JP4743265B2 - 固体撮像素子及び固体撮像素子の製造方法 - Google Patents
固体撮像素子及び固体撮像素子の製造方法 Download PDFInfo
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- 229910052804 chromium Inorganic materials 0.000 description 1
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- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
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- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
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- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
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- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
- H01L27/14843—Interline transfer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
1.固体撮像素子の構成
2.固体撮像素子の製造方法
3.適用例
図1は本発明の実施の形態に係るCCD型の固体撮像素子の構成例を示す概略図である。図示した固体撮像素子1は、平面的に見て、撮像領域2と周辺領域3とに区分されている。撮像領域2は、図示しない素子基板の面内で矩形に区画された領域である。周辺領域3は、上記素子基板の面内で撮像領域2を囲むように区画された領域である。
次に、本発明の実施の形態に係る固体撮像素子の製造方法について説明する。ここでは、主に発明の本質部分に係る上記の主要部(図1のJ−J断面構造部)がどのような工程を経て作製されるかについて説明する。
図7は本発明が適用される撮像装置の構成例を示すブロック図である。本例に係る撮像装置100は、撮像デバイスとなる固体撮像装置101と、この固体撮像装置101に被写体からの光を導く光学系(レンズ群等)102と、固体撮像装置101から出力される画素信号を処理する信号処理部103とを含む。この撮像装置100において、固体撮像装置101は、上記の固体撮像素子1を含むものである。固体撮像装置101は、ワンチップとして形成された形態であってもよいし、固体撮像装置101と、信号処理部103又は光学系102とがまとめてパッケージングされた、撮像機能を有するモジュール状の形態であってもよい。
Claims (8)
- 垂直転送電極部と、
前記垂直転送電極部よりもパターン面積率が高い水平転送電極部とを有し、
前記垂直転送電極部を構成する垂直転送電極は、金属材料の単層構造とし、
前記水平転送電極部を構成する水平転送電極は、多結晶シリコン又はアモルファスシリコンの単層構造としてなり、
前記垂直転送電極部の電極上面と前記水平転送電極部の電極上面とが、それぞれ異なる平坦化工程により形成されている
固体撮像素子。 - 前記金属材料が遮光性を有する請求項1記載の固体撮像素子。
- 垂直転送電極部に多結晶シリコン又はアモルファスシリコンの単層構造でダミー電極を形成するとともに、前記垂直転送電極部よりもパターン面積率が高い水平転送電極部に多結晶シリコン又はアモルファスシリコンの単層構造で水平転送電極を形成する第1の電極形成工程と、
前記垂直転送電極部に形成された前記ダミー電極を除去する電極除去工程と、
前記垂直転送電極部で前記ダミー電極を除去した部分を金属材料で埋め込むように金属膜を形成した後、余分な金属材料を除去することにより、前記ダミー電極を除去した部分に金属材料の単層構造で垂直転送電極を形成する第2の電極形成工程と
を有する固体撮像素子の製造方法。 - 前記第2の電極形成工程では、遮光性を有する金属材料を用いて前記金属膜を形成する請求項3記載の固体撮像素子の製造方法。
- 前記金属膜を形成する前に、フォトダイオード部を形成する請求項3又は4記載の固体撮像素子の製造方法。
- 前記電極除去工程は、前記垂直転送電極部及び前記水平転送電極部を覆う状態でエッチング保護膜を形成する工程と、前記水平転送電極部上の前記エッチング保護膜を覆う状態でレジスト膜を形成する工程と、前記レジスト膜をマスクとして前記エッチング保護膜を除去することにより、前記垂直転送電極部で前記ダミー電極を露出させる工程と、前記露出させた前記ダミー電極をエッチングで除去する工程とを含む請求項3又は4記載の固体撮像素子の製造方法。
- 前記電極除去工程は、前記垂直転送電極部の最終段に配置されたダミー電極の一部を除いて前記垂直転送電極部を覆うようにレジスト膜を形成する工程と、前記レジスト膜をマスクに用いて、前記水平転送電極と前記ダミー電極の一部をエッチングストッパー層で覆う工程と、前記レジスト膜を除去した後、前記ダミー電極をエッチングで除去する工程とを含む請求項3又は4記載の固体撮像素子の製造方法。
- 前記電極除去工程では、前記レジスト膜をマスクとして多結晶シリコン又はアモルファスシリコンに不純物を導入することにより、前記エッチングストッパー層を形成した後、アルカリ系のエッチャントを用いたウェットエッチングにより前記ダミー電極を除去する請求項7記載の固体撮像素子の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008312847A JP4743265B2 (ja) | 2008-12-09 | 2008-12-09 | 固体撮像素子及び固体撮像素子の製造方法 |
US12/612,466 US8247847B2 (en) | 2008-12-09 | 2009-11-04 | Solid-state imaging device and manufacturing method therefor |
TW098138885A TWI390723B (zh) | 2008-12-09 | 2009-11-16 | 固態成像裝置及其製造方法 |
KR1020090120965A KR20100066393A (ko) | 2008-12-09 | 2009-12-08 | 고체 촬상 소자 및 고체 촬상 소자의 제조 방법 |
CN200910253963A CN101752398A (zh) | 2008-12-09 | 2009-12-09 | 固态成像器件及其制造方法 |
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JP2008312847A JP4743265B2 (ja) | 2008-12-09 | 2008-12-09 | 固体撮像素子及び固体撮像素子の製造方法 |
