JP4744665B2 - 基板検査装置及び基板検査システム - Google Patents

基板検査装置及び基板検査システム Download PDF

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Publication number
JP4744665B2
JP4744665B2 JP2000072848A JP2000072848A JP4744665B2 JP 4744665 B2 JP4744665 B2 JP 4744665B2 JP 2000072848 A JP2000072848 A JP 2000072848A JP 2000072848 A JP2000072848 A JP 2000072848A JP 4744665 B2 JP4744665 B2 JP 4744665B2
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JP2001266125A5 (es
JP2001266125A (ja
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武博 高橋
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Olympus Corp
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Olympus Corp
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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP2000072848A 2000-03-15 2000-03-15 基板検査装置及び基板検査システム Expired - Fee Related JP4744665B2 (ja)

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JP2000072848A JP4744665B2 (ja) 2000-03-15 2000-03-15 基板検査装置及び基板検査システム

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JP2000072848A JP4744665B2 (ja) 2000-03-15 2000-03-15 基板検査装置及び基板検査システム

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JP2001266125A JP2001266125A (ja) 2001-09-28
JP2001266125A5 JP2001266125A5 (es) 2007-05-10
JP4744665B2 true JP4744665B2 (ja) 2011-08-10

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140070822A (ko) * 2012-11-27 2014-06-11 엘지디스플레이 주식회사 디스플레이 장치의 검사 시스템 및 검사 방법
KR20180018105A (ko) * 2016-08-12 2018-02-21 에스케이하이닉스 주식회사 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100689694B1 (ko) * 2001-12-27 2007-03-08 삼성전자주식회사 웨이퍼상에 발생된 결함을 검출하는 방법 및 장치
JP4088448B2 (ja) * 2002-01-21 2008-05-21 日本総合住生活株式会社 外壁検査装置および外壁検査方法並びに外壁検査診断システム
JP2006220644A (ja) * 2005-01-14 2006-08-24 Hitachi High-Technologies Corp パターン検査方法及びその装置
JP2009014617A (ja) * 2007-07-06 2009-01-22 Olympus Corp 基板外観検査装置
JP2014066628A (ja) * 2012-09-26 2014-04-17 Ricoh Co Ltd 画像検査装置、画像検査システム及び画像検査方法
KR101478790B1 (ko) 2013-10-14 2015-01-06 (주)에이티테크놀러지 인쇄회로기판의 테스트 장치
JP6953712B2 (ja) * 2016-12-26 2021-10-27 住友ゴム工業株式会社 タイヤの外観検査装置
CN110033724A (zh) * 2019-04-19 2019-07-19 陈波 一种广告液晶显示屏缺陷自动检测系统
CN114372544A (zh) * 2022-01-12 2022-04-19 江苏视睿迪光电有限公司 一种显示屏缺陷的记录装置及方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2974899A (en) * 1998-02-25 1999-09-15 Steven M. Shepard Data integration and registration method and apparatus for non-destructive evaluation of materials
JP4105809B2 (ja) * 1998-09-08 2008-06-25 株式会社ルネサステクノロジ 外観検査方法および外観検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140070822A (ko) * 2012-11-27 2014-06-11 엘지디스플레이 주식회사 디스플레이 장치의 검사 시스템 및 검사 방법
KR102008474B1 (ko) * 2012-11-27 2019-08-08 엘지디스플레이 주식회사 디스플레이 장치의 검사 시스템 및 검사 방법
KR20180018105A (ko) * 2016-08-12 2018-02-21 에스케이하이닉스 주식회사 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템
KR102290488B1 (ko) * 2016-08-12 2021-08-18 에스케이하이닉스 주식회사 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템

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JP2001266125A (ja) 2001-09-28

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