-05-23 US US13/113,604 patent/US8242694B2/en not_active Expired - Lifetime
-
2012
- 2012-07-13 US US13/548,772 patent/US8643258B2/en not_active Expired - Fee Related
-
2013
- 2013-12-20 US US14/136,236 patent/US9147559B2/en not_active Expired - Lifetime
-
2015
- 2015-09-01 US US14/841,886 patent/US9460899B2/en not_active Expired - Lifetime
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3244922A (en) * | 1962-11-05 | 1966-04-05 | Itt | Electron multiplier having undulated passage with semiconductive secondary emissive coating |
| US3375184A (en) * | 1963-10-23 | 1968-03-26 | Solvay | Electrolytic cell with controllable multiple electrodes |
| US3374380A (en) * | 1965-11-10 | 1968-03-19 | Bendix Corp | Apparatus for suppression of ion feedback in electron multipliers |
| JPS5016145B1 (cg-RX-API-DMAC7.html) * | 1968-05-31 | 1975-06-11 | ||
| JPH05144410A (ja) * | 1991-05-21 | 1993-06-11 | Commiss Energ Atom | セラミツク製電子増倍構造体、光電子増倍管、およびその製法 |
| US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
| JP2000113851A (ja) * | 1998-10-01 | 2000-04-21 | New Japan Radio Co Ltd | 電子増倍管およびマルチチャンネルプレートならびにそれらの製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9514920B2 (en) | 2015-03-03 | 2016-12-06 | Hamamatsu Photonics K.K. | Electron multiplier body, photomultiplier tube, and photomultiplier |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140111085A1 (en) | 2014-04-24 |
| EP1717842A4 (en) | 2008-06-18 |
| EP1717843A4 (en) | 2008-12-17 |
| US20150371835A1 (en) | 2015-12-24 |
| US9147559B2 (en) | 2015-09-29 |
| US8242694B2 (en) | 2012-08-14 |
| EP1717842A1 (en) | 2006-11-02 |
| CN1918686A (zh) | 2007-02-21 |
| JP5254400B2 (ja) | 2013-08-07 |
| US20120274204A1 (en) | 2012-11-01 |
| EP1717843A1 (en) | 2006-11-02 |
| CN1922710B (zh) | 2010-10-13 |
| JP2011187454A (ja) | 2011-09-22 |
| US20110221336A1 (en) | 2011-09-15 |
| JPWO2005078759A1 (ja) | 2007-10-18 |
| US20070194713A1 (en) | 2007-08-23 |
| EP2993685A1 (en) | 2016-03-09 |
| US7977878B2 (en) | 2011-07-12 |
| WO2005078759A1 (ja) | 2005-08-25 |
| EP1717843B1 (en) | 2015-12-23 |
| JP5000137B2 (ja) | 2012-08-15 |
| CN100555553C (zh) | 2009-10-28 |
| US20080018246A1 (en) | 2008-01-24 |
| US7602122B2 (en) | 2009-10-13 |
| WO2005078760A1 (ja) | 2005-08-25 |
| CN1922710A (zh) | 2007-02-28 |
| US8643258B2 (en) | 2014-02-04 |
| US9460899B2 (en) | 2016-10-04 |
| JPWO2005078760A1 (ja) | 2007-10-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5254400B2 (ja) | 光電子増倍管及びその製造方法 | |
| JP4708118B2 (ja) | 光電子増倍管 | |
| JP4819437B2 (ja) | 光電子増倍管 | |
| JP4708117B2 (ja) | 光電子増倍管 |
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