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JP2010140922A JP2010140922A (ja) | 2010-06-24 |
JP4743265B2 true JP4743265B2 (ja) | 2011-08-10 |
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US (1) | US8247847B2 (ja) |
JP (1) | JP4743265B2 (ja) |
KR (1) | KR20100066393A (ja) |
CN (1) | CN101752398A (ja) |
TW (1) | TWI390723B (ja) |
Families Citing this family (4)
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WO2012032712A1 (ja) * | 2010-09-10 | 2012-03-15 | パナソニック株式会社 | 固体撮像装置及びその製造方法 |
JP2013084713A (ja) * | 2011-10-07 | 2013-05-09 | Sony Corp | 固体撮像素子および製造方法、並びに撮像ユニット |
JP5995508B2 (ja) * | 2012-04-27 | 2016-09-21 | キヤノン株式会社 | 半導体装置および半導体装置の製造方法 |
CN103400752A (zh) * | 2013-08-15 | 2013-11-20 | 中国电子科技集团公司第四十四研究所 | 离子注入工艺在ccd制作中的应用及ccd制作工艺 |
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JPH03246971A (ja) * | 1990-02-26 | 1991-11-05 | Toshiba Corp | 電荷結合素子およびこれを用いた固体撮像装置 |
JP2003078126A (ja) * | 2001-09-06 | 2003-03-14 | Sony Corp | 固体撮像素子及びその製造方法 |
JP2005032756A (ja) * | 2003-07-07 | 2005-02-03 | Fuji Film Microdevices Co Ltd | 固体撮像装置の製造方法及び固体撮像装置 |
JP2006216655A (ja) * | 2005-02-02 | 2006-08-17 | Sony Corp | 電荷転送素子及びその製造方法 |
JP2006287059A (ja) * | 2005-04-01 | 2006-10-19 | Matsushita Electric Ind Co Ltd | 固体撮像装置及びその製造方法 |
JP2007012677A (ja) * | 2005-06-28 | 2007-01-18 | Fujifilm Holdings Corp | 固体撮像素子およびその製造方法 |
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JP3246971B2 (ja) | 1992-12-22 | 2002-01-15 | カルソニックカンセイ株式会社 | アルミニウム材製熱交換器 |
US6717190B2 (en) * | 2002-02-14 | 2004-04-06 | Fuji Photo Film Co., Ltd. | Solid-state image pick-up device |
JP2008181970A (ja) * | 2007-01-23 | 2008-08-07 | Sharp Corp | アライメントマーク形成方法、アライメント方法、半導体装置の製造方法および固体撮像装置の製造方法 |
JP2010098113A (ja) * | 2008-10-16 | 2010-04-30 | Panasonic Corp | Ccd型固体撮像装置およびその製造方法 |
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- 2009-11-04 US US12/612,466 patent/US8247847B2/en not_active Expired - Fee Related
- 2009-11-16 TW TW098138885A patent/TWI390723B/zh not_active IP Right Cessation
- 2009-12-08 KR KR1020090120965A patent/KR20100066393A/ko not_active Application Discontinuation
- 2009-12-09 CN CN200910253963A patent/CN101752398A/zh active Pending
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JPH03246971A (ja) * | 1990-02-26 | 1991-11-05 | Toshiba Corp | 電荷結合素子およびこれを用いた固体撮像装置 |
JP2003078126A (ja) * | 2001-09-06 | 2003-03-14 | Sony Corp | 固体撮像素子及びその製造方法 |
JP2005032756A (ja) * | 2003-07-07 | 2005-02-03 | Fuji Film Microdevices Co Ltd | 固体撮像装置の製造方法及び固体撮像装置 |
JP2006216655A (ja) * | 2005-02-02 | 2006-08-17 | Sony Corp | 電荷転送素子及びその製造方法 |
JP2006287059A (ja) * | 2005-04-01 | 2006-10-19 | Matsushita Electric Ind Co Ltd | 固体撮像装置及びその製造方法 |
JP2007012677A (ja) * | 2005-06-28 | 2007-01-18 | Fujifilm Holdings Corp | 固体撮像素子およびその製造方法 |
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JP2010140922A (ja) | 2010-06-24 |
US8247847B2 (en) | 2012-08-21 |
US20100140667A1 (en) | 2010-06-10 |
KR20100066393A (ko) | 2010-06-17 |
TW201029173A (en) | 2010-08-01 |
CN101752398A (zh) | 2010-06-23 |
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