JP4760087B2 - セラミックス基板の製造方法 - Google Patents

セラミックス基板の製造方法 Download PDF

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Publication number
JP4760087B2
JP4760087B2 JP2005094333A JP2005094333A JP4760087B2 JP 4760087 B2 JP4760087 B2 JP 4760087B2 JP 2005094333 A JP2005094333 A JP 2005094333A JP 2005094333 A JP2005094333 A JP 2005094333A JP 4760087 B2 JP4760087 B2 JP 4760087B2
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Japan
Prior art keywords
photosensitive
green sheet
ceramic green
pattern
photosensitive ceramic
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Expired - Fee Related
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JP2005094333A
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English (en)
Japanese (ja)
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JP2006272713A (ja
JP2006272713A5 (enExample
Inventor
一起 後藤
隆夫 北川
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Toray Industries Inc
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Toray Industries Inc
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Priority to JP2005094333A priority Critical patent/JP4760087B2/ja
Publication of JP2006272713A publication Critical patent/JP2006272713A/ja
Publication of JP2006272713A5 publication Critical patent/JP2006272713A5/ja
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Publication of JP4760087B2 publication Critical patent/JP4760087B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Compositions Of Oxide Ceramics (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
JP2005094333A 2005-03-29 2005-03-29 セラミックス基板の製造方法 Expired - Fee Related JP4760087B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005094333A JP4760087B2 (ja) 2005-03-29 2005-03-29 セラミックス基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005094333A JP4760087B2 (ja) 2005-03-29 2005-03-29 セラミックス基板の製造方法

Publications (3)

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JP2006272713A JP2006272713A (ja) 2006-10-12
JP2006272713A5 JP2006272713A5 (enExample) 2008-05-08
JP4760087B2 true JP4760087B2 (ja) 2011-08-31

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ID=37207922

Family Applications (1)

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JP2005094333A Expired - Fee Related JP4760087B2 (ja) 2005-03-29 2005-03-29 セラミックス基板の製造方法

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JP (1) JP4760087B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5582944B2 (ja) 2009-09-28 2014-09-03 京セラ株式会社 配線基板、積層板及び積層シート
KR101423534B1 (ko) * 2009-09-28 2014-07-25 쿄세라 코포레이션 구조체 및 그 제조 방법
WO2016140840A1 (en) * 2015-03-03 2016-09-09 3M Innovative Properties Company Gel compositions, shaped gel articles and a method of making a sintered article

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003029415A (ja) * 2001-07-06 2003-01-29 Internatl Business Mach Corp <Ibm> フォトレジスト加工方法及び段型金属体製造方法
JP4372493B2 (ja) * 2003-08-28 2009-11-25 Ｔｄｋ株式会社 セラミックグリーンシートの製造方法および当該セラミックグリーンシートを用いた電子部品の製造方法

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Publication number Publication date
JP2006272713A (ja) 2006-10-12

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